EP0450579A2 - Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren - Google Patents

Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren Download PDF

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Publication number
EP0450579A2
EP0450579A2 EP91105208A EP91105208A EP0450579A2 EP 0450579 A2 EP0450579 A2 EP 0450579A2 EP 91105208 A EP91105208 A EP 91105208A EP 91105208 A EP91105208 A EP 91105208A EP 0450579 A2 EP0450579 A2 EP 0450579A2
Authority
EP
European Patent Office
Prior art keywords
monocrystal ingot
stage
monocrystal
grinding
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91105208A
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English (en)
French (fr)
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EP0450579B1 (de
EP0450579A3 (en
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2085938A external-priority patent/JPH0794111B2/ja
Priority claimed from JP8593990A external-priority patent/JPH07115273B2/ja
Priority claimed from JP2085937A external-priority patent/JPH0794110B2/ja
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to EP93117845A priority Critical patent/EP0588376B1/de
Publication of EP0450579A2 publication Critical patent/EP0450579A2/de
Publication of EP0450579A3 publication Critical patent/EP0450579A3/en
Application granted granted Critical
Publication of EP0450579B1 publication Critical patent/EP0450579B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B23Q3/186—Aligning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1405—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with a series disposition of similar working devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1421—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with a parallel disposition of working devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B24B41/062—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically between centres; Dogs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G05B19/4015—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes going to a reference at the beginning of machine cycle, e.g. for calibration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45156—Grind on lathe
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50152—Align axis cylinder, tube with rotation axis machine

