EP0857876A2 - Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen - Google Patents
Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen Download PDFInfo
- Publication number
- EP0857876A2 EP0857876A2 EP98100358A EP98100358A EP0857876A2 EP 0857876 A2 EP0857876 A2 EP 0857876A2 EP 98100358 A EP98100358 A EP 98100358A EP 98100358 A EP98100358 A EP 98100358A EP 0857876 A2 EP0857876 A2 EP 0857876A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- high vacuum
- vacuum
- connection
- vacuum connection
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/009—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by bleeding, by passing or recycling fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/42—Conditions at the inlet of a pump or machine
Definitions
- the invention relates to a method and a device for regulating the Pumping speed of vacuum pumps according to the preamble of the first claim.
- control valves are used, which between Vacuum pump and vacuum chamber are attached. Because of the required high conductance have a large diameter. This will a complex construction causes high costs and an increase the spatial expansion of the system. They also become special Requirements placed on these valves because they are used in the high vacuum range will.
- the object of the invention is to develop a method and an apparatus for To carry out the procedure to construct, with which the pumping speed of vacuum pumps can be set reproducibly and the individual vacuum process can be adjusted.
- the disadvantages of the conventional methods are to be avoided will.
- a complex construction should be avoided and the danger the condensation and corrosion caused by process gases can be reduced.
- Claims 2, 3 and 5-7 provide further design options of the invention.
- the process in the vacuum chamber can be influenced so that it can run in an optimal manner - as intended. If e.g. through the constant Suction rate of the vacuum pump or the vacuum system too much gas is pumped out, so that the process is no longer in the intended manner can run off, then a part of the pumped out via the connecting line Gases are fed back to the intake flange. As a result, increases the suction pressure and thus becomes according to the characteristic properties the vacuum pump the pumping speed for the process gas to be pumped out degraded.
- the built-in control valve in the connecting line allows control this process precisely.
- Turbomolecular pumps are for use with Vacuum processes are particularly suitable as high vacuum pumps. With them lets the method according to the invention can be carried out advantageously.
- the supply of part of the pumped gas to the high vacuum side has also a positive influence on the composition of the process gas: Since the conductance of the connecting line and control valve for gases with low Molecular weight is higher than for high molecular weight gases, the composition the gases on the intake flange and thus also in the vacuum chamber changed in favor of lighter gases. At the end of the processes in vacuum chambers low molecular weight gases are predominantly involved. Heaviness Gases are rather the waste products Process also the more effective use of the gases required for the process clearly increased.
- FIG 1 shows a schematic representation of a vacuum pump 1, which in this example consists of three stages 2a, 2b and 2c.
- a vacuum pump 1 which in this example consists of three stages 2a, 2b and 2c.
- Backing pump 6 is provided, which to the backing port 5 of the last Stage 2c is appropriate.
- the vacuum chamber 3 At the high vacuum connection 4 of the first stage 2a is the vacuum chamber 3 connected. From any point 7 of the vacuum pump 1 one leads between the high vacuum connection 4 and the fore vacuum connection 5 Connection line 8 to the high vacuum connection 4.
- a control valve 9 is attached.
- the vacuum pump 1 with the three stages 2a, 2b and 2c also by a vacuum system 1 consisting of three different pumps 2a, 2b and 2c replaced will.
- a vacuum system consisting of e.g. a pump with two stages 2a and 2b and from a pump 2c corresponds to the schematic structure in FIG Illustration.
Abstract
Description
Claims (7)
- Verfahren zur Regelung des Saugvermögens einer Vakuumpumpe (1), wobei die Vakuumpumpe aus einer oder mehreren Stufen (2a, 2b, 2c) besteht und einen Hochvakuumanschluß (4) und einen Vorvakuumanschluß (5) aufweist und in welcher ein Gasstrom vom Hochvakuumanschluß zum Vorvakuumanschluß erzeugt wird, dadurch gekennzeichnet, daß an einer Stelle (7) zwischen dem Hochvakuumanschluß (4) und dem Vorvakuumanschluß (5) ein Teil des Gasstromes abgezweigt und dem Hochvakuumanschluß wieder zugeführt wird.
- Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß der Teil des Gasstromes, welcher dem Hochvakuumanschluß wieder zugeführt wird, durch ein Regelventil (9) gesteuert wird.
- Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß anstelle einer Vakuumpumpe, welche aus einer oder mehreren Stufen besteht, ein Vakuumsystem verwendet wird, welches aus einer oder mehreren Pumpen besteht.
- Vorrichtung zur Regelung des Saugvermögens einer Vakuumpumpe (1), welche aus einer oder mehreren Stufen (2a, 2b, 2c) besteht und einen Hochvakuumanschluß (4) und einen Vorvakuumanschluß (5) aufweist und in welcher ein Gasstrom vom Hochvakuumanschluß zum Vorvakuumanschluß erzeugt wird, dadurch gekennzeichnet, daß zur Rückführung eines Teils des Gasstromes von einer Stelle (7) zwischen Hochvakuumanschluß (4) und Vorvakuumanschluß (5) zum Hochvakuumanschluß eine Verbindungsleitung (8) vorhanden ist, welche von dieser Stelle zum Hochvakuumanschluß führt.
- Vorrichtung nach Anspruch 4, dadurch gekennzeichnet, daß zur Steuerung des Teils des Gasstromes, welcher von der Stelle (7) zum Hochvakuumanschluß zurückgeführt wird, die Verbindungsleitung mit einem Regelventil (9) ausgestattet ist.
- Vorrichtung nach einem der Ansprüche 4 oder 5, dadurch gekennzeichnet, daß die Stufe (2a) der Vakuumpumpe, welche den Hochvakuumanschluß trägt, eine Turbomolekularpumpe ist.
- Vorrichtung nach einem der Ansprüche 4 - 6, dadurch gekennzeichnet, daß anstelle einer Vakuumpumpe, welche aus einer oder mehreren Stufen besteht, ein Vakuumsystem verwendet wird, welches aus einer oder mehreren Pumpen besteht.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19704234 | 1997-02-05 | ||
DE19704234A DE19704234B4 (de) | 1997-02-05 | 1997-02-05 | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0857876A2 true EP0857876A2 (de) | 1998-08-12 |
EP0857876A3 EP0857876A3 (de) | 1999-07-07 |
EP0857876B1 EP0857876B1 (de) | 2003-03-19 |
Family
ID=7819318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98100358A Revoked EP0857876B1 (de) | 1997-02-05 | 1998-01-12 | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6030181A (de) |
EP (1) | EP0857876B1 (de) |
JP (1) | JPH10220373A (de) |
AT (1) | ATE235004T1 (de) |
DE (2) | DE19704234B4 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0898083A2 (de) * | 1997-08-15 | 1999-02-24 | The BOC Group plc | Vakuum-Pumpsystem |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19831123A1 (de) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gasballasteinrichtung für mehrstufige Verdrängerpumpen |
JP3038432B2 (ja) * | 1998-07-21 | 2000-05-08 | セイコー精機株式会社 | 真空ポンプ及び真空装置 |
DE19962445A1 (de) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung |
DE10046902B4 (de) * | 2000-09-21 | 2006-04-27 | Nash_Elmo Industries Gmbh | Pumpenanlage und Verfahren zum Pumpen eines Gases |
JP2008008302A (ja) * | 2001-09-06 | 2008-01-17 | Ulvac Japan Ltd | 多段式容積移送型ドライ真空ポンプの省エネ方法 |
DE10159835B4 (de) * | 2001-12-06 | 2012-02-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
US7033142B2 (en) * | 2003-01-24 | 2006-04-25 | Pfeifer Vacuum Gmbh | Vacuum pump system for light gases |
DE10321771C5 (de) * | 2003-05-15 | 2017-01-19 | Continental Teves Ag & Co. Ohg | Verfahren zur Leistungsbegrenzung eines mehrstufigen Kompressor und Kompressor zur Durchführung des Verfahrens |
GB0401396D0 (en) * | 2004-01-22 | 2004-02-25 | Boc Group Plc | Pressure control method |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
