EP0789505A1 - Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage - Google Patents

Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage Download PDF

Info

Publication number
EP0789505A1
EP0789505A1 EP97101968A EP97101968A EP0789505A1 EP 0789505 A1 EP0789505 A1 EP 0789505A1 EP 97101968 A EP97101968 A EP 97101968A EP 97101968 A EP97101968 A EP 97101968A EP 0789505 A1 EP0789505 A1 EP 0789505A1
Authority
EP
European Patent Office
Prior art keywords
power
generating apparatus
small
plasma generating
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97101968A
Other languages
German (de)
English (en)
Other versions
EP0789505B1 (fr
Inventor
Kensuke Akutsu
Yasuhisa Sugawara
Osamu Katayama
Akinori Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Paint Co Ltd
Original Assignee
Nippon Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paint Co Ltd filed Critical Nippon Paint Co Ltd
Publication of EP0789505A1 publication Critical patent/EP0789505A1/fr
Application granted granted Critical
Publication of EP0789505B1 publication Critical patent/EP0789505B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments
    • H05H2245/42—Coating or etching of large items

Definitions

  • the small-sized atmospheric plasma generating apparatus of the first aspect is made in simple, light and compact construction and easy to be carried, with a switching circuit provided with switching contacts to be switched rapidly, a voltage transforming circuit provided with the primary coil and the secondary coil placed in concentric shape, and a discharge electrode on which high voltage and high frequency of AC power to be caused in the secondary coil is applied being engaged with a small-sized casing. Therefore, the small-sized atmospheric plasma generating apparatus can be carried manually or with a robot to cause the discharging electrode to contact with (or be close to) a desired objective thing mounted on the opposed electrode so that the plasma processing can be effected on the portion.
  • the surface characteristics such as adhesive property, paint film adherence property or the like of the surfaces of the processed things become better.
  • a discharge electrode 5 which generates plasma in air around it by causing corona discharge between an opposite electrode and itself when the opposite electrode retained at approximately ground voltage (approximately earth voltage) has been approached thereto while receiving the AC power generated in the voltage transforming circuit 4.
  • approximately ground voltage includes “ground voltage” where the conductor is earthen.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP97101968A 1996-02-09 1997-02-07 Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage Expired - Lifetime EP0789505B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2387296 1996-02-09
JP23872/96 1996-02-09
JP2387296 1996-02-09
JP32140896 1996-12-02
JP8321408A JPH09274997A (ja) 1996-02-09 1996-12-02 小型常圧プラズマ発生装置及び該装置を使用する表面処理方法
JP321408/96 1996-12-02

Publications (2)

Publication Number Publication Date
EP0789505A1 true EP0789505A1 (fr) 1997-08-13
EP0789505B1 EP0789505B1 (fr) 2002-07-10

Family

ID=26361306

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97101968A Expired - Lifetime EP0789505B1 (fr) 1996-02-09 1997-02-07 Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage

Country Status (3)

Country Link
EP (1) EP0789505B1 (fr)
JP (1) JPH09274997A (fr)
DE (1) DE69713818T2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009003613A1 (fr) 2007-07-03 2009-01-08 Cinogy Gmbh Dispositif pour le traitement de surfaces à l'aide d'un plasma généré au moyen d'une électrode par une décharge de gaz à barrière diélectrique par le biais d'un diélectrique solide
CN103458600A (zh) * 2013-07-31 2013-12-18 华中科技大学 一种产生大气压弥散放电非平衡等离子体的系统
CN114247576A (zh) * 2020-09-23 2022-03-29 逢甲大学 等离子气雾装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098547B1 (en) * 2004-02-20 2006-08-29 Phillip Burns Method and apparatus for converting energy to electricity
JP4902842B2 (ja) * 2005-09-16 2012-03-21 国立大学法人東北大学 プラズマ発生方法およびプラズマ発生装置
JP5336691B2 (ja) * 2005-09-16 2013-11-06 国立大学法人東北大学 プラズマ発生装置、表面処理装置、光源、プラズマ発生方法、表面処理方法および光照射方法
DE102008045830A1 (de) * 2008-09-05 2010-03-11 Cinogy Gmbh Verfahren zur Behandlung eines lebende Zellen enthaltenden biologischen Materials
GB0919274D0 (en) * 2009-11-03 2009-12-16 Univ The Glasgow Plasma generation apparatus and use of plasma generation apparatus
JP2012094523A (ja) * 2011-11-21 2012-05-17 Tohoku Univ プラズマ発生装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU963565A1 (ru) * 1980-10-24 1982-10-07 Всесоюзный Научно-Исследовательский Институт Безопасности Труда В Горнорудной Промышленности Способ очистки газа
JPS5932937A (ja) * 1982-08-16 1984-02-22 Sankyo Dengiyou Kk イオンガン
JPS63213660A (ja) * 1987-02-28 1988-09-06 Toyoda Gosei Co Ltd コロナ放電処理用対向電極の製造方法
JPH01242402A (ja) * 1988-03-24 1989-09-27 Yunisoido Kk オゾナイザー
JPH03114533A (ja) * 1989-09-29 1991-05-15 Senichi Masuda 固体表面のプラズマ処理装置
US5249575A (en) * 1991-10-21 1993-10-05 Adm Tronics Unlimited, Inc. Corona discharge beam thermotherapy system
JPH05330805A (ja) * 1992-05-27 1993-12-14 O C Eng Kk 対向電極式オゾン発生器
JPH06163143A (ja) * 1992-11-13 1994-06-10 Fuji Photo Film Co Ltd コロナ放電処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3618412A1 (de) * 1986-05-31 1987-12-03 Oliver Sieke Verfahren und vorrichtung zur behandlung von objekten unter erzeugung chemischer oder physikalischer veraenderungen von gasen, fluessigkeiten, pasten oder feststoffen
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU963565A1 (ru) * 1980-10-24 1982-10-07 Всесоюзный Научно-Исследовательский Институт Безопасности Труда В Горнорудной Промышленности Способ очистки газа
JPS5932937A (ja) * 1982-08-16 1984-02-22 Sankyo Dengiyou Kk イオンガン
JPS63213660A (ja) * 1987-02-28 1988-09-06 Toyoda Gosei Co Ltd コロナ放電処理用対向電極の製造方法
JPH01242402A (ja) * 1988-03-24 1989-09-27 Yunisoido Kk オゾナイザー
JPH03114533A (ja) * 1989-09-29 1991-05-15 Senichi Masuda 固体表面のプラズマ処理装置
US5249575A (en) * 1991-10-21 1993-10-05 Adm Tronics Unlimited, Inc. Corona discharge beam thermotherapy system
JPH05330805A (ja) * 1992-05-27 1993-12-14 O C Eng Kk 対向電極式オゾン発生器
JPH06163143A (ja) * 1992-11-13 1994-06-10 Fuji Photo Film Co Ltd コロナ放電処理装置

