EP1031533B1 - Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit - Google Patents

Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit Download PDF

Info

Publication number
EP1031533B1
EP1031533B1 EP19990403239 EP99403239A EP1031533B1 EP 1031533 B1 EP1031533 B1 EP 1031533B1 EP 19990403239 EP19990403239 EP 19990403239 EP 99403239 A EP99403239 A EP 99403239A EP 1031533 B1 EP1031533 B1 EP 1031533B1
Authority
EP
European Patent Office
Prior art keywords
liquid
pressure
delivery system
delivery
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19990403239
Other languages
English (en)
French (fr)
Other versions
EP1031533A1 (de
Inventor
Georges Guarneri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Publication of EP1031533A1 publication Critical patent/EP1031533A1/de
Application granted granted Critical
Publication of EP1031533B1 publication Critical patent/EP1031533B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/26—Object-catching inserts or similar devices for waste pipes or outlets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/78—Arrangements of storage tanks, reservoirs or pipe-lines
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/14—Wash-basins connected to the waste-pipe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application

Definitions

  • the present invention relates to a system for liquid distribution. It applies in particular to the distribution of ultra-pure chemicals, in particular for the microelectronics industry.
  • the pumped distribution generates bound particles to variations in pump pressure, and the pumps pose reliability issues.
  • tanks are at least 200 l. This leads to dimensions large cabinets, and the tanks must be able withstand the distribution pressure, of the order of 4 bars, or the vacuum.
  • the materials used include an inner shell in polyethylene (PE) plastic, perfluoroalkoxy (PFA) or polyvinylidene fluororide (PVDF), and an external reinforcement in fiberglass or stainless steel.
  • PE polyethylene
  • PFA perfluoroalkoxy
  • PVDF polyvinylidene fluororide
  • This design of the tanks can cause ionic contamination if the manufacturing is not perfectly under control, and security issues related to pressurization or vacuum for large volumes tanks.
  • the object of the invention is to provide a system for space-saving distribution, relatively easy to manufacture, minimizing the risk of contamination of the liquid and optimizing safety.
  • the invention also relates to the use of such a distribution system for the distribution of a ultra-pure liquid, in particular hydrogen peroxide, ammonia or hydrofluoric acid.
  • the distribution system shown in Figure 1 is intended to supply an ultra-pure liquid to a network user 100.
  • the system consists of an upstream part supply 1 and a downstream distribution part 2.
  • a sampling can 10 used to carry out analyzes of the conveyed liquid.
  • Line 14 is equipped with two filters 15A, 15B mounted in parallel, then a sampling container and 16, and it ends up at the user network 100.
  • Line 17 stuck on line 14 downstream filters 15A, 15B allows the recycling of liquid to the inlet of the tank 11, and another pipe 18 makes it possible to recycle excess liquid from user network 100 to the same location.
  • the installation also includes a number of known measurement and control devices per se and which have not been 'represented for the sake of clarity drawing.
  • the barrels 3A and 3B can have a volume of 100 to 20,000 liters, the tank 11, made of PE, PFA or PVDF slightly reinforced with fibers, a volume of 200 l to 5 m 3 , and the containers 12A and 12B have a much lower volume than the previous one, typically from 1 to 50 liters.
  • the filter 7 is a microfiltration member with membrane up to 0.2 ⁇ m
  • filter 8 provides filtration up to 0.1 ⁇ m
  • filters 15A and 15B filtration up to 0.05 ⁇ m.
  • each container 12A, 12B consists of a section of tube 23 made of PE, PFA or PVDF unreinforced, the thickness of which is adapted to withstand distribution pressure.
  • This tube is arranged vertically, its upper end is closed by a plug 24 connected to the associated nitrogen source 21A or 21B, and its lower end is closed by a second plug 25 to which is connected a connecting tee 26.
  • the two horizontal branches of this tee are connected respectively, upstream to a pipe 27 itself connected to the tube plunger 13, and downstream to a pipe 28 itself connected to line 14.
  • the size of the distribution part 2 is particularly reduced.
  • the gaseous sky of barrels 3A and 3B is maintained at slight overpressure, at a pressure less than 100 mbar by the device 4.
  • the pumped liquid by the pump 5 passes through the filters 7 and 8, and part of the liquid is eventually recycled via line 9.
  • the non-recycled liquid reaches the storage tank 11, via a second dip tube 29 which supplies it at source.
  • the gaseous sky of this tank is constantly maintained at a predetermined pressure P2, less than 500 mbar by source 20.
  • One of the two containers 12A, 12B is maintained at a positive pressure P4 or zero but less than pressure P2, by its source nitrogen 21B, and its outlet valve is closed while its inlet valve is open.
  • the other container 12A has its valve inlet valve closed, its outlet valve open, and it is maintained at a pressure P3 greater than P2 and equal to the distribution pressure by its nitrogen source 21A.
  • the container 12B is filled while the container 12A is used for distribution.
  • the pressures of the two containers are reversed, as well as the state of their inlet valves and outlet, so that container 12A fills while that the container 12B empties into the line of distribution 14.
  • the liquid thus distributed continuously undergoes the last filtration step in 15A and / or 15B, then is sent via line 14 to user network 100.
  • Ultrapure liquid can optionally be recycled in the tank 11, from the line 14 via the branch 17 and / or from network 100 via line 18.
  • a third dispensing container similar to containers 12A, 12B and mounted in parallel with them, as a container for help.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Pipeline Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)

