EP0857876A3 - Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen - Google Patents

Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen Download PDF

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Publication number
EP0857876A3
EP0857876A3 EP98100358A EP98100358A EP0857876A3 EP 0857876 A3 EP0857876 A3 EP 0857876A3 EP 98100358 A EP98100358 A EP 98100358A EP 98100358 A EP98100358 A EP 98100358A EP 0857876 A3 EP0857876 A3 EP 0857876A3
Authority
EP
European Patent Office
Prior art keywords
capacitiy
suction
control
vacuum pumps
gas stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98100358A
Other languages
English (en)
French (fr)
Other versions
EP0857876B1 (de
EP0857876A2 (de
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7819318&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0857876(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0857876A2 publication Critical patent/EP0857876A2/de
Publication of EP0857876A3 publication Critical patent/EP0857876A3/de
Application granted granted Critical
Publication of EP0857876B1 publication Critical patent/EP0857876B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/009—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by bleeding, by passing or recycling fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/42—Conditions at the inlet of a pump or machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

Die Erfindung beschreibt ein Verfahren und eine Vorrichtung, durch welche Prozesse in Vakuumkammern in ihrem Ablauf positiv beeinflußt werden können. Bei einer Va-kuumpumpe (1) bestehend aus einer oder mehreren Stufen (2a, 2b, 2c) kann ein Teil des Gasstromes über eine Verbindungsleitung (8) und ein Regelventil (9) dem Ansaugflansch wieder zugeführt werden. Dadurch erhöht sich der Druck auf der Ansaugseite und das Saugvermögen für das abzupumpende Gas sinkt ab. Eine exakte und direkte Regelung des Saugvermögens der Vakuumpumpe ist somit möglich.
EP98100358A 1997-02-05 1998-01-12 Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen Revoked EP0857876B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19704234 1997-02-05
DE19704234A DE19704234B4 (de) 1997-02-05 1997-02-05 Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen

Publications (3)

Publication Number Publication Date
EP0857876A2 EP0857876A2 (de) 1998-08-12
EP0857876A3 true EP0857876A3 (de) 1999-07-07
EP0857876B1 EP0857876B1 (de) 2003-03-19

Family

ID=7819318

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98100358A Revoked EP0857876B1 (de) 1997-02-05 1998-01-12 Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen

Country Status (5)

Country Link
US (1) US6030181A (de)
EP (1) EP0857876B1 (de)
JP (1) JPH10220373A (de)
AT (1) ATE235004T1 (de)
DE (2) DE19704234B4 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9717400D0 (en) * 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10046902B4 (de) * 2000-09-21 2006-04-27 Nash_Elmo Industries Gmbh Pumpenanlage und Verfahren zum Pumpen eines Gases
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法
DE10159835B4 (de) * 2001-12-06 2012-02-23 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases
DE10321771C5 (de) * 2003-05-15 2017-01-19 Continental Teves Ag & Co. Ohg Verfahren zur Leistungsbegrenzung eines mehrstufigen Kompressor und Kompressor zur Durchführung des Verfahrens
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
WO2006006906A1 (en) * 2004-07-13 2006-01-19 Delaval Holding Ab Controllable vacuum source
DE102004059486A1 (de) * 2004-12-10 2006-06-22 Leybold Vacuum Gmbh Vakuum-Anlage
DE602005007593D1 (de) * 2005-06-30 2008-07-31 Varian Spa Vakuumpumpe
US8573465B2 (en) 2008-02-14 2013-11-05 Ethicon Endo-Surgery, Inc. Robotically-controlled surgical end effector system with rotary actuated closure systems
US9204880B2 (en) 2012-03-28 2015-12-08 Ethicon Endo-Surgery, Inc. Tissue thickness compensator comprising capsules defining a low pressure environment
US9241714B2 (en) 2011-04-29 2016-01-26 Ethicon Endo-Surgery, Inc. Tissue thickness compensator and method for making the same
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
US20150098839A1 (en) * 2013-10-08 2015-04-09 Ingersoll-Rand Company Pump Systems and Methods
JP6935216B2 (ja) * 2017-03-31 2021-09-15 株式会社荏原製作所 ルーツ型真空ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345A1 (de) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
EP0401741A1 (de) * 1989-06-05 1990-12-12 Alcatel Cit Zweistufige Trockenprimärpumpe
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT204163B (de) * 1958-02-19 1959-07-10 Enfo Grundlagen Forschungs Ag Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern
DD230614A3 (de) * 1983-06-22 1985-12-04 Alfred Voelzer Verfahren zur inbetriebnahme eines mehrstufigen kolbenverdichters ohne waermeuebertrager nach dem letzten verdichtungsabschnitt
DD236967B1 (de) * 1985-05-06 1989-03-08 Ardenne Forschungsinst Verfahren zum zyklischen evakuieren einer vakuumkammer
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345A1 (de) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
EP0401741A1 (de) * 1989-06-05 1990-12-12 Alcatel Cit Zweistufige Trockenprimärpumpe
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Also Published As

Publication number Publication date
US6030181A (en) 2000-02-29
DE19704234B4 (de) 2006-05-11
JPH10220373A (ja) 1998-08-18
DE19704234A1 (de) 1998-08-06
DE59807507D1 (de) 2003-04-24
ATE235004T1 (de) 2003-04-15
EP0857876B1 (de) 2003-03-19
EP0857876A2 (de) 1998-08-12

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