Definitions

  • the present invention relates to a monocrystal ingot attitude-adjusting/surface-grinding/conveying apparatus for adjusting the attitude of a monocrystal ingot in such a manner that the grinding rotation center of the monocrystal ingot is made coincide with the center of the clamp rotational shaft of a surface grinding device, grinding the surface of the monocrystal ingot to form a cylindrical shape by the surface grinding device and conveying the monocrystal ingot after it has been ground.
  • Monocrystal ingots manufactured by a CZ method or an FZ method are respectively made to be in the form of a cylinder by the following processes:
  • the monocrystal ingot attitude adjusting device may further include two X-Y stages for moving the hands independently in a vertical plane.
  • the width of the monocrystal ingot attitude adjusting device cannot be reduced satisfactorily. What is even worse, the grinding rotation center of the monocrystal ingot cannot be made accurately coincide with the rotation center line of the rotational clamp shaft.
  • a second object of the present invention is to provide a monocrystal ingot attitude adjusting device capable of accurately and desirably adjusting the attitude of a monocrystal ingot when the monocrystal ingot is clamped by a surface grinding device while preventing the application of excessively large force to the monocrystal ingot.
  • a third object of the present invention is to provide a monocrystal ingot rotating device for a surface grinding device, the monocrystal ingot rotating device being capable of making the grinding rotation center accurately coincide with the rotation center line of the rotational clamp shaft of a monocrystal ingot rotating device.
  • the present invention provides a monocrystal ingot conveying/surface-grinding apparatus comprising: a plurality of monocrystal ingot surface grinding devices disposed serially; a guide means, for example, a rail, disposed along the monocrystal ingot surface grinding devices disposed serially; and monocrystal ingot conveying/attitude-adjusting device for loading/unloading the monocrystal ingot to and from the monocrystal ingot surface grinding devices, the monocrystal ingot conveying/attitude-adjusting device being arranged movable along the guide means.
  • the monocrystal ingot surface grinding device comprises: a pair of rotational clamp shafts having the aligned rotational center lines and disposed to confront each other; means for causing the front surfaces of the rotational clamp shafts to abut against the two end surface of the monocrystal ingot having instructed grinding rotation centers so as to support the monocrystal ingot; means for rotating the rotational clamp shafts; and means for causing a grindstone to abut against the surface of the monocrystal ingot so as to grind it to form a cylindrical shape.
  • the monocrystal ingot conveying/attitude-adjusting device comprises: hands for holding the monocrystal ingot; a travelling portion guided by the guide means so as to move as desired; and an intermediate portion disposed between the hands and the travelling portion and arranged to move the hands so that the grinding rotation centers of the two end surface of the monocrystal ingot held by the hands are made coincide with the rotation center line of the rotational clamp shaft of the monocrystal ingot surface grinding device.
  • the monocrystal ingot conveying/attitude-adjusting device since the monocrystal ingot conveying/attitude-adjusting device has a function of loading/unloading the monocrystal ingot to and from the monocrystal ingot surface grinding device, only one monocrystal ingot conveying/attitude-adjusting device is able to sufficiently load/unload the monocrystal ingots to and from a plurality of the monocrystal ingot surface grinding devices.
  • the guide mean is a rail disposed, for example, above the monocrystal ingot surface grinding devices. Furthermore, the monocrystal ingot conveying/attitude-adjusting device is arranged in such a manner that its travelling portion is disposed above the hands.
  • the above-described intermediate portion of the monocrystal ingot conveying/attitude-adjusting device has an X-Y- ⁇ - ⁇ stage having a base, an X-stage which is moved with respect to the base in a direction of an X-axis, a Y-stage which is moved in a direction of a Y-axis which is perpendicular to the X-axis, a ⁇ -stage which is rotated around an axis which parallels the X-axis and ⁇ -stage which is rotated around an axis which parallels the Y-axis.
  • the monocrystal ingot In general, the monocrystal ingot must be held at its two portions by a pair of hands. Therefore, two X-Y stages for individually moving the two hands in a vertical plane may be provided for the intermediate portion. However, the width of the monocrystal ingot conveying/attitude-adjusting device is enlarged excessively. Furthermore, the grinding rotation center of the monocrystal ingot cannot be made accurately coincide with the rotation center line of the rotational clamp shaft. That is, two operational steps must be performed in order to make the grinding rotation center line to parallel the rotation center line of the rotational clamp shaft. Furthermore, two operational steps must be performed for the purpose of making the above-described two center lines coincide with each other. However, if the motors for respectively operating the two hands are rotated for the same time, the two center lines cannot be accurately made coincide with each other because of the difference between the stoppage accuracies of the two motors and the mechanical dimensional errors between the two hands.
  • the width of the monocrystal ingot conveying/attitude-adjusting device can be halved. Furthermore, the above-described two center lines can be made accurately coincide with each other due to individual four steps, for example, as shown in Fig. 12. Furthermore, the application of excessive force to the monocrystal ingot can be prevented.
  • each of the X-axis and Y-axis may be in a plane which is perpendicular to the direction of the rotation center line of each of clamp rotational shafts 70A and 70B of a monocrystal ingot rotating device 46. Therefore, in an ordinary case in which the direction of the rotation center line extends in a horizontal direction, the above-described X-axis extends in the horizontal direction and as well as in direction perpendicular to the direction of the above-described rotation center line, while the above-described Y-axis extends in a perpendicular direction.
