EP0608566A2 - Substrat zur Montage von optischen Bauelement und sein Herstellungsverfahren - Google Patents

Substrat zur Montage von optischen Bauelement und sein Herstellungsverfahren Download PDF

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Publication number
EP0608566A2
EP0608566A2 EP93121032A EP93121032A EP0608566A2 EP 0608566 A2 EP0608566 A2 EP 0608566A2 EP 93121032 A EP93121032 A EP 93121032A EP 93121032 A EP93121032 A EP 93121032A EP 0608566 A2 EP0608566 A2 EP 0608566A2
Authority
EP
European Patent Office
Prior art keywords
component mounting
optical
press molding
molding process
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93121032A
Other languages
English (en)
French (fr)
Other versions
EP0608566A3 (de
EP0608566B1 (de
Inventor
Miho Sugihara
Masaki Aoki
Makoto Umetani
Yoshinari Kashiwagi
Kenji Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0608566A2 publication Critical patent/EP0608566A2/de
Publication of EP0608566A3 publication Critical patent/EP0608566A3/de
Application granted granted Critical
Publication of EP0608566B1 publication Critical patent/EP0608566B1/de
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Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3865—Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using moulding techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/0075—Connectors for light guides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/368—Mechanical coupling means for mounting fibres to supporting carriers with pitch conversion between input and output plane, e.g. for increasing packing density
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3834—Means for centering or aligning the light guide within the ferrule
    • G02B6/3838—Means for centering or aligning the light guide within the ferrule using grooves for light guides
    • G02B6/3839—Means for centering or aligning the light guide within the ferrule using grooves for light guides for a plurality of light guides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/413—Profiled surfaces optical fibre alignment, fixing or connecting members having V-grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques

Definitions

  • the present invention relates to a substrate on which optical components used in optical fiber communication for transmitting high-definition image signals or the like are mounted, and a method of producing the substrate. More particularly, the invention relates to an optical component mounting substrate which is used in an input/output coupler for connecting optical components with an optical fiber that functions as a transmission line.
  • Optical components used in optical fiber communication are usually mounted on a substrate for the purpose of integrating and modularizing components comprising a communication system.
  • a substrate is called “an optical component mounting substrate” here.
  • FIG. 8 A typical configuration of an optical component mounting substrate 80 is shown in Figure 8 .
  • a V-shaped groove 82 and a four-cornered groove 83 which crosses the V-shaped groove 82 are formed on a surface of a base material 81 .
  • the V-shaped groove 82 holds an optical fiber (not shown here), called “an optical fiber holding groove” here.
  • the four-cornered groove 83 holds an optical component that will be inserted therein, and be called “an optical component insertion groove” here.
  • a sheath of an intermediate portion of the optical fiber is removed and a clad in the portion is exposed. This exposed portion is called "a clad-exposed portion". Then the optical fiber is placed linearly along the optical fiber holding groove 82 in such a way that the clad-exposed portion is located in the optical component insertion groove 83 . Therefore, the clad-exposed portion of the optical fiber can be optically connected to the optical component inserted and fixed in the groove.
  • the conventional substrate 80 of the prior art is made of silicon or ceramic.
  • the base material 81 is subjected to manufacturing processes such as etching or dicing saw grinding, and then a precision finishing process is conducted so as to form the V-shaped groove 82 and the four-cornered groove 83 as shown in Figure 8 (e.g., Japanese Laid-Open Patent Publication Nos. 4-352109 and 5-134146).
  • a substrate made of plastics is produced by an injection molding method so that grooves can be efficiently formed on its surface (e.g., Japanese Laid-Open Patent Publication No. 5-19131).
  • optical components are optical waveguide devices.
  • the diameter of those waveguides is typically of the order of several microns.
  • optical fibers which are mainly used in optical fiber communication are at present single-mode fibers, which have a core of the order of several microns in diameter and this core functions as an optical transmission line.
  • intervals of the grooves is limited to a certain level by the operational restriction of the grinding machine used in the process. Therefore, when plural optical fibers are to be connected in close proximity to each other, V-shaped grooves which are to hold the fibers must be ground not in parallel but in a radial manner.
  • a photolithograph technique and an etching process can be applied for groove forming.
  • a desired pattern of grooves is formed on a silicon substrate with a photolithograph technique, and then an etching process is conducted with the pattern as a mask in order to form the actual grooves on the substrate surface.
  • having grooves of different depth side by side is difficult to create in this manner because of etching characteristics.
  • the optical component mounting substrate of this invention comprises: a glass base substrate; a first groove for holding an optical fiber, the first groove being formed on a surface of the glass base substrate by a press molding process; and a second groove in which an optical component being inserted, the second groove being formed on the surface of the glass base substrate by the press molding process.
  • the glass base substrate is made of BK-7 glass.
  • the optical component mounting substrate further comprises: a high refractive glass plate having a larger refractive index than that of the glass base substrate, the high refractive glass plate being overlaid on a portion of the surface of the glass base substrate; and a waveguide being formed on a surface of the high refractive glass plate by a press molding process.
  • the high refractive glass plate is made of SF-1 glass.
  • the optical component mounting substrate further comprises electrical conductors on the surface of the glass base substrate.
  • An optical component mounting apparatus of the invention comprises: a pair of glass substrates, on a surface of each of which a groove for holding an optical fiber is formed by a press molding process, the pair of glass substrates being aligned so that the groove on each surface are opposed to each other; and an optical fiber being fixed in the groove by a light-curing adhesive.
  • An optical component mounting apparatus of the invention comprises: a glass base substrate; a first groove for holding an optical fiber, the first groove being formed on a surface of the glass base substrate by a press molding process; a second groove in which an optical component being inserted, the second groove being formed on the surface of the glass base substrate by the press molding process; two or more optical waveguides formed on the surface of the glass base substrate by a press molding process; a thin film heating means for heating the optical waveguides; electrical conductors for conveying electric current to the thin film heating means; and an optical fiber being fixed in the first groove by a light-curing adhesive.
  • the optical component mounting substrate further comprises a third groove for insulating heat conduction to the optical waveguides from other portions of the glass base substrate.
  • a method of producing an optical component mounting apparatus by a press molding process of the invention comprises the steps of: providing a glass base substrate; providing a first mold to be used as a die in the press molding process; and conducting a press molding process with the first mold, thereby forming a groove for holding an optical fiber on the surface of the glass base substrate.
  • the glass base substrate is made of BK-7 glass.
  • the method further comprises the steps of: providing a high refractive glass plate having a larger refractive index than that of the glass base substrate; overlaying the high refractive glass plate on a portion of the surface of the glass base substrate; providing a second mold to be used as a die in the press molding process; and conducting a press molding process with the second mold, thereby forming a waveguide on the surface of the high refractive glass plate.
  • the high refractive glass plate is SF-1 glass.
  • the method further comprises the steps of: aligning an optical fiber in the groove; and fixing the optical fiber by a light-curing adhesive.
  • the method further comprises the steps of: producing another optical component mounting substrate in the same manner; aligning the two optical component mounting substrates so that the groove on each surface are opposed to each other; aligning an optical fiber along the groove between the two optical component mounting substrates; filling a light-curing adhesive into the groove and other spaces between the two optical component mounting substrates; and fixing the light-curing adhesive by light illumination, thus fixing the optical fiber.
  • the first and the second molds are processed in the steps of: providing a base material made of hard metal; and grinding the base material so as to have a desired surface profile for being used as a die in the press molding process.
  • the first and the second molds are processed in the steps of: providing a base material made of hard metal; grinding a surface of the base material so as to have a desired surface profile for being used as a die in the press molding process; and depositing an iridium alloy layer on the surface being ground of the base metal.
  • the first and the second molds are processed in the steps of: providing a base material made of hard metal; depositing a nickel alloy layer on a surface of the base metal; and cutting the surface of the base metal on which the nickel alloy layer is being deposited thereon so as to have a desired surface profile for being used as a die in the press molding process.
  • the first and the second molds are processed in the steps of: providing a base material made of hard metal; depositing a nickel alloy layer on a surface of the base metal; cutting the surface of the base metal on which the nickel alloy layer is being deposited thereon so as to have a desired surface profile for being used as a die in the press molding process; and depositing an iridium alloy layer on the surface being ground of the base metal.
  • the invention described herein makes possible the advantages of (1) providing an optical component mounting substrate at a low manufacturing cost with high positional accuracy, and with high reliability which can be miniaturized and integrated, and is therefore suitable for mass production, and (2) providing an optical component mounting apparatus using the above optical component mounting substrate.
  • Figure 1 is a perspective view showing a configuration of an optical component mounting substrate in an embodiment of the invention.
  • Figure 2 is a perspective view of a mold to be used for producing optical fiber holding grooves and optical component insertion grooves of the optical component mounting substrate shown in Figure 1 .
  • Figure 3 is a perspective view of a glass substrate after the optical fiber holding grooves and the optical component insertion grooves have been formed with the mold shown in Figure 2 .
  • Figure 4 is a perspective view of another mold to be used for producing optical waveguides of the optical component mounting substrate shown in Figure 1 .
  • Figure 5 is a perspective view showing a configuration of an optical component mounting substrate functioning as an optical fiber array in another embodiment of this invention.
  • Figure 6 is a perspective view showing a configuration of an optical component mounting substrate functioning as an optical switch in still another embodiment of this invention.
  • Figures 7A is a side view of a single-mode optical fiber used in the embodiment of this invention shown in Figure 6
  • Figure 7B is a cross-section of the same optical fiber along the line B-B' indicated in Figure 7A .
  • Figure 8 is a perspective view showing a configuration of an optical component mounting substrate of a prior art.
  • Figure 1 is a perspective view showing a configuration of an optical component mounting substrate 10 in an embodiment of this invention.
  • V-shaped optical fiber holding grooves 12 which hold optical fibers
  • optical component insertion grooves 13 in which optical components are inserted
  • optical waveguides 14 are formed on a surface of a glass base substrate 11 made of glass.
