EP1028449B1 - Röntgenröhre - Google Patents

Röntgenröhre Download PDF

Info

Publication number
EP1028449B1
EP1028449B1 EP00200428A EP00200428A EP1028449B1 EP 1028449 B1 EP1028449 B1 EP 1028449B1 EP 00200428 A EP00200428 A EP 00200428A EP 00200428 A EP00200428 A EP 00200428A EP 1028449 B1 EP1028449 B1 EP 1028449B1
Authority
EP
European Patent Office
Prior art keywords
ray tube
electron beam
chamber
anode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00200428A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1028449A1 (de
Inventor
Geoffrey Harding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Intellectual Property and Standards GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Intellectual Property and Standards GmbH, Koninklijke Philips Electronics NV filed Critical Philips Intellectual Property and Standards GmbH
Publication of EP1028449A1 publication Critical patent/EP1028449A1/de
Application granted granted Critical
Publication of EP1028449B1 publication Critical patent/EP1028449B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases

Definitions

  • the invention relates to an X-ray tube according to the preamble of claim 1.
  • a such X-ray tube is from an article by Bearden et al. in Rev. Sci. Instr., Vol.35. Only 12th, p 1681-1683 known.
  • the target consists of mercury, which by means of a Evaporator's heat source is vaporized and through a nozzle as a mercury vapor jet exiting from an electron beam emitted from a cathode so that X-ray brake radiation is generated before the mercury vapor beam is hit again liquefied in a cooler and the heat source is supplied.
  • the Vapor pressure of mercury is very low, so that only little X-radiation is created. Nevertheless, u.a.
  • a more powerful X-ray tube is known for example from DE 195 44 203.
  • the Electrons generated with an electron source (cathode) are directed toward one Anode accelerates and occur there in a conically narrowing passageway at whose output there is a target of heavy metal.
  • the electron beam is characterized by this arrangement with a very small focus and a relatively high Electron density directed at the target, so that X-rays with high Efficiency are generated.
  • the thermal conductivity of the anode decreases with increasing Temperature. This in turn causes the heat conduction from the electron focus in and through the anode material becomes lower and the temperature in the Focus continues to increase, so that the melting temperature of the anode material is still can be reached and exceeded faster. A destruction of the anode surface is then the immediate consequence. For these reasons, it must be ensured that the Focal point temperature in X-ray tubes of this kind does not exceed about 1500 ° C, so that, to a significant degree, the further possible increase in X-ray density must be waived.
  • the focal point temperature can be increased to about 2200 ° C. without damaging the anode.
  • thermal emission Energy is proportional to the fourth power of the anode surface temperature, For example, such rotating anode tubes operate essentially with radiant cooling.
  • the measures mentioned are either relatively expensive or only of limited effect.
  • the invention is therefore based on the object, an X-ray tube ge called to create kind, with which produces a much higher X-ray density can be. This object is achieved by the measures specified in claim 1 solved.
  • the target is separated from the anode and largely thermally isolated, can the electron density at the focal point of the electron beam are substantially increased, so that a much higher X-ray density can be achieved without the anode temperature assumes impermissibly high values.
  • the chamber Since the chamber is closed by the entrance window opposite the cathode compartment is, through which the electron beam passes, can work with an overpressure which is higher by several powers of ten than in the aforementioned X-ray tube with gaseous target. This can - even at higher tube voltages - A significantly higher X-ray intensity can be achieved without There is a risk that the life of the tube is shortened and the high-voltage strength is affected by the gaseous target.
  • a noble gas with a sufficiently high atomic number be present e.g. Xenon, both in the operating state and in the Operation breaks is gaseous.
  • Claim 2 in contrast, describes the use of a Heavy metal, the solid or in the operating pauses (i.e., at about room temperature) or may be liquid and in the operating condition (i.e., at comparatively high temperatures) is in a vaporous state.
  • An advantageous embodiment is specified in claim 3.
  • the entrance window according to claim 4 and in particular its dimensioning according to Claim 5 has the advantage that on the one hand, the passing electrons energy loss suffer from only about five percent, and that, on the other hand, the window pressure differences can withstand up to 100 bar.
  • a coating of the entrance window according to claim 6 or 7 has the advantage that it also in case of an unintentional increase of the operating pressure within the Chamber is not attacked by the high-temperature plasma and clouded.
  • An X-ray tube 1 according to FIG. 1 has a cathode 2 and an anode 3.
  • the Cathode essentially comprises Katodenkopf 20 with a filament 21 ( Figure 2), by a power supply device (not shown) with a corresponding Heating current is applied.
  • the cathode 3 opposite anode 3 is substantially semi-circular, so that between the cathode 2 and the anode 3 is a radial electric field is generated.
  • a channel 4 extends with an entrance opening 41 for the electrons, which is opposite to the cathode 2.
  • the channel 4 is with its outlet opening 42 on a Diamond window 7 directed a chamber 6 containing the target.
  • the inlet opening 41 of the channel 4 is larger than the outlet opening 42.
  • the channel narrows in the direction of the outlet opening (conical path) and is preferably arranged and formed such that the electrons entering the channel below an angle of no more than 1 ° to a surface of the channel. In this case the electrons are reflected elastically in the direction of the outlet opening 42, without that X-radiation is already generated by this impact and significant energy losses occur. This also contributes to the efficiency of the X-ray tube increase, as well as those electrons, one tangential to the filament of the cathode Have speed component, are scattered into the focal point 51.
  • the cathode 2 In the operating state, the cathode 2 emits in a known manner electrons, which in the radial electric field of the anode can be accelerated in the direction of this and through enter the inlet opening 41 in the channel 4.
  • Channel 4 acts as a collimator and concentrates the electrons in the form of an electron beam 5 into a focal point 51.
  • This focus is within the chamber 6, so that the target material located there (For example, mercury) evaporates and the pressure in the chamber at the Operating temperature of the X-ray tube substantially that in a high-pressure gas discharge lamp (about 50 bar) corresponds.
  • the path length of the electrons is in a mercury vapor at a pressure of 50 bar several millimeters.
  • a line-like arises directly behind the diamond window Focal point with a length of about 5 mm in the propagation direction of the electrons and a width of about 2 mm perpendicular thereto
  • the operating pressure within the chamber 6 should be optimized taking into account the following marginal values: if the pressure is too low, the electrons diffuse too far out of the focus area, so that the focal point becomes relatively large. On the other hand, if the pressure is too high, the inside of the diamond window is too close to the high-temperature plasma to possibly be attacked by it and undergo conversion to carbon. The operating pressure should therefore be between these two values.
  • the diamond window may also be coated with one or more thin metal layers of, for example, titanium and / or platinum to provide protection from the plasma in this manner.
  • Figure 2 shows a plan view of the cathode 2 according to arrow "A” in Figure 1 and leaves the actual filament 21 recognize.
  • Figure 3 is finally a plan view of the Anode 3 according to arrow "B" shown in the center of the inlet opening 41 of the channel 4th lies.
  • a substantially higher X-ray density can be achieved be achieved without the anode is heated to impermissibly high levels.
  • the chamber 6 resulting heat is removed only by radiation cooling.

