EP1344940A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP1344940A1
EP1344940A1 EP03251380A EP03251380A EP1344940A1 EP 1344940 A1 EP1344940 A1 EP 1344940A1 EP 03251380 A EP03251380 A EP 03251380A EP 03251380 A EP03251380 A EP 03251380A EP 1344940 A1 EP1344940 A1 EP 1344940A1
Authority
EP
European Patent Office
Prior art keywords
motor housing
base
vacuum pump
gas
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03251380A
Other languages
English (en)
French (fr)
Inventor
Takahuri c/o Seiko Instruments Inc. Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Technologies Ltd filed Critical BOC Edwards Technologies Ltd
Publication of EP1344940A1 publication Critical patent/EP1344940A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to a vacuum pump and, more particularly, to a vacuum pump which is used when a process gas for, for example, a semiconductor manufacturing system is sucked and exhausted.
  • These semiconductor devices are usually manufactured in a vacuum chamber in a high vacuum state for each process, and a vacuum pump is frequently used to evacuate the vacuum chamber.
  • the semiconductor device manufacturing processes include processes in which various kinds of process gases are applied to a substrate of semiconductor, so that the vacuum pump is used not only to evacuate the vacuum chamber but also to suck and exhaust these process gases.
  • process gases are sometimes introduced into the chamber in a high-temperature state to enhance the reactivity.
  • process gases are cooled during exhaustion, and thereby a chemical reaction takes place to form a solid product, which may adhere and accumulate in the vacuum pump.
  • silicon chloride SiCl 4
  • SiCl 4 silicon chloride
  • the chemical reaction of silicon chloride is promoted, and thus aluminum chloride (AlCl 3 ) is precipitated as a solid product, and adheres and accumulates in the vacuum pump.
  • AlCl 3 aluminum chloride
  • the chemical reaction of silicon chloride is further promoted.
  • a rotor provided with a large number of rotor blades rotates at a high speed of several ten thousand revolutions per minute. If precipitates accumulate on a stator blade disposed on the inner peripheral surface of a casing of the vacuum pump, for example, a disadvantage of contact with the rotor blade may occur. Also, in some cases, the accumulated precipitates narrow a gas discharge path, which remarkably degrades the performance of vacuum pump.
  • a method in which heating is performed from the outside to increase the internal temperature of vacuum pump, by which the adhesion of process gas is restrained is briefly explained with reference to a turbo-molecular pump shown in FIG. 2.
  • a location at which the solid product of process gas is precipitated most easily in the turbo-molecular pump is a base 101 which has a high pressure and moreover is close to a water cooled tube 102 (for temperature control) . Therefore, the base 101 is heated by using a heater 103 so as to be kept at a high temperature.
  • the conduction path of heat generated by the heater 103 is indicated by the arrow marks in FIG. 2.
  • the heat generated by the heater 103 is transferred to a motor housing 106 and a pump inside substrate 104 through the base 101.
  • a motor section 105 disposed in the motor housing 106 and the pump inside substrate 104 have a design limit temperature set considering reliability, the vacuum pump must be used in the setting value range of design limit temperature when the vacuum pump is operated.
  • the design limit temperature of the pump inside substrate 104 is as low as 80°C.
  • an object of the present invention is to provide a vacuum pump in which the accumulation of solid product is restrained by keeping a discharge path for process gas in the vacuum pump at a higher temperature than before, and a motor and a pump inside substrate are cooled effectively.
  • the invention of a first aspect provides a vacuum pump including a body which has a casing and a base and is provided with a gas intake port and a gas discharging port; a rotor pivotally supported in the body so as to be rotatable; a motor for driving the rotor; a motor housing which is located in the body and is fixed to the base; gas transfer means, which is provided between the casing and the rotor, for transferring gas sucked through the gas intake port to the gas discharge port; heating means for heating a gas discharge path for the gas transferred by the gas transferring means; a pump inside substrate which is disposed in the base and the motor housing and is mounted with a predetermined circuit; and heat shutoff means for shutting off heat transfer from the base to the pump inside substrate and motor.
  • the heating means is composed of, for example, a heater disposed around the base or the casing or in the vacuum pump.
  • the heat shutoff means is a heat shutoff wall integrally formed at the end on the base side of the motor housing, and the motor housing is fixed to the base via the heat shutoff means.
  • the heat shutoff wall has a flange portion on the end face opposite to the motor housing, and the motor housing is fixed to the base via the flange portion.
  • the vacuum pump further includes cooling means for cooling the motor housing.
