EP1186004B1 - Processing chamber with optical window cleaned using process gas - Google Patents
Processing chamber with optical window cleaned using process gas Download PDFInfo
- Publication number
- EP1186004B1 EP1186004B1 EP00919921A EP00919921A EP1186004B1 EP 1186004 B1 EP1186004 B1 EP 1186004B1 EP 00919921 A EP00919921 A EP 00919921A EP 00919921 A EP00919921 A EP 00919921A EP 1186004 B1 EP1186004 B1 EP 1186004B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- window
- processing chamber
- semiconductor processing
- light
- prechamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Definitions
- the present invention relates generally to semiconductor processing chamber windows and, more particularly, to a semiconductor processing chamber window with an adjacent process gas inlet that effectively prevents the deposition of byproducts on the window while avoiding the alteration of a process gas composition within the processing chamber.
- Prior Art Fig. 1 shows one example of a window 10 mounted on a side wall of a conventional processing chamber 12. As shown, the window 10 is recessed with respect to the side wall of the processing chamber 12.
- the processes within the processing chamber are monitored by collecting data and analyzing conditions.
- equipment necessary for such collection and analysis include a lamp, a spectrometer, an optical fiber, and a lens.
- the optical fiber has a first end aligned with the window with the lens positioned therebetween. A second end of the optical fiber is bifurcated for coupling to both the lamp and the spectrometer.
- the lamp and the spectrometer work together to monitor a process such as deposition, etching, or cleaning by any one of the known optical endpoint detection methods.
- a process such as deposition, etching, or cleaning by any one of the known optical endpoint detection methods.
- light is reflected off of the wafer and thereafter viewed with the spectrometer.
- the spectrometer may be connected to a photodetector that converts light from the spectrometer to an electrical signal which is in turn amplified and monitored by a computer to determine a process endpoint or collecting other information.
- a complication arises due to the need for directing the light and viewing the reflected light through a single window.
- some of the directed light reflects back from the window and tends to interfere with the ability of the spectrometer to receive the light reflected from the wafer within the processing chamber.
- This reflected light, or noise prevents the spectrometer and the associated photodetector from delivering an electrical signal that is truly indicative of the light reflected from the wafer within the processing chamber.
- US-A-5 229 081 entitled "Apparatus for semiconductor process including photoexcitation process”. Further examples are discussed in US-A-4 582 431 (COLE); EP-A-0 768 525 . (L'AIR LIQUIDE); and EP-A-1 004 937 (NIKON CORPORATION).
- the present invention includes a semiconductor processing chamber enclosed by a plurality of walls as claimed in claim 1 and a method as claimed in claim 12.
- Another example of the present invention includes a source of light, an analysis mechanism, and an optical transmission medium.
- Such optical transmission medium is coupled between the source of light and the analysis mechanism and is further aligned with the window for directing light into the processing chamber and analyzing the interior space of the processing chamber.
- the window is configured to reflect the light received from the optical transmission medium at an angle so as to not interfere with light reflected from within the processing chamber. The window thus allows the analysis mechanism to receive the light reflected from within the processing chamber without interference or noise.
- FIG. 1 is a cross-sectional view of a semiconductor processing chamber of the prior art.
- Fig. 1 illustrates the prior art.
- the present invention includes a semiconductor processing chamber 100, a source of process gas 102, a window 104, and an inlet 106.
- the processing chamber 100 defines an interior space which is enclosed by a top wall 108, a bottom wall 110, and a plurality of side walls 112.
- Such processing chamber 100 serves for processing contents, i.e. wafer 110, for the purpose of manufacturing integrated circuits.
- One step of such processing includes etching the wafer 110. This may be accomplished using any conventional, commonly known techniques.
- the source of process gas 102 is often required for channeling the process gas into the processing chamber 100.
- process gas, or plasma may include, but is not limited to Cl 2 + HBr, Cl 2 , CF 4 , HBr, BCl 3 , SF 6 , N 2 or O 2 .
- the process gas may take the form of any gas that is used during etching or any other process related to the manufacture of integrated circuits.
- a window 104 may be mounted on one of the walls of the processing chamber 100.
- the window 104 is situated on the top wall 108 of the processing chamber 100 for the purpose of allowing analysis of the wafer 110 within the processing chamber 100.
- the window 104 is situated on the side wall 112 of the processing chamber 100. By positioning the window 104 in such location, one may collect data relating to the process gas and any byproducts produced by the etching of the wafer 110.
- a plurality of windows may be mounted on the top wall of the processing chamber for flanking a center of the top wall. For reasons that will soon become apparent, this may be particularly useful during some data collection and analysis techniques. In the foregoing examples, the collected data and analysis serve to provide important information relating to the semiconductor manufacturing process.
- the inlet 106 is positioned adjacent to the window 104 and remains in communication with the processing chamber 100.
- the inlet 106 is further coupled to the source of process gas 102 for the purpose of channeling the process gas into the processing chamber 100.
- This process gas serves to prevent the deposition of polymer precursors on the window 104 which may interfere with the analysis of the contents in the processing chamber 100. Further, by using the process gas as opposed to prior art inert gases, the process gas composition within the processing chamber 100 is unaltered for more effectively processing the wafer 110.
