EP1028449B1 - Röntgenröhre - Google Patents
Röntgenröhre Download PDFInfo
- Publication number
- EP1028449B1 EP1028449B1 EP00200428A EP00200428A EP1028449B1 EP 1028449 B1 EP1028449 B1 EP 1028449B1 EP 00200428 A EP00200428 A EP 00200428A EP 00200428 A EP00200428 A EP 00200428A EP 1028449 B1 EP1028449 B1 EP 1028449B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ray tube
- electron beam
- chamber
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/153—Spot position control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
Definitions
- the invention relates to an X-ray tube according to the preamble of claim 1.
- a such X-ray tube is from an article by Bearden et al. in Rev. Sci. Instr., Vol.35. Only 12th, p 1681-1683 known.
- the target consists of mercury, which by means of a Evaporator's heat source is vaporized and through a nozzle as a mercury vapor jet exiting from an electron beam emitted from a cathode so that X-ray brake radiation is generated before the mercury vapor beam is hit again liquefied in a cooler and the heat source is supplied.
- the Vapor pressure of mercury is very low, so that only little X-radiation is created. Nevertheless, u.a.
- a more powerful X-ray tube is known for example from DE 195 44 203.
- the Electrons generated with an electron source (cathode) are directed toward one Anode accelerates and occur there in a conically narrowing passageway at whose output there is a target of heavy metal.
- the electron beam is characterized by this arrangement with a very small focus and a relatively high Electron density directed at the target, so that X-rays with high Efficiency are generated.
- the thermal conductivity of the anode decreases with increasing Temperature. This in turn causes the heat conduction from the electron focus in and through the anode material becomes lower and the temperature in the Focus continues to increase, so that the melting temperature of the anode material is still can be reached and exceeded faster. A destruction of the anode surface is then the immediate consequence. For these reasons, it must be ensured that the Focal point temperature in X-ray tubes of this kind does not exceed about 1500 ° C, so that, to a significant degree, the further possible increase in X-ray density must be waived.
- the focal point temperature can be increased to about 2200 ° C. without damaging the anode.
- thermal emission Energy is proportional to the fourth power of the anode surface temperature, For example, such rotating anode tubes operate essentially with radiant cooling.
- the measures mentioned are either relatively expensive or only of limited effect.
- the invention is therefore based on the object, an X-ray tube ge called to create kind, with which produces a much higher X-ray density can be. This object is achieved by the measures specified in claim 1 solved.
- the target is separated from the anode and largely thermally isolated, can the electron density at the focal point of the electron beam are substantially increased, so that a much higher X-ray density can be achieved without the anode temperature assumes impermissibly high values.
- the chamber Since the chamber is closed by the entrance window opposite the cathode compartment is, through which the electron beam passes, can work with an overpressure which is higher by several powers of ten than in the aforementioned X-ray tube with gaseous target. This can - even at higher tube voltages - A significantly higher X-ray intensity can be achieved without There is a risk that the life of the tube is shortened and the high-voltage strength is affected by the gaseous target.
- a noble gas with a sufficiently high atomic number be present e.g. Xenon, both in the operating state and in the Operation breaks is gaseous.
- Claim 2 in contrast, describes the use of a Heavy metal, the solid or in the operating pauses (i.e., at about room temperature) or may be liquid and in the operating condition (i.e., at comparatively high temperatures) is in a vaporous state.
- An advantageous embodiment is specified in claim 3.
- the entrance window according to claim 4 and in particular its dimensioning according to Claim 5 has the advantage that on the one hand, the passing electrons energy loss suffer from only about five percent, and that, on the other hand, the window pressure differences can withstand up to 100 bar.
- a coating of the entrance window according to claim 6 or 7 has the advantage that it also in case of an unintentional increase of the operating pressure within the Chamber is not attacked by the high-temperature plasma and clouded.
- An X-ray tube 1 according to FIG. 1 has a cathode 2 and an anode 3.
- the Cathode essentially comprises Katodenkopf 20 with a filament 21 ( Figure 2), by a power supply device (not shown) with a corresponding Heating current is applied.
- the cathode 3 opposite anode 3 is substantially semi-circular, so that between the cathode 2 and the anode 3 is a radial electric field is generated.
- a channel 4 extends with an entrance opening 41 for the electrons, which is opposite to the cathode 2.
- the channel 4 is with its outlet opening 42 on a Diamond window 7 directed a chamber 6 containing the target.
- the inlet opening 41 of the channel 4 is larger than the outlet opening 42.
- the channel narrows in the direction of the outlet opening (conical path) and is preferably arranged and formed such that the electrons entering the channel below an angle of no more than 1 ° to a surface of the channel. In this case the electrons are reflected elastically in the direction of the outlet opening 42, without that X-radiation is already generated by this impact and significant energy losses occur. This also contributes to the efficiency of the X-ray tube increase, as well as those electrons, one tangential to the filament of the cathode Have speed component, are scattered into the focal point 51.
