EP0697377B1 - Verfahren zur Herstellung eines mit einer feinstrukturierten Nesa-Glas-Membrane beschichteten Glassubstrats - Google Patents

Verfahren zur Herstellung eines mit einer feinstrukturierten Nesa-Glas-Membrane beschichteten Glassubstrats Download PDF

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Publication number
EP0697377B1
EP0697377B1 EP95305765A EP95305765A EP0697377B1 EP 0697377 B1 EP0697377 B1 EP 0697377B1 EP 95305765 A EP95305765 A EP 95305765A EP 95305765 A EP95305765 A EP 95305765A EP 0697377 B1 EP0697377 B1 EP 0697377B1
Authority
EP
European Patent Office
Prior art keywords
membrane
glass substrate
photoresist
glass
nesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95305765A
Other languages
English (en)
French (fr)
Other versions
EP0697377A3 (de
EP0697377A2 (de
Inventor
Toshio Minamigawa
Johji Matsumura
Gohei Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honjo Sorex Co Ltd
Original Assignee
Honjo Sorex Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honjo Sorex Co Ltd filed Critical Honjo Sorex Co Ltd
Publication of EP0697377A2 publication Critical patent/EP0697377A2/de
Publication of EP0697377A3 publication Critical patent/EP0697377A3/de
Application granted granted Critical
Publication of EP0697377B1 publication Critical patent/EP0697377B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass

Claims (5)

  1. Verfahren zur Herstellung eines Glassubstrats, das mit einer gemusterten Nesa-Glasmembran beschichtet ist, umfassend die folgenden Schritte: Auftragen eines Photoresists auf ein Glassubstrat, um eine Photoresistmembran zu bilden, Aussetzen der Membran elektromagnetischen Wellen durch eine Maske und anschließend Entwickeln des Photoresists, um eine gemusterte Photoresistmembran auf dem Glassubstrat zu bilden; Formen einer Nesa-Glasmembran auf der gesamten Oberfläche des auf diese Weise mit der gemusterten Photoresistmembran versehenen Glassubstrats; und Entfernen der gemusterten Photoresistmembran zusammen mit der darauf befindlichen Nesa-Glasmembran von dem Glassubstrat, so daß eine gemusterte Nesa-Glasmembran auf dem Glassubstrat zurückbleibt; dadurch gekennzeichnet, daß die Nesa-Glasmembran durch ein chemisches Aufdampfungsverfahren gebildet wird, bei dem (a) eine Lösung aus Dimethylzinn-Dichlorid oder Monomethylzinn-Trichlorid in Wasser mit Trifluoressigsäure oder (b) eine Lösung aus Dimethylzinn-Dichlorid oder Monomethylzinn-Trichlorid in einem Gemisch aus Wasser und Chlorwasserstoffsäure mit Antimontrichlorid verdampft und der resultierende Dampf auf das erhitzte Glassubstrat geblasen wird, um die Nesa-Glasmembran auf dem Glassubstrat zu bilden.
  2. Verfahren nach Anspruch 1, bei dem das Photoresist positiv ist und mit wäßriger Alkalilösung entwickelt wird.
  3. Verfahren nach Anspruch 2, bei dem die wäßrige Alkalilösung eine wäßrige 3-5 Gew.-%-Lösung aus Natriumhydroxid oder Kaliumhydroxid ist.
  4. Verfahren nach einem der vorherigen Ansprüche, bei dem die elektromagnetischen Wellen UV-Strahlen sind.
  5. Verfahren nach einem der vorherigen Ansprüche, bei dem das Glassubstrat eine Silika-Beschichtung auf der Oberfläche aufweist.
EP95305765A 1994-08-18 1995-08-18 Verfahren zur Herstellung eines mit einer feinstrukturierten Nesa-Glas-Membrane beschichteten Glassubstrats Expired - Lifetime EP0697377B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6194065A JP2961350B2 (ja) 1994-08-18 1994-08-18 微細パターンを有するネサ膜の製造方法
JP194065/94 1994-08-18
JP19406594 1994-08-18

Publications (3)

Publication Number Publication Date
EP0697377A2 EP0697377A2 (de) 1996-02-21
EP0697377A3 EP0697377A3 (de) 1996-09-18
EP0697377B1 true EP0697377B1 (de) 2000-03-15

Family

ID=16318375

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95305765A Expired - Lifetime EP0697377B1 (de) 1994-08-18 1995-08-18 Verfahren zur Herstellung eines mit einer feinstrukturierten Nesa-Glas-Membrane beschichteten Glassubstrats

Country Status (6)

Country Link
US (1) US5865865A (de)
EP (1) EP0697377B1 (de)
JP (1) JP2961350B2 (de)
KR (1) KR100329022B1 (de)
AT (1) ATE190594T1 (de)
DE (1) DE69515571T2 (de)

