DE69912089D1 - Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit - Google Patents

Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit

Info

Publication number
DE69912089D1
DE69912089D1 DE69912089T DE69912089T DE69912089D1 DE 69912089 D1 DE69912089 D1 DE 69912089D1 DE 69912089 T DE69912089 T DE 69912089T DE 69912089 T DE69912089 T DE 69912089T DE 69912089 D1 DE69912089 D1 DE 69912089D1
Authority
DE
Germany
Prior art keywords
liquid
dispensing
high purity
dispenser
liquid dispenser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69912089T
Other languages
English (en)
Other versions
DE69912089T2 (de
Inventor
Georges Guarneri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Application granted granted Critical
Publication of DE69912089D1 publication Critical patent/DE69912089D1/de
Publication of DE69912089T2 publication Critical patent/DE69912089T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/26—Object-catching inserts or similar devices for waste pipes or outlets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/78—Arrangements of storage tanks, reservoirs or pipe-lines
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
    • E03C1/14—Wash-basins connected to the waste-pipe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Pipeline Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
DE1999612089 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit Expired - Fee Related DE69912089T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9902467 1999-02-26
FR9902467A FR2790253B1 (fr) 1999-02-26 1999-02-26 Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur

Publications (2)

Publication Number Publication Date
DE69912089D1 true DE69912089D1 (de) 2003-11-20
DE69912089T2 DE69912089T2 (de) 2004-07-22

Family

ID=9542619

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999612089 Expired - Fee Related DE69912089T2 (de) 1999-02-26 1999-12-21 Flüssigkeitsabgabevorrichtung und Verwendung zum Abgeben einer hochreinen Flüssigkeit

Country Status (8)

Country Link
US (1) US6267132B1 (de)
EP (1) EP1031533B1 (de)
JP (1) JP2000249299A (de)
KR (1) KR100668392B1 (de)
DE (1) DE69912089T2 (de)
FR (1) FR2790253B1 (de)
SG (1) SG76001A1 (de)
TW (1) TW418299B (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2790253B1 (fr) * 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur
US6299753B1 (en) * 1999-09-01 2001-10-09 Applied Materials, Inc. Double pressure vessel chemical dispenser unit
US6953047B2 (en) * 2002-01-14 2005-10-11 Air Products And Chemicals, Inc. Cabinet for chemical delivery with solvent purging
US20030185690A1 (en) * 2002-03-28 2003-10-02 Mindi Xu Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6648034B1 (en) * 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
FR2880011B1 (fr) * 2004-12-23 2007-03-30 Air Liquide Electronics Sys Systeme de distribution de liqudes chimiques
SG186677A1 (en) 2005-04-25 2013-01-30 Advanced Tech Materials Liner-based liquid storage and dispensing systems with empty detection capability
CN102101634B (zh) 2005-06-06 2014-12-17 高级技术材料公司 流体储存和分配系统以及方法
US20070215639A1 (en) * 2006-02-15 2007-09-20 Roberts Benjamin R Method and Apparatus for Dispensing Liquid with Precise Control
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
US20090107562A1 (en) * 2007-10-29 2009-04-30 Ruibo Wang Pre-pressurized self-balanced negative-pressure-free water-supply apparatus
CN102105727B (zh) * 2008-06-25 2013-08-21 巴斯夫欧洲公司 在液体输送过程中可靠避免回流的方法
EP2376346B3 (de) 2009-07-09 2016-01-13 Advanced Technology Materials, Inc. Aufbewahrungssystem mit starrer Innenauskleidung sowie Verfahren zur Ausgabe eines Fluidums
WO2011085012A2 (en) 2010-01-06 2011-07-14 Advanced Technology Materials, Inc. Liquid dispensing systems with gas removal and sensing capabilities
JP6087833B2 (ja) 2010-11-23 2017-03-01 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド ライナーベースの分注器
FR2969994B1 (fr) * 2011-01-05 2013-02-08 Hypred Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement
WO2012118527A1 (en) 2011-03-01 2012-09-07 Advanced Technology Materials, Inc. Nested blow molded liner and overpack and methods of making same
CN102563350B (zh) * 2012-03-07 2013-11-27 北京航空航天大学 大尺寸双热沉闭式液氮输送系统及其工作方法
US9605346B2 (en) * 2014-03-28 2017-03-28 Lam Research Corporation Systems and methods for pressure-based liquid flow control
CN104373817A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种ipa供应和回收装置
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
KR102529193B1 (ko) 2018-06-29 2023-05-08 어플라이드 머티어리얼스, 인코포레이티드 액체 리튬 공급 및 조절
CN114394570B (zh) * 2022-02-14 2023-05-26 连云港石化有限公司 一种不易挥发化工液体输送系统及自动控制方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5556002A (en) * 1995-02-03 1996-09-17 Abc Techcorp Measured liquid dispensing system
JP3533512B2 (ja) * 1995-04-26 2004-05-31 株式会社荏原製作所 液化ガス供給システム
US5772447A (en) 1996-02-26 1998-06-30 Koontat Development Co. Ltd. Pivoting electrical plug
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system
JP3546121B2 (ja) * 1997-02-25 2004-07-21 三菱重工業株式会社 管路内流体圧制御装置
FR2790253B1 (fr) * 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur

Also Published As

Publication number Publication date
FR2790253B1 (fr) 2001-04-20
JP2000249299A (ja) 2000-09-12
DE69912089T2 (de) 2004-07-22
EP1031533A1 (de) 2000-08-30
KR100668392B1 (ko) 2007-01-16
EP1031533B1 (de) 2003-10-15
KR20000076712A (ko) 2000-12-26
SG76001A1 (en) 2000-10-24
US6267132B1 (en) 2001-07-31
TW418299B (en) 2001-01-11
FR2790253A1 (fr) 2000-09-01

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee