EP0604740A1 - Pompe à membrane - Google Patents

Pompe à membrane Download PDF

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Publication number
EP0604740A1
EP0604740A1 EP93118021A EP93118021A EP0604740A1 EP 0604740 A1 EP0604740 A1 EP 0604740A1 EP 93118021 A EP93118021 A EP 93118021A EP 93118021 A EP93118021 A EP 93118021A EP 0604740 A1 EP0604740 A1 EP 0604740A1
Authority
EP
European Patent Office
Prior art keywords
membrane
diaphragm
pump
pump chamber
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93118021A
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German (de)
English (en)
Other versions
EP0604740B1 (fr
Inventor
Richard Von Der Heyde
Erich Becker
Heinz Riedlinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
Original Assignee
KNF Neuberger GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Publication of EP0604740A1 publication Critical patent/EP0604740A1/fr
Application granted granted Critical
Publication of EP0604740B1 publication Critical patent/EP0604740B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/1207—Machines, pumps, or pumping installations having flexible working members having peristaltic action the actuating element being a swash plate

Definitions

  • the invention relates to a method for operating a diaphragm pump according to the preamble of claim 1; the invention also relates to diaphragm pumps according to the preambles of claims 2, 3 and 4.
  • Diaphragm pumps have been known for a long time, in which the pump chamber is accommodated in a recess in the pump head and is connected to the pump drive by a flat, e.g. B. disc-like membrane is closed (DE 1 184 447).
  • the pumping action is effected by moving the pump membrane using a connecting rod. With its free end, this clamps the membrane between itself and an associated fastening disk in sections.
  • the connecting rod is mounted eccentrically on a crankshaft, so that during the operation of such a diaphragm pump there is a stroke movement oriented approximately perpendicular to the main central plane of the flat diaphragm.
  • Such diaphragm pumps have the advantage, among other things, that no lubricants or lubricant vapors get into the pump chamber from the crankcase.
  • a disadvantage of these diaphragm pumps is, among other things, their comparatively restless running, which is caused by the back and forth Movement of the connecting rod as well as the reciprocating movement of the central area of the membrane are related.
  • Diaphragm pumps are also already known which have an annular cavity-shaped working space which has a radially through a fixed outer wall and a deformable inner wall formed by an annular membrane, the annular membrane being moved by means of a revolving roller piston (cf. DE-PS 2 911 609).
  • a revolving roller piston cf. DE-PS 2 911 609
  • ring diaphragms or the associated pumps are relatively expensive to manufacture and they still require a crank drive.
  • the rolling piston does not allow a simple construction and manufacture of the membrane, the membrane being known to be a wearing part in membrane pumps.
  • the replacement of the ring diaphragm in ring diaphragm pumps is also relatively complex. These also require a relatively large amount of space.
  • the method according to the invention can be implemented by several different devices, e.g. be realized according to claims 2 to 4, for which independent protection is claimed.
  • the diaphragm pump according to claim 2 it is achieved with relatively simple drive means that the central working area of the diaphragm generates a pumping movement by circulating around a pumping space in the case of an approximately flat diaphragm. Due to the special design of the diaphragm drive, the working area of the diaphragm makes a kind of cyclical orbital movement in the pump chamber.
  • the diaphragm pump according to claim 3 can be manufactured with relatively simple means and is particularly advantageous in the case of slow pump speeds.
  • the slow speeds allow the pressure roller rotating around the central axis in the area of the fixed clamping zone of the membrane to move away from the pump chamber more easily.
  • the design of the diaphragm pump according to claim 4 is particularly simple with respect to the drive system for the diaphragm, because a mechanical drive can be at least greatly simplified or possibly completely omitted and the diaphragm movement required for pumping is generated directly via a rotating magnetic field.
  • the pump volume can advantageously be increased by a membrane-side recess in the pump housing head.
  • the tightness of the sealing zone can be mechanically adjusted or adjusted without the corresponding area of the membrane on the web or the adjacent wall of the housing head e.g. must be attached by gluing. This results in simple assembly, especially when changing a membrane.
