EP1064682A1 - Dram-zellenanordnung und verfahren zu deren herstellung - Google Patents
Dram-zellenanordnung und verfahren zu deren herstellungInfo
- Publication number
- EP1064682A1 EP1064682A1 EP99916756A EP99916756A EP1064682A1 EP 1064682 A1 EP1064682 A1 EP 1064682A1 EP 99916756 A EP99916756 A EP 99916756A EP 99916756 A EP99916756 A EP 99916756A EP 1064682 A1 EP1064682 A1 EP 1064682A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- word line
- adjacent
- trenches
- sta
- produced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
- H10B12/053—Making the transistor the transistor being at least partially in a trench in the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/906—Dram with capacitor electrodes used for accessing, e.g. bit line is capacitor plate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/907—Folded bit line dram configuration
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19811882A DE19811882A1 (de) | 1998-03-18 | 1998-03-18 | DRAM-Zellenanordnung und Verfahren zu deren Herstellung |
DE19811882 | 1998-03-18 | ||
PCT/DE1999/000510 WO1999048151A1 (de) | 1998-03-18 | 1999-02-25 | Dram-zellenanordnung und verfahren zu deren herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1064682A1 true EP1064682A1 (de) | 2001-01-03 |
Family
ID=7861402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99916756A Ceased EP1064682A1 (de) | 1998-03-18 | 1999-02-25 | Dram-zellenanordnung und verfahren zu deren herstellung |
Country Status (7)
Country | Link |
---|---|
US (1) | US6097049A (ja) |
EP (1) | EP1064682A1 (ja) |
JP (1) | JP2002507841A (ja) |
KR (1) | KR100615735B1 (ja) |
DE (1) | DE19811882A1 (ja) |
TW (1) | TW409409B (ja) |
WO (1) | WO1999048151A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19929211B4 (de) * | 1999-06-25 | 2005-10-06 | Infineon Technologies Ag | Verfahren zur Herstellung eines MOS-Transistors sowie einer DRAM-Zellenanordung |
US6355520B1 (en) * | 1999-08-16 | 2002-03-12 | Infineon Technologies Ag | Method for fabricating 4F2 memory cells with improved gate conductor structure |
KR100652370B1 (ko) * | 2000-06-15 | 2006-11-30 | 삼성전자주식회사 | 플로팅 바디효과를 제거한 반도체 메모리소자 및 그제조방법 |
US6642552B2 (en) * | 2001-02-02 | 2003-11-04 | Grail Semiconductor | Inductive storage capacitor |
DE10125967C1 (de) * | 2001-05-29 | 2002-07-11 | Infineon Technologies Ag | DRAM-Zellanordnung mit vertikalen MOS-Transistoren und Verfahren zu deren Herstellung |
US6699777B2 (en) | 2001-10-04 | 2004-03-02 | Micron Technology, Inc. | Etch stop layer in poly-metal structures |
DE10232002B4 (de) * | 2002-07-15 | 2008-12-11 | Qimonda Ag | Verfahren zur selbstjustierten selektiven Kontaktierung von Gate-Elektroden vertikaler Transistoren eines integrierten Halbleiterspeichers und integrierter Halbleiterspeicher |
US7508075B2 (en) * | 2003-08-01 | 2009-03-24 | Micron Technology, Inc. | Self-aligned poly-metal structures |
CN100539184C (zh) * | 2004-02-16 | 2009-09-09 | 富士电机电子技术株式会社 | 双方向元件及其制造方法、半导体装置 |
US7176662B2 (en) * | 2005-02-23 | 2007-02-13 | Coldwatt, Inc. | Power converter employing a tapped inductor and integrated magnetics and method of operating the same |
