EP1031533B1 - Système de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur - Google Patents
Système de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur Download PDFInfo
- Publication number
- EP1031533B1 EP1031533B1 EP19990403239 EP99403239A EP1031533B1 EP 1031533 B1 EP1031533 B1 EP 1031533B1 EP 19990403239 EP19990403239 EP 19990403239 EP 99403239 A EP99403239 A EP 99403239A EP 1031533 B1 EP1031533 B1 EP 1031533B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- liquid
- pressure
- delivery system
- delivery
- distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
- E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
- E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
- E03C1/26—Object-catching inserts or similar devices for waste pipes or outlets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
- B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
- B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/78—Arrangements of storage tanks, reservoirs or pipe-lines
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
- E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
- E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
- E03C1/14—Wash-basins connected to the waste-pipe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0396—Involving pressure control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3124—Plural units
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3127—With gas maintenance or application
Definitions
- the present invention relates to a system for liquid distribution. It applies in particular to the distribution of ultra-pure chemicals, in particular for the microelectronics industry.
- the pumped distribution generates bound particles to variations in pump pressure, and the pumps pose reliability issues.
- tanks are at least 200 l. This leads to dimensions large cabinets, and the tanks must be able withstand the distribution pressure, of the order of 4 bars, or the vacuum.
- the materials used include an inner shell in polyethylene (PE) plastic, perfluoroalkoxy (PFA) or polyvinylidene fluororide (PVDF), and an external reinforcement in fiberglass or stainless steel.
- PE polyethylene
- PFA perfluoroalkoxy
- PVDF polyvinylidene fluororide
- This design of the tanks can cause ionic contamination if the manufacturing is not perfectly under control, and security issues related to pressurization or vacuum for large volumes tanks.
- the object of the invention is to provide a system for space-saving distribution, relatively easy to manufacture, minimizing the risk of contamination of the liquid and optimizing safety.
- the invention also relates to the use of such a distribution system for the distribution of a ultra-pure liquid, in particular hydrogen peroxide, ammonia or hydrofluoric acid.
- the distribution system shown in Figure 1 is intended to supply an ultra-pure liquid to a network user 100.
- the system consists of an upstream part supply 1 and a downstream distribution part 2.
- a sampling can 10 used to carry out analyzes of the conveyed liquid.
- Line 14 is equipped with two filters 15A, 15B mounted in parallel, then a sampling container and 16, and it ends up at the user network 100.
- Line 17 stuck on line 14 downstream filters 15A, 15B allows the recycling of liquid to the inlet of the tank 11, and another pipe 18 makes it possible to recycle excess liquid from user network 100 to the same location.
- the installation also includes a number of known measurement and control devices per se and which have not been 'represented for the sake of clarity drawing.
- the barrels 3A and 3B can have a volume of 100 to 20,000 liters, the tank 11, made of PE, PFA or PVDF slightly reinforced with fibers, a volume of 200 l to 5 m 3 , and the containers 12A and 12B have a much lower volume than the previous one, typically from 1 to 50 liters.
- the filter 7 is a microfiltration member with membrane up to 0.2 ⁇ m
- filter 8 provides filtration up to 0.1 ⁇ m
- filters 15A and 15B filtration up to 0.05 ⁇ m.
- each container 12A, 12B consists of a section of tube 23 made of PE, PFA or PVDF unreinforced, the thickness of which is adapted to withstand distribution pressure.
- This tube is arranged vertically, its upper end is closed by a plug 24 connected to the associated nitrogen source 21A or 21B, and its lower end is closed by a second plug 25 to which is connected a connecting tee 26.
- the two horizontal branches of this tee are connected respectively, upstream to a pipe 27 itself connected to the tube plunger 13, and downstream to a pipe 28 itself connected to line 14.
- the size of the distribution part 2 is particularly reduced.
- the gaseous sky of barrels 3A and 3B is maintained at slight overpressure, at a pressure less than 100 mbar by the device 4.
- the pumped liquid by the pump 5 passes through the filters 7 and 8, and part of the liquid is eventually recycled via line 9.