  • the tightness of the sealing zone can be adjusted variably and in a user-friendly manner by rotating the eccentrically mounted clamping finger about its axis.
  • the spherical section surface shape of the recess results in an enlargement of the pump chamber and thus an increase in the delivery capacity of the pump with simple manufacture of the pump head.
  • the thickening of the membrane results in a good introduction of force at this point.
  • the radial thickening of the pin allows the diaphragm to be guided well and a stable connection between the pin and the diaphragm.
  • the central area between the membrane and the pump chamber wall can be better sealed by the sealing dome.
  • the active pump volume is more precisely delimited towards the center area and a fluctuation in the delivery rate is thus counteracted.
  • a diaphragm pump designated as a whole in FIG. 1, has a pump housing 2 with a diaphragm 3 located therein, which is connected to a drive pin 4.
  • the pump housing 2 is closed off at the top by a housing head 5 which has inlet and outlet openings 6, 7 which are closely spaced in the circumferential direction.
  • the diaphragm 3 is sealingly connected to the pump housing 2 at its clamping edge 32 and its upper side 3a faces the housing head 5, while its lower side 3b faces the part of the pump 1 on the drive side.
  • a pump chamber 8 is located between the diaphragm 3 and the housing head 5.
  • the diaphragm 3 is sealingly connected to the corresponding area of the housing head 5 between the inlet and outlet openings 6, 7, which are spaced apart in the circumferential or pump circumferential direction, but are relatively close to one another.
  • This region 27 extends approximately radially from the membrane edge 3c to the membrane center M (see FIGS. 1 and 2).
  • the membrane 3 On its side facing away from the housing head 5, the membrane 3 has in its central area an approximately bead-like or funnel-shaped attachment projection 21, in which the drive pin 4 engages and is fastened there, for example, in a form-fitting manner or also vulcanized.
  • the drive pin 4 has at its one end facing the membrane 3 a connecting head 4a which is widened, for example, in the shape of a plate. With its other end facing away from the membrane 3, the drive pin 4 is connected via a bearing holder 9 and a roller bearing 11 to a drive shaft 10 which extends along the membrane central axis A.
  • the bearing 11 and the bearing holder 9 are connected in a rotationally fixed manner to the drive shaft 10, with a contact surface 9a of the bearing holder 9 facing the membrane 3 extending obliquely to the central membrane axis A.
  • the drive pin 4 is approximately perpendicular to the inclined contact surface 9a and is eccentric with respect to the central axis A of the membrane 3 and the drive shaft 10 arranged, preferably rotatably mounted in the ball bearing 11.
  • the longitudinal axis 24 of the drive pin 4 extends obliquely to the central axis, the head 4a of the drive pin 4 facing the diaphragm central axis A, which runs coaxially with the central axis A1 of the drive shaft 10. Because of this tilting of the drive pin 4 relative to the central axis A or A1, a corresponding edge region of the connecting head 4a has a smaller distance from the underside of the housing head 5 than the edge region of the connecting head 4a located on the diametrically opposite side of the central plane. In pump mode, i.e. with the drive shaft 10 rotating, the drive pin 4 performs a kind of cyclical wobble movement about the central axis A.
  • the approximately central region 28 of the membrane 3 is pressed in a sealing manner against the central region of the underside of the housing head 5 by the corresponding upward-facing edge region of the connecting head 4a.
  • the respective membrane area, which adjoins the downward sloping edge area of the connecting head 4a is cyclically moved around the central axis A or A1 in time with the rotating movement of the drive pin 4a.
  • the membrane 3 - together with its approximately central, thickened attachment projection 21 - is also eccentrically deflected in a cyclical circumferential manner against the housing head 5, the membrane 3 being elastically deformed.
  • the drive shaft 10 belongs to an electric motor E housed in the motor housing 26.
  • an area of the diaphragm 3 adjacent there is pressed sealingly against the area of the housing head 5 by a clamping finger 13a engaging on the underside 3b of the membrane.
  • the clamping finger 13a extends approximately radially in the direction of the Membrane center M.
  • An associated clamping piece 13 is eccentrically mounted in the side wall 2a of the pump housing 2 and can be operated from the outside via a shaft 26.
  • the membrane region arranged sealingly on the housing head 5 between inlet 5 and outlet 7 forms a sealing zone 27 there (FIGS. 1 and 2), which is shown in dashed lines in Fig. 2.
  • the sealing zone 27 of the diaphragm 3 thus defines a kind of dead center of the diaphragm pump 1 in relation to the pump chamber 8.
  • FIG Recess or formation 18a the side of the housing head 5 facing the membrane 3 has a region, as shown in FIG Recess or formation 18a. Except for this there is a separating web 12 which extends between the inlet and outlet openings 6, 7 approximately radially from the edge region of the housing head 5 to approximately its center and serves as an abutment for the sealing zone 27 of a membrane 3 which is approximately flat on the pump chamber side.
  • the membrane 3 can have a sealing dome 17 in its central region 28, which is modified compared to the embodiment in FIG. 1, and which faces the housing head 5. In the position of use, this is pressed by the rotating drive pin 4 against the adjacent, approximately central area of the underside of the housing head 5. This increases the seal there.
  • a circular membrane 3 which is otherwise approximately flat on its side facing the pump chamber 8, can preferably have a web-like sealing bead 14 running approximately radially from the central sealing dome 17 to the outer edge.
  • the sealing bead 14 is pressed against the sealing area 27 (FIG. 2) of the housing head 5 between the inlet and outlet openings 6, 7 by the clamping fingers 13 arranged on the underside of the membrane 3b, as a result of which this area is better sealed.
  • the pump chamber 8 is then very simply shaped and easy to manufacture (see FIGS. 6 and 7).
  • FIGS. 6 and 7 A recess 18 of the housing head 5 that matches this embodiment of the membrane 3 is shown in FIGS. 6 and 7.
  • the recess 18 is designed as a spherical section surface or dome-shaped and serves to enlarge the pump chamber 8 and thus to increase the pumping capacity.
  • the diaphragm 3 (FIG. 8) has a support 16 on its side facing away from the pump chamber 8, which is approximately cup-shaped in cross section, the pot bottom of the support 16 on the drive pin 4 approximately in the region of the centrally thickened fastening attachment 21 is attached.
  • An approximately radially extending support edge 16a of the support 16 is bent into the plane of the undeformed membrane underside 3b and engages under the adjacent area of the membrane underside 3b. This support 16 counteracts an undesirably strong bending of the respective membrane area.
  • the support 16 In the area of the clamping finger 13, the support 16 has an approximately radial recess 19, so that the clamping finger 13a and the support 16 do not coll
  • a circumferential pressure roller 22 is provided instead of the drive pin 4, which is eccentric with the central drive shaft 10 is connected (Fig.9).
  • the roller axis of rotation 22a extends approximately perpendicular to the longitudinal direction of the drive shaft 10.
  • the pressure roller 22 is rotatably mounted on the roller axis 22a and preferably has approximately the shape of an ellipsoid of revolution or the like.
  • the roller axis 22a is generally oriented radially. With its outer surface 30, it presses the respective area of the membrane 3 'against the pump chamber 8' located between the membrane 3 'and the housing head 5.
  • the pressure roller 22 runs eccentrically around a pivot point lying on the central membrane axis M and presses the membrane 3 cyclically all around against the pump chamber 8 '.
  • the side of the housing head 5 facing the pump chamber 8 ' has a recess 18 which is adapted to the shape of the pressure roller 22.
  • the membrane 3 is at least partially magnetically responsive, so that a magnetic field acting on the membrane 3 and circulating cyclically about the membrane central axis M detects a respective section of the membrane 3 ′′ against the corresponding area of the pump chamber wall 5a ′. presses (Fig. 10).
  • the membrane 3 can be magnetically reactive on its side facing away from the pump chamber 8 or have correspondingly reacting layer sections 23, which are preferably arranged approximately symmetrically to the membrane central axis M.
  • the cyclically rotating magnetic field can be generated by eccentrically the drive shaft 10 magnets 35 are provided.