Claims (10)

  1. Flüssigkeitsabgabevorrichtung, dadurch gekennzeichnet, dass sie Folgendes umfasst:
    einen Versorgungsbehälter (3A, 3B), der eine abzugebende Flüssigkeit enthält, versehen mit Mitteln (4) zum Erhalten eines Gashimmels unter einem Überdruck, der geringer ist als ein erster vorausbestimmter Druck P1;
    einen Lagerzwischenbehälter (11) versehen mit Mitteln (20) zum Erhalten eines Gashimmels unter einem vorausbestimmten Zwischendruck P2 > P1;
    Mittel (5 bis 8) zum Befördern der Flüssigkeit vom Versorgungsbehälter bis zum Zwischenbehälter;
    mindestens zwei Abgabebehälter (12A, 12B), mit einem Volumen, das sehr viel kleiner ist als das des Zwischenbehälters, die parallel stromaufwärts an einen Flüssigkeitsausgang (13) des letzteren und stromabwärts an eine Abgabeleitung (14) der Flüssigkeit an ein Verbrauchernetz (100) angeschlossen sind und
    Steuermittel (21A, 21B), um jeden Abgabebehälter getrennt entweder mit einem Abgabedruck P3 > P2 oder mit einem Fülldruck P4 < P2 zu beaufschlagen.
  2. Flüssigkeitsabgabevorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass sie drei Abgabebehälter umfasst, die parallel installiert sind.
  3. Flüssigkeitsabgabevorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Fördermittel und/oder die Abgabeleitung mit Mitteln zum Filtern der Flüssigkeit (7, 8, 15A, 15B) ausgestattet sind.
  4. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Erhaltungsmittel (4, 20) und Steuermittel (21A, 21B) Inertgasquellen umfassen, insbesondere Stickstoff, die mit Druckregelmitteln ausgestattet sind.
  5. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass sie eine Flüssigkeitsrückführungsleitung (17) von der Abgabeleitung (14) zum Eingang des Lagerbehälters (11) umfasst.
  6. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass sie eine Flüssigkeitsrecyclingleitung (18) vom Verbrauchernetz (100) zum Eingang des Lagerbehälters (11) umfasst.
  7. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass jeder Abgabebehälter (12A, 12B) aus einem Abschnitt senkrechtem Rohr (23) besteht, das an seinem unteren Ende von einem Versorgungs- und Entleerungs-T-Stutzen (26) und an seinem oberen Ende von einem Stopfen (24) verschlossen ist, der mit einem Druckbeaufschlagungsgaseinlass ausgestattet ist.
  8. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass der Druck P1 gleich ca. 100 mbar ist und/oder dass der Druck P2 zwischen ca. 100 und 500 mbar und/oder der Druck P3 zwischen ca. 500 mbar und 6 bar liegt.
  9. Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die Volumina des Lagerbehälters (11) und jedes Abgabebehälters (12A, 12B) jeweils zwischen 200 l und 5 m3 und zwischen 1 und 50 l liegen.
  10. Verwendung einer Flüssigkeitsabgabevorrichtung nach einem der Ansprüche 1 bis 9 zum Abgeben einer hochreinen Flüssigkeit, insbesondere Wasserstoff-, Ammoniak- oder Flusssäureperoxid.
EP19990403239 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit Expired - Lifetime EP1031533B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9902467 1999-02-26
FR9902467A FR2790253B1 (fr) 1999-02-26 1999-02-26 Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur

Publications (2)

Publication Number Publication Date
EP1031533A1 EP1031533A1 (de) 2000-08-30
EP1031533B1 true EP1031533B1 (de) 2003-10-15

Family

ID=9542619

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19990403239 Expired - Lifetime EP1031533B1 (de) 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit

Country Status (8)

Country Link
US (1) US6267132B1 (de)
EP (1) EP1031533B1 (de)
JP (1) JP2000249299A (de)
KR (1) KR100668392B1 (de)
DE (1) DE69912089T2 (de)
FR (1) FR2790253B1 (de)
SG (1) SG76001A1 (de)
TW (1) TW418299B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100668392B1 (ko) * 1999-02-26 2007-01-16 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 액체 이송 시스템

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6299753B1 (en) * 1999-09-01 2001-10-09 Applied Materials, Inc. Double pressure vessel chemical dispenser unit
US6953047B2 (en) * 2002-01-14 2005-10-11 Air Products And Chemicals, Inc. Cabinet for chemical delivery with solvent purging
US20030185690A1 (en) * 2002-03-28 2003-10-02 Mindi Xu Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6648034B1 (en) * 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
FR2880011B1 (fr) * 2004-12-23 2007-03-30 Air Liquide Electronics Sys Systeme de distribution de liqudes chimiques
CN102423665B (zh) 2005-04-25 2015-04-15 高级技术材料公司 具有空检测能力的基于衬里的液体储存和分配系统
EP2388233B1 (de) * 2005-06-06 2017-02-08 Advanced Technology Materials, Inc. Fluidspeicher- und Ausgabesysteme und Verfahren
US20070215639A1 (en) * 2006-02-15 2007-09-20 Roberts Benjamin R Method and Apparatus for Dispensing Liquid with Precise Control
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
US20090107562A1 (en) * 2007-10-29 2009-04-30 Ruibo Wang Pre-pressurized self-balanced negative-pressure-free water-supply apparatus
RU2497035C2 (ru) * 2008-06-25 2013-10-27 Басф Се Способ надежного предотвращения обратного потока при перекачивании жидкости
KR101103992B1 (ko) 2009-07-09 2012-01-06 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 라이너 베이스의 저장 시스템, 라이너 및 반도체 공정에 고순도 재료를 공급하는 방법
CN102791383B (zh) 2010-01-06 2017-11-14 恩特格里斯公司 具有除气和感测能力的液体分配系统
US9637300B2 (en) 2010-11-23 2017-05-02 Entegris, Inc. Liner-based dispenser
FR2969994B1 (fr) * 2011-01-05 2013-02-08 Hypred Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement
EP2681124A4 (de) 2011-03-01 2015-05-27 Advanced Tech Materials Verschachtelte blasgeformte innere auskleidung und umverpackung sowie herstellungsverfahren dafür
CN102563350B (zh) * 2012-03-07 2013-11-27 北京航空航天大学 大尺寸双热沉闭式液氮输送系统及其工作方法
US9605346B2 (en) * 2014-03-28 2017-03-28 Lam Research Corporation Systems and methods for pressure-based liquid flow control
CN104373817A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种ipa供应和回收装置
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
WO2020005657A1 (en) 2018-06-29 2020-01-02 Applied Materials, Inc. Liquid lithium supply and regulation
CN114394570B (zh) * 2022-02-14 2023-05-26 连云港石化有限公司 一种不易挥发化工液体输送系统及自动控制方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148945B1 (en) 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5556002A (en) * 1995-02-03 1996-09-17 Abc Techcorp Measured liquid dispensing system
JP3533512B2 (ja) * 1995-04-26 2004-05-31 株式会社荏原製作所 液化ガス供給システム
US5772447A (en) 1996-02-26 1998-06-30 Koontat Development Co. Ltd. Pivoting electrical plug
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system
JP3546121B2 (ja) * 1997-02-25 2004-07-21 三菱重工業株式会社 管路内流体圧制御装置
FR2790253B1 (fr) * 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100668392B1 (ko) * 1999-02-26 2007-01-16 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 액체 이송 시스템

