EP0789505B1 - Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage - Google Patents

Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage Download PDF

Info

Publication number
EP0789505B1
EP0789505B1 EP97101968A EP97101968A EP0789505B1 EP 0789505 B1 EP0789505 B1 EP 0789505B1 EP 97101968 A EP97101968 A EP 97101968A EP 97101968 A EP97101968 A EP 97101968A EP 0789505 B1 EP0789505 B1 EP 0789505B1
Authority
EP
European Patent Office
Prior art keywords
generating apparatus
plasma generating
power
plasma
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97101968A
Other languages
German (de)
English (en)
Other versions
EP0789505A1 (fr
Inventor
Kensuke Akutsu
Yasuhisa Sugawara
Osamu Katayama
Akinori Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Paint Co Ltd
Original Assignee
Nippon Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paint Co Ltd filed Critical Nippon Paint Co Ltd
Publication of EP0789505A1 publication Critical patent/EP0789505A1/fr
Application granted granted Critical
Publication of EP0789505B1 publication Critical patent/EP0789505B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments
    • H05H2245/42—Coating or etching of large items

Definitions

  • the present invention relates to a small-sized portable atmospheric plasma generating apparatus of a handy type, and to a surface processing method including the step of performing plasma processing onto a surface of various types of objective things to be processed with the use of the plasma generating apparatus so as to improve the quality of the surface, and to improve various surface characteristics such as adhesive property, adherence property and so on of the surface.
  • a plasma generating apparatus is used for generating plasma in air near the objective thing by the corona discharging.
  • the conventional plasma generating apparatus is generally adapted to apply AC power or pulse power of high voltage and high frequency onto a discharging electrode, to bring the discharging electrode to come into contact with (or close to) the objective thing which is placed on the opposite electrode retained at an approximately ground voltage so that plasma may be generated in air near the objective thing by causing the corona discharging between the discharging electrode and the opposite electrode or the objective thing.
  • the conventional plasma generating apparatus used for plasma processing of the objective thing is generally of a fixed type. Accordingly, the objective thing is carried to the plasma generating apparatus with the use of a carrying apparatus or the like so that the plasma processing is adapted to be performed within the plasma generating apparatus.
  • the conventional plasma generating apparatus to be used for plasma-processing such objective things has problems in unsuitability in individual processing or repairing processing such as processing of the objective things of relatively complicated shape, local plasma-processing with respect to one portion of a given objective thing, plasma-processing stronger than in the other portions, or the like, although the conventional one is suitable for mass and standard processing of the objective things of relative simple shape, because the conventional plasma generating apparatus is of a large scale, a fixed type, and large in electric capacity (for example, several tens of Kw or so). Also, such a plasma generating apparatus which is larger in size and capacity has problems in that it is impossible to be carried and becomes expensive in cost.
  • the conventional plasma generating apparatus has problems in that sparking is caused from the discharging electrode to damage the objective things by sparks although discharging is concentrated in metal portions so that processing becomes considerably unequal in processing when the metal portions exposed near the metal surfaces or the processed faces exist. Also, it has a possibility of causing problems due to the discharging concentration into the metal portion when a paint film defect such as extremely small pin hole exists even where the surfaces of the steel plate are covered with paint film or the like.
  • US-A-5 249 575 discloses a corona discharge beam thermo therapy system including an energy generating unit and a portable applicator gun connected by a long cable.
  • the energy generating unit comprises a sonic generator for producing an audio frequency signal of 3 to 5 kHz which is used for modulating a radio frequency carrier produced in a RF generator, such that periodic bursts of radio frequency energy are produced which have a repetition rate corresponding to the audio frequency.
  • the radio frequency is in the range of 200 to 450 kHz.
  • the portable applicator gun includes a tank coil (in other words, a resonance coil) which is coupled to an output coil connected to a discharge electrode.
  • DE-A-36 18 412 discloses an apparatus for the treatment of objects by electrical discharges and/or by particles generated in electric discharges.
  • the circuit according to figure 1 of this document comprises an oscillation generator including a low-frequency transformer, an inductance, a capacitor, and a Tesla transformer having a primary coil and a secondary coil.
  • the circuit includes an electronic on/off switch.
  • Connected to the upper and lower end of the secondary coil of the Tesla transformer are a spark-generating electrode and a spark-receiving electrode for generating a spark in a spark gap.
