EP0810433A2 - Analyseur de gaz et procédé d'étalonnage dudit analyseur - Google Patents

Analyseur de gaz et procédé d'étalonnage dudit analyseur Download PDF

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Publication number
EP0810433A2
EP0810433A2 EP97303637A EP97303637A EP0810433A2 EP 0810433 A2 EP0810433 A2 EP 0810433A2 EP 97303637 A EP97303637 A EP 97303637A EP 97303637 A EP97303637 A EP 97303637A EP 0810433 A2 EP0810433 A2 EP 0810433A2
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Prior art keywords
gas
measured
oxygen
processing zone
electro
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EP97303637A
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German (de)
English (en)
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EP0810433B1 (fr
EP0810433A3 (fr
Inventor
Takao Murase
Jun Usami
Masao Kon
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NGK Insulators Ltd
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NGK Insulators Ltd
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Priority to EP04023148A priority Critical patent/EP1494024B1/fr
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Publication of EP0810433A3 publication Critical patent/EP0810433A3/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
    • G01N27/4175—Calibrating or checking the analyser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
    • G01N27/419—Measuring voltages or currents with a combination of oxygen pumping cells and oxygen concentration cells

Definitions

  • the present invention relates to a gas analyzer that measures a gas component to be measured such as NO x which has bound oxygen, and a method of calibrating the gas analyzer.
  • a reducing gas such as CO is essential. For that reason, there has arisen such a defect that since the generated amount of CO is lower than the generated amount of NO x under the combustion condition where a fuel is excessively reduced (lean burn) when a large amount of NO x is generally generated, the combustion gas produced under such a combustion condition cannot be measured.
  • the system using two sets of sensors cannot be used in the case where the concentration of oxygen in the gas to be measured is largely changed. This is because the dependency of the pump current of one sensor on the concentration of oxygen is different from the dependency of the pump current of the other sensor on the concentration of oxygen.
  • oxygen existing in the gas to be measured causes such a problem that an accuracy of measurement is deteriorated in measuring NO x or other gas components to be measured, etc.
  • European Patent Publication 0678740 A1 a measuring method which is capable of measuring a gas component to be measured having bound oxygen such as NO x or the like in the gas to be measured, using first and second electro-chemical pump cells which are disposed in series, without being adversely affected by the concentration of oxygen in the gas to be measured or by a change of that concentration, with an excellent continuous response, and with an accuracy for a long time.
  • This novel measuring method is carried out as follows: a gas to be measured which contains a gas component to be measured having bound oxygen to be measured is sequentially introduced from an external space where a gas to be measured exists into first and second processing zones under the respective predetermined diffused resistances; and firstly in the first processing zone, oxygen in an atmosphere is controlled to a predetermined oxygen partial pressure by the first electro-chemical pump cell; in the second processing zone, oxygen is controlled to a low oxygen partial pressure value that does not substantially influence the measurement of the amount of said gas component to be measured, while in a third processing zone, the gas component to be measured in the atmosphere introduced from said second processing zone is reduced or decomposed; and oxygen generating at that time is pumped out due to the pumping action of oxygen using the third electro-chemical pump cell, to thereby detect the pump current that flows in the third electro-chemical pump cell so that the amount of the gas component to be measured in the gas to be measured is obtained according to its detection value.
  • the present invention has been made to further improve the above-mentioned measuring method, and therefore an object of the present invention is to provide a gas analyzer and a method of calibrating an analyzed value, which are capable of making measurement with an excellent continuous response, with an accuracy for a long time and without being adversely affected by the increased concentration of oxygen in the gas to be measured, and also are capable of obtaining a high S/N ratio, and obtaining a large change in signals even in measurement of a gas component to be measured having a low concentration.
  • a gas analyzer comprising: a gas sensor in which after a gas to be measured containing a gas component to be measured having bound oxygen to be measured is introduced into a first processing zone under a predetermined diffusion resistance, and an oxygen partial pressure in the atmosphere within said first processing zone is controlled to a predetermined oxygen partial pressure due to the pumping action of oxygen by the first electro-chemical pump cell in said first processing zone, the gas to be measured is introduced into a second processing zone under a predetermined diffusion resistance, and oxygen is pumped out by the second electro-chemical pump cell in the second processing zone, so that the oxygen partial pressure in said atmosphere is controlled to a low oxygen partial pressure value that does not substantially influence the measurement of the amount of the gas component to be measured, and thereafter the gas to be measured is introduced into a third processing zone, and said gas component to be measured in the atmosphere introduced from said second processing zone is reduced or decomposed in said third processing zone, and oxygen generating at that time is pumped out by a third electro-chemical pump cell to detect a pumping current
  • the pumping current in the first processing zone and the pumping current in the second processing zone are introduced into the operating section, and the operating section operates the pumping currents in the first and second processing zones to output the amount of oxygen, the amount of insufficient oxygen or its equivalent in the atmosphere to be measured.