  • Figure 2 shows a mold 20 to be used for forming the optical fiber holding grooves 12 and the optical component insertion grooves 13 .
  • a block of sintered hard metal to be a base material 21 is ground so as to have a convex surface profile 22 with a pitch accuracy of ⁇ 0.5 ⁇ m.
  • This convex surface profile 22 functions as a die in a press molding process for forming the V-shaped optical fiber holding grooves 12 (having an apex angle ⁇ of 70 deg. and a depth of 80 ⁇ m).
  • another convex profile 23 to function as a die for forming the optical component insertion grooves 13 is ground so as to have a geometric accuracy of ⁇ 0.5 ⁇ m (of a width of 500 ⁇ m).
  • the surface of hard metal is likely to be reacted with a glass surface in a press molding process. Therefore, the processed face is then coated with an iridium (Ir) alloy layer which is less reactive with the glass surface (such as Ir-rhenium alloy, Ir-platinum alloy, Ir-rhodium alloy or Ir-tantalum alloy) of a thickness of 1.5 ⁇ m, thereby constructing the mold 20 for forming the optical fiber holding grooves 12 and the optical component insertion grooves 13 on the glass base substrate 11 as shown in Figure 1 .
  • the coating process is typically conducted by sputtering, but is not limited to that method. This iridium alloy layer is not shown in Figure 2 .
  • a press molding process is conducted for 3 minutes at a temperature of 590°C and at a pressure of 40 kg/cm2 in nitrogen atmosphere.
  • a preferable range of temperature for this press molding process is 550 to 630°C and a preferable range of pressure for this press molding process is 20 to 80 kg/cm2.
  • the result of the press molding process is shown in Figure 3 .
  • the V-shaped optical fiber holding grooves 12 and the optical component insertion grooves 13 are formed on a surface of the glass base substrate 11 .
  • Figure 4 shows another mold 40 to be used for forming the optical waveguides 14 .
  • another block of sintered hard metal is provided in order to fabricate this mold 40 .
  • a surface of the block is ground so as to have a concave profile 42 (having a groove depth of 7 ⁇ m and a width of 7 ⁇ m) with a pitch accuracy of ⁇ 0.5 ⁇ m.
  • This concave profile 42 functions as a die in a press molding process for forming the optical waveguides 14 on the flat portion 34 of the surface of the glass base substrate 11 shown in Figure 3 .
  • the processed face is coated in the same manner and from the same reason as described before with an iridium (Ir) alloy layer (such as Ir-rhenium alloy, Ir-platinum alloy, Ir-rhodium alloy or Ir-tantalum alloy) of a thickness of 1.5 ⁇ m, thereby constructing another mold 40 for forming the optical waveguides 14 .
  • Ir iridium
  • the iridium alloy layer is not shown in Figure 4 .
  • a press molding process is conducted in a similar manner as described before for 3 minutes at a temperature of 460°C and at a pressure of 10 kg/cm2 in nitrogen atmosphere.
  • a preferable range of temperature for this press molding process is 430 to 490°C and a preferable range of pressure for this press molding process is 5 to 40 kg/cm2.
  • the concave profile 42 is transferred onto a surface of the SF-1 plate 15 and therefore, the optical waveguides 14 are formed on the surface.
  • the glass base substrate 11 of BK-1 and the glass plate 15 of SF-1 are directly bonded with physical bonding at their interface, thereby completing the optical component mounting substrate 10 shown in Figure 1 .
  • Cutting with a diamond tool is generally able to bring better manufacturing accuracy and minuter pitch than the grinding process described before.
  • the hard metal that is used as the molds in the above-mentioned first embodiment is too hard to be cut with the diamond tool.
  • the diamond tool would be severely abraded in such a process.
  • the surfaces of the molds are coated with a nickel alloy layer in the second embodiment of this invention that will be describes hereafter.
  • a block of sintered hard metal is provided as a base material 21 in order to produce a mold 20 .
  • a nickel (Ni) alloy layer (such as Ni-steel, Ni-phosphorus, Ni-boron or Ni-molybdenum) is deposited with a thickness of 100 ⁇ m on a surface of the block. Typically, this is done by a sputtering method.
  • the coated surface of the block is cut by a diamond cutting tool so as to form a convex surface profile 22 with a pitch accuracy of ⁇ 0.3 ⁇ m.
  • This profile is later used as a die for forming optical fiber holding grooves 12 in a press molding process, similarly as in the case of the first embodiment.
  • Another convex profile 23 for forming optical component insertion grooves 13 is also cut so as to have a geometric accuracy of ⁇ 0.3 ⁇ m (of a width of 500 ⁇ m).
  • the processed face is coated with an iridium (Ir) alloy layer (such as Ir-rhenium alloy, Ir-platinum alloy, Ir-rhodium alloy or Ir-tantalum alloy) in the same way and from the same reason as in the first embodiment, thereby constructing the mold 20 for forming the optical fiber holding grooves 12 and the optical component insertion grooves 13 on the surface of the glass base substrate 11 .
