EP1240433A1 - Pompe a vide a compression seche comportant un dispositif de ballast a gaz - Google Patents

Pompe a vide a compression seche comportant un dispositif de ballast a gaz

Info

Publication number
EP1240433A1
EP1240433A1 EP00951529A EP00951529A EP1240433A1 EP 1240433 A1 EP1240433 A1 EP 1240433A1 EP 00951529 A EP00951529 A EP 00951529A EP 00951529 A EP00951529 A EP 00951529A EP 1240433 A1 EP1240433 A1 EP 1240433A1
Authority
EP
European Patent Office
Prior art keywords
pump
gas ballast
ballast device
gas
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00951529A
Other languages
German (de)
English (en)
Other versions
EP1240433B1 (fr
Inventor
Lutz Arndt
Thomas Dreifert
Michael HÖLZEMER
Jürgen Meyer
Frank SCHÖNBORN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1240433A1 publication Critical patent/EP1240433A1/fr
Application granted granted Critical
Publication of EP1240433B1 publication Critical patent/EP1240433B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F04B37/20—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids for wet gases, e.g. wet air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a dry compressing vacuum pump with continuous or gradual internal compression and with a gas ballast device.
  • “Dry-compressing vacuum pump with internal compression” should be understood to mean any vacuum pump whose pumping chamber or pumping chambers is / are oil-free and in which the pumping chamber volume decreases continuously or in stages from the inlet to the pump outlet.
  • a dry-compressing vacuum pump with a continuously decreasing pumping chamber volume is one Screw vacuum pump with screw gears, the pitch, depth and / or width of which decreases continuously from the inlet to the outlet.
  • Examples of dry-compressing vacuum pumps with gradually decreasing internal compression are multi-stage claw, roots or piston vacuum pumps, in which the volume of the pumping or compression chambers increases from stage to stage It also is known for screw vacuum pumps that the screw threads training courses in such a way that they gradually change their properties.
  • Dry-compressing vacuum pumps are generally used in applications (e.g. in semiconductor production) in which toxic, very expensive or even explosive gases have to be conveyed.
  • the object of the present invention is to design the gas ballast device in a vacuum pump of the type mentioned at the outset in such a way that the risk of gases escaping no longer exists. Moreover the aim is to ensure that gas ballast operation does not put an additional load on the pump drive motor.
  • a check valve is part of the gas ballast device, it can be ensured that gases conveyed by the pump cannot escape to the outside via the gas ballast device.
  • FIG. 1 is a schematically illustrated multi-stage
  • FIG. 2 shows a concrete version of the gas ballast device
  • - Figure 3 shows the rotors of a screw vacuum pump with internal compression
  • the pump 1 according to FIG. 1 comprises three stages 2, 3, 4 with a scoop volume decreasing from the inlet 5 to the outlet 6.
  • a gas ballast device 8 designed according to the invention is connected between the penultimate and the last stage and has a shut-off valve 11, a check valve 12 and a differential pressure valve 13 in a ballast gas supply line 9, arranged in any order.
  • the gas ballast operation can be switched on or off in a known manner.
  • the check valve 12 is installed in such a way that it prevents the escape of gases which are conveyed in the pump 1 through the line 9.
  • the differential pressure valve 13 has the effect that the ballast gas only enters the pump 1 when the valve 11 is open when the pressure in the region of the ballast gas inlet falls below a pressure predetermined by the differential pressure valve.
  • FIG. 2 shows an embodiment of the gas ballast device 8, which is placed directly on the housing 15 of a vacuum pump 1. It comprises the housing 16, which is fastened on the vacuum pump 1 with the aid of a screw 17.
  • the screw 17 is screwed into the channel 18 that supplies the ballast gas and has a shaft cavity 19 in this area on, which is connected via a lateral opening 21 to the interior 22 of the housing 16.
  • the check valve 12 is located in the cavity 19. It consists of a ball 23 (for example made of an elastomer), a seat 24 (for example made of steel) and a spring 25 which acts in the direction of the closed position.
  • the check valve 12 described also has the function of the differential pressure valve 13.
  • the desired differential pressure can be determined via the design of the closing spring 25.
  • the interior 22 of the cylindrical housing 16 has lateral openings 27.
  • a rotatable sleeve 28 comprising the housing 16 has openings 29 concentric with the openings 27 in the position shown. By turning the sleeve 28, the gas ballast supply is opened or closed.
  • FIG. 3 shows the rotors 31, 32 of a dry-compressing vacuum pump 1 based on the screw principle. Inlet and outlet are schematically indicated by arrows 34, 35.
  • the screw threads of the rotors 31, 32 have a decreasing pitch and a decreasing width of the thread webs.
  • a gas ballast supply is provided near the outlet via the gas ballast device 8.
  • Screw vacuum pumps are advantageously operated with a clear internal compression, so that there is a maximum power consumption of the drive motor at an intake pressure of approximately 300 mbar. With this suction The supply of ballast gas is not necessary because the then usually high pump temperatures avoid condensation. If ballast gas were nevertheless pumped in this operating state, this would result in additional power consumption, ie an additional engine power would have to be stored. It is therefore expedient to dimension the differential pressure valve 13 such that a gas ballast supply can only take place at a relatively high pressure difference. For example, if the opening pressure of the differential pressure valve is 900 mbar, gas ballast could only be introduced at a pressure of approx. 100 mbar (atmospheric pressure minus 900 mbar). In this operating state, the full engine power is no longer required, so that no greater engine power has to be installed for the gas ballast.
  • FIGS. 4 and 5 show an embodiment (FIG. 4 only partially) of a dry-compressing vacuum pump, which is designed as a multi-stage piston vacuum pump.
  • the cylindrical scooping areas 43 to 46 are located in their pump chamber parts 41 and 42. Between the housing parts 41, 42 there is the crankshaft chamber 47, the housing of which is designated by 48.
  • the pistons 51 to 54 are each stepped and form eight pump chambers, some of which are connected in parallel, so that the pump shown has four pumping stages with decreasing volume. Its inlet is 55, its outlet 56.
  • a vacuum pump of this type is described in detail.
  • the last annular pump chamber forms the last stage of the one shown Vacuum pump. Its inlet is 57, its outlet 58.
  • the gas ballast is fed into the connecting line between the outlet of the penultimate pump stage and the inlet 57 of the last pump stage.
  • the gas ballast device 8 is connected to this connecting line.
  • the gas ballast is supplied via the crankshaft space 47, as is known per se from DE-A-197 09 206.
  • the inlet 57 of the last stage of the pump is connected to the crankshaft chamber 47 via the line 59. Its mouth forms a ballast gas inlet 61 close to the suction chamber. It is located near one end face of the crankshaft housing 48.
  • the gas ballast or flushing gas inlet 8 is located in the region of the opposite side of the crankshaft housing 48. or maintain negative pressure therein.
  • crankcase 47 In piston vacuum pumps, it is important that the pressure in the crankcase 47 matches the pressure in the pump chambers. In particular, it is difficult to start a piston vacuum pump when using AC motors that have a weak starting torque if there is a high pressure (for example atmospheric pressure) in the crankcase and a vacuum in the working spaces 43 to 46. This occurs when the pump clients shut down and the crankcase 47 is flooded via the open gas ballast device 8. However, if the gas ballast supply only opens when a pressure difference is exceeded, a negative pressure can also be maintained in the crankcase when the pump is stopped.
  • a high pressure for example atmospheric pressure
  • the crankcase 47 is only vented up to a pressure of approximately 400 mbar (atmospheric pressure minus 600 mbar).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide à compression sèche (1) ayant une compression intérieure continue ou étagée, et comportant un dispositif de ballast à gaz (8) pourvu d'une soupape d'arrêt (11) et en complément d'une soupape de retenue (12) empêchant la sortie des gaz hors de la pompe (1), au travers du dispositif de ballast à gaz (8).
EP00951529A 1999-12-22 2000-08-23 Pompe à vide à compression sèche comportant un dispositif de ballast à gaz Expired - Lifetime EP1240433B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19962445A DE19962445A1 (de) 1999-12-22 1999-12-22 Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE19962445 1999-12-22
PCT/EP2000/008201 WO2001046592A1 (fr) 1999-12-22 2000-08-23 Pompe a vide a compression seche comportant un dispositif de ballast a gaz