  • the stages constituting the above-described X-Y- ⁇ - ⁇ stage may be connected to one another in an optional order.
  • the X-stage is fastened to the base
  • the Y-stage is fastened to the X-stage
  • the ⁇ -stage is fastened to the Y-stage
  • the ⁇ -stage is fastened to the ⁇ -stage
  • the hands are fastened to the ⁇ -stage or the base.
  • the mechanism for operating the Y-stage with respect to the X-stage for example, comprises: a feed screw journalled by the X-stage and having a right-hand thread and a left-hand thread formed in its single shaft; a pair of nuts respectively received by the left-hand thread and the right-hand thread; a pair of slide blocks which are moved together with the nuts and having inclined surfaces which do not run parallel to the axial direction of the feed screw; a pair of fixing blocks secured to the Y-stage in such a manner that their surfaces running parallel to the inclined surfaces are disposed to confront the inclined surfaces of the slide blocks; and means for guiding the slide blocks along the inclined surfaces of the fixing blocks, whereby the interval between the X-stage and the Y-stage is changed by rotating the feed screw.
  • the above-described monocrystal ingot surface grinding devices have through holes in the shaft core portions of the rotational clamp shafts, and includes cameras for outputting image signals; endoscopes the base portions of which are disposed adjacent to image Lenses of the cameras, while the front portions of the same are inserted into the through holes; and means for detecting the positions of the grinding rotation centers with respect to the rotation center lines of the rotational clamp shafts in accordance with the image signals.
  • the end surfaces of the monocrystal ingot can be observed from a direction substantially perpendicular to the surfaces. Therefore, the grinding rotation center can be made accurately coincide with the rotation center line of the rotational clamp shafts of the monocrystal ingot rotating device.
  • the above-described endoscopes are bore scopes having light guides, wherein light sources are fastened to the base portions of the light guides and light emitted from the light sources is emitted from the front portions of the bore scopes so as to irradiate the end surfaces of the monocrystal ingot.
  • the grinding rotation center can be clearly observed even if the rotational clamp shafts and the end surfaces of the monocrystal ingot are made come closer to each other. Therefore, the accuracy of the above-described coincidence established between the two center lines can be further improved.
  • the above-described bore scope is inserted into the above-described through hole while having, for example, a bearing fitted around the outer surface thereof.
  • the optical axis of the bore scope and the rotation center line of the rotational clamp shaft can be made coincide with each other as a result of the above-described insertion of the bore scope. Therefore, the position of the above-described grinding rotation center with respect to the rotation center line of the rotational clamp shaft can be easily detected. Furthermore, the position at which the bore scope must be fastened can extremely easily be adjusted. If the rotational clamp shaft is mechanically vibrated or its position is undesirably deviated, the optical axis of the bore scope and the rotation center line of the rotational clamp shaft can be made always coincide with each other. Therefore, an accurate coincidence of the two center lines can be maintained for a satisfactorily long time.
  • the above-described monocrystal ingot conveying/surface-grinding apparatus may further comprise: a loader, for example, a conveyer disposed below the rail and arranged to convey the monocrystal ingot which has not been ground by the monocrystal ingot surface grinding devices; and an unloader, for example, a conveyer disposed below the rail and arranged to convey the monocrystal ingot which has been ground by the monocrystal ingot surface grinding devices.
  • a loader for example, a conveyer disposed below the rail and arranged to convey the monocrystal ingot which has not been ground by the monocrystal ingot surface grinding devices
  • an unloader for example, a conveyer disposed below the rail and arranged to convey the monocrystal ingot which has been ground by the monocrystal ingot surface grinding devices.
  • Figs. 1 to 13 respectively illustrate a first embodiment of the present invention
  • Fig. 1 illustrates a monocrystal ingot conveying/surface-grinding apparatus.
  • Each of monocrystal ingots 10 to be processed is in the form of a substantially cylindrical shape since its two end portions are axially cut off.
  • the thus formed monocrystal ingot 10 is loaded into a rotational-center marker 12 by a conveying robot (omitted from illustration).
  • the rotational-center marker 12 detects the outer shape of the monocrystal ingot 10 by measuring a plurality of positions of the surface of the monocrystal ingot 10. As a result, the rotational-center marker 12 calculates the center line of rotation of the monocrystal ingot 10 to be ground, the center line enabling the monocrystal ingot 10 to be in the form of a cylindrical shape having the maximum diameter.
  • grinding center points MA and MB are marked at intersections between the above-described center line and the two end surfaces of the monocrystal ingot 10.
  • the monocrystal ingots 10 are, by the above-described conveying robot , placed on supporting frames 142 (see Fig. 4A) fastened to the upper surface of a conveyer belt 141 of a conveyer 14 at predetermined intervals.
  • Travelling rails 16A and 16B having the same shape are disposed adjacent to the ceiling of the factory in such a manner that they run parallel each other in a direction perpendicular to the conveyer 14.
  • the travelling rails 16A and 16B respectively have monocrystal ingot conveying/attitude-adjusting devices 20A and 20B fastened so as to be capable of moving along the travelling rails 16A and 16B.
  • monocrystal ingot surface grinding devices 221A to 225A and 221B to 225B of the same structure are, at the same intervals on the floor of the factory, disposed in series along the travelling rails 16A and 16B.
  • the monocrystal ingot conveying/attitude-adjusting device 20A and the monocrystal ingot surface grinding devices 221A to 225A are able to communicate with each other via a communication cable 18A.