  • Ir iridium
  • a nickel (Ni) alloy layer (such as Ni-steel, Ni-phosphorus, Ni-boron or Ni-molybdenum) is deposited with a thickness of 100 ⁇ m on a surface of the block. Typically, this is done by a sputtering method.
  • the coated surface of the block is cut with a diamond cutting tool so as to form a concave profile 42 (having a groove depth of 7 ⁇ m and a width of 7 ⁇ m) with a pitch accuracy of ⁇ 0.3 ⁇ m.
  • This concave 42 profile functions as a die in a press molding process for forming optical waveguides 14 on the surface of the glass base substrate 11 .
  • the processed surface is coated in the same manner and from the same reason as described before with an iridium (Ir) alloy layer (such as Ir-rhenium alloy, Ir-platinum alloy, Ir-rhodium alloy or Ir-tantalum alloy) of a thickness of 1.5 ⁇ m, thereby constructing another mold 40 for forming the optical waveguides 14 of the optical component mounting substrate 10 .
  • Ir iridium
  • the nickel alloy layer and the iridium alloy layer on the molds 20 and 40 are not shown in Figures 2 and 4 .
  • the subsequent press molding processes are conducted in the same manner as those of the first embodiment described before so as to form the optical fiber holding grooves 12 , the optical component insertion grooves 13 and the optical waveguides 14 , thereby constructing the optical component mounting substrate 10 .
  • the optical component mounting substrate produced by cutting with a diamond tool in column No. 2 shows minuter geometric accuracy than that in column No. 1 produced by grinding.
  • an optical fiber array 50 which has a pair of optical component mounting substrates 51 produced in accordance with the invention is described.
  • V-shaped grooves 53 are formed by a press molding process. This process is conducted in the same manner as described before for the first and the second embodiment.
  • the pair of optical component mounting substrates 51 are aligned so that the grooves 53 formed on their surfaces are opposed to each other. Clad-exposed portions 54 of optical fibers 56 are deposited along each of the grooves 53 . Then, a photo-curing adhesive 55 is filled into the grooves 53 and other space between the aligned pair of optical component mounting substrates 51 . Light is illuminated so that the adhesive 55 and the clad-exposed portions 54 of the optical fibers 56 are fixed, thereby constructing the optical fiber array 50 .
  • the depth of the grooves 53 can be adequately determined according to the diameter of the clad-exposed portions 54 of the optical fibers 56 to be fixed. Typically, it is 10 to 200 ⁇ m.
  • the optical component mounting substrates 51 in the optical fiber array 50 are produced by a press molding process.
  • convex and concave profiles of molds are precisely transferred onto a transparent glass base material 52 so that the grooves 53 are precisely formed.
  • Optical components on each surface are located precisely at the designed position. This means that in this manner, mass production of the optical component mounting substrates can be conducted at a low cost with high positional accuracy.
  • the photo-curing adhesive 55 is used to fix the optical fibers 56 . Therefore, light must be illuminated onto the adhesive 55 . Since the optical component mounting substrates 51 of this embodiment are made of transparent glass, light can reach to the adhesive 55 through the substrates 51 both from a front surface 57 and from a back surface 58 of the substrates 51 . This makes the fixation process substantially easier.
  • the clad-exposed portions 54 of the optical fibers 56 are sandwiched between the pair of the substrates 51 and be temporarily but rather firmly fixed. This brings less positional deviation of the fixed fibers 56 .
  • the substrates 51 generally exhibit excellent bonding strength with many kinds of photo-curing adhesives that can be used. Therefore, the optical fibers 56 in the grooves 53 can be fixed more firmly with less positional deviation and without distortion.
  • optical fiber array 50 of this embodiment Another advantage of the optical fiber array 50 of this embodiment is that the fixation process can be visually checked anytime, since the substrates 51 are transparent.
  • optical fiber array 50 can also be coupled with another optical component in the same manner.
  • an optical switch 60 which has an optical component mounting substrate 61 produced in accordance with the invention is described as the fourth embodiment of the invention.
  • grooves 63 , 64 and 65 are formed for holding optical fibers 176 , optical waveguides 66 between which light energy is transferred and grooves 68 for insulating heat conduction to the optical waveguides 66 from other portions of the glass base substrate 62 .
  • the optical fibers 176 are disposed in the grooves 63 , 64 and 65 not only on the right part of the glass base substrate 62 but also on the left part in the same manner.
  • the optical component mounting substrate 61 further comprises thin film heating means 67 for heating the optical waveguides 66 .
  • the heating means 67 is preferably a titanium resistance film.
  • Electrical conductors are also formed on a side face and the back face of the glass base substrate 62 in the following manner: Copper is plated on the side and the back faces of the glass base substrate 62 , a photoresist is overlaid on the plated copper, and a conductor pattern is formed by a photolithography technique so that the resist pattern corresponding to a electrical conductor pattern remains on the surface. Then, unnecessary portions of copper are removed by etching, and the resist washed away, thereby forming the electrical conductors on the surface of the glass base substrate 62 .