  • the gas component to be measured is NO x
  • the measured NO x is corrected according to the amount value of oxygen, the amount value of insufficient oxygen or an equivalent value of oxygen measured.
  • At least the drive section is formed integrally with said gas sensor.
  • a method of calibrating a gas analyzer which includes a gas sensor in which after a gas to be measured containing a gas component to be measured having bound oxygen to be measured is introduced into a first processing zone under a predetermined diffusion resistance, and an oxygen partial pressure in the atmosphere within said first processing zone is controlled to a predetermined oxygen partial pressure due to the pumping action of oxygen by the first electro-chemical pump cell in said first processing zone, the gas to be measured is introduced into a second processing zone under a predetermined diffusion resistance, and oxygen is pumped out by the second electro-chemical pump cell in the second processing zone, so that the oxygen partial pressure in said atmosphere is controlled to a low oxygen partial pressure value that does not substantially influence the measurement of the amount of the gas component to be measured, and thereafter the gas to be measured is introduced into a third processing zone, and said gas component to be measured in the atmosphere introduced from said second processing zone is reduced or decomposed in said third processing zone, and oxygen generating at that time is pumped out by a third electro-chemical pump cell
  • the standard gas containing at least H 2 O and CO 2 is used as the known gas component to be measured other than the gas component to be measured.
  • a temperature of said gas sensor is increased 50° C higher than a working temperature for a predetermined time before measuring the calibration curve, the temperature of said gas sensor is returned to the working temperature to prepare the calibration curve of the standard gas.
  • said gas sensor before measuring the calibration curve, said gas sensor is separated from said drive section, and an alternating current power supply is connected between the respective electrode pair of said first to third processing zones, and after an alternating current of 1Hz or higher is supplied for a predetermined time, said gas sensor is returned to a drive state to prepare the calibration curve of the standard gas.
  • Figs. 3A and 3B are structural diagrams showing an example of an NO x sensor which is a structural element that constitutes a gas analyzer of the present invention, in which Fig. 3A is an explanatory plan view showing the NO x sensor, and Fig. 3B is an explanatory enlarged diagram showing a main portion of the NO x sensor taken along a line A-A of Fig. 3A.
  • reference numeral 2 denotes a sensor device which is in the form of an elongated slender plate-like body, and as is apparent from Fig. 3B, the sensor device 2 is formed of a plate body having an integral structure in which a plurality of solid electrolyte layers 4a, 4b, 4c, 4d, 4e and 4f of the ion conduction which are fine and air-tight are laminated.
  • the respective solid electrolyte layers 4a to 4f are made of a known solid electrolyte material of the oxygen ion conduction such as zirconium porcelain.
  • the sensor device 2 of the integral structure is manufactured by integrally sintering a laminate of non-sintered solid electrolyte as in the conventional manner.
  • a first inner space 6, a second inner space 7 and a third inner space 8 which are in the form of a rectangular plane, respectively, are disposed in such a manner that the respective spaces are sectioned from the external, respectively, so that the first inner space 6 is positioned at a tip side of the device, and the third inner space 8 is positioned on a base end side of the device, to thereby form a first processing zone, a second processing zone and a third processing zone.
  • a reference air introduction passage 10 as a reference gas existent space is disposed to extend along the longitudinal direction of the sensor device 2 in such a manner that it is independent from the first, second and third inner spaces 6, 7 and 8 and superimposed vertically on each other.
  • the reference air introduction passage 10 is designed to open at an end portion of the base side of the sensor device 2 so that it communicates with the air.
  • the first, second and third inner spaces 6, 7 and 8 are formed in a state that they are positioned on substantially the same plane with the structure that spaces corresponding to the first, second and third inner spaces 6, 7 and 8 formed in the solid electrolyte 4b are covered with upper and lower solid electrolyte layers 4a and 4c.
  • the reference air introduction passage 10 is formed such that a space corresponding to the reference air introduction passage 10 formed in the solid electrolyte layer 4d is covered with the solid electrolytes 4c and 4e from the upper and the lower, respectively.
  • a first diffusion rate-limiting passage 12 which is a first diffusion rate-limiting means that allows the first inner space 6 to communicate with the external space in which the gas to be measured exists is formed by notching the solid electrolyte 4b so that it opens at the tip of the sensor device 2.
  • the gas to be measured which contains NO x as the gas component to be measured is introduced into the first inner space 6 under a predetermined diffusion resistance.
  • annular notch is defined in a part of the solid electrolyte layer 4b positioned between the first inner space 6 and the second inner space 7, and in a part of the solid electrolyte layer 4b positioned between the second inner space 7 and the third inner space 8, respectively, to thereby form second and third diffusion rate-limiting passages 13 and 14 that constitute second and third rate-limiting means, respectively.