  • the respectively adjacent layer section 23 on the membrane 3 is deflected or pressed against the pump chamber wall 5a.
  • the diaphragm pump 1 is cyclically conveyed.
  • the longitudinal axis of the drive pin 4 is designated 24. Their extension intersects the central axis A of the membrane 3 in the area of the pump chamber wall 5a. With such an arrangement, the membrane center point M (FIG. 5) remains comparatively low in movement when the drive pin 4 is pivoted in accordance with the rotational movement of the drive shaft. As can be clearly seen from FIG. 8, in the case of the undeflected membrane 3, the longitudinal axis 24 of the drive pin 4 lies in the extension of the central membrane axis A. While in the exemplary embodiment according to FIG.
  • the clamping finger 13 extends from the edge of the side wall 2a of the pump housing extends only up to about half the radial extent of the diaphragm 3 and there the radial extent of the connecting head 4a of the drive pin 4 projects only slightly beyond its diameter, in the embodiment according to FIG. 8 the clamping finger 13 is brought close to the central axis A of the diaphragm 3 .
  • the connecting head 4a 'then also has a greater radial extent and, if necessary, also leads to a greater stiffening of the central region 28 of the membrane 3.
  • connecting head 4a is asymmetrical, as it is 8, 12 to 15 is shown in a greatly enlarged scale. Accordingly, this connecting head 4a 'has an approximately V-shaped recess 44 in the region of the clamping finger 13a, which is only indicated by dash-dotted lines in FIG. 13. If the connecting head 4a 'is - as in the operating state - inside the membrane 3 and the drive pin assumes the position according to FIG. 1, 12 or 15, the section according to FIG.
  • FIG. 12 shows through the housing head 5, the membrane 3 and the upper part of the pump housing 2 according to the section line AA in FIG. 13, that the connecting head 4a ′ designed according to FIG. 13 and the clamping fingers 13 do not impede one another.
  • FIG. 14 which corresponds to a section BB corresponding to the section line of the same name in FIG. 13, it is shown that in the plane perpendicular to the drawing plane of FIG. 12, the connecting head 4a 'according to FIG. 13 is in the transverse plane shown in FIG. 14 Pressing movement with respect to the membrane 3, which is pressed there against the pump chamber wall 5a, exerts.
  • FIG. 15 shows a section through the pump head 5 and the upper part of the pump housing 2 together with membrane 3 and drive pin 4 together with the associated connecting head 4a ′, the connecting head 4a and the clamping finger 13 being mirror-inverted compared to the illustration in FIG. 14, but fitting to FIG. 2 are shown that the membrane 3 - in operation in the rotating state of the drive pin 4 - in the area of the sealing section 31 (Fig. 2 and 17) pressed against the pump chamber wall 18 of the housing head 5 both with the standing sealing zone 27 and with the rotating sealing section 31 is.
  • FIG. 11 it can be seen in connection with Fig. 8 that the membrane 3 with its support 16 is in a train connection 41.
  • holding openings 42 are provided on the support edge 16a of the membrane support 16 and snap-in pins 43 matched to these holding openings 42 on the underside 3b of the membrane. These are arrow-shaped in cross-section and have abutment surfaces 43a, with which they can rest against a stop surface 38 of the holding openings 42. Since the membrane 3 is elastic, the snap-in pins 43 can be pressed into the holding openings 42 according to the push-button principle, so that they lock into place there. Instead of holding openings 42 which are round in cross section, as shown in FIG.
  • such openings can also be designed, for example, as holding openings which are analogous in cross section and extend in the circumferential direction in segments. Then instead of snap-in pins 43, analog profiled and curved snap-in segments will be provided for the membrane 3.
  • the support 16 ensures that the diaphragm 3 is not undesirably deflected too much in the direction away from the housing head 5 in the direction of the motor housing 26 and is accordingly overstressed. If a connection 41 according to the design according to FIG.