  • the optical waveguides 66 with the same propagation constant are formed in parallel and in close proximity to each other. Intervals and length of the optical waveguides 66 in the proximate area 171 are optimized so that light energy can be transferred with 100% efficiency from one waveguide to another when light travels a distance of an odd-number multiple of the perfect coupling length. For the light of a wavelength of 1.3 ⁇ m, a preferable interval of the optical waveguides 66 in the proximate area 171 is 3 ⁇ m and a preferable length of the proximate area 171 is 0.7 mm.
  • the optical waveguides themselves in this case are preferably 8 ⁇ m wide and 10 ⁇ m high.
  • the amount of power consumption at the thin film heating means 67 changes, which further causes a propagation constant of the optical waveguides 66 to change. Consequently, a phase difference which governs transfer of light energy between the optical waveguides 66 can be controlled.
  • the optical coupling between the optical waveguides 66 is alternatively produced or cancelled by controlling and adjusting the current flow of the electrical conductors, thereby the optical switching function is achieved.
  • the optical switch 60 of this embodiment utilizes the thermo-optic effect, it is preferable to reduce heat capacity in the vicinity of the optical waveguides 66 to be as low as possible, in order to attain quick responses. This is the reason why the grooves 68 are formed so as to insulate heat conduction to the optical waveguides 66 from other portions of the glass base substrate 62 .
  • the optical waveguides 66 in the proximate area 171 must be located to be as close as possible in order to achieve effective transfer of light energy.
  • the optical waveguides 66 in an interface area 173 between the optical waveguides 66 and the optical fibers 176 , the optical waveguides 66 must be separated from each other by some intervals in order to avoid crosstalk.
  • the optical waveguides 66 are forced to curve at large angle between the interface area 173 and the proximate area 171 (area 172 in Figure 6 refers). This results in a large radiation mode loss.
  • an optical fiber 70 shown in Figures 7A and 7B may preferably be used in the embodiment.
  • This is a single-mode optical fiber, a side view of which is shown in Figure 7A and a cross-section of which along the line B-B' in Figure 7A is shown in Figure 7B .
  • the optical fiber 70 comprises a jacket 76 , a clad 77 with diameter of 125 ⁇ m and a core 78 with diameter of 9 ⁇ m.
  • One end of the optical fiber 70 is processed so as to form a clad-exposed portion 72 in which the jacket 76 is removed to expose the clad 77 . Furthermore, the outer diameter of the clad 77 is reduced in some portion (called “a clad-reduced portion” 73 here), as shown in Figure 7A , by any process such as etching with hydrofluoric acid.
  • the jacket 76 still remains on other part of the fiber 70 , which is called a jacket-covered portion 71 .
  • grooves 63 , 64 and 65 for holding the clad-reduced portion 73 , the clad-exposed portion 72 and the jacket-covered portion 71 of the optical fibers 70 , respectively, are formed on the surface of the glass base substrate 61 with a press molding process.
  • the intervals of the grooves 63 and 64 may be different between the portion referred to as 63 and the portion referred to as 64 .
  • Such a configuration can be easily produced simply by transferring convex and concave surface profiles of molds, formed in a desired pattern, onto the surface of the glass base substrate by a press molding process.
  • the depth of the grooves 63 , 64 can be adequately determined in accordance with the diameter of the optical fiber 176 to be fixed. Typically, the grooves 63 are 10 to 100 ⁇ m in deep, and the grooves 64 are 30 to 200 ⁇ m deep.
  • the optical component mounting substrate of this invention can be produced easily at a low cost by mass production.
  • the substrate can also attain many advantages such as small coupling loss, small crosstalk, high positional accuracy, excellent reproducibility, high reliability and small manufacturing cost.
  • the invention provides an excellent optical component mounting substrate on which electrical conductors and other components for operating the optical components can be formed. Therefore, the invention is very beneficial for the industry.
  • the optical fiber holding grooves are V-shaped.
  • their cross-sectional shape is not limited to this shape, and other cross-sectional shape such as a U-shape or four-cornered may be used instead.