Also Published As

Publication number Publication date
EP1031533A1 (de) 2000-08-30
DE69912089T2 (de) 2004-07-22
US6267132B1 (en) 2001-07-31
TW418299B (en) 2001-01-11
KR100668392B1 (ko) 2007-01-16
FR2790253B1 (fr) 2001-04-20
SG76001A1 (en) 2000-10-24
JP2000249299A (ja) 2000-09-12
FR2790253A1 (fr) 2000-09-01
DE69912089D1 (de) 2003-11-20
KR20000076712A (ko) 2000-12-26

Similar Documents

Publication Publication Date Title
EP1031533B1 (de) Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit
US20180237285A1 (en) Liquid dispensing systems with gas removal and sensing capabilities
US20190039875A1 (en) Apparatus and methods for filling and dispensing liquids
KR101357961B1 (ko) 가스 제거를 수행하는 액체 분배 시스템
CN104813095B (zh) 压力调节流体贮存和输送容器的抗尖峰压力管理
US6171367B1 (en) Method and apparatus for delivering and recycling a bubble-free liquid chemical
JP3527470B2 (ja) 化学薬品配給システム、及び液体が入っている貯槽が空状態になったことを検出する方法
TWI635999B (zh) 高黏度液體含納材料的壓力分配裝置及方法
JPH06500621A (ja) 高純度化学薬品を移送及び送出するための改良された装置及び方法
WO2006009717A2 (en) Collapsible fluid container
US7013916B1 (en) Sub-atmospheric gas delivery method and apparatus
CN101039851A (zh) 贮藏和分配来自位于桶内的囊中的酒
EP1180638A2 (de) Verfahren zur Zuführung eines Unterdruck-Gases und dessen Vorrichtung
US4646784A (en) Liquid chemical dispensing apparatus
JP2009177056A (ja) レジスト液回収方法
EP3116792B1 (de) Verfahren und vorrichtung zur verpackung eines getränks
KR100904052B1 (ko) 약액 공급 장치
US20030185690A1 (en) Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6435227B1 (en) Tank filling apparatus and method
FR2723005A1 (fr) Dispositif de distribution de liquide par gravite et dispositif d&#39;enduction photographique
JP5297658B2 (ja) レジスト液供給回収システム
FR2878312A1 (fr) Procede de remplissage d&#39;un recipient de fluide sous pression a entree et sortie separees
TW509970B (en) Liquid transfer system
FR3036697A1 (fr) Appareil pour debiter une boisson hors d&#39;une bouteille a goulot de gros volume, utilisant un gaz sous pression
FR2849011A1 (fr) Procede de remplissage automatique de contenants pour liquides alimentaires et appareil mettant en oeuvre ce procede

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB IE IT

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20010228

AKX Designation fees paid

Free format text: DE GB IE IT

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB IE IT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031015

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: FRENCH

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IE

Payment date: 20031120

Year of fee payment: 5

REF Corresponds to:

Ref document number: 69912089

Country of ref document: DE

Date of ref document: 20031120

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20040117

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20040716

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20081128

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20081128

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20081120

Year of fee payment: 10

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20091221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100701

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091221