- the inlet 106 may serve as a primary source of process gas 102 for the processing chamber or, in the alternative, may merely supplement the flow of process gas from a conventional process gas port.
- the window 104 is recessed with respect to the wall of the processing chamber 100 to which the window 104 is mounted. This is accomplished by a substantially right cylindrical prechamber 114 being positioned between the window 104 and the processing chamber 100. As best shown in Fig. 3, the inlet 106 is mounted on a side wall 113 of the prechamber 114 and is positioned adjacent to the window 104.
- the specific orientation of the inlet 106 is such that the process gas is directed in a direction perpendicular with respect to an axis of the prechamber 114 and substantially parallel with respect to a lower surface of the window 104.
- the process gas dislodges any byproducts from the lower surface of the window 104 and directs the same through the prechamber 114 and into the processing chamber 100 where the process gas contributes to the processing of the wafer 110.
- the flow of process gas may be continuous in nature for preventing any byproducts or the like from entering the prechamber 114.
- test equipment including a source of light 120, an analysis mechanism 122, an optical transmission medium 124, and a lens 126.
- the optical transmission medium 124 includes an optical fiber having a first end aligned with the window 104 with the lens 126 positioned therebetween. A second end of the optical fiber is bifurcated for coupling to both the source of light 120 and the analysis mechanism 122.
- the source of light 120 includes a lamp and the analysis mechanism 122 includes a CCD spectrometer.
- the bifurcated optical fiber may replaced with a pair of separate optical fibers.
- One of the optical fibers may serve to direct light from the lamp into the processing chamber via a first window.
- a second one of the optical fibers may be used to collect light reflected from a wafer within the processing chamber via a second window.
- the lamp directs light through the optical fiber for being reflected off of the wafer 110 within the processing chamber 100.
- the window 104 may be beveled, or angled, to ensure that any reflected light that does not pass through the window 104 is reflected at angle, as shown in Fig. 3. This prevents such reflected light from being reflected 180° which would direct the light back through the optical fiber and obscure any reflected light from the wafer 110.
- the upper and lower surfaces of lens 126 may be planar, parallel, and form a 3-4° angle with respect to a horizontal.
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/282,519 US6052176A (en) | 1999-03-31 | 1999-03-31 | Processing chamber with optical window cleaned using process gas |
US282519 | 1999-03-31 | ||
PCT/US2000/008514 WO2000059009A2 (en) | 1999-03-31 | 2000-03-30 | Processing chamber with optical window cleaned using process gas |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1186004A2 EP1186004A2 (en) | 2002-03-13 |
EP1186004B1 true EP1186004B1 (en) | 2008-01-16 |
Family
ID=23081871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00919921A Expired - Lifetime EP1186004B1 (en) | 1999-03-31 | 2000-03-30 | Processing chamber with optical window cleaned using process gas |
Country Status (7)
Country | Link |
---|---|
US (1) | US6052176A (ja) |
EP (1) | EP1186004B1 (ja) |
JP (1) | JP4743969B2 (ja) |
KR (2) | KR100844298B1 (ja) |
DE (1) | DE60037805T2 (ja) |
TW (1) | TW466546B (ja) |
WO (1) | WO2000059009A2 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6129807A (en) * | 1997-10-06 | 2000-10-10 | Applied Materials, Inc. | Apparatus for monitoring processing of a substrate |
US6390019B1 (en) * | 1998-06-11 | 2002-05-21 | Applied Materials, Inc. | Chamber having improved process monitoring window |
US6230651B1 (en) * | 1998-12-30 | 2001-05-15 | Lam Research Corporation | Gas injection system for plasma processing |
US6413867B1 (en) | 1999-12-23 | 2002-07-02 | Applied Materials, Inc. | Film thickness control using spectral interferometry |
EP1352415A2 (en) * | 2000-10-23 | 2003-10-15 | Applied Materials, Inc. | Monitoring substrate processing using reflected radiation |
US7270724B2 (en) | 2000-12-13 | 2007-09-18 | Uvtech Systems, Inc. | Scanning plasma reactor |
US6773683B2 (en) * | 2001-01-08 | 2004-08-10 | Uvtech Systems, Inc. | Photocatalytic reactor system for treating flue effluents |
US20030070620A1 (en) | 2001-10-15 | 2003-04-17 | Cooperberg David J. | Tunable multi-zone gas injection system |
