EP1081387B1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP1081387B1
EP1081387B1 EP00117868A EP00117868A EP1081387B1 EP 1081387 B1 EP1081387 B1 EP 1081387B1 EP 00117868 A EP00117868 A EP 00117868A EP 00117868 A EP00117868 A EP 00117868A EP 1081387 B1 EP1081387 B1 EP 1081387B1
Authority
EP
European Patent Office
Prior art keywords
pump
gas
parallel
vacuum
units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00117868A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1081387A2 (de
EP1081387A3 (de
Inventor
Armin Conrad
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1081387A2 publication Critical patent/EP1081387A2/de
Publication of EP1081387A3 publication Critical patent/EP1081387A3/de
Application granted granted Critical
Publication of EP1081387B1 publication Critical patent/EP1081387B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
  • At least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum.
  • Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint.
  • Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
  • Turbomolecular pumps are particularly suitable for generating high and ultra-high vacuum for use in wide areas of technology.
  • their field of use is limited to higher pressures because they are fully effective only at low pressures to about 10 -3 mbar due to their operation.
  • the D1 ( DE-A-198 48 406 ) teaches a favorable design for a parallel-working Gaedepumpe.
  • the rotor is constructed from a cylinder, on which a plurality of radially or axially protruding ribs are arranged, which circulate in a channel which has a vapor barrier.
  • the D2 ( US-A-5,238,362 ) deals with a built-up of turbomolecular pumping stage and side channel pumping vacuum pump. It is taught to arrange the side channel pumping stage in a self-contained housing, which is then installed in the housing of the vacuum pump.
  • turbomolecular pumping stage or another molecular pumping stage can not be completed without vacuum technology.
  • the compression of a turbomolecular pumping stage decreases after higher pressure and the compression of a side channel pumping stage decreases with lower pressure.
  • the work areas of both pumps practically do not overlap.
  • the invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to the high and ultra-high vacuum range.
  • the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. Reliable and safe operation is one of the basic requirements.
  • the arrangement according to the invention makes it possible by the parallel connection of Gaedepumpgen to present a compact vacuum pump, which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
  • a compact vacuum pump which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
  • the suction capacity present at the intake opening can be optimally utilized over the entire pressure range, since the pressure compatibility can be designed in such a way that that of the respective preceding pumping unit or unit can be designed level of delivered gas from the next pump unit or stage is taken without loss.
  • the illustrated vacuum pump houses in a housing 1 three pumping units 14, 16, 18.
  • the housing is provided with a gas inlet opening 2 and a gas outlet opening 4.
  • the pump units consist of rotating and fixed gas-conveying components.
  • the rotating components are mounted on a shaft 6 in the axial direction one behind the other.
  • To operate the shaft includes a drive system 8 and bearing elements 10 and 12.
  • the fixed components are connected to the housing 1.
  • the gas inlet opening facing pump unit 14 is formed as a turbomolecular pump.
  • the following in the direction of gas flow pump unit 16 consists of several subunits 16a, 16b and 16c. These each have one or more molecular pumping stages according to the type of Gaede, hereinafter called Gaedeschen on. Within the subunits, the Gaedeschen are connected in parallel. This means that connecting elements 34a for the subunit 16a or 34b for the subunit 16b combine the input sides and on the other side the output sides of the Gaedeschen so that a parallel gas flow in the individual subunits is made possible.
  • the subunit 16a consists of four parallel-pumping Gaedeculturen, the subunit 16b of two parallel pumping Gaedeschen and the subunit 16c of two individual, connected in series Gaedeschen.
  • the subunits are interconnected by connecting members 36a, 36b and 36c so that the output side of one subunit is connected to the input side of the following subunit, respectively.
  • the gas outlet opening facing pump unit is designed as a multi-stage side channel pump.
  • the pumping units 14 and 16 are connected via connecting channels 32 and the pumping units 16 and 18 via connecting channels 38 in series such as the subunits 16a, 16b, 16c. Via a line 42, the pump unit 18 is connected to the gas outlet.
  • the amount of gas sucked in via the gas inlet opening 2 on the high-vacuum side is compressed by the turbomolecular pump unit 14 and carried on via the connecting lines 32 to the second pump unit 16.
  • the first sub-unit 16a consists of four Gaedeschen that take over the further promotion in parallel operation. The fact that several Gaedeschen are connected in parallel, the entire, funded by the turbomolecular pump and compressed gas quantity can be recorded. In the subunit 16a, the gas quantity is further compressed, so that for the second subunit 16b two parallel Gaedeschen are sufficient to further promote the total amount of gas and further compressing until finally a Gaedeici sufficient as a subunit 16c for the promotion. The side channel pump following the last gas stage can now continue to deliver the gas without loss and compress it to high pressure.
  • the combination of the pump units can vary depending on the application and vacuum technical requirements. Thus, for some applications, only a combination of a turbomolecular pump with the pumping unit 16, consisting of Gaesterunn be sufficient. For other applications, a combination of Gaesterunn and side channel pump can meet the requirements.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)
EP00117868A 1999-09-06 2000-08-19 Vakuumpumpe Expired - Lifetime EP1081387B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19942410A DE19942410A1 (de) 1999-09-06 1999-09-06 Vakuumpumpe
DE19942410 1999-09-06

Publications (3)

Publication Number Publication Date
EP1081387A2 EP1081387A2 (de) 2001-03-07
EP1081387A3 EP1081387A3 (de) 2002-04-17
EP1081387B1 true EP1081387B1 (de) 2009-03-18

Family

ID=7920926

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00117868A Expired - Lifetime EP1081387B1 (de) 1999-09-06 2000-08-19 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6464451B1 (ja)
EP (1) EP1081387B1 (ja)
JP (1) JP2001090690A (ja)
AT (1) ATE426098T1 (ja)
DE (2) DE19942410A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
US7171786B2 (en) * 2003-12-01 2007-02-06 Tapco International Corporation Window well
EP2027015A1 (en) * 2006-06-12 2009-02-25 Mag Aerospace Industries, Inc. Regenerative vacuum generator for aircraft and other vehicles
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
WO2009142905A1 (en) 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2354046A1 (de) * 1973-10-29 1975-05-07 Battelle Institut E V Elektrisch angetriebene turbomolekularvakuumpumpe
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
CN1115362A (zh) * 1994-07-06 1996-01-24 储继国 多拖动面分子泵
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
GB2333127A (en) * 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction

Also Published As

Publication number Publication date
US6464451B1 (en) 2002-10-15
DE50015596D1 (de) 2009-04-30
JP2001090690A (ja) 2001-04-03
ATE426098T1 (de) 2009-04-15
EP1081387A2 (de) 2001-03-07
DE19942410A1 (de) 2001-03-08
EP1081387A3 (de) 2002-04-17

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