  • the invention of a fifth aspect provides a vacuum pump including a body which has a casing and a base and is provided with a gas intake port and a gas discharging port; a rotor pivotally supported in the body so as to be rotatable; a motor for driving the rotor; a motor housing which is located in the body and is fixed to the base; gas transfer means, which is provided between the casing and the rotor, for transferring gas sucked through the gas intake port to the gas discharge port; heating means for heating a gas discharge path for the gas transferred by the gas transferring means; a pump inside substrate which is disposed in the base and the motor housing and is mounted with a predetermined circuit; and heat insulating means provided on the opposing surface of the motor housing and the base.
  • the heating means is composed of, for example, a heater disposed around the base or the casing or in the vacuum pump.
  • the heat insulating means is a gap or a heat insulating material.
  • the vacuum pump further includes heat shutoff means for shutting off heat transfer from the base to the pump inside substrate and motor.
  • the cooling means is a water cooled tube provided on the motor housing to circulate cooling water.
  • the water cooled tube is provided on the motor housing so that solder or a paste material for heat conduction is additionally provided.
  • the pump inside substrate disposed in the motor housing can be protected from heating caused by the heat generated by the heater. Also, by directly cooling the motor housing, the pump inside substrate can be cooled efficiently. Since the pump inside substrate can be cooled efficiently, the setting temperature of the gas discharge path in the vacuum pump can be increased as compared with the conventional vacuum pump, and thus the precipitation of solid product in the vacuum pump can be restrained.
  • FIG. 1 is a sectional view of a turbo-molecular pump in accordance with the present invention, showing a cress section in the axial direction of a rotor shaft 2.
  • a gas intake port 3 of a turbo-molecular pump 1 is connected to a vacuum chamber of a semiconductor manufacturing system via a conductance valve (a valve for regulating conductance, i.e., flow ability of exhaust gas by changing the cross-sectional area of flow path of pipe) and the like, and a gas discharge port 4 is connected to an auxiliary pump.
  • a conductance valve a valve for regulating conductance, i.e., flow ability of exhaust gas by changing the cross-sectional area of flow path of pipe
  • a casing 5 that forms a casing for the turbo-molecular pump 1 has a cylindrical shape, and a rotor shaft 2 is disposed in the center thereof.
  • the casing 5 constitutes a body 31 of the turbo-molecular pump 1 together with a base 6.
  • magnetic bearing portions 7, 8 and 9 At the upper part, lower part, and bottom part in the axial direction of the rotor shaft 2, there are provided magnetic bearing portions 7, 8 and 9, respectively.
  • the rotor shaft 2 is supported in the radial direction (radial direction of the rotor shaft 2) in a non-contact manner by the magnetic bearing portions 7 and 8, and is supported in the thrust direction (axial direction of the rotor shaft 2) in a non-contact manner by the magnetic bearing portion 9.
  • These magnetic bearing portions 7, 8 and 9 constitute what is called a five-axis control type magnetic bearing, and the rotor shaft 2 has only the degree of freedom of rotation around the axis of the rotor shaft 2.
  • the rotor shaft 2 is formed of a material with high magnetic permeability (for example, iron), and hence is attracted by a magnetic force of the electromagnet.
  • a displacement sensor 10 detects displacement in the radial direction of the rotor shaft 2.
  • a control section not shown, operates to return the rotor shaft 2 to the predetermined position by regulating the magnetic force of each electromagnet.
  • the magnetic force of electromagnet is regulated by feedback controlling the exciting current of each electromagnet.
  • the control section carries out feedback control of magnetic force of the magnetic bearing portion 7 by means of a signal sent from the displacement sensor 10.
  • the rotor shaft 2 is magnetically levitated in the radial direction in the magnetic bearing portion 7 with a predetermined clearance being provided with respect to the electromagnets, and is held in a space in a non-contact manner.
  • the construction and operation of the magnetic bearing portion 8 are the same as those of the magnetic bearing portion 7.
  • the magnetic bearing portion 8 four electromagnets are arranged at 90° intervals around the rotor shaft 2, and the rotor shaft 2 is held in the radial direction in the magnetic bearing portion 8 in a non-contact manner by a suction force of magnetic force of the electromagnets.
  • a displacement sensor 11 detects displacement in the radial direction of the rotor shaft 2.
  • the control section Upon receipt of a displacement signal in the radial direction of the rotor shaft 2 from the displacement sensor 11, the control section, not shown, carries out feedback control of the exciting current of electromagnet so as to hold the rotor shaft 2 at a predetermined position by correcting the displacement.
  • the control section carries out feedback control of magnetic force of the magnetic bearing portion 8 by means of a signal sent from the displacement sensor 11.
  • the rotor shaft 2 is magnetically levitated in the radial direction in the magnetic bearing portion 8 with a predetermined clearance being provided with respect to the electromagnets, and is held in a space in a non-contact manner.
  • the rotor shaft 2 is held in the radial direction at two places of the magnetic bearing portions 7 and 8, the rotor shaft 2 is held at the predetermined position in the radial direction.