  • the support in connection with the train connections 11 can ensure that, for example, if the membrane pump 1 is used for vacuum generation or suction, the membrane 3 is also removed from the pump chamber wall 5a in accordance with the pot-like support 16. Since the cup-shaped support 16 in turn receives its movement sequence from the drive pin 4 of the diaphragm 3, a substantially predetermined cyclical movement results for the active area of the diaphragm 3, in particular also where the diaphragm 3 "opens", ie, enlarges, the pump chamber 8 should.
  • an additional diaphragm 39 can be seen in addition to the diaphragm 3 connected to the connecting head 4a of the drive pin 4, which represents the working diaphragm in the diaphragm pump 1, an additional diaphragm 39 can be seen. It is somewhat below, ie closer to the drive for the diaphragm 3 Arranged space and has a radial expansion, which is dimensioned so that it is less than the pump is exposed to elastic deformations as the membrane 3 that serves as the working membrane and closes the pump chamber 8.
  • the additional membrane 39 serves as a safety membrane. Because it is exposed to less deformation, it generally has a longer lifespan than the working membrane 3 and is still functional only when the working membrane 3 breaks, for example. The safety membrane 39 then prevents the pumped medium from entering the drive area or exiting the membrane pump 1 there.
  • FIG. 17 shows a modified embodiment of the diaphragm pump 1 in the area of its housing head 5 or the adjacent part of the pump housing 2 in a highly schematic manner.
  • the membrane 3 there is provided on its side 3b facing away from the pump chamber 8 with magnetic layer sections 23.
  • a magnet carrier 20 in the form of an approximately flat disk 20 which is connected to the drive shaft 10 in a rotationally fixed connection.
  • Permanent magnets 35 are located on the magnetic carrier disk 20, spaced apart and arranged approximately in strips, as can be seen well from the supervision of such a magnetic carrier disk 20.
  • electromagnets can also be provided in the magnet carrier disk 20.
  • the individual electric or permanent magnets 35 are spaced apart from one another in the circumferential direction.
  • the magnetic layer sections 23 arranged on the underside 3b of the membrane 3 can be spaced analogously. They are flexible according to the membrane 3 and can also be designed both as permanent magnets and as electromagnets. If necessary, they can also be embedded in the membrane on its underside, for example as permanent magnets. With regard to their polarity, the magnetic layer sections 23 of the membrane 3 on the one hand and the individual magnets 35 arranged on the magnet carrier 20 are selected such that they are Circulating drive shaft 10 of the diaphragm 3 cyclically impose a movement in the direction of the pump chamber wall 5a or in the opposite direction, so that the diaphragm 3 performs a circumferential pump movement in the manner described in connection with FIG. 1.
  • the magnetic carrier disk 20 ' shows a slight modification of the magnetic carrier disk 20 '.
  • the force is transmitted to the membrane 3 by means of magnetic or electromagnetic forces via the magnetic field (s) F (FIGS. 10 and 16).
  • the mechanical rotary movement can be carried out in the embodiment according to FIGS. 17 can be achieved relatively easily by rotating the drive shaft 10.
  • the membrane 3 is equipped with magnetic layer sections 23 or similar magnetic parts, however, no rotating magnet carrier 20 or 20 'is required. It is sufficient if a circumferential electromagnetic field F is created which is sufficiently close below the membrane 3.
  • a circumferential electromagnetic field F is created which is sufficiently close below the membrane 3.
  • FIG. 18 shows an internal top view of a housing head 5 similar to that according to FIG. 3, a contour line being drawn in FIG. 18. If one cuts the housing head 5 according to FIG. 18 along this contour line KL, the contour line cut according to FIG. 19 is obtained. It can be seen that the recess 18 of the housing head 5 drops from the separating web 12 in the somewhat curved manner, as in FIG. 3 indicated at web 12. In its central region, the recess 18a then runs flat along the contour line KL, in the surface region e.g. spherical cutout similar to FIGS. 7 and 6.
  • the recess 18 in the housing head 5 does not have to be circular in the edge region nor have a web 12 nor be flat in the central region.
  • a more Egyptian outline shape of the recess 18 can be seen from FIG. 20.
  • FIG. 20 a contour line KL is again shown in broken lines.
