EP1031533A1 - Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit - Google Patents

Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit Download PDF

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Publication number
EP1031533A1
EP1031533A1 EP19990403239 EP99403239A EP1031533A1 EP 1031533 A1 EP1031533 A1 EP 1031533A1 EP 19990403239 EP19990403239 EP 19990403239 EP 99403239 A EP99403239 A EP 99403239A EP 1031533 A1 EP1031533 A1 EP 1031533A1
Authority
EP
European Patent Office
Prior art keywords
liquid
pressure
distribution system
distribution
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19990403239
Other languages
English (en)
French (fr)
Other versions
EP1031533B1 (de
Inventor
Georges Guarneri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Publication of EP1031533A1 publication Critical patent/EP1031533A1/de
Application granted granted Critical
Publication of EP1031533B1 publication Critical patent/EP1031533B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/26—Object-catching inserts or similar devices for waste pipes or outlets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/78—Arrangements of storage tanks, reservoirs or pipe-lines
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/14—Wash-basins connected to the waste-pipe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application

Definitions

  • the present invention relates to a system for liquid distribution. It applies in particular to the distribution of ultra-pure chemicals, in particular for the microelectronics industry.
  • the pumped distribution generates bound particles to variations in pump pressure, and the pumps pose reliability issues.
  • tanks are at least 200 l. This leads to dimensions large cabinets, and the tanks must be able withstand the distribution pressure, of the order of 4 bars, or the vacuum.
  • the materials used include an inner shell in polyethylene (PE) type plastic, perfluoroalkoxy (PFA) or polyvinylidene fluororide (PVDF), and an external reinforcement in fiberglass or stainless steel.
  • PE polyethylene
  • PFA perfluoroalkoxy
  • PVDF polyvinylidene fluororide
  • This design of the tanks can cause ionic contamination if the manufacturing is not perfectly under control, and security issues related to pressurization or vacuum for large volumes tanks.
  • the object of the invention is to provide a system for space-saving distribution, relatively easy to manufacture, minimizing the risk of contamination of the liquid and optimizing safety.
  • the invention also relates to the use of such a distribution system for the distribution of a ultra-pure liquid, in particular hydrogen peroxide, ammonia or hydrofluoric acid.
  • the distribution system shown in Figure 1 is intended to supply an ultra-pure liquid to a network user 100.
  • the system consists of an upstream part supply 1 and a downstream distribution part 2.
  • a sampling can 10 used to carry out analyzes of the conveyed liquid.
  • Line 14 is equipped with two filters 15A, 15B mounted in parallel, then a sampling container and 16, and it ends up at the user network 100.
  • a pipe 17 stuck on the pipe 14 downstream filters 15A, 15B allows the recycling of liquid to the inlet of the tank 11, and another pipe 18 makes it possible to recycle excess liquid from user network 100 to the same location.
  • the installation also includes a number of known measurement and control devices per se and which have not been represented for the sake of clarity drawing.
  • the drums 3A and 3B can have a volume of 100 to 20,000 liters, the tank 11, made of PE, PFA or PVDF slightly reinforced with fibers, a volume of 200 l to 5 m 3 , and the containers 12A and 12B have a much lower volume than the previous one, typically from 1 to 50 liters.
  • the filter 7 is a microfiltration member with membrane up to 0.2 ⁇ m
  • filter 8 provides filtration up to 0.1 ⁇ m
  • filters 15A and 15B filtration up to 0.05 ⁇ m.
  • each container 12A, 12B consists of a section of tube 23 made of PE, PFA or PVDF unreinforced, the thickness of which is adapted to withstand distribution pressure.
  • This tube is arranged vertically, its upper end is closed by a plug 24 connected to the associated nitrogen source 21A or 21B, and its lower end is closed by a second plug 25 to which is connected a connecting tee 26.
  • the two horizontal branches of this tee are connected respectively, upstream to a pipe 27 itself connected to the tube plunger 13, and downstream to a pipe 28 itself connected to line 14.
  • the size of the distribution part 2 is particularly reduced.
  • the gaseous sky of barrels 3A and 3B is maintained at slight overpressure, at a pressure less than 100 mb, by device 4.
  • the pumped liquid by the pump 5 passes through the filters 7 and 8, and part of the liquid is eventually recycled via line 9.
  • the non-recycled liquid reaches the storage tank 11, via a second dip tube 29 which supplies it at source.
  • the gaseous sky of this tank is constantly maintained at a predetermined pressure P2, less than 500 mb, by source 20.
  • One of the two containers 12A, 12B is maintained at a positive pressure P4 or zero but less than pressure P2, by its source nitrogen 21B, and its outlet valve is closed while its inlet valve is open.
  • the other container 12A has its valve inlet valve closed, its outlet valve open, and it is maintained at a pressure P3 greater than P2 and equal to the distribution pressure by its nitrogen source 21A.
  • the container 12B is filled while the container 12A is used for distribution.
  • the pressures of the two containers are reversed, as well as the state of their inlet valves and outlet, so that container 12A fills while that the container 12B empties into the line of distribution 14.
  • the liquid thus continuously dispensed undergoes the last filtration step in 15A and / or 15B, then is sent via line 14 to user network 100.
  • Ultrapure liquid can optionally be recycled in the tank 11, from the line 14 via the branch 17 and / or from network 100 via line 18.
  • a third dispensing container similar to containers 12A, 12B and mounted in parallel with them, as a container for relief.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Pipeline Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
EP19990403239 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit Expired - Lifetime EP1031533B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9902467A FR2790253B1 (fr) 1999-02-26 1999-02-26 Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur
FR9902467 1999-02-26