  • Those second and third diffusion rate-limiting passages 13 and 14 are filled with a porous member made of alumina or the like, respectively, so that the diffusion resistances of those passages 13 and 14 are set to be larger than the diffusion resistance of the first diffusion rate-limiting passage 12. Then, through the second diffusion rate-limiting passage 13, the atmosphere within the first inner space 6 is introduced into the second inner space 7 under a predetermined diffusion resistance, and also the atmosphere within the second inner space 7 is introduced into the third inner space 8 under a predetermined diffusion resistance.
  • a part of the solid electrolyte film 4a which is exposed to the first inner space 6 is provided with a first inside pump electrode 16 which is in contact with that part of the solid electrolyte film 4a and formed of a rectangular porous cermet electrode, and an outer surface of the solid electrolyte layer 4a corresponding to the first inside pump electrode 16 is provided with a first outer pump electrode 18 which is in contact with the outer surface of the solid electrolyte layer 4a and formed of the same rectangular porous cermet electrode, whereby those electrodes 16, 18 and the solid electrolyte layer 4a constitute a first electro-chemical pump cell.
  • a desired voltage is applied between those two electrodes 16 and 18-of the first electro-chemical pump cell by an external variable power supply 20 so that a current flows from the first outside pump electrode 18 toward the first inside pump electrode 16, thereby being capable of pumping out oxygen in the atmosphere within the first inner space 6 to the space in which the gas to be measured exists. If the current flows in an opposite direction, oxygen is pumped in the first inner space 6 from the external space in which the gas to be measured exists.
  • the porous cermet electrode is made of metal such as Pt and ceramics such as ZrO 2 , and the first inside pump electrode 16 disposed within the first inner space 6 which is in contact with the gas to be measured needs to be made of a metal which is weak in the reduction of the NO x component in the gas to be measured or has no reduction of the NO x component therein.
  • the first inside pump electrode 16 is made of a cermet consisting of Pt-Au alloy and ZrO 2 .
  • a part of the solid electrolyte layer 4c which is exposed to the first inner space 6 is provided with a measurement electrode 22 which is in contact with that part of the solid electrolyte layer 4c and formed of a porous cermet electrode like the first inside pump electrode 16, and a part of the solid electrolyte layer 4c which is exposed to the reference air introduction passage 10 is provided with a reference electrode 24 which is in contact with that part of the solid electrolyte layer 4c and formed of a porous cermet electrode like the first outside pump electrode 18, whereby the measurement electrode 22, the reference electrode 24 and the solid electrolyte layer 4c constitute an electro-chemical cell as an oxygen partial pressure detecting means, that is,, an electro-chemical sensor cell.
  • an electromotive force developed between the measurement electrode 22 and the reference electrode 24 is measured by a potentiometer 26 on the basis of a difference in the concentration of oxygen between the atmosphere within the first inner space 6 and a reference air (atmosphere) within the reference air introduction passage 10, to thereby detect a partial pressure of oxygen in the atmosphere within the first inner space 6.
  • the voltage applied from the variable power supply 20 is controlled on the basis of a value of the partial pressure of oxygen in the atmosphere within the first inner space 6 which has been detected by the potentiometer 26, whereby the pumping action of the first electro-chemical pump cell is controlled in such a manner that the partial pressure of oxygen in the atmosphere within the first inner space 6 becomes a predetermined value which is sufficiently low to the degree that the partial pressure of oxygen can be controlled in the succeeding second inner space 7.
  • a second inside pump electrode 28 formed of a porous cermet electrode like the first inside pump electrode 16 is provided on the solid electrolyte layer 4c in such a manner that it is positioned within the second inner space 7 and is in contact with the solid electrolyte layer 4c.
  • a part of the solid electrolyte layer 4c corresponding to the inside pump electrode 28 which is exposed to the reference air introduction passage 10 is provided with a second outside pump electrode 30 formed of a porous cermet electrode like the first outside pump electrode 18, and the inside pump electrode 28, the outside pump electrode 30 and the solid electrolyte layer 4c constitute a second electro-chemical pump cell.
  • a desired voltage is applied between those two electrodes 28 and 30 of the second electro-chemical pump cell by an external d.c.
  • a rectangular third inside pump electrode 36 is disposed on a part of the solid electrolyte layer 4c which is exposed to the third inner space 8 within the third inner space 8 in such a manner that the third inside pump electrode 36 is in contact with that part of the solid electrolyte layer 4c.
  • the third inside pump electrode 36 is made of a porous cermet consisting of Rh which is a metal that can reduce NO x which is the gas component to be measured and ZrO 2 as ceramics, whereby the electrode 36 functions as an NO x reduction catalyst that can reduce NO x existing in the atmosphere within the third inner space 8.