  • High voltage diodes are provided as shown in figure 1, resulting in that the spark discharge occurs in a predetermined direction, that is from spark generating electrode to spark receiving electrode.
  • an oscillation detector detects the oscillations produced by the secondary coil of the Tesla transformer, and these oscillations are counted in an oscillation counter.
  • a push-button switch starts the operation of the device, and after the oscillation counter has counted a predetermined number of oscillations, the circuit provides a signal for switching off the electronic switch.
  • an object of the present invention is to provide a plasma generating apparatus for satisfying the following conditions (at least one) or a method of processing
  • the small-sized atmospheric plasma generating apparatus has a simple, light and compact construction and is easy to be carried, with a switching circuit provided with switching contacts to be switched rapidly, a voltage transforming circuit provided with the primary coil and the secondary coil placed in concentric shape, and a discharge electrode on which high voltage and high frequency of AC power to be caused in the secondary coil is applied being engaged with a small-sized casing. Therefore, the small-sized atmospheric plasma generating apparatus can be carried manually or with a robot to cause the discharging electrode to contact with (or be close to) a desired object
  • the plasma processing can be effected on the portion.
  • the surface characteristics such as adhesive property, paint film adherence property or the like of the surfaces of the processed things become better.
  • the strength of the plasma processing to be effected upon the portion can be controlled by adjusting the time when the discharging electrode is caused to come into contact with the portion. For example, make the contact time longer, and the stronger plasma processing can be effected on the portion.
  • such simple construction of plasma generating apparatus (results in lower manufacturing cost, and the power capacity becomes smaller. Further, safety can be improved in handling of high voltage by placement of the switching circuit and the voltage transforming circuit within the insulating casing.
  • the discharging electrode is provided with a discharge wire of a good conductor material, connected to an output terminal of the secondary coil of the voltage transforming circuit, and with a coating member of a dielectric material, for covering the discharge wire.
  • the discharge wire is desired to be a flexible wire of stainless-steel
  • the coat member is desired to be a tube of poly-vinyl-chloride or Teflon.
  • the sparking can be prevented from being caused in the discharge electrode, and further the object in which metal portion exists on the surface thereof can be plasma-processed, because the discharge wire made of stainless-steel or the like is coated with a coating member composed of dielectric material such as vinyl-chloride, Teflon or the like. Also, safety is much improved in handing of the high voltage, because the discharge wire on which the high voltage is applied is coated with dielectric material, namely, insulating material. Further, the discharge electrode can be brought into soft or elastic contact with the objective thing to be processed, because the discharge electrode is flexible.
  • a surface processing method according to claim 6.
  • Preferred embodiments of the method according to claim 6 are indicated in dependent claims 7-9.
  • plastic film, resin mold product, PCM (pre-coated metal, i.e. a metal plate with a coating) steel plate, paper for printing use or the like can be used.
  • the plasma generating apparatus can be carried into a position where the object exists to effect the plasma processing with desired strength upon the desired portion of the object. Accordingly, it can be easily processed for repairing or individual processing such as processing of the objects of relatively complicated shape such as deep grooves, holes or the like, local plasma processing with respect to only one portion of the given object or plasma processing stronger than in other portions.
  • a switching circuit 3 for converting AC power fed from the AC power source (not shown) into AC power of high frequency, and a voltage transforming circuit 4 for causing AC power of high voltage and high frequency through the voltage transformation of the AC power of high frequency outputted from the switching circuit 3 are disposed within an approximately cylindrical, hollow casing 2 made of insulating material.
  • a discharge electrode 5 which generates plasma in air around it by causing corona discharge between an opposite electrode and itself when the opposite electrode retained at approximately ground voltage (approximately earth voltage) has been approached thereto while receiving the AC power generated in the voltage transforming circuit 4.
  • approximately ground voltage includes “ground voltage” where the conductor is earthened.
  • the voltage transforming circuit 4 is a so-called Tesla coil where the primary coil 6 (winding) having a smaller number of turns, and the secondary coil 7 (winding) having a larger number of turns are disposed in concentric cylindrical shape for distraining of high-frequency loss.
  • an iron core (not shown) or a ferrite core is used for increasing the output.