- the non-recycled liquid reaches the storage tank 11, via a second dip tube 29 which supplies it at source.
- the gaseous sky of this tank is constantly maintained at a predetermined pressure P2, less than 500 mbar by source 20.
- One of the two containers 12A, 12B is maintained at a positive pressure P4 or zero but less than pressure P2, by its source nitrogen 21B, and its outlet valve is closed while its inlet valve is open.
- the other container 12A has its valve inlet valve closed, its outlet valve open, and it is maintained at a pressure P3 greater than P2 and equal to the distribution pressure by its nitrogen source 21A.
- the container 12B is filled while the container 12A is used for distribution.
- the pressures of the two containers are reversed, as well as the state of their inlet valves and outlet, so that container 12A fills while that the container 12B empties into the line of distribution 14.
- the liquid thus distributed continuously undergoes the last filtration step in 15A and / or 15B, then is sent via line 14 to user network 100.
- Ultrapure liquid can optionally be recycled in the tank 11, from the line 14 via the branch 17 and / or from network 100 via line 18.
- a third dispensing container similar to containers 12A, 12B and mounted in parallel with them, as a container for help.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Pipeline Systems (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9902467 | 1999-02-26 | ||
FR9902467A FR2790253B1 (fr) | 1999-02-26 | 1999-02-26 | Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1031533A1 EP1031533A1 (fr) | 2000-08-30 |
EP1031533B1 true EP1031533B1 (fr) | 2003-10-15 |
Family
ID=9542619
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19990403239 Expired - Lifetime EP1031533B1 (fr) | 1999-02-26 | 1999-12-21 | Système de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur |
Country Status (8)
Country | Link |
---|---|
US (1) | US6267132B1 (zh) |
EP (1) | EP1031533B1 (zh) |
JP (1) | JP2000249299A (zh) |
KR (1) | KR100668392B1 (zh) |
DE (1) | DE69912089T2 (zh) |
FR (1) | FR2790253B1 (zh) |
SG (1) | SG76001A1 (zh) |
TW (1) | TW418299B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100668392B1 (ko) * | 1999-02-26 | 2007-01-16 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 액체 이송 시스템 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6299753B1 (en) * | 1999-09-01 | 2001-10-09 | Applied Materials, Inc. | Double pressure vessel chemical dispenser unit |
US6953047B2 (en) | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
US20030185690A1 (en) * | 2002-03-28 | 2003-10-02 | Mindi Xu | Systems and methods for transferring and delivering a liquid chemical from a source to an end use station |
US6648034B1 (en) * | 2002-05-23 | 2003-11-18 | Air Products And Chemicals, Inc. | Purgeable manifold for low vapor pressure chemicals containers |
US7172096B2 (en) * | 2004-11-15 | 2007-02-06 | Advanced Technology Materials, Inc. | Liquid dispensing system |
FR2880011B1 (fr) * | 2004-12-23 | 2007-03-30 | Air Liquide Electronics Sys | Systeme de distribution de liqudes chimiques |
EP3006102A1 (en) | 2005-04-25 | 2016-04-13 | Advanced Technology Materials, Inc. | Liner-based liquid storage and dispensing systems with empty detection capability |
WO2006133026A2 (en) | 2005-06-06 | 2006-12-14 | Advanced Technology Materials, Inc. | Fluid storage and dispensing systems and processes |
US20070215639A1 (en) * | 2006-02-15 | 2007-09-20 | Roberts Benjamin R | Method and Apparatus for Dispensing Liquid with Precise Control |