  • Cross-sectional shapes of other grooves in the embodiments described above are also not limited to what are described here.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)
EP93121032A 1992-12-28 1993-12-28 Substrat mit Rippenwellenleiter und Nuten zur Montage von optischen Bauelementen und sein Herstellungsverfahren Expired - Lifetime EP0608566B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4349097A JPH06201936A (ja) 1992-12-28 1992-12-28 光ファイバアレイ及びその製造方法
JP349097/92 1992-12-28
JP34909792 1992-12-28

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EP0608566A2 true EP0608566A2 (de) 1994-08-03
EP0608566A3 EP0608566A3 (de) 1995-02-01
EP0608566B1 EP0608566B1 (de) 2000-03-08

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US (1) US5425118A (de)
EP (1) EP0608566B1 (de)
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DE (1) DE69328017T2 (de)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996030184A1 (de) * 1995-03-31 1996-10-03 Forschungszentrum Karlsruhe Gmbh Verfahren und vorrichtung zur herstellung von zweischichtigen, lichtleitenden mikrostrukturen durch abformtechnik
EP0793122A2 (de) * 1996-02-27 1997-09-03 Hitachi Cable, Ltd. Optischer Wellenleiter, optisches Modul und diesen verwendendes optisches System
EP0807836A2 (de) * 1996-05-14 1997-11-19 Robert Bosch Gmbh Verfahren zur Herstellung eines integriert optischen Wellenleiterbauteils sowie Anordnung
EP0850886A1 (de) * 1996-12-26 1998-07-01 Hoya Corporation Verfahren zur Herstellung von geformten Glasprodukten
WO1998057206A1 (en) * 1997-06-10 1998-12-17 Minnesota Mining And Manufacturing Company Rib-type integrated optical interconnect
EP0899242A2 (de) * 1997-08-29 1999-03-03 Hoya Corporation Vorform für ein Befestigungselement optischer Fasern und Verfahren zu seiner Herstellung
EP0933656A2 (de) * 1998-02-02 1999-08-04 Matsushita Electric Industrial Co., Ltd. Optisches Wellenleiterbauelement und Herstellungsverfahren dafür
EP0947866A2 (de) * 1998-03-31 1999-10-06 Ngk Insulators, Ltd. Glassubstrat und zwei Stuffen Giessverfahren
US6354111B1 (en) 1997-12-16 2002-03-12 Ngk Insulators Ltd. Press-forming die for glass elements
EP1225464A2 (de) * 1995-02-21 2002-07-24 Ngk Insulators, Ltd. Substrat zur Befestigung einer optischen Faser, zugehöriges Herstellungsverfahren und optisches Bauelement
EP1308760A1 (de) * 2001-11-01 2003-05-07 Samsung Electronics Co., Ltd. Faserarray mit V-Nuten-Substrat und Deckpressplatte
US6870595B1 (en) * 1998-09-22 2005-03-22 Minolta Co., Ltd. Optical filter device and method of making same
CN108940751A (zh) * 2018-09-12 2018-12-07 苏州猎奇智能设备有限公司 自动耦合设备

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4344179C1 (de) * 1993-12-23 1994-10-27 Krone Ag Koppelvorrichtung zwischen einer Glasfaser und einem auf einem Substrat integrierten dielektrischen Wellenleiter
WO1997015850A1 (fr) * 1995-10-27 1997-05-01 Hoya Corporation Element de fixation de fibre optique et procede de fabrication
JPH09152522A (ja) * 1995-11-30 1997-06-10 Sumitomo Electric Ind Ltd 光ファイバ整列部品と光導波路基板との接続構造
JPH09178962A (ja) * 1995-12-27 1997-07-11 Mitsubishi Gas Chem Co Inc 光ファイバアレイおよびその製造法
EP0850887B1 (de) 1996-12-26 2000-03-22 Hoya Corporation Verfahren zum Herstellen eines Glasproduktes durch Pressformen
WO1998040772A1 (fr) * 1997-03-13 1998-09-17 Sumitomo Electric Industries, Ltd. Element de transmission optique et son procede de production
JP3242360B2 (ja) * 1997-03-17 2001-12-25 ホーヤ株式会社 砥石、光ファイバガイドブロック製造用成形型の製造方法、光ファイバガイドブロック製造用成形型、および光ファイバガイドブロックの製造方法
US5970200A (en) * 1997-03-21 1999-10-19 Kabushiki Kaisha Toshiba Apparatus having optical components and a manufacturing method thereof
DE19721721B4 (de) * 1997-05-23 2007-08-30 Robert Bosch Gmbh Verfahren zur Herstellung thermooptischer Schaltelemente
JP2002090560A (ja) * 2000-09-13 2002-03-27 Nec Corp 光通信モジュールとその製造方法
JP4450965B2 (ja) * 2000-09-29 2010-04-14 日本碍子株式会社 光学部品の接着構造
JP4512786B2 (ja) * 2000-11-17 2010-07-28 独立行政法人産業技術総合研究所 ガラス基板の加工方法
AU2002240072A1 (en) * 2001-01-22 2002-07-30 Gregory Hirsch Pressed capillary optics
FR2823859B1 (fr) * 2001-04-19 2003-08-29 Teem Photonics Support de positionnement et de maintien de fibres optiques et son procede de realisation