  • the monocrystal ingot conveying/attitude-adjusting device 20B and the monocrystal ingot surface grinding devices 221B to 225B are able to communicate with each other via a communication cable 18B.
  • the communication cable 18A and the monocrystal ingot conveying/attitude-adjusting device 20A are magnetically connected to each other in a non-contact manner.
  • the communication cable 18B and the monocrystal ingot conveying/attitude-adjusting device 20B are magnetically connected to each other in a non-contact manner.
  • the monocrystal ingot conveying/attitude-adjusting device 20A conveys the monocrystal ingots 10 placed on the conveyer 14 so as to supply them to the monocrystal ingot surface grinding devices 221A to 225A. Furthermore, the monocrystal ingot conveying/attitude-adjusting device 20A places the monocrystal ingots 11 which have been ground to form cylindrical shapes by the monocrystal ingot surface grinding devices 221A to 225A on the conveyer 23 disposed in parallel to the conveyer 14.
  • Fig. 2 illustrates a sequence of the conveying operation performed by the monocrystal ingot conveying/attitude-adjusting device 20A.
  • the monocrystal ingot surface grinding devices 221A to 225A have no subject to be ground. Therefore, the monocrystal ingot conveying/attitude-adjusting device 20A conveys the monocrystal ingots 10 placed on the conveyer 14 so as to supply them to the above-described monocrystal ingot surface grinding devices 221A to 225A.
  • the monocrystal ingot conveying/attitude-adjusting device 20A receives the above-described signal. Then, the flow advances to next step 104. (104) The monocrystal ingot conveying/attitude-adjusting device 20A is moved to a position above the monocrystal ingot surface grinding device 22iA which has transmitted the signal which denotes the completion of the grinding work.
  • the monocrystal ingot conveying/attitude-adjusting device 20A holds the cylindrical monocrystal ingot 11 which has been held by the monocrystal ingot surface grinding device 22iA so that the cylindrical monocrystal ingot 11 is sent from the monocrystal ingot surface grinding device 22iA.
  • the monocrystal ingot conveying/attitude-adjusting device 20A is moved to the conveyer 23 in a state shown in Fig. 1.
  • the monocrystal ingot conveying/attitude-adjusting device 20A places the cylindrical monocrystal ingot 11, which has been held by it, on the conveyer 23.
  • the monocrystal ingot conveying/attitude-adjusting device 20A is subsequently moved to a position above the conveyer 14.
  • the monocrystal ingot conveying/attitude-adjusting device 20A holds and lifts the monocrystal ingot 10 placed on the conveyer 14.
  • the monocrystal ingot conveying/attitude-adjusting device 20A is moved to a position above the monocrystal ingot surface grinding device 22iA which has transmitted the signal which denotes the completion of the grinding work.
  • the monocrystal ingot conveying/attitude-adjusting device 20A downwards moves the monocrystal ingot 10 so as to supply it to the monocrystal ingot surface grinding device 22iA.
  • the monocrystal ingot surface grinding device 22iA holds the monocrystal ingot 10 so that the surface of the monocrystal ingot 10 is ground to form a cylindrical shape.
  • the monocrystal ingot conveying/attitude-adjusting device 20A comprises the following elements 201 to 206.
  • a travelling portion 201 is fastened to the travelling rail 16A in such a manner that it can be moved in the lengthwise direction of the travelling rail 16A by a motor M1.
  • the travelling portion 201 further moves, by a motor M2 thereof, upwards/downwards a vertical arm 203 having the lower end portion to which the upper end portion of an attitude adjusting portion 202 is secured.
  • the vertical arm 203 and the travelling portion 201 are connected to each other by, for example, a rack and pinion.
  • the attitude adjusting portion 202 has two wrists 204 secured to the lower end portion of the same in such a manner that the two wrists 204 are disposed in parallel in the vertical direction of the drawing sheet (see Fig. 1).
  • the wrists 204 respectively comprise hands 205 and 206 having the same structure, the hands 205 and 206 being respectively operated vertically in the opposite directions to each other by the same distance by corresponding motors M3 provided for the wrists 204.
  • a feed screw having a right-hand thread in the upper portion thereof and a left-hand thread in the lower portion thereof is rotated by the torque motor M3 so that the hands 205 and 206 are respectively vertically moved via nuts respectively received by the upper portion and the lower portion of the feed screw.
  • the reason why the torque motors M3 are provided for the corresponding wrists 204 is that the monocrystal ingot 10 has different diameters depending upon its portions.
  • the attitude adjusting portion 202 has four motors mounted for the purpose of operating an X-Y- ⁇ - ⁇ stage 24 (see Fig. 9) to be described later.
  • step 114 will now be described in detail with reference to Figs. 3 and 4A to 4G.
  • the monocrystal ingot conveying/attitude-adjusting device 20A is, as shown in Fig. 4A, positioned in such a manner that its attitude adjusting portion 202 is positioned adjacently to the travelling portion 201 (the uppermost position). Furthermore, the two hands 205 and 206 are positioned farthest away from each other. (200) In this state, the travelling portion 201 downwards moves the attitude adjusting portion 202 to the level at which the monocrystal ingot 10 placed on the conveyer 14 is positioned before the attitude adjusting portion 202 is subsequently stopped as shown in Fig. 4B. (202) The conveyer belt 141 is operated forward by one step (by the distance between the monocrystal ingots 10 placed on the conveyer 14).
  • the monocrystal ingot 10 is positioned between the hands 205 and 206 as shown in Fig. 4C.
  • the torque motor M3 of the wrist 204 is turned on so as to move the hands 205 and 206 in a direction in which they approach each other, causing a state shown in Fig. 4D to be realized.
  • the rotation of the torque motor M3 is maintained as it is.
  • the travelling portion 201 upwards moves the attitude adjusting portion 202 to its uppermost position before it is stopped in a state shown in Fig. 4E.
  • step 114 shown in Fig. 2 are performed.
  • step 110 shown in Fig. 2 are retroactively performed in a direction from step 206 to step 200 shown in Fig. 3.