- the cathode 2 In the operating state, the cathode 2 emits in a known manner electrons, which in the radial electric field of the anode can be accelerated in the direction of this and through enter the inlet opening 41 in the channel 4.
- Channel 4 acts as a collimator and concentrates the electrons in the form of an electron beam 5 into a focal point 51.
- This focus is within the chamber 6, so that the target material located there (For example, mercury) evaporates and the pressure in the chamber at the Operating temperature of the X-ray tube substantially that in a high-pressure gas discharge lamp (about 50 bar) corresponds.
- the path length of the electrons is in a mercury vapor at a pressure of 50 bar several millimeters.
- a line-like arises directly behind the diamond window Focal point with a length of about 5 mm in the propagation direction of the electrons and a width of about 2 mm perpendicular thereto
- the operating pressure within the chamber 6 should be optimized taking into account the following marginal values: if the pressure is too low, the electrons diffuse too far out of the focus area, so that the focal point becomes relatively large. On the other hand, if the pressure is too high, the inside of the diamond window is too close to the high-temperature plasma to possibly be attacked by it and undergo conversion to carbon. The operating pressure should therefore be between these two values.
- the diamond window may also be coated with one or more thin metal layers of, for example, titanium and / or platinum to provide protection from the plasma in this manner.
- Figure 2 shows a plan view of the cathode 2 according to arrow "A” in Figure 1 and leaves the actual filament 21 recognize.
- Figure 3 is finally a plan view of the Anode 3 according to arrow "B" shown in the center of the inlet opening 41 of the channel 4th lies.
- a substantially higher X-ray density can be achieved be achieved without the anode is heated to impermissibly high levels.
- the chamber 6 resulting heat is removed only by radiation cooling.
Landscapes
- X-Ray Techniques (AREA)
Description
Als zusätzliche Maßnahme kann das Diamantfenster auch mit einer oder mehreren dünnen Metallschichten zum Beispiel aus Titan und/oder Platin beschichtet werden, um auf diese Weise einen Schutz vor dem Plasma zu schaffen.
Claims (8)
- Röntgenröhre mit einer Einrichtung zur Erzeugung und Fokussierung eines Elektronenstrahls auf ein Target, das ein zumindest im Betriebszustand der Röntgenröhre gas- oder dampfförmiges Material enthält
dadurch gekennzeichnet, dass das gas- oder dampfförmiges Material des Targets unter Überdruck in einer für Röntgenstrahlung zumindest teilweise durchlässigen Kammer (6) eingeschlossen ist, die ein Eintrittsfenster (7) für den Eintritt des Elektronenstrahls (5) in die Kammer (6) aufweist. - Röntgenröhre nach Anspruch 1,
dadurch gekennzeichnet, daß das Target ein Schwermetall enthält. - Röntgenröhre nach Anspruch 2,
dadurch gekennzeichnet, daß das Schwermetall Quecksilber ist, dessen Menge so gewählt ist, daß es unter Einwirkung des Elektronenstrahls (5) verdampft und ein Gas mit einem Druck von etwa 50 bar bildet. - Röntgenröhre nach Anspruch 1,
dadurch gekennzeichnet, dass die Kammer (6) aus Quarzglas ist und das Eintrittsfenster (7) für den Elektronenstrahl (5) aus Diamant besteht. - Röntgenröhre nach Anspruch 4,
dadurch gekennzeichnet, daß das Eintrittsfenster (7) eine Dicke von etwa 10 µm und einen Durchmesser von etwa 10 mm aufweist. - Röntgenröhre nach Anspruch 4,
dadurch gekennzeichnet, daß das Eintrittsfenster (7) mit mindestens einer Metallschicht beschichtet ist. - Röntgenröhre nach Anspruch 6,
dadurch gekennzeichnet, daß die Metallschicht Titan oder Platin enthält. - Röntgenröhre nach Anspruch 1,
dadurch gekennzeichnet, daß die Einrichtung zur Erzeugung und Fokussierung eines Elektronenstrahls eine Kathode (2) und eine Anode (3) mit einem konischen Durchtrittskanal (4) aufweist, dessen der Kathode zugewandte Eintrittsöffnung (41) größer ist als seine Austrirrsöffnung (42), und der so angeordner und ausgebildet ist, daß die Elektronen unter einem Winkel von maximal etwa 1 Grad auf eine Oberfläche des Durchtrittskanals (4) treffen.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19905802A DE19905802A1 (de) | 1999-02-12 | 1999-02-12 | Röntgenröhre |
