EP1274942B8 - Vakuumpumpe mit zwei zusammenwirkenden rotoren - Google Patents

Vakuumpumpe mit zwei zusammenwirkenden rotoren Download PDF

Info

Publication number
EP1274942B8
EP1274942B8 EP01927731A EP01927731A EP1274942B8 EP 1274942 B8 EP1274942 B8 EP 1274942B8 EP 01927731 A EP01927731 A EP 01927731A EP 01927731 A EP01927731 A EP 01927731A EP 1274942 B8 EP1274942 B8 EP 1274942B8
Authority
EP
European Patent Office
Prior art keywords
gear
rotor shafts
drive
vacuum pump
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01927731A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1274942B1 (de
EP1274942A1 (de
Inventor
Manfred Behling
Lothar Brenner
Thomas Dreifert
Hartmut Kriehn
Klaus Rofall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1274942A1 publication Critical patent/EP1274942A1/de
Publication of EP1274942B1 publication Critical patent/EP1274942B1/de
Application granted granted Critical
Publication of EP1274942B8 publication Critical patent/EP1274942B8/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cephalosporin Compounds (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
EP01927731A 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren Expired - Lifetime EP1274942B8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10019066 2000-04-18
DE10019066A DE10019066A1 (de) 2000-04-18 2000-04-18 Vakuumpumpe mit zwei zusammenwirkenden Rotoren
PCT/EP2001/002972 WO2001079701A1 (de) 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren

Publications (3)

Publication Number Publication Date
EP1274942A1 EP1274942A1 (de) 2003-01-15
EP1274942B1 EP1274942B1 (de) 2010-07-14
EP1274942B8 true EP1274942B8 (de) 2010-09-01

Family

ID=7639093

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01927731A Expired - Lifetime EP1274942B8 (de) 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren

Country Status (8)

Country Link
US (1) US6964559B2 (ja)
EP (1) EP1274942B8 (ja)
JP (1) JP4838480B2 (ja)
KR (1) KR100793456B1 (ja)
AT (1) ATE474139T1 (ja)
DE (2) DE10019066A1 (ja)
TW (1) TW507048B (ja)
WO (1) WO2001079701A1 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
DE10156180B4 (de) 2001-11-15 2015-10-15 Oerlikon Leybold Vacuum Gmbh Gekühlte Schraubenvakuumpumpe
KR100561419B1 (ko) * 2004-02-21 2006-03-16 삼성전자주식회사 다중헤드기어펌프 및 이를 채용한 습식 화상형성장치
DE102004016237A1 (de) * 2004-04-02 2005-10-20 Leybold Vakuum Gmbh Zwei-Wellen-Vakuumpumpe
DE102006030917B4 (de) 2006-06-26 2018-08-16 Pierburg Gmbh Ölpumpen- und Vakuumpumpenmodul
JP2008157446A (ja) * 2006-11-30 2008-07-10 Anest Iwata Corp ２軸以上の回転軸間の駆動力伝達機構と該駆動力伝達機構を用いた無給油流体機械
JP2008138549A (ja) * 2006-11-30 2008-06-19 Anest Iwata Corp ２軸以上の回転軸を配した無給油流体機械本体を有する無給油流体機械
US7997227B2 (en) * 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
DE102007053979A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
EP2367701A1 (fr) * 2008-12-19 2011-09-28 Mouvex Dispositif de mise sous pression d'un fluide destine a etre directement sur une prise de mouvement
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
WO2012055734A2 (de) 2010-10-27 2012-05-03 Gebr. Becker Gmbh Vakuumpumpe
CN102080642B (zh) * 2010-12-17 2012-07-04 中国科学院遗传与发育生物学研究所 一种风力机气动提水方法
DE202017003046U1 (de) * 2017-06-09 2018-09-14 Leybold Gmbh Trockenverdichtende Vakuumpumpe
DE102018113043A1 (de) * 2018-05-31 2019-12-05 FRISTAM Pumpen Schaumburg GmbH Rotierende Verdrängerpumpe

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2446194A (en) * 1943-07-30 1948-08-03 Samiran David Pump construction
US2880676A (en) * 1956-03-26 1959-04-07 Succop Anna Louise Motor and pump combination
US2937807A (en) * 1956-12-26 1960-05-24 Heraeus Gmbh W C High vacuum pumps
US3651705A (en) * 1970-10-14 1972-03-28 Fiat Spa Gears for toothed belt drives, particularly for motors for automotive vehicles, made of synthetic material
US3796526A (en) * 1972-02-22 1974-03-12 Lennox Ind Inc Screw compressor
DD153168A5 (de) * 1979-09-24 1981-12-23 Isartaler Schraubenkompressor Verdichteranlage
US4674960A (en) * 1985-06-25 1987-06-23 Spectra-Physics, Inc. Sealed rotary compressor
JP2511870B2 (ja) * 1986-03-20 1996-07-03 株式会社日立製作所 スクリユ−真空ポンプ装置
US4877385A (en) * 1987-01-20 1989-10-31 General Motors Corporation Positive displacement rotary mechanism
JPS63198789A (ja) 1987-02-13 1988-08-17 Hitachi Ltd オイルフリ−真空ポンプ
DE3706588C2 (de) * 1987-02-26 1993-12-02 Mannesmann Ag Antriebseinrichtung für Rotationskolbenverdichter
EP0332741B1 (de) * 1988-02-29 1991-09-18 Leybold Aktiengesellschaft Mehrstufige Vakuumpumpe
US4943215A (en) 1988-02-29 1990-07-24 Leybold Aktiengesellschaft Multistage vacuum pump with bore for fouling removal
JPH0758074B2 (ja) * 1988-04-28 1995-06-21 株式会社日立製作所 オイルフリー・スクリュー圧縮機装置
JP2635406B2 (ja) 1989-04-20 1997-07-30 株式会社神戸製鋼所 オイルフリースクリュ式ポンプ装置
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
DE69132867T2 (de) * 1990-08-01 2002-09-12 Matsushita Electric Ind Co Ltd Drehkolbenanlage für flüssige Medien
US5454700A (en) * 1993-05-08 1995-10-03 Ishikawajima-Harima Jukogyo Kabushiki Kaisha Bearing support for a lysholm compressor
US5443644A (en) * 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
JPH08144977A (ja) 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
SE506513C2 (sv) * 1995-10-23 1997-12-22 Lysholm Techn Ab Transmission med ett tvådelat kopplingsorgan
JPH1193873A (ja) 1997-09-22 1999-04-06 Aisin Seiki Co Ltd 真空ポンプ
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19820523A1 (de) * 1998-05-08 1999-11-11 Peter Frieden Schraubenspindel-Vakuumpumpe mit Rotorkühlung
JP3668616B2 (ja) 1998-09-17 2005-07-06 株式会社日立産機システム オイルフリースクリュー圧縮機
DE19945871A1 (de) 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen

Also Published As

Publication number Publication date
EP1274942B1 (de) 2010-07-14
JP4838480B2 (ja) 2011-12-14
DE50115557D1 (de) 2010-08-26
US20030152468A1 (en) 2003-08-14
JP2004501308A (ja) 2004-01-15
EP1274942A1 (de) 2003-01-15
US6964559B2 (en) 2005-11-15
WO2001079701A1 (de) 2001-10-25
DE10019066A1 (de) 2001-10-25
KR20020091213A (ko) 2002-12-05
ATE474139T1 (de) 2010-07-15
KR100793456B1 (ko) 2008-01-14
TW507048B (en) 2002-10-21

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