EP1268127A2 - Verfahren und vorrichtung zum kantenformen - Google Patents

Verfahren und vorrichtung zum kantenformen

Info

Publication number
EP1268127A2
EP1268127A2 EP01920194A EP01920194A EP1268127A2 EP 1268127 A2 EP1268127 A2 EP 1268127A2 EP 01920194 A EP01920194 A EP 01920194A EP 01920194 A EP01920194 A EP 01920194A EP 1268127 A2 EP1268127 A2 EP 1268127A2
Authority
EP
European Patent Office
Prior art keywords
range
resin
edge
abrasive wheel
bonded abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01920194A
Other languages
English (en)
French (fr)
Other versions
EP1268127B1 (de
Inventor
Hironori Hagiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of EP1268127A2 publication Critical patent/EP1268127A2/de
Application granted granted Critical
Publication of EP1268127B1 publication Critical patent/EP1268127B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/02—Wheels in one piece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Processing Of Meat And Fish (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
EP01920194A 2000-03-07 2001-03-06 Verfahren und vorrichtung zum kantenformen Expired - Lifetime EP1268127B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000061915 2000-03-07
JP2000061915A JP2001259978A (ja) 2000-03-07 2000-03-07 ガラス板の端部を面取りする方法
PCT/US2001/006940 WO2001066307A2 (en) 2000-03-07 2001-03-06 Method and apparatus for shaping edges

Publications (2)

Publication Number Publication Date
EP1268127A2 true EP1268127A2 (de) 2003-01-02
EP1268127B1 EP1268127B1 (de) 2005-06-01

Family

ID=18581991

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01920194A Expired - Lifetime EP1268127B1 (de) 2000-03-07 2001-03-06 Verfahren und vorrichtung zum kantenformen

Country Status (7)

Country Link
US (1) US20030017788A1 (de)
EP (1) EP1268127B1 (de)
JP (2) JP2001259978A (de)
AT (1) ATE296713T1 (de)
AU (1) AU2001247271A1 (de)
DE (1) DE60111203D1 (de)
WO (1) WO2001066307A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005093948A1 (ja) * 2004-03-26 2005-10-06 Hitachi Kokusai Electric Inc. 増幅器
US20070298240A1 (en) * 2006-06-22 2007-12-27 Gobena Feben T Compressible abrasive article
US7303464B1 (en) * 2006-10-13 2007-12-04 3M Innovative Properties Company Contact wheel
DE102009030294B4 (de) * 2009-06-24 2013-04-25 Siltronic Ag Verfahren zur Politur der Kante einer Halbleiterscheibe
JP5757289B2 (ja) * 2010-07-08 2015-07-29 旭硝子株式会社 ガラス基板端面の加工装置及びガラス基板端面の加工方法並びにガラス基板
GB2482345A (en) * 2010-07-30 2012-02-01 Vestas Wind Sys As Tapering an edge of a fibrous reinforcement sheet using a rotary tool
US8721392B2 (en) * 2011-06-28 2014-05-13 Corning Incorporated Glass edge finishing method
SG192302A1 (en) * 2012-01-18 2013-08-30 Avanstrate Inc Method of making glass sheet
WO2015113026A2 (en) * 2014-01-27 2015-07-30 Corning Incorporated Edge chamfering by mechanically processing laser cut glass
JP2019171520A (ja) * 2018-03-28 2019-10-10 株式会社ノリタケカンパニーリミテド レジノイド研削砥石