  • a constant voltage is applied between the third inside pump electrode 36 and a third outside pump electrode 38 disposed within the reference air introduction passage 10 in correspondence with the third inside pump electrode 36, whereby oxygen in the atmosphere within the third inner space 8 is pumped out within the reference air introduction passage 10.
  • a third electro-chemical pump cell is made up of the third inside pump electrode 36, the third outside pump electrode 38 and the solid electrolyte layer 4c. Then, a pumping current flowing due to the pumping action of the electro-chemical pump cell is detected by an ammeter 40.
  • the above-mentioned constant voltage (d.c.) power supply 34 is designed such that a voltage having a magnitude that gives a limit current to the pumping of oxygen produced when NO x is decomposed in the third electro-chemical pump cell can be applied under the condition where limited NO x flows in the third diffusion rate-limiting passage 14.
  • a plurality of heaters 42 which are allowed to heat by the supply of electricity from the external are embedded within the sensor device 2 in such a manner that the heaters 42 are interposed between the solid electrolyte layers 4e and 4f from the upper and the lower, respectively.
  • a ceramic thin layer made of alumina, etc. although being not shown is formed to obtain electrical insulation between the heater 42 and the solid electrolyte layers 4e, 4f, respectively.
  • the heaters 42 as shown in Fig.
  • the sensor device 2 thus structured, its tip side is disposed within the space in which the gas to be measured exists, whereby the gas to be measured is led to the first inner space 6 through the first diffusion rate-limiting passage 12 defined in the sensor device 2 under a predetermined diffusion resistance. Then, the gas to be measured which has been led to the first inner space 6 is subjected to the pumping action of oxygen developed by applying a predetermined voltage between the two electrodes 16 and 18 that constitute the first electro-chemical pump cell so that a partial pressure of oxygen is controlled to a predetermined value.
  • a voltage of the first electro-chemical pump cell is controlled so that the electromotive force corresponds to a difference between a predetermined concentration of oxygen in the first inner space 6 and the concentration of oxygen in the reference air.
  • the first diffusion rate-limiting passage 12 functions to restrict, when a voltage is applied to the first electro-chemical pump cell, the amount of oxygen in the gas to be measured which flows in the space to be measured (first inner space 6) in a diffused manner, to thereby restrain a current flowing in the first electro-chemical pump cell.
  • oxygen is pumped out by the pumping action of oxygen of the first electro-chemical pump cell, but in the case where the concentration of oxygen in the gas to be measured is lower than the predetermined value or zero, oxygen is pumped in from the external space by the pumping action of oxygen of the first electro-chemical pump cell, so that the partial pressure of oxygen in the atmosphere within the first processing zone is controlled to the predetermined partial pressure of oxygen.
  • a state of the partial pressure of oxygen where NO x in the atmosphere is not reduced by the inside pump electrode 16 or the measurement electrode 22, for example, a state of the partial pressure of oxygen where the reaction of NO ⁇ 1/2N 2 + 1/20 2 does not occur is given.
  • NO x in the gas to be measured (atmosphere) is reduced within the first inner space 6, NO x cannot be accurately measured in the succeeding third inner space 8. From this viewpoint, it is necessary that a state in which NO x cannot be reduced by a component related to the reduction of NO x (in this example, a metal component of the inside pump electrode 16 and the measurement electrode 22) is given within the first inner space 6.
  • the second electro-chemical pump cells (4c, 28, 30) are provided in the second inner space 7 so that the partial pressure of oxygen in the atmosphere within the second inner space 7 can be always held to a constant low partial pressure value of oxygen, whereby even though the partial pressure of oxygen in the atmosphere which can be introduced from the first inner space 6 by the pumping action is changed depending on the concentration of oxygen in the gas to be measured, the partial pressure of oxygen in the atmosphere within the second inner space 7 can be always held constant low value. As a result, the partial pressure of oxygen can be controlled to a low partial pressure value of oxygen which does not substantially adversely affect the measurement of NO x .
  • the second inside pump electrode 28 is made of an electrode material which has no reduction with respect to the gas to be measured, or is low in reduction.
  • the gas to be measured in which a partial pressure of oxygen is controlled within the second inner space 7 is led to the third inner space 8 through the third diffusion rate-limiting passage 14 under a predetermined diffusion resistance. Then, the gas to be measured which has been introduced into the third inner space 8 is subjected to the pumping action of oxygen by applying a predetermined voltage between the third inside pump electrode 36 and the third outside pump electrode 38 which constitute the third electro-chemical pump cell in a direction in which oxygen is pumped out from the third inner space 8 toward the reference air introduction passage 10 side, with the results that the concentration of oxygen is further lowered, in particular, on a three-phase interface of the third inside pump electrode 36, in the third inner space 8, and NO x is controlled to a reduced state in the periphery of the inside pump electrode 36 that also functions as the reduction catalyst.