  • FIG. 21 shows the course of the “depth” of the position of the bottom of the recess 18, measured along the contour line KL, the individual segments of the contour line from FIGS. 19 u.
  • Fig. 21 can be found in Figs. 18 and 20 respectively.
  • the shape of the recess can be adapted to the respectively favorable conditions for the membrane movement.
  • FIG. 22 shows a top view of the pot-shaped support 16.
  • the support edge 16a can be seen there and within it a recess 19 which lies in the region of the clamping finger 3a and prevents excessive material pressure there.
  • a through bore 60 for receiving the drive pin 4 is located in the center of the pot-shaped support 16.
  • connection between a membrane 3 on the one hand and the cup-shaped support 16 on the other hand (FIG. 11) and / or the seal between the diaphragm on the one hand and the housing head 5 on the other hand or its separating web 12 (FIG. 3) cannot only be achieved by a mechanical connection such as the train connection 41 in FIG. 11 or the clamping piece 13 in FIG. 1. If necessary, the connection can also be effected by gluing, if, for example, the pumped medium and the other operating conditions permit this. However, preference is given to the positive mechanical connections, as shown, for example, in FIGS. 11 u. 8 are provided.
  • the clamping piece 13 is mounted eccentrically to the longitudinal axis of the clamping finger in the side wall 2a of the pump housing by means of a shaft 26 connected to it. Accordingly, by turning the shaft 26 projecting outward from the pump housing 2, the clamping force between the clamping finger 13, the housing head 5 and the intermediate sealing zone 27 of the diaphragm 3 can be adjusted appropriately.
  • the surfaces of the diaphragm pump 1 which come into contact with the delivery medium are chemically neutral with respect to this delivery medium.
  • the side 3a of the membrane 3 facing the delivery medium can accordingly be provided with a chemically inert layer 70, as is indicated, for example, in sections in FIG. 12.
  • a chemically inert layer 70 can be made of PTFE (polytetrafluoroethylene), for example.
  • the housing head 5 is also made of stainless steel which is resistant to the conveying medium.
  • the housing head 5 can also be provided with correspondingly resistant coatings on the sides that come into contact with the aggressive delivery medium, for example with PTFE, as is also indicated in a short section, for example in FIG. 12, at the pump chamber 8 there. If necessary, you can also use the entire
  • the recess 19 in the pot-shaped support also prevents the bead 16 belonging to the membrane 3 in an appropriate tilted position of the support 16 from causing an undesirably strong pressure in the area of this bead 14.
  • FIGS. 7 A preferred embodiment of the housing head 5 with a spherical cap-like shape of the pump chamber 8 is shown in FIGS. 7 shown. However, it is also possible to choose different forms, as shown in FIGS. 18 to 21 and described in this connection.
  • the method according to the invention for operating a diaphragm pump 1 or the associated pumps 1 can run at a relatively high speed, for example at 300 rpm. This also corresponds to the speed of a normal three-phase motor, so that a reduction gear or the like additional measures can be avoided.