  • the mechanical structure of the monocrystal ingot surface grinding device 221A is constituted by a monocrystal ingot rotating device 46 and a grindstone moving device 48.
  • the grindstone moving device 48 moves its grindstone 49 in all directions with respect to the monocrystal ingot 10 which is being rotated while being held by the monocrystal ingot rotating device 46. Since the grindstone moving device 48 is constituted in a known manner, description about is omitted here. Then, the monocrystal ingot rotating device 46 will now be described.
  • a base plate 52 secured to a base frame 50 has a leg plate 54A and two parallel rails 56 respectively secured thereto.
  • a slider 58 is received by the two rails 56 in such a manner that the slider 58 is able to move on the rails 56 in a direction perpendicular to the leg plate 54A.
  • a leg plate 54B confronting the leg plate 54A is secured to the top surface of the slider 58.
  • a hydraulic cylinder 60 is secured to the upper surface of the leg plate 54B in such a manner that a piston rod 62 of the hydraulic cylinder 60 parallels the rails 56.
  • the front portion of the piston rod 62 is secured to a stopper 64.
  • a slider 65 is secured to the lower surface of the stopper 64, the slider 65 being received by the rail 56.
  • the stopper 64 is secured to the rail 56 at an optional position in the lengthwise direction of the rail 56 by a screw 66 which is inserted into the stopper 64.
  • bearings 68A are secured to the two end portions of a through hole formed in the leg plate 54A.
  • a rotational clamp shaft 70A is received by the above-described bearings 68A.
  • An annular rubber plate 72A is pasted to the front surface of the rotational clamp shaft 70A.
  • a spur gear 74 is secured to the base portion of the rotational clamp shaft 70A, the base portion of the rotational clamp shaft 70A projecting over the leg plate 54A.
  • a motor 76 is secured to the leg plate 54A via a bracket (omitted from illustration), the motor 76 having a motor shaft 77 to which a spur gear 78, which is arranged to be engaged with the spur gear 74, is secured.
  • the rotational clamp shaft 70A has, in the shaft core portion thereof, a through hole 79A formed concentrically with the rotational clamp shaft 70A.
  • the front portion of a bore scope 82A, to which a bearing 80A is fastened around the outer surface thereof, is inserted into the through hole 79A so as to be supported by the through hole 79A.
  • the bore scope 82A is arranged in such a manner that the base portion of a hard pipe 821 is fastened to a base portion 822.
  • a CCD camera 84A is secured to the base portion 822 to confront an ocular lens 823 disposed in the base portion 822.
  • the base portion 822 is supported by the lower leg plate 54A via a bracket (omitted from illustration).
  • a light source 86A is secured to the base end portion of the pipe 821. Irradiating light emitted from the light source 86A passes through a light guide (an optical fiber) 824 disposed inside the pipe 821 so as to be emitted outside through the front portion of the bore scope 82A so as to irradiate the end surface of the monocrystal ingot 10. Light reflected from the end surface of the monocrystal ingot 10 passes through an objective lens 825 and a relay lens 826 respectively disposed in the pipe 821. Reflected light further passes through the ocular lens 823 before it is imaged on an image sensor (omitted from illustration) included in the CCD camera 84A. An image signal taken from the CCD camera 84A is supplied to a confirmation monitor TV 88A.
  • an image plane A of the monitor TV 88A displays an image NA of the central point to be ground, the image NA corresponding to the grinding central point MA marked on the end surface of the monocrystal ingot 10.
  • the monitor TV 88A also displays an XY rectangular coordinate the intersection of which corresponds to the optical axis of the bore scope 82A and the rotation center line of the rotational clamp shaft 70A.
  • Fig. 7 illustrates the structure of a portion adjacent to the leg plate 54B.
  • the structure of this portion is the same as that shown in Fig. 6 except for an arrangement in which the rotational clamp shaft 70B freely rotates. Therefore, the same elements are given the same reference numerals and symbol A is replaced by symbol B, the description of the same elements being omitted here.
  • a slide cover (omitted from illustration) which covers the upper portion and the front portion between the leg plates 54A and 54B is disposed in such a manner that it is able to slide in the lengthwise direction of the base plate 52. Furthermore, a slide sheet (omitted from illustration), through which a grindstone 49 is inserted, is provided for the grindstone moving device 48 in such a manner that the slide sheet covers the backside between the leg plates 54A and 54B, the slide sheet being able to move together with the grindstone 49.
  • image signals transmitted from the CCD cameras 84A and 84B are also supplied to a position measuring device 90.
  • the position measuring device 90 calculates deviated coordinates ( ⁇ X A , ⁇ Y A ) and ( ⁇ X B , ⁇ Y B ) of the grinding central points MA and MB from the optical axes of the CCD cameras 84A and 84B so as to supply the result of the calculation to a controller 92.
  • Fig. 13A illustrates the coordinate of each of the images NA and NB of the grinding central points.
  • the controller 92 operates an X-stage 26, a Y-stage 28, a ⁇ -Stage 30 and ⁇ -stage 32 of the X-Y- ⁇ - ⁇ stage 24 via a driver 94 provided for the attitude adjusting portion 202.
  • a driver 94 provided for the attitude adjusting portion 202.
  • the driver 94 and the controller 92 are optically or magnetically connected to each other in a non-contact manner.
  • Fig. 10 is an enlarged cross sectional view taken along line A-A of Fig. 9.
  • Rails 251 are secured to the two end portions of the lower surface of the base 25, the rails 251 being disposed in a direction perpendicular to the drawings sheet.
  • a feed screw 252 is received in a direction perpendicular to the drawing sheet by a bearing (omitted from illustration) at the central portion of the lower surface of the base 25 in such a manner the feed screw 252 is rotated by a motor M5.
  • a slider 261 which receives the rails 251 is secured to the upper surface of the X-stage 26.
  • a nut 262 which receives the above-described feed screw 252 is secured to the central portion of the upper surface of the X-stage 26.