US7492992B1 (en) * 2003-08-08 2009-02-17 Neophotonics Corporation Bi-directional PLC transceiver device
AU2006200712B1 (en) * 2006-02-21 2006-09-28 Rosewood Research Pty Ltd Spectographic sample monitoring
US7748910B2 (en) * 2006-02-28 2010-07-06 Hitachi Chemical Company, Ltd. Optical system and method of manufacturing the same
WO2015098854A1 (ja) * 2013-12-27 2015-07-02 株式会社フジクラ 光学装置の製造方法
JP7161072B2 (ja) * 2020-02-07 2022-10-25 株式会社フジクラ 光ファイバピッチ変換治具、光コネクタ、ピッチ変換コード、光変換箱、および光ファイバのピッチ変換方法
US11145606B1 (en) * 2020-03-26 2021-10-12 Globalfoundries U.S. Inc. Corner structures for an optical fiber groove

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3428092A1 (de) * 1984-07-30 1986-02-06 Standard Elektrik Lorenz Ag, 7000 Stuttgart Verfahren zur herstellung von v-foermigen nuten fuer eine mehrfachspleissvorrichtung fuer glasfaserbuendel und vorrichtung zur durchfuehrung des verfahrens
US4639074A (en) * 1984-06-18 1987-01-27 At&T Bell Laboratories Fiber-waveguide self alignment coupler
EP0283203A1 (de) * 1987-03-12 1988-09-21 Corning Glass Works Integrierter optischer Baustein und Methode zu seiner Herstellung
JPS6426807A (en) * 1987-07-23 1989-01-30 Canon Kk Production of light guide
JPH0327002A (ja) * 1989-06-23 1991-02-05 Sumitomo Electric Ind Ltd 光導波路の製造方法
JPH04296802A (ja) * 1991-03-27 1992-10-21 Ngk Insulators Ltd 光ファイバ固定用基板の製造法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1138823B (it) * 1981-06-26 1986-09-17 Pirelli Cavi Spa Metodo ed apparecchiatura per la produzione di scanalature in un filamento allungato
US4525035A (en) * 1984-01-05 1985-06-25 Albert Nagler Wide angle eyepiece
US4968109A (en) * 1984-04-19 1990-11-06 E. I. Du Pont De Nemours And Company Press bonding apparatus method for terminating an optical fiber with a plastically deformable termination member
FR2574950B1 (fr) * 1984-12-18 1987-09-25 Corning Glass Works Composants optiques integres en verre et leur fabrication
JPS62276514A (ja) * 1986-05-23 1987-12-01 Sumitomo Electric Ind Ltd 多心光コネクタフエル−ル
US4789217A (en) * 1987-05-05 1988-12-06 Tektronix, Inc. Method of and apparatus for securing elongate members of generally cylindrical form in end-to-end relationship
JPH0237307A (ja) * 1988-07-27 1990-02-07 Nippon Electric Glass Co Ltd 光ファイバ永久接続器
JP2687145B2 (ja) * 1988-09-01 1997-12-08 日本電気硝子株式会社 光ファイバ接続具の製造方法
US4875969A (en) * 1988-10-07 1989-10-24 Eastman Kodak Company Method of making a fiber optic array
US4973127A (en) * 1989-05-31 1990-11-27 At&T Bell Laboratories Multifiber optical connector and method of making same
JPH03221905A (ja) * 1990-01-29 1991-09-30 Sumitomo Electric Ind Ltd プラスチック光導波路、その製法およびそれを用いた光部品
DE69109513T2 (de) * 1990-02-13 1996-01-18 Nippon Telegraph & Telephone Herstellungsverfahren von dielektrischen Vielschichtenfiltern.
JPH0519131A (ja) * 1990-08-17 1993-01-29 Furukawa Electric Co Ltd:The 光部品
JPH05134146A (ja) * 1991-02-06 1993-05-28 Tohoku Nakatani:Kk 多芯光コネクタフエルール
JPH04344604A (ja) * 1991-05-22 1992-12-01 Nec Corp 光ファイバスプライサー
JPH04352109A (ja) * 1991-05-30 1992-12-07 Sumitomo Electric Ind Ltd 光ケーブル多心用窒化珪素系コネクタ
JPH05333231A (ja) * 1992-05-29 1993-12-17 Furukawa Electric Co Ltd:The 光導波路と光ファイバの接続方法
US5308555A (en) * 1992-07-31 1994-05-03 At&T Bell Laboratories Molding of optical components using optical fibers to form a mold

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4639074A (en) * 1984-06-18 1987-01-27 At&T Bell Laboratories Fiber-waveguide self alignment coupler
DE3428092A1 (de) * 1984-07-30 1986-02-06 Standard Elektrik Lorenz Ag, 7000 Stuttgart Verfahren zur herstellung von v-foermigen nuten fuer eine mehrfachspleissvorrichtung fuer glasfaserbuendel und vorrichtung zur durchfuehrung des verfahrens
EP0283203A1 (de) * 1987-03-12 1988-09-21 Corning Glass Works Integrierter optischer Baustein und Methode zu seiner Herstellung
JPS6426807A (en) * 1987-07-23 1989-01-30 Canon Kk Production of light guide
JPH0327002A (ja) * 1989-06-23 1991-02-05 Sumitomo Electric Ind Ltd 光導波路の製造方法
JPH04296802A (ja) * 1991-03-27 1992-10-21 Ngk Insulators Ltd 光ファイバ固定用基板の製造法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 13, no. 210 (P-872) 17 May 1989 & JP-A-01 026 807 (CANON) *