  • Previously known, comparable peristaltic pumps that is to say those with a circumferentially squeezed hose with comparable performance, have a considerably greater production outlay than the diaphragm pump 1 according to the invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP93118021A 1992-12-31 1993-11-06 Pompe à membrane Expired - Lifetime EP0604740B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4244619 1992-12-31
DE4244619A DE4244619A1 (de) 1992-12-31 1992-12-31 Verfahren zum Betreiben einer Membranpumpe sowie Membranpumpe zum Durchführen des Verfahrens

Publications (2)

Publication Number Publication Date
EP0604740A1 true EP0604740A1 (fr) 1994-07-06
EP0604740B1 EP0604740B1 (fr) 1996-07-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP93118021A Expired - Lifetime EP0604740B1 (fr) 1992-12-31 1993-11-06 Pompe à membrane

Country Status (4)

Country Link
US (1) US5533886A (fr)
EP (1) EP0604740B1 (fr)
JP (1) JPH06235381A (fr)
DE (2) DE4244619A1 (fr)

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EP2441483A1 (fr) * 2010-10-13 2012-04-18 Fresenius Kabi Deutschland GmbH Module de pompe, module à base de pompe et système de pompe
WO2015193407A3 (fr) * 2014-06-17 2016-02-25 Tcs Micropumps Limited Pompe à fluide
DE202017107243U1 (de) 2017-08-01 2018-11-09 Schwarzer Precision GmbH & Co. KG Membranpumpe zur berührungslosen Betätigung der Membranen von mehreren Arbeitsräumen einer Membranpumpe
EP3438455A2 (fr) 2017-08-01 2019-02-06 Schwarzer Precision GmbH & Co. KG Pompe à membrane et procédé d'actionnement sans contact des membranes d'une pluralité de chambres de travail d'une pompe à membrane
DE102017128271A1 (de) 2017-08-01 2019-02-07 Schwarzer Precision GmbH & Co. KG Membranpumpe und Verfahren zur berührungslosen Betätigung der Membranen von mehreren Arbeitsräumen einer Membranpumpe

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US6464475B1 (en) * 2000-04-06 2002-10-15 Idromeccanica Bertolini S.P.A. Head for pumps in particular of the membrane or piston type and method for its manufacture
US6544109B1 (en) 2000-08-31 2003-04-08 Micron Technology, Inc. Slurry delivery and planarization systems
DE50110636D1 (de) 2000-09-14 2006-09-14 Beenker Jan W Verfahren und maschine zur förderung von medien
US7040869B2 (en) 2000-09-14 2006-05-09 Jan W. Beenker Method and device for conveying media
US6506012B2 (en) 2001-05-18 2003-01-14 Alan D. Tuck, Jr. Nutating centrifugal pump
EP1308622B1 (fr) * 2001-11-06 2013-12-18 Oken Seiko Co., Ltd. Pompe à membrane
SE520340C2 (sv) * 2002-03-14 2003-06-24 Billy Nilson Ambulatorisk membranpump
DE20210502U1 (de) * 2002-07-06 2003-11-20 Braun Melsungen Ag Peristaltische Schlauchpumpe
DE102004002079A1 (de) * 2004-01-15 2005-08-11 Knf Flodos Ag Membranpumpe
US7013793B2 (en) 2004-03-22 2006-03-21 Itt Manufacturing Enterprises Diaphragm mounting method for a diaphragm pump
JP2005344569A (ja) * 2004-06-01 2005-12-15 Toyota Industries Corp ポンプ
KR101285678B1 (ko) * 2004-09-20 2013-07-12 메델라 홀딩 아게 안전 밸브를 구비한 흡입 펌프
EP1662142A1 (fr) * 2004-11-26 2006-05-31 Debiotech S.A. Pompe péristaltique
DE102006002924B3 (de) 2006-01-20 2007-09-13 Albert-Ludwigs-Universität Freiburg Fluidhandhabungsvorrichtung und Verfahren zum Handhaben eines Fluids
US8017409B2 (en) 2009-05-29 2011-09-13 Ecolab Usa Inc. Microflow analytical system
US9618129B2 (en) * 2010-10-07 2017-04-11 Vanderbilt University Normally closed microvalve and applications of the same
CN102536756B (zh) * 2012-01-13 2015-05-13 厦门坤锦电子科技有限公司 一种微型液泵
GB2528031B (en) * 2014-05-29 2020-05-27 Charles Austen Pumps Ltd A Rotary Pump