  • the voltage transforming circuit 4 of such construction can cause sufficient high voltage in spite of extremely simple construction which is small in size and light in weight.
  • a discharge electrode supporting plate 8 composed of an insulating material is mounted on the front end portion of the casing 2 with the use of a mounting member 9 composed of an insulating material, and a discharge electrode 5 is supported by the discharge supporting plate 8.
  • a discharging wire 13 composed of stainless wire flexibly connected with the output terminal of the secondary coil 7 of the voltage transforming circuit 4, and a Teflon tube 14 (coating member made of dielectric material) for coating the discharge wire 13 are provided on the discharge electrode 5 through a connecting screw 10, a connecting rod 11, and a connecting pin 12 each made of a good conductor material.
  • the diameter of the discharge wire 3 is, for example, 1 mm
  • the outer diameter of the Teflon tube 14 is, for example, 2 mm.
  • a conductor 15 is provided in the switching circuit 3, supplying the AC power (for example, 60 Hz) of 100 V through a plug 26 from the AC power supply (not shown).
  • the switching circuit 3 has a magnet 16 (electromagnet) for switch driving use with one portion of the conductor 15 being wound on a rod 17 formed with a ferromagnetic material.
  • the switching circuit 3 has a contact switch S composed of a first contact 18 whose one end is connected with a P2 point of the conductor 15, and a second contact 19 connected with a P1 point of the conductor 15.
  • a switching knob 20 for adjusting the operation characteristics of the contact switch S is provided with respect to the contact switch S.
  • the switch adjusting knob 20 is screwed into the rear end wall 2a of the casing 2 and is adapted to move in the directions Y1 ⁇ Y2 by pivoting around the axial line thereof.
  • the conductor 15 is earthened at a P3 point with a capacitor 21 for noise removing being interposed, to prevent noise from being caused within the conductor 15, in the conductor 15 between the P1 point and the P3 point.
  • the switching circuit 3 may be formed with the use of a switch having an electrode pair and a simple on and off function, or a semiconductor switch (for example, transistor), instead of such construction. Also, the switching circuit 3 may be made a switch circuit which produces the AC power of high frequency with oscillating current by causing the oscillation current through causing sparking discharges in the electrode pair disposed across the slight gap with power fed from the power supply. In this case, the assembly composed of the switching circuit 3 and the voltage transforming circuit 4 becomes a Tesla transformer.
  • a magnet 16 for the switching driving use repeats the exciting condition and the demagnetic condition in accordance with the frequency of the AC power to open and close the contact switch S. Namely, when the magnet 16 for switch driving use is in an excited condition, a ferromagnetic material piece 24 mounted in the second contact 19 is attracted to the magnet 16 for switch driving use to separate the contact portion 22 of a first contact 18 and the contact portion 23 of a second contact 19 to open the contact switch S.
  • the second contact point 19 is restored to its original position by the elasticity thereof to cause the contact portion 22 of the first contact 18 to contact with the contact portion 23 of the second contact 19 to close the contact switch S.
  • the contact switch S is continuously made open, closed at high speed to cause the AC power of high frequency in the switching circuit 3 for inputting the alternate current into the primary coil 6 of the voltage transforming circuit 4.
  • the making, breaking characteristics of the contact switch S and the oscillating characteristics of the AC power of high frequency to be caused by the switching circuit 3 can be adjusted if desired by the adjusting operation of the switching adjusting knob 20.
  • the AC power of high frequency caused by the switching circuit 3 is inputted into the primary coil 6 of the voltage transforming circuit 4 to cause the AC power of high frequency and high voltage in the secondary coil 7 of the voltage transforming circuit 4 for inputting the AC power into the discharge wire 13 of the discharge electrode 5.
  • the other terminal (terminal not connected with the discharge wire 13) of the secondary coil 7 of the voltage transforming circuit 4 is earthened so that the plasma producing apparatus 1 becomes equal in potential as that of the opposite electrode in use of the plasma generating apparatus 1.
  • Corona discharging is caused between the discharge electrode 5 and the opposite electrode, when the discharge electrode 5 is caused close to or brought to come into contact with the opposite electrode retained at the approximately ground voltage in feeding the AC power of high frequency and high voltage to the discharge electrode 5, to cause the plasma in air between the discharge electrode 5 and the opposite electrode by the corona discharging.
  • sparking is not caused between the discharge electrode 5 and the opposite electrode, because the discharge wire 13 is coated with a Teflon tube 14 (dielectric).
