EP0857876A3 - Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen - Google Patents
Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen Download PDFInfo
- Publication number
- EP0857876A3 EP0857876A3 EP98100358A EP98100358A EP0857876A3 EP 0857876 A3 EP0857876 A3 EP 0857876A3 EP 98100358 A EP98100358 A EP 98100358A EP 98100358 A EP98100358 A EP 98100358A EP 0857876 A3 EP0857876 A3 EP 0857876A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- capacitiy
- suction
- control
- vacuum pumps
- gas stream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/009—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by bleeding, by passing or recycling fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/42—Conditions at the inlet of a pump or machine
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19704234 | 1997-02-05 | ||
DE19704234A DE19704234B4 (de) | 1997-02-05 | 1997-02-05 | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0857876A2 EP0857876A2 (de) | 1998-08-12 |
EP0857876A3 true EP0857876A3 (de) | 1999-07-07 |
EP0857876B1 EP0857876B1 (de) | 2003-03-19 |
Family
ID=7819318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98100358A Revoked EP0857876B1 (de) | 1997-02-05 | 1998-01-12 | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6030181A (de) |
EP (1) | EP0857876B1 (de) |
JP (1) | JPH10220373A (de) |
AT (1) | ATE235004T1 (de) |
DE (2) | DE19704234B4 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9717400D0 (en) * | 1997-08-15 | 1997-10-22 | Boc Group Plc | Vacuum pumping systems |
DE19831123A1 (de) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gasballasteinrichtung für mehrstufige Verdrängerpumpen |
JP3038432B2 (ja) * | 1998-07-21 | 2000-05-08 | セイコー精機株式会社 | 真空ポンプ及び真空装置 |
DE19962445A1 (de) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung |
DE10046902B4 (de) * | 2000-09-21 | 2006-04-27 | Nash_Elmo Industries Gmbh | Pumpenanlage und Verfahren zum Pumpen eines Gases |
JP2008008302A (ja) * | 2001-09-06 | 2008-01-17 | Ulvac Japan Ltd | 多段式容積移送型ドライ真空ポンプの省エネ方法 |
DE10159835B4 (de) * | 2001-12-06 | 2012-02-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
US7033142B2 (en) * | 2003-01-24 | 2006-04-25 | Pfeifer Vacuum Gmbh | Vacuum pump system for light gases |
DE10321771C5 (de) * | 2003-05-15 | 2017-01-19 | Continental Teves Ag & Co. Ohg | Verfahren zur Leistungsbegrenzung eines mehrstufigen Kompressor und Kompressor zur Durchführung des Verfahrens |
GB0401396D0 (en) * | 2004-01-22 | 2004-02-25 | Boc Group Plc | Pressure control method |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
WO2006006906A1 (en) * | 2004-07-13 | 2006-01-19 | Delaval Holding Ab | Controllable vacuum source |
DE102004059486A1 (de) * | 2004-12-10 | 2006-06-22 | Leybold Vacuum Gmbh | Vakuum-Anlage |
DE602005007593D1 (de) * | 2005-06-30 | 2008-07-31 | Varian Spa | Vakuumpumpe |
US8573465B2 (en) | 2008-02-14 | 2013-11-05 | Ethicon Endo-Surgery, Inc. | Robotically-controlled surgical end effector system with rotary actuated closure systems |
US9204880B2 (en) | 2012-03-28 | 2015-12-08 | Ethicon Endo-Surgery, Inc. | Tissue thickness compensator comprising capsules defining a low pressure environment |
US9241714B2 (en) | 2011-04-29 | 2016-01-26 | Ethicon Endo-Surgery, Inc. | Tissue thickness compensator and method for making the same |
GB2499217A (en) * | 2012-02-08 | 2013-08-14 | Edwards Ltd | Vacuum pump with recirculation valve |
DE202012012359U1 (de) * | 2012-12-22 | 2014-03-24 | Oerlikon Leybold Vacuum Gmbh | Pumpstand zum Pumpen leichter Gase |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
US20150098839A1 (en) * | 2013-10-08 | 2015-04-09 | Ingersoll-Rand Company | Pump Systems and Methods |
JP6935216B2 (ja) * | 2017-03-31 | 2021-09-15 | 株式会社荏原製作所 | ルーツ型真空ポンプ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0344345A1 (de) * | 1988-06-01 | 1989-12-06 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
EP0401741A1 (de) * | 1989-06-05 | 1990-12-12 | Alcatel Cit | Zweistufige Trockenprimärpumpe |
DE4410903A1 (de) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT204163B (de) * | 1958-02-19 | 1959-07-10 | Enfo Grundlagen Forschungs Ag | Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern |
DD230614A3 (de) * | 1983-06-22 | 1985-12-04 | Alfred Voelzer | Verfahren zur inbetriebnahme eines mehrstufigen kolbenverdichters ohne waermeuebertrager nach dem letzten verdichtungsabschnitt |
DD236967B1 (de) * | 1985-05-06 | 1989-03-08 | Ardenne Forschungsinst | Verfahren zum zyklischen evakuieren einer vakuumkammer |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
DE4331589C2 (de) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
-
1997
- 1997-02-05 DE DE19704234A patent/DE19704234B4/de not_active Revoked
- 1997-12-19 JP JP9350538A patent/JPH10220373A/ja active Pending
-
1998
- 1998-01-12 EP EP98100358A patent/EP0857876B1/de not_active Revoked
- 1998-01-12 DE DE59807507T patent/DE59807507D1/de not_active Expired - Lifetime
- 1998-01-12 AT AT98100358T patent/ATE235004T1/de not_active IP Right Cessation
- 1998-02-05 US US09/018,888 patent/US6030181A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0344345A1 (de) * | 1988-06-01 | 1989-12-06 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
EP0401741A1 (de) * | 1989-06-05 | 1990-12-12 | Alcatel Cit | Zweistufige Trockenprimärpumpe |
DE4410903A1 (de) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
Also Published As
Publication number | Publication date |
---|---|
US6030181A (en) | 2000-02-29 |
DE19704234B4 (de) | 2006-05-11 |
JPH10220373A (ja) | 1998-08-18 |
DE19704234A1 (de) | 1998-08-06 |
DE59807507D1 (de) | 2003-04-24 |
ATE235004T1 (de) | 2003-04-15 |
EP0857876B1 (de) | 2003-03-19 |
EP0857876A2 (de) | 1998-08-12 |
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