JP4697882B2 (ja) * | 2006-05-19 | 2011-06-08 | 東京エレクトロン株式会社 | 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム |
US20090107562A1 (en) * | 2007-10-29 | 2009-04-30 | Ruibo Wang | Pre-pressurized self-balanced negative-pressure-free water-supply apparatus |
EP2304286B1 (de) * | 2008-06-25 | 2013-01-23 | Basf Se | Verfahren zum sicheren vermeiden von rückströmung bei der förderung einer flüssigkeit |
CN104627536A (zh) | 2009-07-09 | 2015-05-20 | 先进技术材料股份有限公司 | 基于衬里的存储系统 |
CN102791383B (zh) | 2010-01-06 | 2017-11-14 | 恩特格里斯公司 | 具有除气和感测能力的液体分配系统 |
WO2012071370A2 (en) | 2010-11-23 | 2012-05-31 | Advanced Technology Materials, Inc. | Liner-based dispenser |
FR2969994B1 (fr) * | 2011-01-05 | 2013-02-08 | Hypred | Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement |
CN103648920B (zh) | 2011-03-01 | 2016-10-05 | 高级技术材料公司 | 嵌套的吹塑内衬和外包装及其制造方法 |
CN102563350B (zh) * | 2012-03-07 | 2013-11-27 | 北京航空航天大学 | 大尺寸双热沉闭式液氮输送系统及其工作方法 |
US9605346B2 (en) * | 2014-03-28 | 2017-03-28 | Lam Research Corporation | Systems and methods for pressure-based liquid flow control |
CN104373817A (zh) * | 2014-11-05 | 2015-02-25 | 东晶锐康晶体(成都)有限公司 | 一种ipa供应和回收装置 |
US10363543B2 (en) * | 2016-04-19 | 2019-07-30 | General Electric Company | Gas driven fluid transport |
US11198604B2 (en) | 2018-06-29 | 2021-12-14 | Applied Materials, Inc. | Liquid lithium supply and regulation |
CN114394570B (zh) * | 2022-02-14 | 2023-05-26 | 连云港石化有限公司 | 一种不易挥发化工液体输送系统及自动控制方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5148945B1 (en) | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
US5417346A (en) | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
US5556002A (en) * | 1995-02-03 | 1996-09-17 | Abc Techcorp | Measured liquid dispensing system |
JP3533512B2 (ja) * | 1995-04-26 | 2004-05-31 | 株式会社荏原製作所 | 液化ガス供給システム |
US5772447A (en) | 1996-02-26 | 1998-06-30 | Koontat Development Co. Ltd. | Pivoting electrical plug |
US5832948A (en) * | 1996-12-20 | 1998-11-10 | Chemand Corp. | Liquid transfer system |
JP3546121B2 (ja) * | 1997-02-25 | 2004-07-21 | 三菱重工業株式会社 | 管路内流体圧制御装置 |
FR2790253B1 (fr) * | 1999-02-26 | 2001-04-20 | Air Liquide Electronics Sys | Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur |
-
1999
- 1999-02-26 FR FR9902467A patent/FR2790253B1/fr not_active Expired - Lifetime
- 1999-12-21 DE DE1999612089 patent/DE69912089T2/de not_active Expired - Fee Related
- 1999-12-21 EP EP19990403239 patent/EP1031533B1/fr not_active Expired - Lifetime
-
2000
- 2000-02-03 US US09/497,166 patent/US6267132B1/en not_active Expired - Lifetime
- 2000-02-21 TW TW89102928A patent/TW418299B/zh not_active IP Right Cessation
- 2000-02-21 SG SG200000911A patent/SG76001A1/en unknown
- 2000-02-22 JP JP2000044335A patent/JP2000249299A/ja not_active Ceased
- 2000-02-23 KR KR1020000008720A patent/KR100668392B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100668392B1 (ko) * | 1999-02-26 | 2007-01-16 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 액체 이송 시스템 |
Also Published As
Publication number | Publication date |
---|---|
JP2000249299A (ja) | 2000-09-12 |
TW418299B (en) | 2001-01-11 |
FR2790253B1 (fr) | 2001-04-20 |
SG76001A1 (en) | 2000-10-24 |
FR2790253A1 (fr) | 2000-09-01 |
DE69912089D1 (de) | 2003-11-20 |
KR20000076712A (ko) | 2000-12-26 |
KR100668392B1 (ko) | 2007-01-16 |
EP1031533A1 (fr) | 2000-08-30 |
US6267132B1 (en) | 2001-07-31 |
DE69912089T2 (de) | 2004-07-22 |
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