  • the magnetic bearing portion 9 provided at the lower end of the rotor shaft 2 is composed of a disk-shaped metallic disk 12, electromagnets 13 and 14, and a displacement sensor 15, and holds the rotor shaft 2 in the thrust direction.
  • the metallic disk 12 which is formed of a material with high magnetic permeability such as iron, is fixed perpendicularly to the rotor shaft 2 in the center thereof.
  • the electromagnet 13 and the electromagnet 14 are provided respectively.
  • the electromagnet 13 attracts the metallic disk 12 upward by means of the magnetic force, and the electromagnet 14 attracts the metallic disk 12 downward.
  • the control section suitably regulates the magnetic force applied to the metallic disk 12 by the electromagnets 13 and 14 so that the rotor shaft 2 is magnetically levitated in the thrust direction and held in a space in a non-contact manner.
  • the displacement sensor 15 detects displacement in the thrust direction of the rotor shaft 2, and sends the detection signal to the control section, not shown.
  • the control section detects displacement in the thrust direction of the rotor shaft 2 based on the displacement detection signal received from the displacement sensor 11.
  • the control section When the rotor shaft 2 moves either way in the thrust direction and is displaced from a predetermined position, the control section operates so that the magnetic force is regulated by feedback controlling the exciting currents of the electromagnets 13 and 14 so as to correct the displacement, by which the rotor shaft 2 is returned to the predetermined position.
  • the control section continuously carried out this feedback control so that the rotor shaft 2 is magnetically levitated in the thrust direction at the predetermined position and held there.
  • the rotor shaft 2 is held in the radial direction by the magnetic bearing portions 7 and 8, and is held in the thrust direction by the magnetic bearing portion 9. Therefore, the rotor shaft 2 has only the degree of freedom of rotation around the axis of the rotor shaft 2.
  • the rotor shaft 2 is provided with a motor section 16 between the magnetic bearing portions 7 and 8.
  • the motor section 16 is assumed to be formed of a dc brushless motor as an example.
  • a permanent magnet is fixed around the rotor shaft 2.
  • This permanent magnet is fixed so that, for example, the N pole and S pole are arranged 180° apart around the rotor shaft 2.
  • six electromagnets are arranged at 60° intervals symmetrically and opposingly with respect to the axis of the rotor shaft 2 with a predetermined clearance being provided with respect to the rotor shaft 2.
  • a rotational speed sensor is installed at the lower end of the rotor shaft 2.
  • the control section can detect the rotational speed of rotor shaft 2 based on the detection signal from the rotational speed sensor.
  • a sensor is installed to detect the phase of rotation of the rotor shaft 2.
  • the control section detects the position of the permanent magnet by using the detection signals of this sensor and the rotational speed sensor.
  • a rotor 17 is installed with a plurality of bolts 18.
  • a portion ranging from a substantially middle position of the rotor 17 to the gas intake port 3, that is, a substantially upper half portion in FIG. 1 is a molecular pump section, and a substantially lower half portion in the figure, that is, a portion ranging from a substantially middle position of the rotor 17 to the gas discharge port 4 is a screw groove pump section.
  • rotor blades 19 are installed at a plurality of stages radially from the rotor 17 so as to be inclined through a predetermined angle from a plane perpendicular to the axis of the rotor shaft 2.
  • the rotor blade 19 is fixed to the rotor 17 so as to be rotated at a high speed together with the rotor shaft 2.
  • stator blades 20 are arranged toward the inside of the casing 5 alternately with the rotor blades 19 so as to be inclined through a predetermined angle from a plane perpendicular to the axis of the rotor shaft 2.
  • the exhaust gas sucked through the gas intake port 3 passes between the rotor blade 19 and the stator blade 20, and is sent to the screw groove pump section formed in the lower half portion in the figure. At this time, the temperature of the rotor blade 19 is increased by friction between the rotor blade 19 and the exhaust gas and the conduction of heat generated in the motor section 16. This heat is transferred to the stator blade 20 by radiation or gas molecule of exhaust gas.
  • a spacer 21 is a ring-shaped member, and is formed of a metal such as aluminum, iron, stainless steel, copper, or an alloy containing these metals as components.
  • the spacer 21 is interposed between stages of the stator blades 20 to keep the stage formed by the stator blades 20 at a predetermined interval, and holds the stator blades 20 at predetermined positions.
  • the spacers 21 are connected to each other in the outer peripheral portion, and form a heat conduction path for conducting the heat that the stator blade 20 receives from the rotor blade 19 and the heat generated by friction between the exhaust gas and the stator blade 20.
  • the screw groove pump section formed on the gas discharge port side of the rotor 17 is composed of a rotor 17 and a screw groove spacer 22.
  • the screw groove spacer 22 is a cylindrical member formed of a metal such as aluminum, copper, stainless steel, or iron, or an alloy containing these metals as components, and has a plurality of spiral screw grooves 23 formed in the inner peripheral surface thereof.