  • the plasma generating apparatus 1 of the invention can be easily carried, because the switching circuit 3 and the voltage transforming circuit 4 both being simple, small and light, are accommodated within the casing 2, and a discharge electrode 5 which is simple, small and light is supported by the discharging electrode supporting plate 8 provided in the tip end portion of the casing 2, thus resulting in a simple, compact construction. Therefore, the plasma producing apparatus 1 can be carried by the hands or by a robot to bring the discharge electrode into contact with (or closer to) the desired portion of the desired processed things placed on the opposite electrode so that the plasma processing can be effected on the portion.
  • non-conductive materials such as resin (plastic), paper, cloth or the like and/or objective thing 31 (concretely, for example, plastic film, resin mold products, PCM steel plate, paper for printing use or the like) composed of conductive materials (metal materials) such as aluminum, iron or the like are placed on the opposite electrode 30 (earth electrode) where the voltage is retained at the ground voltage (earth voltage) as shown in, for example, in Fig. 3.
  • the metal plate of stratified member can be earthened without provision of the opposite electrode when the object 31 includes the stratified metal, for example, stratified member with resin, paint and so on being coated on such metal plate as PCM steel plate. Even in this case, strong corona discharging is caused and strong plasma is produced.
  • the plasma generating apparatus 1 is carried manually or with a robot so that the discharging electrode 5 of the pressure plasma generating apparatus 1 is caused to come into contact with a proper position within a range to be plasma-processed on the surface of the object. And the discharge electrode 5 which remains in contact with the surface of the object is caused to move onto the range to be plasma-processed.
  • the discharge electrode 5 is desired to move evenly at a moving speed of, for example, 1 cm/sec. through 2 cm/sec. Also, it is desired to move the discharge electrode 5 repeatedly about 1 through 5 times on the surface of the object when the normal plasma processing is effected on the surface of the object.
  • the time for causing the discharge electrode 5 to come into contact with the surface of the object is set preferably in accordance with the strength of the plasma processing to be required.
  • the corona discharge is caused between the discharge electrode 5 and the opposite electrode 30 to generate the plasma in air near the surface of the object by the corona discharging so that the surface of the object is plasma-processed by the plasma.
  • the various types of surface characteristics such as adhesive property, adherence property of an adhesive agent or the paint on the surface of the object, printing characteristics of the printing ink, the cloudiness preventing property of the surface, washing property or friction characteristics or the like are improved or changed in quality when other member is bonded, paint is coated or prints are effected with the use of adhesive with respect to the surface of the object 31.
  • the strength of the plasma processing to be effected upon the position can be controlled by the adjustment of time when the discharging electrode 5 is caused to come into contact with the position, to be plasma-processed, of the surface of the object. For example, a stronger plasma processing can be effected on the portion when contact time is made longer. Accordingly, plasma processing of a desired strength can be effected upon the desired position of the objects 31.
  • the surface of the object is plasma-processed without causing the spark discharging with plasma to be generated between the Teflon tube 14 and the surface of the object by contacting or sliding contact and moving of the Teflon tube 14 with respect to the surface of the object in effecting of the plasma processing upon the object 31, because the flexible discharging wire 13 is coated with Teflon tube 14 (dielectric) as described above.
  • the plasma processing can be completed in a short time (for example, few seconds) without causing damages on the surfaces of the object, because the discharging wire 13 (steel wire) or Teflon tube 14 comes into soft contact with the surface of the object with proper pressing force through elastic force.
  • the plasma processing can be effected by selection of the shape or the material quality corresponding to the portion with respect to portions of deep grooves, holes or the like which were insufficient in processing by the conventional fixed type large on scale. Also, the processing efficiency can be improved with the joint use of the fixed type when objects relatively complicated in shape, material quality and larger in processing area are processed.
  • the Teflon tube 14 is to be consumed, whose life service depends upon the using limit or other factors to be consumed. But the above problems can be coped by making the Teflon tube 14 detachable or exchangeable, namely, as consumption product.
  • Fig. 4 shows results where the surface processing is effected with respect to the coating steel plate by the plasma processing with the use of the plasma generating apparatus of the invention to have the improved results of the surface measured.
  • Steel plate with primer and white paint (Furekicoat made by Nippon Paint Co., Ltd.) being coated on it is used as coated steel plate.
  • Plasma processing different in number is effected on the coating surfaces of a plurality of coating steel plates.