Publications (2)

Publication Number Publication Date
EP1031533A1 true EP1031533A1 (de) 2000-08-30
EP1031533B1 EP1031533B1 (de) 2003-10-15

Family

ID=9542619

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19990403239 Expired - Lifetime EP1031533B1 (de) 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit

Country Status (8)

Country Link
US (1) US6267132B1 (de)
EP (1) EP1031533B1 (de)
JP (1) JP2000249299A (de)
KR (1) KR100668392B1 (de)
DE (1) DE69912089T2 (de)
FR (1) FR2790253B1 (de)
SG (1) SG76001A1 (de)
TW (1) TW418299B (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1081253A2 (de) * 1999-09-01 2001-03-07 Applied Materials, Inc. Chemischer Dosiervorrichtung mit doppeltem Druckbehälter
EP1327603A3 (de) * 2002-01-14 2003-10-15 Air Products And Chemicals, Inc. Gehäuse mit Vorrichtung zum Zapfen von Chemikalien mit Spüleinrichtung
EP1991495A1 (de) * 2006-02-15 2008-11-19 Air Liquide Electronics U.S. LP Verfahren und vorrichtung zur flüssigkeitsausgabe mit präzisionssteuerung
EP2388232A1 (de) * 2005-06-06 2011-11-23 Advanced Technology Materials, Inc. Prozessflüssigkeitspendesystem und -methode
CN102563350A (zh) * 2012-03-07 2012-07-11 北京航空航天大学 大尺寸双热沉闭式液氮输送系统及其工作方法
CN104373817A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种ipa供应和回收装置
CN112368404A (zh) * 2018-06-29 2021-02-12 应用材料公司 液态锂供应和调节

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2790253B1 (fr) * 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur
US20030185690A1 (en) * 2002-03-28 2003-10-02 Mindi Xu Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6648034B1 (en) * 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
FR2880011B1 (fr) * 2004-12-23 2007-03-30 Air Liquide Electronics Sys Systeme de distribution de liqudes chimiques
KR101312237B1 (ko) 2005-04-25 2013-09-26 도쿄엘렉트론가부시키가이샤 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및분배 시스템
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
US20090107562A1 (en) * 2007-10-29 2009-04-30 Ruibo Wang Pre-pressurized self-balanced negative-pressure-free water-supply apparatus
MY183847A (en) * 2008-06-25 2021-03-17 Basf Se Method for safely preventing backflowing in the conveying of a fluid
EP2376346B3 (de) 2009-07-09 2016-01-13 Advanced Technology Materials, Inc. Aufbewahrungssystem mit starrer Innenauskleidung sowie Verfahren zur Ausgabe eines Fluidums
US20120291627A1 (en) 2010-01-06 2012-11-22 Advanced Technology Materials, Inc. Liquid dispensing systems with gas removal and sensing capabilities
WO2012071370A2 (en) 2010-11-23 2012-05-31 Advanced Technology Materials, Inc. Liner-based dispenser
FR2969994B1 (fr) * 2011-01-05 2013-02-08 Hypred Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement
BR112013022316A2 (pt) 2011-03-01 2017-05-30 Advanced Tech Materials sistema baseado em revestimento interno, e, método para prover um sistema baseado em revestimento interno
US9605346B2 (en) * 2014-03-28 2017-03-28 Lam Research Corporation Systems and methods for pressure-based liquid flow control
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
CN114394570B (zh) * 2022-02-14 2023-05-26 连云港石化有限公司 一种不易挥发化工液体输送系统及自动控制方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992005406A1 (en) * 1990-09-17 1992-04-02 Applied Chemical Solutions Improved apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5556002A (en) * 1995-02-03 1996-09-17 Abc Techcorp Measured liquid dispensing system
US5772447A (en) 1996-02-26 1998-06-30 Koontat Development Co. Ltd. Pivoting electrical plug
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system