KR100697291B1 (ko) * | 2005-09-15 | 2007-03-20 | 삼성전자주식회사 | 비휘발성 반도체 메모리 장치 및 그 제조방법 |
KR100660881B1 (ko) * | 2005-10-12 | 2006-12-26 | 삼성전자주식회사 | 수직 채널 트랜지스터를 구비한 반도체 소자 및 그 제조방법 |
KR100833182B1 (ko) * | 2005-11-17 | 2008-05-28 | 삼성전자주식회사 | 수직채널 트랜지스터를 구비한 반도체 메모리장치 및 그제조 방법 |
KR100881392B1 (ko) | 2006-10-31 | 2009-02-05 | 주식회사 하이닉스반도체 | 수직형 트랜지스터를 구비한 반도체 소자 및 그의 제조방법 |
KR100912965B1 (ko) | 2007-12-24 | 2009-08-20 | 주식회사 하이닉스반도체 | 수직 채널 트랜지스터를 구비한 반도체 소자의 제조 방법 |
CN102623049B (zh) * | 2011-01-27 | 2015-03-11 | 北京兆易创新科技股份有限公司 | 一种非易失性存储单元及其数据编程、读取、擦除方法 |
TWI418008B (zh) * | 2011-08-01 | 2013-12-01 | Winbond Electronics Corp | 半導體元件及其製造方法 |
CN113451269B (zh) * | 2020-03-25 | 2022-07-22 | 长鑫存储技术有限公司 | 字线结构和半导体存储器 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0793365B2 (ja) * | 1984-09-11 | 1995-10-09 | 株式会社東芝 | 半導体記憶装置およびその製造方法 |
US4737829A (en) * | 1985-03-28 | 1988-04-12 | Nec Corporation | Dynamic random access memory device having a plurality of one-transistor type memory cells |
DE3780895T2 (de) * | 1986-09-24 | 1993-03-11 | Nec Corp | Komplementaerer feldeffekt-transistor mit isoliertem gate. |
US4949138A (en) * | 1987-10-27 | 1990-08-14 | Texas Instruments Incorporated | Semiconductor integrated circuit device |
JPH03131064A (ja) * | 1989-10-17 | 1991-06-04 | Fujitsu Ltd | 半導体装置 |
JP2932635B2 (ja) * | 1990-08-11 | 1999-08-09 | 日本電気株式会社 | 半導体記憶装置 |
DE19519160C1 (de) * | 1995-05-24 | 1996-09-12 | Siemens Ag | DRAM-Zellenanordnung und Verfahren zu deren Herstellung |
DE19620625C1 (de) * | 1996-05-22 | 1997-10-23 | Siemens Ag | DRAM-Zellenanordnung und Verfahren zu deren Herstellung |
DE19727436C1 (de) * | 1997-06-27 | 1998-10-01 | Siemens Ag | DRAM-Zellenanordnung mit dynamischen selbstverstärkenden Speicherzellen und Verfahren zu deren Herstellung |
EP0917203A3 (de) * | 1997-11-14 | 2003-02-05 | Infineon Technologies AG | Gain Cell DRAM Struktur und Verfahren zu deren Herstellung |
-
1998
- 1998-03-18 DE DE19811882A patent/DE19811882A1/de not_active Ceased
-
1999
- 1999-02-25 JP JP2000537263A patent/JP2002507841A/ja active Pending
- 1999-02-25 KR KR1020007010308A patent/KR100615735B1/ko not_active IP Right Cessation
- 1999-02-25 EP EP99916756A patent/EP1064682A1/de not_active Ceased
- 1999-02-25 WO PCT/DE1999/000510 patent/WO1999048151A1/de active IP Right Grant
- 1999-03-17 TW TW088104172A patent/TW409409B/zh not_active IP Right Cessation
- 1999-03-18 US US09/272,077 patent/US6097049A/en not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
See references of WO9948151A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE19811882A1 (de) | 1999-09-23 |
JP2002507841A (ja) | 2002-03-12 |
TW409409B (en) | 2000-10-21 |
WO1999048151A1 (de) | 1999-09-23 |
US6097049A (en) | 2000-08-01 |
KR20010041982A (ko) | 2001-05-25 |
KR100615735B1 (ko) | 2006-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20000908 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IE IT |
|
17Q | First examination report despatched |
Effective date: 20080327 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 20090223 |