  • a current that flows in the third electro-chemical pump becomes a value proportional to the concentration of oxygen in the atmosphere which is led to the third inner space 8, that is, a sum of the concentration of oxygen in the atmosphere within the second inner space 7 and the concentration of oxygen generated by making NO x reduced by the third inside pump electrode 36.
  • the concentration of oxygen in the atmosphere within the second inner space 7 is controlled to be held constant by the second electro-chemical pump cell, a current flowing in the third electro-chemical pump cell is proportional to the concentration of NO x .
  • the concentration of NO x corresponds to the amount of diffusion of NO x which is limited by the third diffusion rate-limiting passage 14, thus being capable of measuring the concentration of NO x .
  • Fig. 4 is a cross-sectional view showing a modified example of the NO x sensor which is a structural element that constitutes a gas analyzer of the present invention.
  • the second inner space 7 and the third inner space 8 are integrated with each other to form an integral inner space 9 consisting of one small flat space in which the second inside pump electrode 28 and the third inside pump electrode 36 are disposed.
  • this modified example is characterized in that the reference electrode 24 of the electro-chemical sensor cell disposed within the reference air introduction passage 10, the second outside pump electrode 30 in the second electro-chemical pump cell, and the third outside pump electrode 38 in the third electro-chemical pump cell are structured by one common electrode 44.
  • the integral inner space 9 is structured with the second processing zone and the third processing zone, and the gas to be measured which has been introduced from the first inner space 6 through the second diffusion rate-limiting passage 13 is subjected to the pumping action of oxygen due to the second electro-chemical pump cell which is made up of the second inside pump electrode 28 and the second outside pump electrode 30 disposed on the intake side of the integral inner space 9 and the solid electrolyte layers 4a, 4b and 4c, whereby the gas to be measured is controlled to a constant low value of the partial pressure of oxygen, and is diffused under a predetermined diffusion resistance which is regulated by the small flat space of the integral inner space 9 to reach the third electro-chemical pump cell disposed on the back side of the integral inner space 9, where NO x which is the gas component to be measured is reduced by the third inside pump electrode 36. Also, oxygen is pumped out from the third inside pump electrode 36 to the third outside pump electrode 38, to thereby detect the pumping current of the third electro-chemical pump cell by the ammeter 40.
  • Fig. 1 is a block diagram showing an example of the structure of a gas analyzer in accordance with the present invention.
  • the gas analyzer according to the present invention fundamentally includes a gas sensor 100, a drive section 101 that pumps oxygen from the gas sensor 100, an operating section 102 that operates a pumping current flowing in the electro-chemical pump cell of the gas sensor 100 into a gas value to be measured, a display output section 103 that displays a value operated by the operating section 102, or outputs the value as an electrical output to the external, and a heater drive section 104 that heats the gas sensor 100 to a predetermined temperature.
  • the operating section 102 has a function to operate the pumping current flowing in the third electro-chemical pump cell into the gas value to be measured.
  • the operating section 102 further inputs the pumping current (Ip1) in the first processing zone and the pumping current (Ip2) in the second processing zone to operate and output the amount of oxygen or the amount of insufficient oxygen in the gas to be measured or an equivalent thereof.
  • an equivalent of a gas to be measured is specifically a coefficient of excess oxygen (value of ⁇ ) or an air-fuel ratio (A/F value). This can be obtained on the basis of the fact that (A ⁇
  • A, B and C are constants, respectively, and lp3 is the pumping current flowing in the third electro-chemical pump cell, that is, the pumping current in the third processing zone.
  • an NO x concentration in a gas to be measured is preferably adjusted or corrected depending on an oxygen amount in a gas to be measured, an insufficient oxygen amount, or an equivalent.
  • p3) as the oxygen amount, the insufficient oxygen amount, or the equivalent is preferably used for adjusting a NO x concentration.
  • p2) may be used to make the calculation simpler.
  • the pumping current (lp3) in the third processing zone depends upon the concentration of oxygen in the gas to be measured. As shown in Fig.
  • the pumping current slightly fluctuates depending on the concentration of oxygen in the gas to be measured. From this viewpoint, it is preferable that the dependency of the pumping current (lp3) on the concentration of oxygen in the gas to be measured is measured, and the measured data is stored in the operating section 102 in advance so that the concentration of NO x in the gas to be measured is corrected.
  • Fig. 2 is a block diagram showing another example of the structure of a gas analyzer in accordance with the present invention.
  • a gas sensor is apart from a receiver unit such as an operating section.