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section Ch Week 8332, Derwent World Patents Index; Class J01, AN 83-733577, XP002030623 *
DATABASE WPI Section Ch Week 8414, Derwent World Patents Index; Class M13, AN 84-084296, XP002031061 *
DATABASE WPI Section Ch Week 9126, Derwent World Patents Index; Class A35, AN 91-188531, XP002031063 *
DATABASE WPI Section Ch Week 9403, Derwent World Patents Index; Class E36, AN 94-022590, XP002031062 *
DATABASE WPI Section Ch Week 9428, Derwent World Patents Index; Class A35, AN 94-227983, XP002031064 *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 003 (C - 557) 6 January 1989 (1989-01-06) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 579 (C - 668) 20 December 1989 (1989-12-20) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009003613A1 (fr) 2007-07-03 2009-01-08 Cinogy Gmbh Dispositif pour le traitement de surfaces à l'aide d'un plasma généré au moyen d'une électrode par une décharge de gaz à barrière diélectrique par le biais d'un diélectrique solide
CN103458600A (zh) * 2013-07-31 2013-12-18 华中科技大学 一种产生大气压弥散放电非平衡等离子体的系统
CN103458600B (zh) * 2013-07-31 2016-07-13 华中科技大学 一种产生大气压弥散放电非平衡等离子体的系统
CN114247576A (zh) * 2020-09-23 2022-03-29 逢甲大学 等离子气雾装置
CN114247576B (zh) * 2020-09-23 2023-09-19 逢甲大学 等离子气雾装置

Also Published As

Publication number Publication date
JPH09274997A (ja) 1997-10-21
DE69713818D1 (de) 2002-08-14
DE69713818T2 (de) 2003-02-06
EP0789505B1 (fr) 2002-07-10

Similar Documents

Publication Publication Date Title
US9357624B1 (en) Barrier discharge charge neutralization
EP0789505A1 (fr) Dispositif de dimensions réduites pour engendrer un plasma atmosphérique et procédé de traitement de surfaces en faisant usage
US7686912B2 (en) Method for bonding substrates and method for irradiating particle beam to be utilized therefor
US20030007307A1 (en) Apparatus for removing static electricity using high-frequency high AC voltage
EP0977470A3 (fr) Procédé et dispositif de génération d'un plasma inductif
EP1207546A3 (fr) Dispositif et procédé de traitement d'un substrat par plasma
JPS6232468B2 (fr)
CN101014222B (zh) 用于执行清洁涂敷有有机物质的材料表面的方法的发生器
EP0887836A3 (fr) Appareil de fabrication de dispositifs électroniques
JPS5681678A (en) Method and apparatus for plasma etching
JP2005235448A (ja) プラズマ処理方法及びその装置
JP2010044876A (ja) イオン生成装置
KR100529749B1 (ko) 고전압 및 고주파 펄스방식의 오염물질 처리용 전자발생장치
EP0254747A4 (fr) Laser coaxial a co2 a haute frequence d'excitation.
JPH11233487A (ja) 静電吸着電極のクリーニング方法及びその検出装置
WO2003101153A8 (fr) Appareil industriel d'application de champs electromagnetiques radiofrequence sur des materiaux dielectriques semi-conducteurs
JP3774654B2 (ja) 粉体塗装装置及び方法
JP2004140391A5 (fr)
JPH1154297A (ja) 可搬式小型表面処理装置及び可搬式小型表面処理装置の放電処理部材
JPH1154298A (ja) 可搬式小型表面処理装置
JPH05243160A (ja) 半導体デバイス製造用プラズマｃｖｄ装置
JP2961444B2 (ja) ポリイミド樹脂の表面改質方法
JP2003151796A (ja) 携帯型プラズマ処理装置
JP4558306B2 (ja) 表面改質方法および該表面改質方法で改質した樹脂材
JPH08321394A (ja) 除電器

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB

17P Request for examination filed

Effective date: 19980122

17Q First examination report despatched

Effective date: 19990727

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 69713818

Country of ref document: DE

Date of ref document: 20020814

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030411

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20040204

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20040219

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050207

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050901

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20050207