DE102014117793A1 (de) * 2014-12-03 2016-06-09 Pfeiffer Vacuum Gmbh Vakuumeinrichtung
DE102014118924A1 (de) 2014-12-17 2016-06-23 Qonqave Gmbh Fördervorrichtung
EP3297699B1 (fr) * 2015-05-18 2020-04-29 Smith & Nephew PLC Systèmes de pompe thermo-assistés pour utilisation dans le traitement des plaies par pression négative
KR101956218B1 (ko) * 2017-03-06 2019-03-08 윤병일 무맥동 정량 펌프

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US9062673B2 (en) 2010-10-13 2015-06-23 Fresenius Kabi Deutschland Gmbh Pump module, pump base module and pump system
EP2441484A1 (fr) * 2010-10-13 2012-04-18 Fresenius Kabi Deutschland GmbH Module de pompe, module à base de pompe et système de pompe
US9157430B2 (en) 2010-10-13 2015-10-13 Fresenius Kabi Deutschland Gmbh Pump module, pump module and pump system
EP2441485A1 (fr) * 2010-10-13 2012-04-18 Fresenius Kabi Deutschland GmbH Module de pompe, module à base de pompe et système de pompe
WO2012049263A1 (fr) * 2010-10-13 2012-04-19 Fresenius Kabi Deutschland Gmbh Module de pompe, module de base de pompe et système de pompe
WO2012049262A3 (fr) * 2010-10-13 2012-12-20 Fresenius Kabi Deutschland Gmbh Module de pompe, module de base de pompe et système de pompe
WO2012049260A3 (fr) * 2010-10-13 2012-12-20 Fresenius Kabi Deutschland Gmbh Module de pompe, module de base de pompe et système de pompe
CN103221082A (zh) * 2010-10-13 2013-07-24 弗雷泽纽斯卡比德国有限公司 泵模块、泵基础模块和泵系统
CN103221082B (zh) * 2010-10-13 2016-01-13 弗雷泽纽斯卡比德国有限公司 泵模块、泵基础模块和泵系统
KR20140114264A (ko) * 2010-10-13 2014-09-26 프레제니우스 카비 도이치란트 게엠베하 펌프 모듈, 펌프 베이스 모듈 및 펌프 시스템
EP2441483A1 (fr) * 2010-10-13 2012-04-18 Fresenius Kabi Deutschland GmbH Module de pompe, module à base de pompe et système de pompe
EP2441958A1 (fr) * 2010-10-13 2012-04-18 Fresenius Kabi Deutschland GmbH Module de pompe, module à base de pompe et système de pompe
US8784079B2 (en) 2010-10-13 2014-07-22 Fresenius Kabi Deutschland Gmbh Pump module, pump base module and pump system
KR101867802B1 (ko) * 2010-10-13 2018-06-18 프레제니우스 카비 도이치란트 게엠베하 펌프 모듈, 펌프 베이스 모듈 및 펌프 시스템
US9470220B2 (en) 2010-10-13 2016-10-18 Fresenius Kabu Deutschland Gmbh Pump module, pump base module and pump system
EA025893B1 (ru) * 2010-10-13 2017-02-28 Фрезениус Каби Дойчланд Гмбх Базовый насосный модуль и насосная система
EA026794B1 (ru) * 2010-10-13 2017-05-31 Фрезениус Каби Дойчланд Гмбх Насосный модуль, базовый насосный модуль и насосная система
WO2015193407A3 (fr) * 2014-06-17 2016-02-25 Tcs Micropumps Limited Pompe à fluide
DE202017107243U1 (de) 2017-08-01 2018-11-09 Schwarzer Precision GmbH & Co. KG Membranpumpe zur berührungslosen Betätigung der Membranen von mehreren Arbeitsräumen einer Membranpumpe
EP3438455A2 (fr) 2017-08-01 2019-02-06 Schwarzer Precision GmbH & Co. KG Pompe à membrane et procédé d'actionnement sans contact des membranes d'une pluralité de chambres de travail d'une pompe à membrane
DE102017128271A1 (de) 2017-08-01 2019-02-07 Schwarzer Precision GmbH & Co. KG Membranpumpe und Verfahren zur berührungslosen Betätigung der Membranen von mehreren Arbeitsräumen einer Membranpumpe
EP3438455A3 (fr) * 2017-08-01 2019-04-17 Schwarzer Precision GmbH & Co. KG Pompe à membrane et procédé d'actionnement sans contact des membranes d'une pluralité de chambres de travail d'une pompe à membrane

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DE59303259D1 (de) 1996-08-22
JPH06235381A (ja) 1994-08-23
EP0604740B1 (fr) 1996-07-17
DE4244619A1 (de) 1994-07-07
US5533886A (en) 1996-07-09

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