  • a gas sensor 100, a drive section 101 that pumps oxygen from the gas sensor 100, and an amplifier 105 that amplifies the pumping current obtained by the drive section 101 are integrated into a sensor probe 110, and at a position apart from the sensor probe 110, a receiver unit 120 which is made up of an operating section 102, a display output section 103 and a heater drive section 104 is disposed.
  • Fig. 5 shows a specific gas analyzer of the gas analyzer shown in the block diagram of Fig. 2.
  • a gas analyzer 50 is made up of a gas-to-be-measured introduction section 60 and an NO x detecting section 70.
  • a gas intake 63 and a gas exhaust port 64 are formed on the tip side of a cylindrical probe 62.
  • Lattices 65 and 66 are disposed on the gas intake 63 and the gas exhaust port 64 at given intervals, respectively.
  • an inner tube 67 having a flange 67a is concentric with the probe 62.
  • the gas to be measured which is taken in from the gas intake 63 enters the interior of the inner tube 67, returns to a space between the inner tube 67 and the probe 62 at an end portion of the inner tube 67, and is then exhausted to the exterior of the probe 62 from the gas exhaust port 64.
  • An NO x detecting section 70 is so structured that an NO x sensor unit 73 is received within a detecting section body 72.
  • the NO x sensor unit 73 is provided with a plate-like NO x sensor 74 so that the sensor 74 is exposed to one end of the sensor unit 73, and is also integrated with a terminal block 75 used to electrically connect the NO x sensor 74 to the external through screwing means or the like, on the other end of the sensor unit 73.
  • the outer peripheral portion of the end of the detecting section body 72 is provided with a flange 77 for connecting the gas-to-be-measured introduction section 60 to the NO x detecting unit 70.
  • a calibrated gas intake 78 for supplying a calibrated gas to the NO x sensor 74.
  • a flange 79 and a cap 80 for receiving the terminal block 75 therein.
  • a wiring port 81 for leading out an electrode from the terminal block 75 (wiring of the drive section, etc., which will be described later) etc., to the external.
  • a gas seal portion using an 0 ring 82 is disposed to prevent the gas to be measured from leaking to the terminal block 75.
  • a terminal screw 86 for fixing the terminal block 75 and the NO x sensor unit 73 to the NO x detecting section 70 is fitted to the terminal block 75.
  • the terminal block 75 is provided with a drive section 85 including an amplifier, and the drive section 85 is electrically connected to a receiver 90 including an operating section, an display output section, and so on to conduct the pumping action of the NO x sensor 74, a predetermined arithmetic operation, and display/output.
  • the drive section is integrally structured in the vicinity of the gas sensor, and the pumping current in the drive section is amplified by the amplifier and then led to the operating section, thereby being capable of reducing an electrical noise.
  • the pumping currents (Ip3) to plural known amounts of the gas component to be measured are measured to prepare calibration curves to thereby calibrate the present gas analyzer.
  • data relating to the pumping currents (Ip3) to the plural known amounts of the gas component to be measured are stored in the operating section of the gas analyzer, and on the basis of that data, the pumping current (lp3) of the gas component to be measured in question is converted or calibrated to the amount of the gas component to be measured.
  • the calibrated gas standard gas
  • the pumping current Ia, Ib, Ic
  • the calibration curve is a line, a multi- order curve, or the like, and the calibration curve can be automatically prepared in the operating section.
  • the aforementioned oxygen reliability or equivalent reliability is measured so as to adjust the calibration curve.
  • the gas analyzer according to the present invention is calibrated using the calibration curve as described above. It is preferable to use a gas containing at least any one kind of gas component selected from H 2 O and CO 2 in addition to the known gas component to be measured as the known gas component to be measured (calibrated gas) used at that time.
  • the added amount of H 2 O and CO 2 is preferably 0.1 vol% or more, respectively or in total, and more preferably 1 vol% or more.
  • the poisoning material or the like is separated from the electrode of the solid electrolyte before measuring the calibration curve, and the gas analyzer is calibrated in a normal state of the electrode.
  • the separating method is roughly classified into a method of increasing the temperature of the sensor and a method of forcedly supplying electricity.
  • a method in which after the temperature of the sensor having the electro-chemical pump cell is increased 50° C higher than its working temperature for a given period, it returns to the working temperature to prepare the calibration curve of the calibrated gas (method of increasing the temperature of the sensor).
  • a period during which the sensor is held to a high temperature is satisfactorily about 10 minutes.
  • the method of forcedly applying electricity there is preferably used a method in which the sensor is separated from the drive section, and an alternating current power supply is connected between the respective electrode pair in the first to third processing zones, and after an alternating current of, for example, 1 Hz or higher flows for a given period, the sensor is returned to a drive state to prepare the calibration curve of the calibrated gas.
  • a period during which the alternating current flows is satisfactorily about 10 minutes.