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3889430A (en) * 1972-05-17 1975-06-17 S P A M Abrasive tools
CH559593A5 (en) * 1973-01-26 1975-03-14 Moon Star Chemical Corp Helical honing tool for gear wheel - has abrasive particles embedded in polymer esp. mixt. of polyurethane and epoxy resin
DE2730665A1 (de) * 1977-07-07 1979-01-11 Lippert H Gmbh Schleifscheibe fuer nasschliff
EP0042932A3 (de) * 1980-06-30 1984-07-25 International Business Machines Corporation Verfahren zur Herstellung hohler rohrartiger Körper
US4525958A (en) * 1981-11-19 1985-07-02 Ppg Industries, Inc. Method of controlling article speed during edge grinding
JPS6062464A (ja) * 1983-09-10 1985-04-10 Kawasaki Steel Corp 回転砥石による金属帯の側端研削装置
JPS6165762A (ja) * 1984-09-06 1986-04-04 Nippon Sheet Glass Co Ltd 板状体の端面研磨装置
IT1190474B (it) * 1986-03-04 1988-02-16 Siv Soc Italiana Vetro Macchina perfezionata per la molatura del bordo di lastre di vetro,particolarmente vetrature per automobili
JP2719855B2 (ja) * 1991-05-24 1998-02-25 信越半導体株式会社 ウエーハ外周の鏡面面取り装置
JPH081493A (ja) * 1994-06-17 1996-01-09 Shin Etsu Handotai Co Ltd ウェーハ面取部の鏡面研磨方法および鏡面研磨装置
TW383322B (en) * 1994-11-02 2000-03-01 Norton Co An improved method for preparing mixtures for abrasive articles
US5569062A (en) * 1995-07-03 1996-10-29 Speedfam Corporation Polishing pad conditioning
US5868603A (en) * 1996-12-12 1999-02-09 Corning Incorporated Method for edge finishing glass sheets
US6022268A (en) * 1998-04-03 2000-02-08 Rodel Holdings Inc. Polishing pads and methods relating thereto
KR20000076987A (ko) * 1999-03-31 2000-12-26 다구마시로오 피가공물 연삭방법 및 장치
US6213855B1 (en) * 1999-07-26 2001-04-10 Speedfam-Ipec Corporation Self-powered carrier for polishing or planarizing wafers
US6267649B1 (en) * 1999-08-23 2001-07-31 Industrial Technology Research Institute Edge and bevel CMP of copper wafer
JP2001121430A (ja) * 1999-10-25 2001-05-08 Noritake Co Ltd ブッシュ付研削砥石車
US6722964B2 (en) * 2000-04-04 2004-04-20 Ebara Corporation Polishing apparatus and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0166307A2 *

Also Published As

Publication number Publication date
US20030017788A1 (en) 2003-01-23
JP2003525759A (ja) 2003-09-02
JP2001259978A (ja) 2001-09-25
WO2001066307A3 (en) 2002-03-28
ATE296713T1 (de) 2005-06-15
WO2001066307A2 (en) 2001-09-13
DE60111203D1 (de) 2005-07-07
EP1268127B1 (de) 2005-06-01
AU2001247271A1 (en) 2001-09-17

Similar Documents

Publication Publication Date Title
CA2245498A1 (en) Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers
EP1052062A1 (de) Vorbehandlung eines fixierten Schleifmittels
TW348088B (en) Apparatus for and method of polishing a workpiece
EP1268127A2 (de) Verfahren und vorrichtung zum kantenformen
ZA957039B (en) Coated abrasive article, method for preparing the same, and method of using a coated abrasive article to abrade a hard workpiece.
DE69503408T2 (de) Vorrichtung zum chemisch-mechanischen Polieren mit verbesserter Verteilung der Polierzusammensetzung
DE60023549D1 (de) Verfahren zum polieren oder planarisieren eines substrats
CA2265322A1 (en) Method for grinding precision components
EP0940219A3 (de) Halbleiterscheibe Bearbeitungsmaschine und Verfahren
SG131737A1 (en) Polishing tool and polishing method and apparatus using same
EP0857541A3 (de) Chemisch-mechanische Poliervorrichtung
TW208666B (de)
TW364867B (en) Polishing method, abrasive material, and polishing apparatus
AU2002351393A1 (en) Methods for planarization of group viii metal-containing surfaces using a fixed abrasive article
EP1125686A4 (de) Werkstückhalterscheibe zum polieren, werkstückpoliervorrichtung und verfahren
WO2007103780B1 (en) Improved sharpener for blades of food slicers
JPS57170538A (en) Polishing method for one side of semiconductor wafer
CN202684687U (zh) 玻璃边缘抛光装置
EP0845329A3 (de) Verfahren und Vorrichtung zum Polieren einer dünnen Platte
JPS62292367A (ja) ダイヤモンド被覆弾性粒研磨シ−ト
TW562720B (en) Polishing molding and polishing surface plate using the same
CN215881103U (zh) 打磨装置
CN216967291U (zh) 一种盖板类压铸件的表面优质抛磨装备
CN219704638U (zh) 一种适用于不锈钢样品研磨及抛光处理的固定装置
JPH0248155A (ja) アイススケイトエッヂ用、ダイヤモンド研磨機

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020925

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RIN1 Information on inventor provided before grant (corrected)

Inventor name: HAGIWARA, HIRONORI

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

17Q First examination report despatched

Effective date: 20041102

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050601

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 60111203

Country of ref document: DE

Date of ref document: 20050707

Kind code of ref document: P

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050901

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050901

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050901

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050902

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20051107

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060306

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060306

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060331

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060331

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20060302

EN Fr: translation not filed
GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20060306

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20080324

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050601

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060331

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 20091001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091001