EP0729834A2 - Tintenstrahlkopf, Substrat für einen Tintenstrahlkopf und Tintenstrahlgerät - Google Patents
Tintenstrahlkopf, Substrat für einen Tintenstrahlkopf und Tintenstrahlgerät Download PDFInfo
- Publication number
- EP0729834A2 EP0729834A2 EP96103179A EP96103179A EP0729834A2 EP 0729834 A2 EP0729834 A2 EP 0729834A2 EP 96103179 A EP96103179 A EP 96103179A EP 96103179 A EP96103179 A EP 96103179A EP 0729834 A2 EP0729834 A2 EP 0729834A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- ink
- heating
- electrodes
- jet head
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 239000010410 layer Substances 0.000 claims abstract description 167
- 238000010438 heat treatment Methods 0.000 claims abstract description 156
- 239000011241 protective layer Substances 0.000 claims abstract description 28
- 239000012212 insulator Substances 0.000 claims abstract description 24
- 238000007599 discharging Methods 0.000 claims description 28
- 238000007639 printing Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 41
- 239000004020 conductor Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 3
- 238000005338 heat storage Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910003862 HfB2 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- -1 Ta and Fe Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7086695 | 1995-03-03 | ||
JP7086695 | 1995-03-03 | ||
JP70866/95 | 1995-03-03 | ||
JP7239195 | 1995-03-06 | ||
JP7239195 | 1995-03-06 | ||
JP72391/95 | 1995-03-06 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0729834A2 true EP0729834A2 (de) | 1996-09-04 |
EP0729834A3 EP0729834A3 (de) | 1997-05-21 |
EP0729834B1 EP0729834B1 (de) | 2002-06-12 |
Family
ID=26411992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19960103179 Expired - Lifetime EP0729834B1 (de) | 1995-03-03 | 1996-03-01 | Tintenstrahlkopf, Substrat für einen Tintenstrahlkopf und Tintenstrahlgerät |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0729834B1 (de) |
DE (1) | DE69621665T2 (de) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0951999A3 (de) * | 1998-04-22 | 2000-05-03 | Hewlett-Packard Company | Zur Reduzierung des Tintentropfvolumens geeigneter Tntenstrahldruckkopf |
US6331049B1 (en) | 1999-03-12 | 2001-12-18 | Hewlett-Packard Company | Printhead having varied thickness passivation layer and method of making same |
WO2002083424A1 (fr) * | 2001-04-13 | 2002-10-24 | Sony Corporation | Tete d'injection de liquide, dispositif d'injection de liquide et procede de fabrication d'une tete d'injection de liquide |
US7025894B2 (en) | 2001-10-16 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Fluid-ejection devices and a deposition method for layers thereof |
EP1968797A2 (de) * | 2005-12-23 | 2008-09-17 | Lexmark International, Inc., Intellectual Property Law Dept. | Energiearme, langlebige mikrofluidausstossvorrichtung |
CN101125482B (zh) * | 2001-10-30 | 2010-04-21 | 佳能株式会社 | 具有贯通孔的结构体、其制造方法及液体排出头 |
US7838155B2 (en) | 2001-03-13 | 2010-11-23 | Sony Corporation | Aqueous electrolyte solution absorber and method for producing it |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5582677A (en) * | 1978-12-18 | 1980-06-21 | Toshiba Corp | Thermal head |
JPS5582678A (en) * | 1978-12-19 | 1980-06-21 | Toshiba Corp | Thermal head |
JPS62202754A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
US4951063A (en) * | 1989-05-22 | 1990-08-21 | Xerox Corporation | Heating elements for thermal ink jet devices |