  • a plurality of coating steel plates plasma-processed in this manner are pasted with the use of adhesive (Power-tight 110, made by Nippon Paint Co., Ltd.) (the same type of coating steel plates are pasted with each other) respectively on the coated steel plates not plasma-processed.
  • adhesive Power-tight 110, made by Nippon Paint Co., Ltd.
  • one portion of the coated steel plate pasted is peeled off to measure the peeling strength with the use of a Tensilon (trademark), peeling strength testing apparatus.
  • the peeling-off strength is considerably increased by the plasma processing operation of the invention. Namely, the peeling strength becomes higher in approximate proportion to the number of plasma processing operations when the plasma processing is five times or lower in number although the peeling strength is about 11.6 N/cm (3 kgw/inch) in the coated steel plate not plasma-processed. In the coated steel plate where plasma processing has been processed five times, the peeling strength is increased as high as about 108.1 N/cm (28 kgw/inch). As apparent from Fig. 4, the peeling strength is not extended so much as expected if the plasma processing is effected five times or more. Accordingly, it is desirable for the plasma processing to be effected by 1 time through 5 times in accordance with the processing strength to be required.
  • the result where the adhesive property between the electrodeposited coating surface being plasma-processed of the invention and the coating surface not plasma-processed and the sealer is measured is shown as follows.
  • a sample where the plasma processing has been effected five times with carrying speed of 0.5 m/min. on the steel plate surface electrodisposedly coated, and a sample not plasma-processed are respectively baked with the sealer being coated.
  • the adhesive property is measured through the measurement of the break strength through pulling of the sealer by the Tensilon apparatus.
  • the adhesive property is also considerably increased with respect to the sealer as compared with the sample not plasma-processed.
  • the results are shown through the measurement of the results of the improved surface where the surface processing is effected with respect to resin mold product having three dimensional shape by the plasma-processing with the use of the plasma generating apparatus of the invention.
  • the bowl-like shape made of polypropylene is used for a resin mold product.
  • Plasma processing is effected on the outer peripheral portion of 10 mm in width from the top portion of the side face of the resin mold product. Two types of plasma processing have been effected, of a) rotating the resin mold product with the discharge electrode being secured, and b) rotating the discharging electrode with resin mold product being fixed.
  • the peeling test has been effected with cellophane tape by effecting a checkerboard squares cutting operation in accordance with JIS (Japanese Industry Standard) K5400 with respect to the outer peripheral portion plasma-processed and not plasma-processed in this manner, with R-215 (two component type urethane paint) made by Nippon Bee Chemical Co. being applied and dried.
  • JIS Japanese Industry Standard
  • K5400 Japanese Industrial Standard
  • R-215 two component type urethane paint
  • the adhesive property of a particular portion only can be improved by the use of the plasma generating apparatus of the invention.
  • the results are shown where the improved results of the surface have been measured by the surface processing effected with respect to the resin mold product whose surface includes the metal portion by plasma processing with the use of the plasma generating apparatus of the invention.
  • the discharging wire of the plasma generating apparatus is coated with Teflon tube.
  • a bumper for automobile made of polypropylene, with the metal portion being exposed onto the surface due to the metal nut closed, processed by a large size of fixed type plasma generating apparatus is used as the resin mold product with the metal portion being masked. A portion of 5 cm in radius around the metal portion including the masked portion of the resin mold product has been plasma-processed.
  • the peeling test has been effected with cellophane tape by effecting a checkerboard squares cutting operation on the surface of the resin mold product after the processing in accordance with JIS K5400, with R-215 (two component type urethane paint) made by Nippon Bee Chemical Co. being applied and dried, thus obtaining the results of 100/100.
  • the evaluation was effected by flowing of the two component type of adhesive agent on the market into the bottom of the grooves, bonding into the insertion the polypropylene plate suitable for the size of the grooves to measure the peel strength of the polypropylene plate with respect to the basic material with the use of the Tensilon, because such direct evaluation as surface tension measurement was difficult in the result of the surface improvement of the bottom of the grooves.
  • the surface having complicated shape such as grooves insufficient in processing effects can be improved in quality in the conventional large, fixed type of plasma generating apparatus by the use of the plasma generating apparatus of the invention.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Claims (9)

