ATE474139T1 - Vakuumpumpe mit zwei zusammenwirkenden rotoren - Google Patents

Vakuumpumpe mit zwei zusammenwirkenden rotoren

Info

Publication number
ATE474139T1
ATE474139T1 AT01927731T AT01927731T ATE474139T1 AT E474139 T1 ATE474139 T1 AT E474139T1 AT 01927731 T AT01927731 T AT 01927731T AT 01927731 T AT01927731 T AT 01927731T AT E474139 T1 ATE474139 T1 AT E474139T1
Authority
AT
Austria
Prior art keywords
gear
rotor shafts
drive
vacuum pump
rotors
Prior art date
Application number
AT01927731T
Other languages
English (en)
Inventor
Manfred Behling
Lothar Brenner
Thomas Dreifert
Hartmut Kriehn
Klaus Rofall
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Application granted granted Critical
Publication of ATE474139T1 publication Critical patent/ATE474139T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cephalosporin Compounds (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
AT01927731T 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren ATE474139T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10019066A DE10019066A1 (de) 2000-04-18 2000-04-18 Vakuumpumpe mit zwei zusammenwirkenden Rotoren
PCT/EP2001/002972 WO2001079701A1 (de) 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren

Publications (1)

Publication Number Publication Date
ATE474139T1 true ATE474139T1 (de) 2010-07-15

Family

ID=7639093

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01927731T ATE474139T1 (de) 2000-04-18 2001-03-15 Vakuumpumpe mit zwei zusammenwirkenden rotoren

Country Status (8)

Country Link
US (1) US6964559B2 (de)
EP (1) EP1274942B8 (de)
JP (1) JP4838480B2 (de)
KR (1) KR100793456B1 (de)
AT (1) ATE474139T1 (de)
DE (2) DE10019066A1 (de)
TW (1) TW507048B (de)
WO (1) WO2001079701A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
DE10156180B4 (de) 2001-11-15 2015-10-15 Oerlikon Leybold Vacuum Gmbh Gekühlte Schraubenvakuumpumpe
KR100561419B1 (ko) * 2004-02-21 2006-03-16 삼성전자주식회사 다중헤드기어펌프 및 이를 채용한 습식 화상형성장치
DE102004016237A1 (de) * 2004-04-02 2005-10-20 Leybold Vakuum Gmbh Zwei-Wellen-Vakuumpumpe
DE102006030917B4 (de) 2006-06-26 2018-08-16 Pierburg Gmbh Ölpumpen- und Vakuumpumpenmodul
JP2008157446A (ja) * 2006-11-30 2008-07-10 Anest Iwata Corp ２軸以上の回転軸間の駆動力伝達機構と該駆動力伝達機構を用いた無給油流体機械
JP2008138549A (ja) * 2006-11-30 2008-06-19 Anest Iwata Corp ２軸以上の回転軸を配した無給油流体機械本体を有する無給油流体機械
US7997227B2 (en) * 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
DE102007053979A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
WO2010070211A1 (fr) * 2008-12-19 2010-06-24 Mouvex Dispositif de mise sous pression d'un fluide destine a etre directement sur une prise de mouvement
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
DE102011054607A1 (de) 2010-10-27 2012-06-21 Gebr. Becker Gmbh Vakuumpumpe
CN102080642B (zh) * 2010-12-17 2012-07-04 中国科学院遗传与发育生物学研究所 一种风力机气动提水方法
DE202017003046U1 (de) * 2017-06-09 2018-09-14 Leybold Gmbh Trockenverdichtende Vakuumpumpe
DE102018113043A1 (de) * 2018-05-31 2019-12-05 FRISTAM Pumpen Schaumburg GmbH Rotierende Verdrängerpumpe