Landscapes

  • X-Ray Techniques (AREA)
EP00200428A 1999-02-12 2000-02-03 Röntgenröhre Expired - Lifetime EP1028449B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19905802A DE19905802A1 (de) 1999-02-12 1999-02-12 Röntgenröhre
DE19905802 1999-02-12

Publications (2)

Publication Number Publication Date
EP1028449A1 EP1028449A1 (de) 2000-08-16
EP1028449B1 true EP1028449B1 (de) 2005-01-26

Family

ID=7897245

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00200428A Expired - Lifetime EP1028449B1 (de) 1999-02-12 2000-02-03 Röntgenröhre

Country Status (4)

Country Link
US (1) US6359968B1 (ja)
EP (1) EP1028449B1 (ja)
JP (1) JP2000243332A (ja)
DE (2) DE19905802A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19934987B4 (de) * 1999-07-26 2004-11-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Röntgenanode und ihre Verwendung
DE10129463A1 (de) * 2001-06-19 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit einem Flüssigmetall-Target
SE530094C2 (sv) * 2006-05-11 2008-02-26 Jettec Ab Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans
KR101866173B1 (ko) * 2012-06-15 2018-06-11 지멘스 악티엔게젤샤프트 Ｘ­선 소스，ｘ­선 소스의 사용 그리고 ｘ­선들을 생성하기 위한 방법
DE102013209447A1 (de) * 2013-05-22 2014-11-27 Siemens Aktiengesellschaft Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1946336A (en) * 1929-03-25 1934-02-06 Raytheon Mfg Co Gaseous discharge device
FR741148A (ja) * 1931-11-05 1933-02-04
DE890246C (de) * 1940-03-03 1953-09-17 Heinrich Dr Med Chantraine Roentgenroehre mit einer aus einer umlaufenden metallischen Fluessigkeit, z. B. Quecksilber, bestehenden Anode
NL171866B (nl) * 1951-08-18 Unilever Nv Werkwijze ter bereiding van een gedeeltelijk gesulfideerde metallische, op een drager aangebrachte katalysator.
US2923852A (en) * 1957-10-21 1960-02-02 Scott Franklin Robert Apparatus for producing high velocity shock waves and gases
US3525228A (en) * 1969-02-04 1970-08-25 Atomic Energy Commission Nonboiling liquid target for a high-energy particle beam
US4538291A (en) * 1981-11-09 1985-08-27 Kabushiki Kaisha Suwa Seikosha X-ray source
JPS5929331A (ja) * 1982-08-12 1984-02-16 Fujitsu Ltd エツクス線発生装置
EP0186491B1 (en) * 1984-12-26 1992-06-17 Kabushiki Kaisha Toshiba Apparatus for producing soft x-rays using a high energy beam
SU1368924A1 (ru) * 1985-06-24 1988-01-23 Воронежский государственный университет им.Ленинского комсомола Способ получени ренгеновского излучени
US4737647A (en) * 1986-03-31 1988-04-12 Siemens Medical Laboratories, Inc. Target assembly for an electron linear accelerator
US4953191A (en) * 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
US5052034A (en) * 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator
DE4017002A1 (de) * 1990-05-26 1991-11-28 Philips Patentverwaltung Strahlenquelle fuer quasimonochromatische roentgenstrahlung
US5243638A (en) * 1992-03-10 1993-09-07 Hui Wang Apparatus and method for generating a plasma x-ray source
US5577091A (en) * 1994-04-01 1996-11-19 University Of Central Florida Water laser plasma x-ray point sources
US5459771A (en) * 1994-04-01 1995-10-17 University Of Central Florida Water laser plasma x-ray point source and apparatus
US5577092A (en) * 1995-01-25 1996-11-19 Kublak; Glenn D. Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
DE19544203A1 (de) * 1995-11-28 1997-06-05 Philips Patentverwaltung Röntgenröhre, insbesondere Mikrofokusröntgenröhre
JPH10221499A (ja) * 1997-02-07 1998-08-21 Hitachi Ltd レーザプラズマｘ線源およびそれを用いた半導体露光装置並びに半導体露光方法
DE19821939A1 (de) * 1998-05-15 1999-11-18 Philips Patentverwaltung Röntgenstrahler mit einem Flüssigmetall-Target