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JP3533512B2 (ja) * 1995-04-26 2004-05-31 株式会社荏原製作所 液化ガス供給システム
JP3546121B2 (ja) * 1997-02-25 2004-07-21 三菱重工業株式会社 管路内流体圧制御装置
FR2790253B1 (fr) * 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992005406A1 (en) * 1990-09-17 1992-04-02 Applied Chemical Solutions Improved apparatus and method for the transfer and delivery of high purity chemicals
US5330072A (en) 1990-09-17 1994-07-19 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5556002A (en) * 1995-02-03 1996-09-17 Abc Techcorp Measured liquid dispensing system
US5772447A (en) 1996-02-26 1998-06-30 Koontat Development Co. Ltd. Pivoting electrical plug
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1081253A3 (de) * 1999-09-01 2004-04-28 Applied Materials, Inc. Chemischer Dosiervorrichtung mit doppeltem Druckbehälter
EP1081253A2 (de) * 1999-09-01 2001-03-07 Applied Materials, Inc. Chemischer Dosiervorrichtung mit doppeltem Druckbehälter
EP1327603A3 (de) * 2002-01-14 2003-10-15 Air Products And Chemicals, Inc. Gehäuse mit Vorrichtung zum Zapfen von Chemikalien mit Spüleinrichtung
US6953047B2 (en) 2002-01-14 2005-10-11 Air Products And Chemicals, Inc. Cabinet for chemical delivery with solvent purging
US7334595B2 (en) 2002-01-14 2008-02-26 Air Products And Chemicals, Inc. Cabinet for chemical delivery with solvent purging and removal
EP2388232A1 (de) * 2005-06-06 2011-11-23 Advanced Technology Materials, Inc. Prozessflüssigkeitspendesystem und -methode
EP2388231B1 (de) * 2005-06-06 2018-09-26 Entegris, Inc. Fluidspeicher- und Ausgabesysteme und Verfahren
EP1991495A4 (de) * 2006-02-15 2011-11-09 Air Liquide Electronics Us Lp Verfahren und vorrichtung zur flüssigkeitsausgabe mit präzisionssteuerung
EP1991495A1 (de) * 2006-02-15 2008-11-19 Air Liquide Electronics U.S. LP Verfahren und vorrichtung zur flüssigkeitsausgabe mit präzisionssteuerung
CN102563350A (zh) * 2012-03-07 2012-07-11 北京航空航天大学 大尺寸双热沉闭式液氮输送系统及其工作方法
CN102563350B (zh) * 2012-03-07 2013-11-27 北京航空航天大学 大尺寸双热沉闭式液氮输送系统及其工作方法
CN104373817A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种ipa供应和回收装置
CN112368404A (zh) * 2018-06-29 2021-02-12 应用材料公司 液态锂供应和调节
US11603306B2 (en) 2018-06-29 2023-03-14 Applied Materials, Inc. Liquid lithium supply and regulation
US11987489B2 (en) 2018-06-29 2024-05-21 Applied Materials, Inc. Liquid lithium supply and regulation

Also Published As

Publication number Publication date
DE69912089D1 (de) 2003-11-20
US6267132B1 (en) 2001-07-31
KR100668392B1 (ko) 2007-01-16
FR2790253A1 (fr) 2000-09-01
DE69912089T2 (de) 2004-07-22
EP1031533B1 (de) 2003-10-15
KR20000076712A (ko) 2000-12-26
TW418299B (en) 2001-01-11
FR2790253B1 (fr) 2001-04-20
SG76001A1 (en) 2000-10-24
JP2000249299A (ja) 2000-09-12

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