US6750156B2 (en) | 2001-10-24 | 2004-06-15 | Applied Materials, Inc. | Method and apparatus for forming an anti-reflective coating on a substrate |
US6901808B1 (en) | 2002-02-12 | 2005-06-07 | Lam Research Corporation | Capacitive manometer having reduced process drift |
US7252011B2 (en) * | 2002-03-11 | 2007-08-07 | Mks Instruments, Inc. | Surface area deposition trap |
TWI225667B (en) * | 2002-03-25 | 2004-12-21 | Adaptive Plasma Tech Corp | Plasma etching method and apparatus for manufacturing a semiconductor device |
US6769437B2 (en) * | 2002-04-08 | 2004-08-03 | Philip Morris Incorporated | Use of oxyhydroxide compounds for reducing carbon monoxide in the mainstream smoke of a cigarette |
US7534469B2 (en) * | 2005-03-31 | 2009-05-19 | Asm Japan K.K. | Semiconductor-processing apparatus provided with self-cleaning device |
US7932181B2 (en) * | 2006-06-20 | 2011-04-26 | Lam Research Corporation | Edge gas injection for critical dimension uniformity improvement |
US7928366B2 (en) * | 2006-10-06 | 2011-04-19 | Lam Research Corporation | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
US20080233016A1 (en) * | 2007-03-21 | 2008-09-25 | Verity Instruments, Inc. | Multichannel array as window protection |
US10541183B2 (en) | 2012-07-19 | 2020-01-21 | Texas Instruments Incorporated | Spectral reflectometry window heater |
FI20155547A (fi) * | 2015-07-10 | 2017-01-11 | Outotec Finland Oy | Transparentti suojaava seinäelin käytettäväksi menetelmässä tai laitteessa fluidien laseravusteista optista säteilyspektroskooppia varten |
US10043641B2 (en) * | 2016-09-22 | 2018-08-07 | Applied Materials, Inc. | Methods and apparatus for processing chamber cleaning end point detection |
CN114062340B (zh) * | 2020-07-30 | 2023-07-25 | 中国科学院大连化学物理研究所 | 一种用于深海环境的紫外光学系统承压装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3135443A1 (de) * | 1981-09-08 | 1983-03-24 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und fotometrische anordnung zur dickenmessung und -steuerung optisch wirksamer schichten |
JPS59181537A (ja) * | 1983-03-31 | 1984-10-16 | Fujitsu Ltd | エツチング方法 |
US4582431A (en) * | 1983-10-11 | 1986-04-15 | Honeywell Inc. | Optical monitor for direct thickness control of transparent films |
JPS61158144A (ja) * | 1984-12-28 | 1986-07-17 | Sony Corp | エツチング終点の検出法 |
JPH0821573B2 (ja) * | 1986-02-03 | 1996-03-04 | 株式会社日立製作所 | プラズマ処理装置 |
US4816294A (en) * | 1987-05-04 | 1989-03-28 | Midwest Research Institute | Method and apparatus for removing and preventing window deposition during photochemical vapor deposition (photo-CVD) processes |
JPS6465436A (en) * | 1987-09-07 | 1989-03-10 | Nippon Atomic Ind Group Co | Spectral cell laser beam device |
US5229081A (en) * | 1988-02-12 | 1993-07-20 | Regal Joint Co., Ltd. | Apparatus for semiconductor process including photo-excitation process |
JPH04119631A (ja) * | 1990-09-10 | 1992-04-21 | Fujitsu Ltd | 半導体装置の製造方法 |
JP3261660B2 (ja) * | 1992-04-21 | 2002-03-04 | アルバック成膜株式会社 | ドライエッチングに於けるエッチングモニター方法 |
JPH06120177A (ja) * | 1992-10-09 | 1994-04-28 | Fujitsu Ltd | ドライエッチング方法とそれに使用する装置 |
EP0756318A1 (en) * | 1995-07-24 | 1997-01-29 | International Business Machines Corporation | Method for real-time in-situ monitoring of a trench formation process |
US5963336A (en) * | 1995-10-10 | 1999-10-05 | American Air Liquide Inc. | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
KR20000034896A (ko) * | 1998-11-27 | 2000-06-26 | 오노 시게오 | 노광 장치용 광학계와 노광 장치 및 그 조립 방법 |
-
1999
- 1999-03-31 US US09/282,519 patent/US6052176A/en not_active Expired - Lifetime
-
2000
- 2000-03-30 KR KR1020067023659A patent/KR100844298B1/ko active IP Right Grant
- 2000-03-30 KR KR1020017012364A patent/KR100707753B1/ko active IP Right Grant
- 2000-03-30 JP JP2000608419A patent/JP4743969B2/ja not_active Expired - Lifetime
- 2000-03-30 EP EP00919921A patent/EP1186004B1/en not_active Expired - Lifetime
- 2000-03-30 DE DE60037805T patent/DE60037805T2/de not_active Expired - Fee Related
- 2000-03-30 WO PCT/US2000/008514 patent/WO2000059009A2/en active Search and Examination
- 2000-06-22 TW TW089105917A patent/TW466546B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100844298B1 (ko) | 2008-07-07 |
TW466546B (en) | 2001-12-01 |
KR20010110709A (ko) | 2001-12-13 |
DE60037805D1 (de) | 2008-03-06 |
DE60037805T2 (de) | 2009-01-02 |
KR100707753B1 (ko) | 2007-04-17 |
EP1186004A2 (en) | 2002-03-13 |
US6052176A (en) | 2000-04-18 |
JP2002540625A (ja) | 2002-11-26 |
KR20060118632A (ko) | 2006-11-23 |
JP4743969B2 (ja) | 2011-08-10 |
WO2000059009A3 (en) | 2001-03-01 |
WO2000059009A2 (en) | 2000-10-05 |
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