  • Leg plates 264 are secured to the two end portions of the lower surface of the X-stage 26 to confront each other. Furthermore, a feed screw 265 is rotatably supported by the leg plates 264, the feed screw 265 having a right-hand thread and a left-hand thread formed symmetrically with each other similarly to the portion for operating the hands 205 and 206. Nuts 266 are received by the above-described threads. The feed screw 265 is rotated by a motor M6 secured to the leg plate 264. Each of the nuts 266 is secured to the central portion of the lower surface of the slide plate 267.
  • Sliders 269 are secured to the end portions of the upper surfaces of the slide plates 267, the sliders 269 being received by rails 270 which are secured to the lower surface of the X-stage 26 in a lateral direction of Fig. 9.
  • Taper blocks 268 are secured to the end portions of the lower surfaces of the slide plates 267.
  • a rail 271 is secured to the lower surface (inclined surface) of each of the taper blocks 268, the rail 271 being received by a guide 281 of the same shape as that of the above-described slider 269.
  • the guides 281 are secured to the two end portions of the upper surface of the Y-stage 28 via taper blocks 282.
  • a connecting piece 283 is secured to an end portion of the lower surface of the Y-stage 28, while another connecting piece 301 is secured to an end portion of the upper surface of the ⁇ -stage 30. Furthermore, a pin 302 is inserted into the above-described connecting pieces 283 and 301.
  • a feed screw 303 is inserted into another end portion of the ⁇ -stage 30. Furthermore, a spur gear 304 fastened to the base portion of the feed screw 303 is rotated by a motor M7 secured to the ⁇ -stage 30. The front portion of the feed screw 303 pushes the horizontal portion of an L-shape piece 284 secured to the side surface of the Y-stage 28.
  • a ⁇ -stage 32 which is a worm wheel, is rotatably received onto the lower surface of the ⁇ -stage 30 by a pin 322 via a spacer 321.
  • a worm 323 received by a bearing (omitted from illustration) is engaged with the ⁇ -stage 32, the worm 323 being rotated by a motor M8 secured to the ⁇ -stage 30.
  • the wrist 204 shown in Fig. 4A is, although omitted from illustration, secured to the ⁇ -stage 32.
  • Fig. 11 illustrates the direction in which the monocrystal ingot 10 is moved by the X-Y- ⁇ - ⁇ stage 24 by arrows X, Y, ⁇ and ⁇ .
  • the center of rotation ⁇ parallels the X-axis, while that of rotation ⁇ parallels the Y-axis.
  • the grinding central points MA and MB are made accurately coincide with the rotational central lines of the rotational clamp shafts 70A and 70B.
  • the hydraulic cylinder 60 is turned on so that the monocrystal ingot 10 is held between the rotational clamp shafts 70A and 70B. Furthermore, the motor 76 is rotated so that the monocrystal ingot 10 is rotated. Thus, the surface of the monocrystal ingot 10 is ground by the grindstone moving device 48. As a result, the cylindrical monocrystal ingot 11 having almost the maximum diameter can be obtained.
  • Fig. 14 illustrates a monocrystal ingot conveying/attitude-adjusting device 20C according to the second embodiment of the present invention.
  • the monocrystal ingot conveying/attitude-adjusting device 20C is arranged in such a manner that its conveying portion 201A moves along a rail 16C arranged on the floor or a factory.
  • An X-Y- ⁇ - ⁇ stage 24A which is constituted by substantially vertically inverting the X-Y- ⁇ - ⁇ stage 24 shown in Fig. 9, is disposed on the base plate 25 of the conveying portion 201A.
  • the same elements are given the same reference numerals, and their descriptions are omitted here.
  • a wrist 204 which is the same as that shown in Fig. 4A, is secured to the upper surface of the ⁇ -stage 32.
  • the hands 206 and 207 which are the same as those shown in Fig. 4A, project over the front surface of the wrist 204 in a direction upwards perpendicular to the drawing sheet.
  • the monocrystal ingot conveying/attitude-adjusting device 20C is arranged in such a manner that the function of the vertical arm 203 shown in Fig. 4A is replaced by the Y-stage 28.
  • a structure may be employed which is arranged in such a manner that a U or O-shape rail is employed in place of the rails 16A and 16B and thereby the range, in which the monocrystal ingot conveying/attitude-adjusting devices 20A and 20B are able to move, is enlarged.
  • the efficiency of the operation of the monocrystal ingot conveying/attitude-adjusting devices 20A and 20B can further be improved.
  • the guide means may be replaced by a light reflecting paint line drawn on the floor of the factory.
  • the monocrystal ingot conveying/attitude-adjusting device is arranged in such a manner that its lower portion is in the form of a car.
  • the monocrystal ingot conveying/attitude-adjusting device moves along the above-described line while detecting the line by a reflection type photo-detector.
  • elements having the same structures as those of the rail 16A and the monocrystal ingot conveying/attitude-adjusting device 20A may be disposed between the rotational center marker 12 and the conveyer 14.
  • the conveyer 14 serving as a loader and a conveyer 23 serving as an unloader may be replaced by cassettes, which are disposed at predetermined intervals in the vertical direction for the purpose of placing/accommodating the monocrystal ingots, and a lifter for moving upwards/downwards the cassettes.
  • a structure in which a bore scope 82A is employed to serve as an endoscope, is described.
  • another structure may be employed because the front portion of the endoscope must be inserted into the through hole 79A.
  • a structure may be employed which is arranged in such a manner that the base portion of a metal pipe is inserted into the through hole 79A, the base portion of the metal pipe is secured to the leg plate 54A and the front portion of a flexible endoscope is inserted into the metal pipe.
EP91105208A 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren Expired - Lifetime EP0450579B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP93117845A EP0588376B1 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2085938A JPH0794111B2 (ja) 1990-03-31 1990-03-31 周面研削装置用単結晶インゴット回転装置
JP8593990A JPH07115273B2 (ja) 1990-03-31 1990-03-31 単結晶インゴット姿勢調整装置
JP2085937A JPH0794110B2 (ja) 1990-03-31 1990-03-31 単結晶インゴット搬送・周面研削装置
JP85938/90 1990-03-31
JP85939/90 1990-03-31
JP85937/90 1990-03-31