CN1993040B (zh) * | 2004-07-13 | 2011-12-28 | 德拉瓦尔控股股份有限公司 | 挤奶系统、真空源和提供真空的方法 |
DE102004059486A1 (de) * | 2004-12-10 | 2006-06-22 | Leybold Vacuum Gmbh | Vakuum-Anlage |
EP1739308B1 (de) * | 2005-06-30 | 2008-06-18 | VARIAN S.p.A. | Vakuumpumpe |
US8573465B2 (en) | 2008-02-14 | 2013-11-05 | Ethicon Endo-Surgery, Inc. | Robotically-controlled surgical end effector system with rotary actuated closure systems |
US9301753B2 (en) | 2010-09-30 | 2016-04-05 | Ethicon Endo-Surgery, Llc | Expandable tissue thickness compensator |
US9211120B2 (en) | 2011-04-29 | 2015-12-15 | Ethicon Endo-Surgery, Inc. | Tissue thickness compensator comprising a plurality of medicaments |
GB2499217A (en) * | 2012-02-08 | 2013-08-14 | Edwards Ltd | Vacuum pump with recirculation valve |
DE202012012359U1 (de) * | 2012-12-22 | 2014-03-24 | Oerlikon Leybold Vacuum Gmbh | Pumpstand zum Pumpen leichter Gase |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
US20150098839A1 (en) * | 2013-10-08 | 2015-04-09 | Ingersoll-Rand Company | Pump Systems and Methods |
JP6935216B2 (ja) * | 2017-03-31 | 2021-09-15 | 株式会社荏原製作所 | ルーツ型真空ポンプ |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT204163B (de) | 1958-02-19 | 1959-07-10 | Enfo Grundlagen Forschungs Ag | Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern |
EP0344345A1 (de) | 1988-06-01 | 1989-12-06 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE69000990T2 (de) | 1989-06-05 | 1993-06-09 | Cit Alcatel | Zweistufige trockenprimaerpumpe. |
DE4410903A1 (de) | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD230614A3 (de) * | 1983-06-22 | 1985-12-04 | Alfred Voelzer | Verfahren zur inbetriebnahme eines mehrstufigen kolbenverdichters ohne waermeuebertrager nach dem letzten verdichtungsabschnitt |
DD236967B1 (de) * | 1985-05-06 | 1989-03-08 | Ardenne Forschungsinst | Verfahren zum zyklischen evakuieren einer vakuumkammer |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
DE4331589C2 (de) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
-
1997
- 1997-02-05 DE DE19704234A patent/DE19704234B4/de not_active Revoked
- 1997-12-19 JP JP9350538A patent/JPH10220373A/ja active Pending
-
1998
- 1998-01-12 AT AT98100358T patent/ATE235004T1/de not_active IP Right Cessation
- 1998-01-12 DE DE59807507T patent/DE59807507D1/de not_active Expired - Lifetime
- 1998-01-12 EP EP98100358A patent/EP0857876B1/de not_active Revoked
- 1998-02-05 US US09/018,888 patent/US6030181A/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT204163B (de) | 1958-02-19 | 1959-07-10 | Enfo Grundlagen Forschungs Ag | Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern |
EP0344345A1 (de) | 1988-06-01 | 1989-12-06 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE69000990T2 (de) | 1989-06-05 | 1993-06-09 | Cit Alcatel | Zweistufige trockenprimaerpumpe. |
DE4410903A1 (de) | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0898083A2 (de) * | 1997-08-15 | 1999-02-24 | The BOC Group plc | Vakuum-Pumpsystem |
EP0898083B1 (de) * | 1997-08-15 | 2003-12-17 | The BOC Group plc | Vakuum-Pumpsystem |
Also Published As
Publication number | Publication date |
---|---|
ATE235004T1 (de) | 2003-04-15 |
EP0857876B1 (de) | 2003-03-19 |
DE19704234A1 (de) | 1998-08-06 |
DE59807507D1 (de) | 2003-04-24 |
DE19704234B4 (de) | 2006-05-11 |
EP0857876A3 (de) | 1999-07-07 |
US6030181A (en) | 2000-02-29 |
JPH10220373A (ja) | 1998-08-18 |
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