  • the stabilized pumping current and electromotive force corresponding to the concentration of the gas to be measured such as NO x in question can be obtained, and the concentration of the gas component to be measured can be accurately measured. Also, even though the concentration of oxygen in the gas to be measured is high, measurement is enabled without being adversely affected by the high concentration, with an excellent continuous response and with an accuracy for a long time, and a high S/N ratio can be obtained in the measurement of the gas component to be measured with a low concentration, to thereby obtain a large change in signals.
EP97303637A 1996-05-30 1997-05-29 Analyseur de gaz et procédé d'étalonnage dudit analyseur Expired - Lifetime EP0810433B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04023148A EP1494024B1 (fr) 1996-05-30 1997-05-29 Analyseur de gaz

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP136610/96 1996-05-30
JP13661096 1996-05-30
JP13661096 1996-05-30
JP10616797 1997-04-23
JP106167/97 1997-04-23
JP10616797A JP3470012B2 (ja) 1996-05-30 1997-04-23 ガス分析計及びその校正方法

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EP0928965A2 (fr) * 1997-12-22 1999-07-14 Ngk Insulators, Ltd. Appareil pour la mesurage du concentration de NOx
EP0933631A2 (fr) * 1998-01-28 1999-08-04 Ngk Spark Plug Co., Ltd. Connecteur pour un capteur de NOx
EP0964246A2 (fr) * 1998-06-12 1999-12-15 Panametrics, Inc. Méthode et système d'un capteur d'oxygène calibré intérieurement
WO2000055614A1 (fr) * 1999-03-16 2000-09-21 Volkswagen Aktiengesellschaft ETALONNAGE D'UN DETECTEUR DE Nox
EP1087226A1 (fr) * 1999-09-22 2001-03-28 Ngk Insulators, Ltd. Analyseur de gaz et son procédé de calibration
EP0961115A3 (fr) * 1998-05-28 2002-01-16 Ngk Spark Plug Co., Ltd. Méthode pour stabiliser le courant de pompage dans un capteur de gaz
GB2399644A (en) * 2003-02-27 2004-09-22 Bosch Gmbh Robert Zero point adjustment of the signal from a sensor element of a gas sensor
WO2005078426A1 (fr) * 2004-02-10 2005-08-25 General Electric Company Procedes de diagnostic et de commande de detecteur d'oxygene etalonne au niveau interne
WO2006136509A1 (fr) * 2005-06-23 2006-12-28 Siemens Vdo Automotive Ag Capteur de gaz

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JP3563399B2 (ja) * 1996-05-30 2004-09-08 日本碍子株式会社 ガス分析計
JP3332761B2 (ja) * 1996-11-08 2002-10-07 日本特殊陶業株式会社 酸素濃度・窒素酸化物濃度測定方法及び装置
US6228252B1 (en) 1997-02-13 2001-05-08 Ngk Spark Plug Co. Ltd. Apparatus for detecting concentration of nitrogen oxide
DE69825813T2 (de) 1997-03-21 2005-02-03 NGK Spark Plug Co., Ltd., Nagoya Verfahren und Vorrichtung zur Messung einer NOx-Gaskonzentration
JP4309491B2 (ja) * 1997-05-28 2009-08-05 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 混合ガスのラムダ値を規定するための限界電流ゾンデ用のセンサ部材、ならびに該センサ部材を寸法決めするための方法
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KR100287366B1 (ko) * 1997-11-24 2001-04-16 윤순조 엠피이지 방식을 이용한 휴대용 음향 재생장치 및 방법
US6055840A (en) * 1998-01-21 2000-05-02 Industrial Scientific Corporation Method and apparatus for determining concentration of a gas
US6133042A (en) * 1998-02-10 2000-10-17 Ford Global Technologies, Inc. Modulated oxygen-flux method and apparatus to improve the performance of a calorimetric gas sensor
EP0981046A1 (fr) 1998-08-10 2000-02-23 Ngk Spark Plug Co., Ltd Procédé de mesure de la concentration d'un composant d'un gaz
DE19845927B4 (de) * 1998-10-06 2013-03-07 Robert Bosch Gmbh Verfahren zum Prüfen eines Meßfühlers
US6266995B1 (en) 1999-05-20 2001-07-31 Respiratory Management Services, Inc. Portable medical gas system tester
DE19956822B4 (de) * 1999-11-25 2004-01-29 Siemens Ag Verfahren zur Bestimmung der NOx-Konzentration
JP4821928B2 (ja) * 2000-10-31 2011-11-24 株式会社デンソー ガス濃度検出装置