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2446194A (en) * 1943-07-30 1948-08-03 Samiran David Pump construction
US2880676A (en) * 1956-03-26 1959-04-07 Succop Anna Louise Motor and pump combination
US2937807A (en) * 1956-12-26 1960-05-24 Heraeus Gmbh W C High vacuum pumps
US3651705A (en) * 1970-10-14 1972-03-28 Fiat Spa Gears for toothed belt drives, particularly for motors for automotive vehicles, made of synthetic material
US3796526A (en) * 1972-02-22 1974-03-12 Lennox Ind Inc Screw compressor
DD153168A5 (de) * 1979-09-24 1981-12-23 Isartaler Schraubenkompressor Verdichteranlage
US4674960A (en) * 1985-06-25 1987-06-23 Spectra-Physics, Inc. Sealed rotary compressor
JP2511870B2 (ja) * 1986-03-20 1996-07-03 株式会社日立製作所 スクリユ−真空ポンプ装置
US4877385A (en) * 1987-01-20 1989-10-31 General Motors Corporation Positive displacement rotary mechanism
JPS63198789A (ja) 1987-02-13 1988-08-17 Hitachi Ltd オイルフリ−真空ポンプ
DE3706588C2 (de) * 1987-02-26 1993-12-02 Mannesmann Ag Antriebseinrichtung für Rotationskolbenverdichter
US4943215A (en) 1988-02-29 1990-07-24 Leybold Aktiengesellschaft Multistage vacuum pump with bore for fouling removal
EP0332741B1 (de) * 1988-02-29 1991-09-18 Leybold Aktiengesellschaft Mehrstufige Vakuumpumpe
JPH0758074B2 (ja) * 1988-04-28 1995-06-21 株式会社日立製作所 オイルフリー・スクリュー圧縮機装置
JP2635406B2 (ja) * 1989-04-20 1997-07-30 株式会社神戸製鋼所 オイルフリースクリュ式ポンプ装置
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
EP0472933B2 (de) * 1990-08-01 2003-12-03 Matsushita Electric Industrial Co., Ltd. Drehanlage für flüssige Medien
US5454700A (en) * 1993-05-08 1995-10-03 Ishikawajima-Harima Jukogyo Kabushiki Kaisha Bearing support for a lysholm compressor
US5443644A (en) * 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
SE506513C2 (sv) * 1995-10-23 1997-12-22 Lysholm Techn Ab Transmission med ett tvådelat kopplingsorgan
JPH1193873A (ja) 1997-09-22 1999-04-06 Aisin Seiki Co Ltd 真空ポンプ
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19820523A1 (de) * 1998-05-08 1999-11-11 Peter Frieden Schraubenspindel-Vakuumpumpe mit Rotorkühlung
JP3668616B2 (ja) 1998-09-17 2005-07-06 株式会社日立産機システム オイルフリースクリュー圧縮機
DE19945871A1 (de) 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen

Also Published As

Publication number Publication date
WO2001079701A1 (de) 2001-10-25
KR20020091213A (ko) 2002-12-05
EP1274942B1 (de) 2010-07-14
EP1274942B8 (de) 2010-09-01
US20030152468A1 (en) 2003-08-14
DE10019066A1 (de) 2001-10-25
JP2004501308A (ja) 2004-01-15
US6964559B2 (en) 2005-11-15
JP4838480B2 (ja) 2011-12-14
EP1274942A1 (de) 2003-01-15
KR100793456B1 (ko) 2008-01-14
TW507048B (en) 2002-10-21
DE50115557D1 (de) 2010-08-26

Similar Documents

Publication Publication Date Title
ATE474139T1 (de) Vakuumpumpe mit zwei zusammenwirkenden rotoren
GB2376505B (en) Improvements in screw compressors
ATE105378T1 (de) Kombinierte turbomolekularpumpe mit zwei wellen und atmosphaerischem auslass.
CA2438306A1 (en) Water-injected screw compressor
ATE93010T1 (de) Drehkolbenmaschine der art einer schraubenpumpe.
DE50102942D1 (de) Flüssigkeitsgekühlter elektromotor
DK0834017T3 (da) Vakuumpumpe
DE60302219D1 (de) Antriebssystem von einer Zentrifuge
ATE325274T1 (de) Vakuumpumpe
ATE422617T1 (de) Kältemittelverdichter
CA2265358A1 (en) Compact sealless screw pump
ATE327421T1 (de) Rotationsmaschine mit zwei rotoren
DE3865516D1 (de) Innenachsige drehkolbenmaschine.
DE59811743D1 (de) Antrieb für Aufzüge
DE59910616D1 (de) Mehrwellenvakuumpumpe
EP1081387A3 (de) Vakuumpumpe
CN2225105Y (zh) 用于水泵的单相电机
ES2013417A6 (es) Perfeccionamientos en la fabricacion de bombas rotativas.
ITMI20022766A1 (it) Pompa in particolare pompa rotativa a palette o pompa
EP1279834A3 (de) Drehschieberpumpe
DE50300523D1 (de) Leicht zu reinigende Kreiselpumpe
SU1786900A1 (ru) Многоступенчатый роторный вакуумный насос
DE69031495D1 (de) Torodiale hyperexpandierende rotierende maschine, verdichter, pumpe und expansionsgerät
RU2006112111A (ru) Насос
GR20000100104A (el) Νεος τυπος αντλιας-κινητηρος