Publications (2)

Publication Number Publication Date
EP1240433A1 true EP1240433A1 (fr) 2002-09-18
EP1240433B1 EP1240433B1 (fr) 2006-07-19

Family

ID=7934119

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00951529A Expired - Lifetime EP1240433B1 (fr) 1999-12-22 2000-08-23 Pompe à vide à compression sèche comportant un dispositif de ballast à gaz

Country Status (7)

Country Link
US (1) US6776588B1 (fr)
EP (1) EP1240433B1 (fr)
JP (1) JP2003518228A (fr)
AU (1) AU6443100A (fr)
DE (2) DE19962445A1 (fr)
TW (1) TW482875B (fr)
WO (1) WO2001046592A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
DE10212940A1 (de) * 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Exzenterpumpe und Verfahren zum Betrieb dieser Pumpe
US7819646B2 (en) * 2002-10-14 2010-10-26 Edwards Limited Rotary piston vacuum pump with washing installation
DE102004059486A1 (de) * 2004-12-10 2006-06-22 Leybold Vacuum Gmbh Vakuum-Anlage
DE102004063058A1 (de) * 2004-12-22 2006-07-13 Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
DE102006011577A1 (de) * 2006-03-10 2007-09-13 Linde Ag Verdichteranlage mit einem Pufferbehälter
JP2008088912A (ja) * 2006-10-03 2008-04-17 Tohoku Univ メカニカルポンプおよびその製造方法
DE102007011589A1 (de) * 2007-03-08 2008-09-11 Schott Ag Fördereinrichtung für Precursor
DE102007043350B3 (de) 2007-09-12 2009-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zur Steuerung einer Gasballastzufuhr zu einer Vakuumpumpe
JP5680972B2 (ja) 2008-03-10 2015-03-04 ブルクハルト コンプレッション アーゲー 天然ガス燃料の供給装置および方法
EP2572109B1 (fr) * 2010-05-21 2020-09-02 Exxonmobil Upstream Research Company Appareil compresseur dynamique en parallèle et procédé associé
EP3045724A1 (fr) * 2015-01-13 2016-07-20 Neoceram S.A. Pompe en céramique et carter correspondant
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
CN111500309A (zh) * 2020-04-27 2020-08-07 中山凯旋真空科技股份有限公司 干式真空泵及原油真空闪蒸处理装置

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Also Published As

Publication number Publication date
DE50013201D1 (de) 2006-08-31
AU6443100A (en) 2001-07-03
TW482875B (en) 2002-04-11
US6776588B1 (en) 2004-08-17
EP1240433B1 (fr) 2006-07-19
JP2003518228A (ja) 2003-06-03
DE19962445A1 (de) 2001-06-28
WO2001046592A1 (fr) 2001-06-28

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