DE10339458A1 (de) * 2002-08-28 2004-03-25 Denso Corp., Kariya Gasmessfühler und Verfahren zu dessen Herstellung
US6936496B2 (en) 2002-12-20 2005-08-30 Hewlett-Packard Development Company, L.P. Nanowire filament
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US7375012B2 (en) * 2005-02-28 2008-05-20 Pavel Kornilovich Method of forming multilayer film
US20070058819A1 (en) * 2005-09-14 2007-03-15 Membrain,Llc Portable audio player and method for selling same
JP2007085869A (ja) * 2005-09-21 2007-04-05 Energy Support Corp ガスセンサの校正方法及びガス分析装置
JP2007108018A (ja) * 2005-10-13 2007-04-26 Energy Support Corp ガス分析装置の校正方法
US7810376B2 (en) * 2007-11-06 2010-10-12 Picarro, Inc. Mitigation of gas memory effects in gas analysis
DE102008038224B3 (de) * 2008-08-18 2010-05-12 Continental Automotive Gmbh Verfahren und Vorrichtung zum Überprüfen eines Abgassensors
JP5247780B2 (ja) * 2010-09-01 2013-07-24 株式会社日本自動車部品総合研究所 ガスセンサの校正方法
CN113588883B (zh) * 2021-08-02 2022-10-04 中科三清科技有限公司 一种进行自动校准的环境空气质量监测装置
WO2024062818A1 (fr) * 2022-09-22 2024-03-28 日本碍子株式会社 Capteur de gaz et procédé de mesure de concentration utilisant un capteur de gaz
WO2024070326A1 (fr) * 2022-09-29 2024-04-04 日本碍子株式会社 Capteur de gaz et procédé de mesure de concentration à l'aide d'un capteur de gaz

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Cited By (17)

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Publication number Priority date Publication date Assignee Title
US6689266B2 (en) 1997-12-22 2004-02-10 Ngk Insulators, Ltd. NOx concentration-measuring apparatus
EP0928965A2 (fr) * 1997-12-22 1999-07-14 Ngk Insulators, Ltd. Appareil pour la mesurage du concentration de NOx
EP0928965A3 (fr) * 1997-12-22 2001-12-05 Ngk Insulators, Ltd. Appareil pour la mesurage du concentration de NOx
US6419818B2 (en) 1997-12-22 2002-07-16 Ngk Insulators, Ltd. NOx concentration-measuring method
EP0933631A2 (fr) * 1998-01-28 1999-08-04 Ngk Spark Plug Co., Ltd. Connecteur pour un capteur de NOx
EP0933631A3 (fr) * 1998-01-28 2004-09-29 Ngk Spark Plug Co., Ltd. Connecteur pour un capteur de NOx
EP0961115A3 (fr) * 1998-05-28 2002-01-16 Ngk Spark Plug Co., Ltd. Méthode pour stabiliser le courant de pompage dans un capteur de gaz
EP0964246A2 (fr) * 1998-06-12 1999-12-15 Panametrics, Inc. Méthode et système d'un capteur d'oxygène calibré intérieurement
EP0964246A3 (fr) * 1998-06-12 2002-01-16 Panametrics, Inc. Méthode et système d'un capteur d'oxygène calibré intérieurement
WO2000055614A1 (fr) * 1999-03-16 2000-09-21 Volkswagen Aktiengesellschaft ETALONNAGE D'UN DETECTEUR DE Nox
EP1087226A1 (fr) * 1999-09-22 2001-03-28 Ngk Insulators, Ltd. Analyseur de gaz et son procédé de calibration
US6401522B1 (en) 1999-09-22 2002-06-11 Ngk Insulators, Ltd. Gas analyzer and method of calibrating the same
GB2399644A (en) * 2003-02-27 2004-09-22 Bosch Gmbh Robert Zero point adjustment of the signal from a sensor element of a gas sensor
WO2005078426A1 (fr) * 2004-02-10 2005-08-25 General Electric Company Procedes de diagnostic et de commande de detecteur d'oxygene etalonne au niveau interne
US7338592B2 (en) 2004-02-10 2008-03-04 General Electric Company Diagnostic and control methods for internally calibrated oxygen sensor
US7862703B2 (en) 2004-02-10 2011-01-04 General Electric Company Diagnostic and control methods for internally calibrated oxygen sensor
WO2006136509A1 (fr) * 2005-06-23 2006-12-28 Siemens Vdo Automotive Ag Capteur de gaz

Also Published As

Publication number Publication date
US5780710A (en) 1998-07-14
EP1494024B1 (fr) 2008-09-24
EP0810433B1 (fr) 2005-01-12
EP1494024A2 (fr) 2005-01-05
DE69732194D1 (de) 2005-02-17
EP1494024A3 (fr) 2005-01-19
JP3470012B2 (ja) 2003-11-25
DE69739009D1 (de) 2008-11-06
DE69732194T2 (de) 2005-12-22
JPH1073563A (ja) 1998-03-17
EP0810433A3 (fr) 1998-10-07

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