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* Cited by examiner, † Cited by third party
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US6124026A (en) * 1997-07-07 2000-09-26 Libbey-Owens-Ford Co. Anti-reflective, reduced visible light transmitting coated glass article
JP2002208324A (ja) * 2001-01-05 2002-07-26 Honjo Sorex Kk 微細パターンを有するネサ膜の製造方法
GB0123744D0 (en) 2001-10-03 2001-11-21 Qinetiq Ltd Coated optical components
DE10222609B4 (de) * 2002-04-15 2008-07-10 Schott Ag Verfahren zur Herstellung strukturierter Schichten auf Substraten und verfahrensgemäß beschichtetes Substrat
US6904219B1 (en) 2002-07-26 2005-06-07 Boston Laser, Inc. Ultra high-power continuous wave planar waveguide amplifiers and lasers
AU2004259485B2 (en) * 2003-07-24 2009-04-23 Kaneka Corporation Stacked photoelectric converter
US7372610B2 (en) 2005-02-23 2008-05-13 Sage Electrochromics, Inc. Electrochromic devices and methods
KR100666502B1 (ko) 2005-07-15 2007-01-09 학교법인 포항공과대학교 유리 나노 가공 방법
KR100682031B1 (ko) 2005-08-23 2007-02-12 학교법인 포항공과대학교 유리 가공 방법
JP4708965B2 (ja) * 2005-11-10 2011-06-22 キヤノン株式会社 撮像装置
KR100748870B1 (ko) * 2006-05-04 2007-08-14 한국과학기술연구원 에어로젤 후막의 제조방법
DE102012104830A1 (de) * 2012-06-04 2013-12-05 Epcos Ag Vielschichtbauelement und Verfahren zum Herstellen eines Vielschichtbauelements
JP6179410B2 (ja) * 2013-07-29 2017-08-16 株式会社Ｊｖｃケンウッド 撮像装置および撮像装置撮像窓の水滴付着判定方法
CN110183113B (zh) * 2019-05-22 2022-03-22 湖南天羿领航科技有限公司 防眩光玻璃的制备方法
WO2024052668A1 (en) * 2022-09-06 2024-03-14 Pilkington Group Limited Process for depositing a layer

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US3615465A (en) * 1969-06-13 1971-10-26 Nasa Photoetching of metal-oxide layers
JPS5228809B1 (de) * 1970-07-24 1977-07-28
US4187336A (en) * 1977-04-04 1980-02-05 Gordon Roy G Non-iridescent glass structures
JPS55129347A (en) * 1979-03-28 1980-10-07 Chiyou Lsi Gijutsu Kenkyu Kumiai Photomask
AU575141B2 (en) * 1984-04-10 1988-07-21 Atofina Chemicals, Inc. Fluorine-doped tin oxide coating
DE3581835D1 (de) * 1984-05-22 1991-04-04 Nippon Telegraph & Telephone Folie aus polymerisiertem kunststoff mit leitendem muster und verfahren zur herstellung derselben.
US4696837A (en) * 1985-06-25 1987-09-29 M&T Chemicals Inc. Chemical vapor deposition method of producing fluorine-doped tin oxide coatings
JPS61236634A (ja) * 1985-04-09 1986-10-21 Shirakawa Kosumosu Denki Kk 表示装置用透明電極の製造法
US4788079A (en) * 1985-10-30 1988-11-29 M&T Chemicals Inc. Method of making haze-free tin oxide coatings
JPS63310513A (ja) * 1987-06-12 1988-12-19 Shirakawa Kosumosu Denki Kk 酸化錫透明電極の製造法
JPS6445006A (en) * 1987-08-13 1989-02-17 Asahi Glass Co Ltd Transparent conductive substrate
US4948706A (en) * 1987-12-30 1990-08-14 Hoya Corporation Process for producing transparent substrate having thereon transparent conductive pattern elements separated by light-shielding insulating film, and process for producing surface-colored material
JPH0735920A (ja) * 1993-07-26 1995-02-07 Sumitomo Chem Co Ltd 基板上に枠部の機能性塗膜等を形成する方法
US5503952A (en) * 1994-03-22 1996-04-02 Shinto Paint Co., Ltd. Method for manufacture of color filter and liquid crystal display

Also Published As

Publication number Publication date
KR100329022B1 (ko) 2002-09-04
DE69515571D1 (de) 2000-04-20
EP0697377A3 (de) 1996-09-18
JP2961350B2 (ja) 1999-10-12
US5865865A (en) 1999-02-02
JPH0859297A (ja) 1996-03-05
ATE190594T1 (de) 2000-04-15
KR960007482A (ko) 1996-03-22
DE69515571T2 (de) 2000-09-21
EP0697377A2 (de) 1996-02-21

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