  1. Un appareil portatif générateur de plasma atmosphérique, comprenant :
    un circuit de commutation (3) pour convertir de l'énergie, provenant d'une source d'énergie, en une énergie en courant alternatif à haute fréquence, par répétition rapide de commutations d'un commutateur à contacts (S) prévu à l'intérieur ;
    un circuit de transformation de tension (4) incluant un enroulement primaire (6) pour recevoir l'énergie en courant alternatif à haute fréquence, produite à partir dudit circuit de commutation (3), et un enroulement secondaire (7) ayant un nombre de spires plus grand que ledit enroulement primaire, et disposé de manière concentrique par rapport audit enroulement primaire (6), ledit circuit de transformation de tension (4) étant capable de produire une énergie en courant alternatif à haute tension et haute fréquence dans ledit enroulement secondaire (7), en fonction de l'énergie reçue dans ledit enroulement primaire (6) ;
    une électrode de décharge (5) pour provoquer une décharge par effet corona entre ladite électrode de décharge (5) et une électrode opposée (30) maintenue approximativement à la tension de la masse, afin de produire un plasma dans l'air ; et
    une enceinte (2), faite en un matériau électriquement isolant et contenant ledit circuit de commutation (3) et ledit circuit de transformation de tension (4) ;
       dans lequel ledit appareil générateur de plasma est de petites dimensions, en ayant une longueur de 400 à 600 mm et un diamètre de 50 à 80 mm.
  2. L'appareil générateur de plasma atmosphérique selon la revendication 1, dans lequel ladite source d'énergie fournit de l'énergie en courant alternatif, ledit circuit de commutation (3) comprend un électroaimant (16), dans lequel un état excité et un état démagnétisé sont répétés en alternance par l'énergie en courant alternatif fournie à partir de ladite source d'énergie, et ledit commutateur à contacts (S) est propre à être permuté selon l' alternance entre l'état excité et l'état démagnétisé dudit électroaimant (16).
  3. L'appareil générateur de plasma atmosphérique selon la revendication 1, dans lequel ledit circuit de commutation (3) inclut une paire d'électrodes (18, 19) séparées par une petite distance, et dans lequel l'énergie fournie à partir de la source d'énergie, génère une décharge par étincelle entre ladite paire d'électrodes afin de provoquer un courant périodique pour produire l'énergie en courant alternatif.
  4. L'appareil générateur de plasma atmosphérique selon l'une quelconque des revendications 1 à 3, dans lequel ladite électrode de décharge (5) est pourvue d'un fil à décharge (13) fait en un matériau bon conducteur, relié à une borne de sortie dudit enroulement secondaire (7) dudit circuit de transformation de tension (4), et d'un élément de revêtement (14) en une matière diélectrique recouvrant ledit fil à décharge (13).
  5. L'appareil générateur de plasma atmosphérique selon la revendication 4, dans lequel ledit fil à décharge (13) est un fil souple en acier inoxydable, et ledit élément de revêtement (14) est un tube en chlorure de polyvinyle ou en Téflon.
  6. Un procédé de traitement de surface, au moyen de l'appareil générateur de plasma atmosphérique selon l'une quelconque des revendications 1 à 5, lequel procédé comprend les étapes consistant à:
    porter ledit appareil générateur de plasma atmosphérique (1) de telle sorte que son électrode de décharge (5) soit située à proximité de ou en contact avec une surface d'un objet (31) à traiter, ledit objet (31) étant placé sur ladite électrode opposée (30) maintenue approximativement à la tension de la masse ; et
    exécuter le traitement au plasma de la surface dudit objet (31) avec un plasma produit par ladite électrode de décharge (5), de manière à en améliorer la qualité de surface.
  7. Le procédé de traitement de surface selon la revendication 6, dans lequel la surface dudit objet (31) présente une forme compliquée.
  8. Le procédé de traitement de surface selon la revendication 6 ou 7, dans lequel le traitement de surface est effectué uniquement sur une partie de la surface dudit objet (31).
  9. Le procédé de traitement de surface selon l'une des revendications 6 à 8, dans lequel la surface dudit objet (31) à traiter contient une partie métallique.
EP97101968A 1996-02-09 1997-02-07 Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage Expired - Lifetime EP0789505B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2387296 1996-02-09
JP2387296 1996-02-09
JP23872/96 1996-02-09
JP321408/96 1996-12-02
JP8321408A JPH09274997A (ja) 1996-02-09 1996-12-02 小型常圧プラズマ発生装置及び該装置を使用する表面処理方法
JP32140896 1996-12-02