EP0396315A1 (de) * | 1989-05-01 | 1990-11-07 | Xerox Corporation | Wärmetintenstrahldruckknopf mit Blasen erzeugenden Heizelementen |
EP0596705A2 (de) * | 1992-11-05 | 1994-05-11 | Xerox Corporation | Heizelement für thermischen Tintenstrahldruckkopf |
-
1996
- 1996-03-01 EP EP19960103179 patent/EP0729834B1/de not_active Expired - Lifetime
- 1996-03-01 DE DE1996621665 patent/DE69621665T2/de not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5582677A (en) * | 1978-12-18 | 1980-06-21 | Toshiba Corp | Thermal head |
JPS5582678A (en) * | 1978-12-19 | 1980-06-21 | Toshiba Corp | Thermal head |
JPS62202754A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
EP0396315A1 (de) * | 1989-05-01 | 1990-11-07 | Xerox Corporation | Wärmetintenstrahldruckknopf mit Blasen erzeugenden Heizelementen |
US4951063A (en) * | 1989-05-22 | 1990-08-21 | Xerox Corporation | Heating elements for thermal ink jet devices |
EP0596705A2 (de) * | 1992-11-05 | 1994-05-11 | Xerox Corporation | Heizelement für thermischen Tintenstrahldruckkopf |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 004, no. 125 (M-030), 3 September 1980 & JP 55 082677 A (TOSHIBA CORP), 21 June 1980, * |
PATENT ABSTRACTS OF JAPAN vol. 004, no. 125 (M-030), 3 September 1980 & JP 55 082678 A (TOSHIBA CORP), 21 June 1980, * |
PATENT ABSTRACTS OF JAPAN vol. 012, no. 055 (M-669), 19 February 1988 & JP 62 202754 A (TDK CORP), 7 September 1987, * |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0951999A3 (de) * | 1998-04-22 | 2000-05-03 | Hewlett-Packard Company | Zur Reduzierung des Tintentropfvolumens geeigneter Tntenstrahldruckkopf |
US6293654B1 (en) | 1998-04-22 | 2001-09-25 | Hewlett-Packard Company | Printhead apparatus |
KR100440109B1 (ko) * | 1998-04-22 | 2004-07-15 | 휴렛-팩커드 컴퍼니(델라웨어주법인) | 잉크젯 프린트 헤드 장치 |
US6331049B1 (en) | 1999-03-12 | 2001-12-18 | Hewlett-Packard Company | Printhead having varied thickness passivation layer and method of making same |
US7838155B2 (en) | 2001-03-13 | 2010-11-23 | Sony Corporation | Aqueous electrolyte solution absorber and method for producing it |
US7182440B2 (en) | 2001-04-13 | 2007-02-27 | Sony Corporation | Liquid jet apparatus |
KR100866270B1 (ko) * | 2001-04-13 | 2008-11-03 | 소니 가부시끼 가이샤 | 액체 분사 헤드, 액체 분사 장치 및 액체 분사 헤드의제조 방법 |
US7836598B2 (en) | 2001-04-13 | 2010-11-23 | Sony Corporation | Method of manufacturing a thermal liquid jet head using an etching process |
WO2002083424A1 (fr) * | 2001-04-13 | 2002-10-24 | Sony Corporation | Tete d'injection de liquide, dispositif d'injection de liquide et procede de fabrication d'une tete d'injection de liquide |
US7025894B2 (en) | 2001-10-16 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Fluid-ejection devices and a deposition method for layers thereof |
US7517060B2 (en) | 2001-10-16 | 2009-04-14 | Hewlett-Packard Development Company, L.P. | Fluid-ejection devices and a deposition method for layers thereof |
CN101125482B (zh) * | 2001-10-30 | 2010-04-21 | 佳能株式会社 | 具有贯通孔的结构体、其制造方法及液体排出头 |
EP1968797A2 (de) * | 2005-12-23 | 2008-09-17 | Lexmark International, Inc., Intellectual Property Law Dept. | Energiearme, langlebige mikrofluidausstossvorrichtung |
EP1968797A4 (de) * | 2005-12-23 | 2010-08-11 | Lexmark International Inc Inte | Energiearme, langlebige mikrofluidausstossvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
DE69621665T2 (de) | 2003-03-06 |
EP0729834B1 (de) | 2002-06-12 |
DE69621665D1 (de) | 2002-07-18 |
EP0729834A3 (de) | 1997-05-21 |
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