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP93117845A Division EP0588376B1 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren
EP93117845.3 Division-Into 1993-11-04

Publications (3)

Publication Number Publication Date
EP0450579A2 true EP0450579A2 (de) 1991-10-09
EP0450579A3 EP0450579A3 (en) 1992-03-18
EP0450579B1 EP0450579B1 (de) 1994-10-19

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
EP93117845A Expired - Lifetime EP0588376B1 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren
EP91105208A Expired - Lifetime EP0450579B1 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP93117845A Expired - Lifetime EP0588376B1 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren

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US (1) US5201145A (de)
EP (2) EP0588376B1 (de)
DE (2) DE69104639T2 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0608890A1 (de) * 1993-01-28 1994-08-03 Shin-Etsu Handotai Company Limited Vorrichtung zur Korrektur vor Bearbeitungsfehlern
US5417760A (en) * 1993-02-04 1995-05-23 F. L Smidth & Co. A/S Method for manufacturing of normal as well as ultra-fine cement
WO1997048525A1 (en) * 1996-06-15 1997-12-24 Unova U.K. Limited Workpiece inspection and handling
WO2003076699A1 (en) * 2002-03-05 2003-09-18 Corning Incorporated Method for making an oriented optical fluoride crystal blank
US9272442B2 (en) 2012-12-31 2016-03-01 Sunedison, Inc. Methods for aligning an ingot with mounting block
US9950402B2 (en) 2012-12-31 2018-04-24 Corner Star Limited System and method for aligning an ingot with mounting block