PATENT ABSTRACTS OF JAPAN vol. 15, no. 158 (P-1193) 19 April 1991 & JP-A-03 027 002 (SUMITOMO) *
PATENT ABSTRACTS OF JAPAN vol. 17, no. 107 (P-1496) 4 March 1993 & JP-A-04 296 802 (NGK INSULATORS) 21 October 1992 *
TECHNISCHES MESSEN TM, vol.58, no.4, April 1991, MUNCHEN DE pages 140 - 145 E. VOGES 'Integrierte Optik auf Glas und Silizium f}r Sensoranwendungen' *

Cited By (25)

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EP1225464A3 (de) * 1995-02-21 2004-05-19 Ngk Insulators, Ltd. Substrat zur Befestigung einer optischen Faser, zugehöriges Herstellungsverfahren und optisches Bauelement
EP1225464A2 (de) * 1995-02-21 2002-07-24 Ngk Insulators, Ltd. Substrat zur Befestigung einer optischen Faser, zugehöriges Herstellungsverfahren und optisches Bauelement
WO1996030184A1 (de) * 1995-03-31 1996-10-03 Forschungszentrum Karlsruhe Gmbh Verfahren und vorrichtung zur herstellung von zweischichtigen, lichtleitenden mikrostrukturen durch abformtechnik
US5949945A (en) * 1996-02-27 1999-09-07 Hitachi Cable, Ltd. Optical waveguide, optical module and optical system using the same
EP0793122A2 (de) * 1996-02-27 1997-09-03 Hitachi Cable, Ltd. Optischer Wellenleiter, optisches Modul und diesen verwendendes optisches System
EP0793122A3 (de) * 1996-02-27 1997-10-29 Hitachi Cable Optischer Wellenleiter, optisches Modul und diesen verwendendes optisches System
EP0807836A2 (de) * 1996-05-14 1997-11-19 Robert Bosch Gmbh Verfahren zur Herstellung eines integriert optischen Wellenleiterbauteils sowie Anordnung
EP0807836A3 (de) * 1996-05-14 1997-12-17 Robert Bosch Gmbh Verfahren zur Herstellung eines integriert optischen Wellenleiterbauteils sowie Anordnung
EP0850886A1 (de) * 1996-12-26 1998-07-01 Hoya Corporation Verfahren zur Herstellung von geformten Glasprodukten
US6105395A (en) * 1996-12-26 2000-08-22 Hoya Corporation Manufacturing method for glass molded products
WO1998057206A1 (en) * 1997-06-10 1998-12-17 Minnesota Mining And Manufacturing Company Rib-type integrated optical interconnect
EP0899242A2 (de) * 1997-08-29 1999-03-03 Hoya Corporation Vorform für ein Befestigungselement optischer Fasern und Verfahren zu seiner Herstellung
EP0899242A3 (de) * 1997-08-29 1999-06-09 Hoya Corporation Vorform für ein Befestigungselement optischer Fasern und Verfahren zu seiner Herstellung
US6354111B1 (en) 1997-12-16 2002-03-12 Ngk Insulators Ltd. Press-forming die for glass elements
EP0926101B1 (de) * 1997-12-16 2002-05-22 Ngk Insulators, Ltd. Pressform für Elemente aus Glas
US6314228B1 (en) 1998-02-02 2001-11-06 Matsushita Electric Industrial Co., Ltd. Optical waveguide component and a method of producing the same
EP0933656A2 (de) * 1998-02-02 1999-08-04 Matsushita Electric Industrial Co., Ltd. Optisches Wellenleiterbauelement und Herstellungsverfahren dafür
US6606442B2 (en) 1998-02-02 2003-08-12 Matsushita Electric Industrial Co., Ltd. Optical waveguide component and a method of producing the same
EP0933656A3 (de) * 1998-02-02 2000-02-09 Matsushita Electric Industrial Co., Ltd. Optisches Wellenleiterbauelement und Herstellungsverfahren dafür
EP0947866A3 (de) * 1998-03-31 2002-05-22 Ngk Insulators, Ltd. Glassubstrat und zwei Stuffen Giessverfahren
EP0947866A2 (de) * 1998-03-31 1999-10-06 Ngk Insulators, Ltd. Glassubstrat und zwei Stuffen Giessverfahren
US6870595B1 (en) * 1998-09-22 2005-03-22 Minolta Co., Ltd. Optical filter device and method of making same
EP1308760A1 (de) * 2001-11-01 2003-05-07 Samsung Electronics Co., Ltd. Faserarray mit V-Nuten-Substrat und Deckpressplatte
US6757471B2 (en) 2001-11-01 2004-06-29 Samsung Electronics Co., Ltd. Optical fiber block assembly for minimizing stress concentration and contacting device therewith
CN108940751A (zh) * 2018-09-12 2018-12-07 苏州猎奇智能设备有限公司 自动耦合设备

Also Published As

Publication number Publication date
JPH06201936A (ja) 1994-07-22
DE69328017T2 (de) 2000-09-14
EP0608566A3 (de) 1995-02-01
US5425118A (en) 1995-06-13
DE69328017D1 (de) 2000-04-13
EP0608566B1 (de) 2000-03-08

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