Publications (2)

Publication Number Publication Date
EP0789505A1 EP0789505A1 (fr) 1997-08-13
EP0789505B1 true EP0789505B1 (fr) 2002-07-10

Family

ID=26361306

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97101968A Expired - Lifetime EP0789505B1 (fr) 1996-02-09 1997-02-07 Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage

Country Status (3)

Country Link
EP (1) EP0789505B1 (fr)
JP (1) JPH09274997A (fr)
DE (1) DE69713818T2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120107896A1 (en) * 2008-09-05 2012-05-03 Dirk Wandke Method for Treating a Biological Material Comprising Living Cells

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098547B1 (en) * 2004-02-20 2006-08-29 Phillip Burns Method and apparatus for converting energy to electricity
JP5336691B2 (ja) * 2005-09-16 2013-11-06 国立大学法人東北大学 プラズマ発生装置、表面処理装置、光源、プラズマ発生方法、表面処理方法および光照射方法
JP4902842B2 (ja) * 2005-09-16 2012-03-21 国立大学法人東北大学 プラズマ発生方法およびプラズマ発生装置
DE102007030915A1 (de) 2007-07-03 2009-01-22 Cinogy Gmbh Vorrichtung zur Behandlung von Oberflächen mit einem mittels einer Elektrode über ein Feststoff-Dielektrikum durch eine dielektrische behinderte Gasentladung erzeugten Plasma
GB0919274D0 (en) * 2009-11-03 2009-12-16 Univ The Glasgow Plasma generation apparatus and use of plasma generation apparatus
JP2012094523A (ja) * 2011-11-21 2012-05-17 Tohoku Univ プラズマ発生装置
CN103458600B (zh) * 2013-07-31 2016-07-13 华中科技大学 一种产生大气压弥散放电非平衡等离子体的系统
TWI760857B (zh) * 2020-09-23 2022-04-11 逢甲大學 電漿氣霧裝置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3618412A1 (de) * 1986-05-31 1987-12-03 Oliver Sieke Verfahren und vorrichtung zur behandlung von objekten unter erzeugung chemischer oder physikalischer veraenderungen von gasen, fluessigkeiten, pasten oder feststoffen
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU963565A1 (ru) * 1980-10-24 1982-10-07 Всесоюзный Научно-Исследовательский Институт Безопасности Труда В Горнорудной Промышленности Способ очистки газа
JPS5932937A (ja) * 1982-08-16 1984-02-22 Sankyo Dengiyou Kk イオンガン
JPS63213660A (ja) * 1987-02-28 1988-09-06 Toyoda Gosei Co Ltd コロナ放電処理用対向電極の製造方法
JP2585695B2 (ja) * 1988-03-24 1997-02-26 ユニソイド株式会社 オゾナイザー
JP2939508B2 (ja) * 1989-09-29 1999-08-25 増田 佳子 固体表面のプラズマ処理装置
US5249575A (en) * 1991-10-21 1993-10-05 Adm Tronics Unlimited, Inc. Corona discharge beam thermotherapy system
JPH05330805A (ja) * 1992-05-27 1993-12-14 O C Eng Kk 対向電極式オゾン発生器
JPH06163143A (ja) * 1992-11-13 1994-06-10 Fuji Photo Film Co Ltd コロナ放電処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3618412A1 (de) * 1986-05-31 1987-12-03 Oliver Sieke Verfahren und vorrichtung zur behandlung von objekten unter erzeugung chemischer oder physikalischer veraenderungen von gasen, fluessigkeiten, pasten oder feststoffen