  • the direction of spiral of the screw groove 23 is a direction such that when molecules of exhaust gas move in the rotation direction of the rotor 17, the molecules are transferred to the gas discharge port 4.
  • a heater 29 is mounted on the outer peripheral surface of the base 6.
  • the heater 29 is formed of an electrical heating member such as a Nichrome wire, and is supplied with electric power from a temperature controller, not shown.
  • the heater generates heat when being supplied with electric power, and heats the base 6.
  • the temperature in a gas discharge path for process gas is kept at a high temperature, and thus the precipitation of solid product in the pump is restrained.
  • the heater 29 is mounted on the outer peripheral surface of the base 6 to heat the interior of gas discharge path near the base 6, which meets the conditions (low temperature, high pressure) for easy precipitation of solid product of process gas. Therefore, even if the heater 29 is mounted on the outer peripheral surface of the casing 5, in which case the interior of gas discharge path can be heated, an effect of restraining the precipitation of solid product of process gas can be achieved. Also, the heater 29 can be incorporated directly in the turbo-molecular pump to heat the gas discharge path.
  • a motor housing 24 there are arranged the motor section 16, the magnetic bearing portions 7, 8 and 9, and the displacement sensors 10, 11 and 15. Further, beneath the magnetic bearing portions 7, 8 and 9, there is disposed a pump inside substrate 25 which is mounted with circuits in which various types of information on the vacuum pump are recorded.
  • the pump inside substrate 25 is formed with circuits in which pump operation time, error history, setting temperature for temperature control, etc. are stored. These circuits use a large number of semiconductor parts. Since the design limit temperature for the semiconductor part is set considering reliability, the semiconductor part must be used within the range of setting value of design limit temperature when the vacuum pump is operated. The design limit temperature is set at a value considering the guaranteed value of parts maker and a margin.
  • turbo-molecular pump using a magnetic bearing as a bearing has been described in the embodiment of the present invention, the present invention can also be applied to the case where, for example, a mechanical bearing is used.
  • the conventional portion 24a which is a portion corresponding to a motor housing 106 in FIG. 2, serves to support the motor.
  • the heat shutoff wall portion 24b which is a portion serving to shut off heat so that the radiation heat of the base 6 heated by the heater 29 does not transfer to the pump inside substrate 25, is formed into a cylindrical shape extending from the conventional portion 24a in the downward direction of turbo-molecular pump.
  • the fixing portion 24c which is a portion used when the motor housing 24 is installed to the base 6, is formed into a flange shape on the lower end face of the heat shutoff wall portion 24b.
  • the fixing portion 24c is also used when a back cover 26 for covering an opening at the bottom of the turbo-molecular pump is installed.
  • a gap portion 27 is formed by providing a gap between the motor housing 24 and the base 6.
  • a gap portion 27a is formed on the inner peripheral surface of the base 6 so as to decrease the contact area between the motor housing 24 and the base 6 as far as possible.
  • a gap portion 27b is formed similarly on the lower end surface of the base 6.
  • the gap portion 27 is provided to prevent the heat of the base 6 heated by the heater 29 from transferring to the motor housing 24, and serves to decrease the thermal conductivity between the base 6 and the motor housing 24.
  • the motor housing 24 is fixed to the base 6 with bolts with a heat insulating material 30 being interposed in the connecting portion.
  • the heat insulating material 30 serves to prevent the heat of the base 6 heated by the heater 29 from transferring to the connecting portion.
  • the motor housing 24 is provided with cooling means for cooling the pump inside substrate 25 and the like in the motor housing 24.
  • a water cooled tube 28 is installed under the motor housing fixing portion 24c to circulate cooling water.
  • Solder, a paste material for heat conduction, or the like can be provided additionally between the water cooled tube 28 and the motor housing fixing portion 24c to efficiently conduct cooling.
  • a cooling tube can be run directly in the motor housing to cool the motor housing 24.
  • the process gas sucked through the gas intake port 3 moves in the gas discharge path toward the gas discharge port 4 while the temperature thereof decreases.
  • the process gas can be prevented from adhering and accumulating near the base 6 as a solid product.
  • the motor housing 24 is thermally insulated from the base 6 by the gap portion 27 and the heat insulating material 30, the motor housing 24 is not heated by the heat of the base 6 heated by the heater 29, and the heat can be transferred efficiently to cooling water circulating in the water cooled tube 28.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03251380A 2002-03-13 2003-03-07 Vakuumpumpe Withdrawn EP1344940A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002069013A JP2003269369A (ja) 2002-03-13 2002-03-13 真空ポンプ
JP2002069013 2002-03-13