Also Published As

Publication number Publication date
DE19905802A1 (de) 2000-08-17
US6359968B1 (en) 2002-03-19
EP1028449A1 (de) 2000-08-16
DE50009314D1 (de) 2005-03-03
JP2000243332A (ja) 2000-09-08

Similar Documents

Publication Publication Date Title
DE10120336C2 (de) Ionenmobilitätsspektrometer mit nicht-radioaktiver Ionenquelle
DE102013004297B4 (de) Target für Röntgenstrahlgenerator, Verfahren zum Herstellen desselben und Röntgenstrahlgenerator
DE69814574T2 (de) Einrichtung zur Vermeidung einer Überhitzung des Fensters einer Röntgenröhre
DE112009001604B4 (de) Thermionenemitter zur Steuerung des Elektronenstrahlprofils in zwei Dimensionen
DE60007852T2 (de) Verfahren und vorrichtung zum verlängern der lebenszeit einer röntgenanode
DE19934987B4 (de) Röntgenanode und ihre Verwendung
DE19957559A1 (de) Wärmeenergiespeicher- und Übertragungsvorrichtung
WO2009098027A1 (de) Röntgentarget
DE19513291C2 (de) Röntgenröhre
DE10337667B4 (de) Plasma-Strahlungsquelle und Anordnung zur Erzeugung eines Gasvorhangs für Plasma-Strahlungsquellen
DE102006060135A1 (de) Struktur zum Einfangen von gestreuten Elektronen
DE4017002A1 (de) Strahlenquelle fuer quasimonochromatische roentgenstrahlung
DE102013103668B4 (de) Anordnung zum Handhaben eines flüssigen Metalls zur Kühlung von umlaufenden Komponenten einer Strahlungsquelle auf Basis eines strahlungsemittierenden Plasmas
EP1028449B1 (de) Röntgenröhre
WO2005096341A1 (de) Anodenmodul für eine flüssigmetallanoden-röntgenquelle sowie röntgenstrahler mit einem anodenmodul
EP2283508B1 (de) Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung
DE3514700A1 (de) Roentgenroehre
DE102009007871A1 (de) Röntgentarget und Verfahren zur Erzeugung von Röntgenstrahlung
EP2979293A1 (de) Röntgenquelle und bildgebendes system
DE102005018342B4 (de) Vorrichtung und Verfahren zur Erzeugung von Röntgenstrahlung
EP1769520B1 (de) Abschirmung einer röntgenquelle
EP0425718B1 (de) Röntgenstrahlerzeuger
DE102008051519B4 (de) Elektronenstrahler mit Austrittsfenster sowie Röntgenstrahler
DE896533C (de) Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen
DE19513289C2 (de) Röntgenröhre mit einer Verstelleinheit

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB NL

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20010216

AKX Designation fees paid

Free format text: DE FR GB NL

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V.

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V.

17Q First examination report despatched

Effective date: 20031020

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V.

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB NL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050126

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REF Corresponds to:

Ref document number: 50009314

Country of ref document: DE

Date of ref document: 20050303

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20050412

REG Reference to a national code

Ref country code: GB

Ref legal event code: 746

Effective date: 20050427

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20051027

ET Fr: translation filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

REG Reference to a national code

Ref country code: FR

Ref legal event code: TP

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080902

PGRI Patent reinstated in contracting state [announced from national office to epo]

Ref country code: DE

Effective date: 20090202

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20110211

Year of fee payment: 12

Ref country code: FR

Payment date: 20110302

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20110209

Year of fee payment: 12

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20120203

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20121031

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50009314

Country of ref document: DE

Effective date: 20120901

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120229

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120203

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120901