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120107896A1 (en) * 2008-09-05 2012-05-03 Dirk Wandke Method for Treating a Biological Material Comprising Living Cells

Also Published As

Publication number Publication date
EP0789505A1 (fr) 1997-08-13
JPH09274997A (ja) 1997-10-21
DE69713818T2 (de) 2003-02-06
DE69713818D1 (de) 2002-08-14

Similar Documents

Publication Publication Date Title
EP0789505B1 (fr) Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage
US6165376A (en) Work surface treatment method and work surface treatment apparatus
JP4695799B2 (ja) 高周波電力をプラズマ処理チャンバに送給するプラズマ処理システム、及び方法
US5798146A (en) Surface charging to improve wettability
US9357624B1 (en) Barrier discharge charge neutralization
US6465964B1 (en) Plasma treatment apparatus and plasma generation method using the apparatus
US7686912B2 (en) Method for bonding substrates and method for irradiating particle beam to be utilized therefor
TW341530B (en) Method and apparatus for removing particles from surface of article
US20090135537A1 (en) Wire electrode type ionizer
CA2144834A1 (fr) Methode et appareil pour generation de plasma induit
JPS59105863A (ja) 静電塗装用噴射装置
JPS60167330A (ja) リアクテイブイオンエツチ装置のガス供給装置
EP0887836A3 (fr) Appareil de fabrication de dispositifs électroniques
JP3232511B2 (ja) 高周波高圧電源
JP2004158247A (ja) プラズマ処理装置およびプラズマ処理方法
JPH11233487A (ja) 静電吸着電極のクリーニング方法及びその検出装置
JPH1154298A (ja) 可搬式小型表面処理装置
JPH1154297A (ja) 可搬式小型表面処理装置及び可搬式小型表面処理装置の放電処理部材
JP3774654B2 (ja) 粉体塗装装置及び方法
KR20040050003A (ko) 고전압 및 고주파 펄스방식의 오염물질 처리용 전자발생장치
GB2340659A (en) Electrostatic chucks
JP2961444B2 (ja) ポリイミド樹脂の表面改質方法
US3668097A (en) Method for treating surfaces of work pieces to improve the adhesion of printing inks and adhesives thereto
JP2003151796A (ja) 携帯型プラズマ処理装置
KR970065764A (ko) 플라즈마 공정 장치 및 플라즈마 공정 방법

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB

17P Request for examination filed

Effective date: 19980122

17Q First examination report despatched

Effective date: 19990727

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 69713818

Country of ref document: DE

Date of ref document: 20020814

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030411

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20040204

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20040219

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050207

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050901

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20050207