DE19905802 | 1999-02-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1028449A1 EP1028449A1 (de) | 2000-08-16 |
EP1028449B1 true EP1028449B1 (de) | 2005-01-26 |
Family
ID=7897245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00200428A Expired - Lifetime EP1028449B1 (de) | 1999-02-12 | 2000-02-03 | Röntgenröhre |
Country Status (4)
Country | Link |
---|---|
US (1) | US6359968B1 (de) |
EP (1) | EP1028449B1 (de) |
JP (1) | JP2000243332A (de) |
DE (2) | DE19905802A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19934987B4 (de) * | 1999-07-26 | 2004-11-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Röntgenanode und ihre Verwendung |
DE10129463A1 (de) * | 2001-06-19 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Flüssigmetall-Target |
SE530094C2 (sv) * | 2006-05-11 | 2008-02-26 | Jettec Ab | Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans |
RU2015100936A (ru) * | 2012-06-15 | 2016-08-10 | Сименс Акциенгезелльшафт | Источник рентгеновского излучения и его применение и способ генерации рентгеновского излучения |
DE102013209447A1 (de) * | 2013-05-22 | 2014-11-27 | Siemens Aktiengesellschaft | Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1946336A (en) * | 1929-03-25 | 1934-02-06 | Raytheon Mfg Co | Gaseous discharge device |
FR741148A (de) * | 1931-11-05 | 1933-02-04 | ||
DE890246C (de) * | 1940-03-03 | 1953-09-17 | Heinrich Dr Med Chantraine | Roentgenroehre mit einer aus einer umlaufenden metallischen Fluessigkeit, z. B. Quecksilber, bestehenden Anode |
NL171866B (nl) * | 1951-08-18 | Unilever Nv | Werkwijze ter bereiding van een gedeeltelijk gesulfideerde metallische, op een drager aangebrachte katalysator. | |
US2923852A (en) * | 1957-10-21 | 1960-02-02 | Scott Franklin Robert | Apparatus for producing high velocity shock waves and gases |
US3525228A (en) * | 1969-02-04 | 1970-08-25 | Atomic Energy Commission | Nonboiling liquid target for a high-energy particle beam |
US4538291A (en) * | 1981-11-09 | 1985-08-27 | Kabushiki Kaisha Suwa Seikosha | X-ray source |
JPS5929331A (ja) * | 1982-08-12 | 1984-02-16 | Fujitsu Ltd | エツクス線発生装置 |
EP0186491B1 (de) * | 1984-12-26 | 1992-06-17 | Kabushiki Kaisha Toshiba | Vorrichtung zur Erzeugung von Weich-Röntgenstrahlen durch ein Hochenergiebündel |
SU1368924A1 (ru) * | 1985-06-24 | 1988-01-23 | Воронежский государственный университет им.Ленинского комсомола | Способ получени ренгеновского излучени |
US4737647A (en) * | 1986-03-31 | 1988-04-12 | Siemens Medical Laboratories, Inc. | Target assembly for an electron linear accelerator |
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
US5052034A (en) * | 1989-10-30 | 1991-09-24 | Siemens Aktiengesellschaft | X-ray generator |
DE4017002A1 (de) * | 1990-05-26 | 1991-11-28 | Philips Patentverwaltung | Strahlenquelle fuer quasimonochromatische roentgenstrahlung |
US5243638A (en) * | 1992-03-10 | 1993-09-07 | Hui Wang | Apparatus and method for generating a plasma x-ray source |
US5459771A (en) * | 1994-04-01 | 1995-10-17 | University Of Central Florida | Water laser plasma x-ray point source and apparatus |
US5577091A (en) * | 1994-04-01 | 1996-11-19 | University Of Central Florida | Water laser plasma x-ray point sources |
US5577092A (en) * | 1995-01-25 | 1996-11-19 | Kublak; Glenn D. | Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources |
DE19544203A1 (de) * | 1995-11-28 | 1997-06-05 | Philips Patentverwaltung | Röntgenröhre, insbesondere Mikrofokusröntgenröhre |
JPH10221499A (ja) * | 1997-02-07 | 1998-08-21 | Hitachi Ltd | レーザプラズマx線源およびそれを用いた半導体露光装置並びに半導体露光方法 |
DE19821939A1 (de) * | 1998-05-15 | 1999-11-18 | Philips Patentverwaltung | Röntgenstrahler mit einem Flüssigmetall-Target |
-
1999
- 1999-02-12 DE DE19905802A patent/DE19905802A1/de not_active Withdrawn
-
2000
- 2000-02-03 DE DE50009314T patent/DE50009314D1/de not_active Expired - Lifetime
- 2000-02-03 EP EP00200428A patent/EP1028449B1/de not_active Expired - Lifetime
- 2000-02-07 JP JP2000029564A patent/JP2000243332A/ja active Pending
- 2000-02-10 US US09/501,895 patent/US6359968B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6359968B1 (en) | 2002-03-19 |
DE19905802A1 (de) | 2000-08-17 |
EP1028449A1 (de) | 2000-08-16 |
DE50009314D1 (de) | 2005-03-03 |
JP2000243332A (ja) | 2000-09-08 |
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