Publications (1)

Publication Number Publication Date
EP1344940A1 true EP1344940A1 (de) 2003-09-17

Family

ID=27764518

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03251380A Withdrawn EP1344940A1 (de) 2002-03-13 2003-03-07 Vakuumpumpe

Country Status (4)

Country Link
US (1) US20030175131A1 (de)
EP (1) EP1344940A1 (de)
JP (1) JP2003269369A (de)
KR (1) KR20030074304A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015043962A1 (de) * 2013-09-24 2015-04-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

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Publication number Priority date Publication date Assignee Title
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
NL2001601C2 (nl) * 2008-05-21 2009-11-24 Heineken Supply Chain Bv Koelinrichting en werkwijze voor koeling van houders.
CN102472288B (zh) * 2009-08-21 2015-03-25 埃地沃兹日本有限公司 真空泵
TWI491804B (zh) 2010-04-19 2015-07-11 Ebara Corp 乾真空泵裝置及該乾真空泵裝置之冷卻方法
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP6705228B2 (ja) * 2016-03-14 2020-06-03 株式会社島津製作所 温度制御装置およびターボ分子ポンプ
JP6791015B2 (ja) * 2017-05-30 2020-11-25 株式会社島津製作所 真空ポンプ
JP7048391B2 (ja) * 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ
JP7150565B2 (ja) * 2018-10-31 2022-10-11 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
KR102120045B1 (ko) * 2019-04-19 2020-06-09 금덕펌프산업(주) 열방출장치를 갖는 고온용 수중펌프

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US4797062A (en) * 1984-03-24 1989-01-10 Leybold-Heraeus Gmbh Device for moving gas at subatmospheric pressure
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
EP0694699A1 (de) * 1994-07-28 1996-01-31 Ebara Corporation Vakuum-Pumpvorrichtung
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
EP0855517A2 (de) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vakuumpumpe

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DE2331039C2 (de) * 1973-06-19 1984-05-10 Klein, Schanzlin & Becker Ag, 6710 Frankenthal Kühlmittelumwälzpumpe
DE3820005C1 (de) * 1988-06-11 1989-10-05 Grundfos International A/S, Bjerringbro, Dk
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
US6068455A (en) * 1997-03-20 2000-05-30 B/E Aerospace Long life pump system
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
DE10003153A1 (de) * 2000-01-26 2001-08-02 Leybold Vakuum Gmbh Turboradialgebläse
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
JP2002250294A (ja) * 2001-02-21 2002-09-06 Nikkiso Co Ltd 遠心ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797062A (en) * 1984-03-24 1989-01-10 Leybold-Heraeus Gmbh Device for moving gas at subatmospheric pressure
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
EP0694699A1 (de) * 1994-07-28 1996-01-31 Ebara Corporation Vakuum-Pumpvorrichtung
EP0855517A2 (de) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Vakuumpumpe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015043962A1 (de) * 2013-09-24 2015-04-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US10221864B2 (en) 2013-09-24 2019-03-05 Leybold Gmbh Vacuum pump
EP3049676B1 (de) 2013-09-24 2019-07-10 Leybold GmbH Vakuumpumpe

Also Published As

Publication number Publication date
US20030175131A1 (en) 2003-09-18
KR20030074304A (ko) 2003-09-19
JP2003269369A (ja) 2003-09-25

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