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19837858A1 (de) * 1998-08-20 2000-03-02 Wacker Siltronic Halbleitermat Schleifmaschine
JP3951079B2 (ja) * 1998-09-14 2007-08-01 株式会社安川電機 オフラインティーチング方法、オフラインティーチング装置および記録媒体
TWI498179B (zh) * 2012-12-19 2015-09-01 Genesis Photonics Inc 工作機台及晶圓的處理方法
JP7078560B2 (ja) * 2019-01-25 2022-05-31 ファナック株式会社 精密工作機械
US20220001454A1 (en) * 2020-07-01 2022-01-06 Snap-On Incorporated On-vehicle disk brake lathe system with capture device and use thereof

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DE2127106A1 (de) * 1971-06-01 1972-12-14 Licentia Gmbh Transportvorrichtung
DE2927650A1 (de) * 1978-07-14 1980-01-24 Tschudin Werkzeugmasch Verfahren zum rundschleifen von rundteilen und rundschleifmaschine zur durchfuehrung dieses verfahrens
DD238938A1 (de) * 1985-07-01 1986-09-10 Zeiss Jena Veb Carl Optisch positionierbare einrichtung
WO1987001333A1 (fr) * 1985-09-06 1987-03-12 Bula & Fils S.A. Machine de finissage de pieces moulees ou usinees
EP0387130A1 (de) * 1989-03-02 1990-09-12 Commissariat A L'energie Atomique Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes

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FR2604383B1 (fr) * 1986-09-25 1993-05-07 Usinor Chatillon Dispositif d'appui radial pour une piece tournante a usiner du type a lunette, et rectifieuse equipee de ce dispositif et au besoin d'un automate de chargement/dechargement et son application notamment a l'usinage de cylindres de laminoirs
US4879846A (en) * 1988-07-29 1989-11-14 United Technologies Corporation Ingot knock out and grind machine
US5007204A (en) * 1988-09-16 1991-04-16 Shin-Etsu Handotai Company Limited Apparatus for shaping ingots into right circular cylindrical form
JPH0683957B2 (ja) * 1988-11-10 1994-10-26 信越半導体株式会社 円筒研磨装置

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Publication number Priority date Publication date Assignee Title
GB1124877A (en) * 1967-03-07 1968-08-21 Tripoli Joseph V Fluid centering and sensing devices
DE2127106A1 (de) * 1971-06-01 1972-12-14 Licentia Gmbh Transportvorrichtung
DE2927650A1 (de) * 1978-07-14 1980-01-24 Tschudin Werkzeugmasch Verfahren zum rundschleifen von rundteilen und rundschleifmaschine zur durchfuehrung dieses verfahrens
DD238938A1 (de) * 1985-07-01 1986-09-10 Zeiss Jena Veb Carl Optisch positionierbare einrichtung
WO1987001333A1 (fr) * 1985-09-06 1987-03-12 Bula & Fils S.A. Machine de finissage de pieces moulees ou usinees
EP0387130A1 (de) * 1989-03-02 1990-09-12 Commissariat A L'energie Atomique Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0608890A1 (de) * 1993-01-28 1994-08-03 Shin-Etsu Handotai Company Limited Vorrichtung zur Korrektur vor Bearbeitungsfehlern
US5417760A (en) * 1993-02-04 1995-05-23 F. L Smidth & Co. A/S Method for manufacturing of normal as well as ultra-fine cement
WO1997048525A1 (en) * 1996-06-15 1997-12-24 Unova U.K. Limited Workpiece inspection and handling
US6224459B1 (en) * 1996-06-15 2001-05-01 Unova U.K. Limited Workpiece inspection and handling
CN1096915C (zh) * 1996-06-15 2002-12-25 尤诺瓦英国有限公司 工件检验与传送
WO2003076699A1 (en) * 2002-03-05 2003-09-18 Corning Incorporated Method for making an oriented optical fluoride crystal blank
US7001462B2 (en) 2002-03-05 2006-02-21 Corning Incorporated Method for making an oriented optical fluoride crystal blank
US9272442B2 (en) 2012-12-31 2016-03-01 Sunedison, Inc. Methods for aligning an ingot with mounting block
US9950402B2 (en) 2012-12-31 2018-04-24 Corner Star Limited System and method for aligning an ingot with mounting block

Also Published As

Publication number Publication date
DE69130575D1 (de) 1999-01-14
DE69104639D1 (de) 1994-11-24
EP0588376B1 (de) 1998-12-02
EP0450579B1 (de) 1994-10-19
DE69130575T2 (de) 1999-07-29
EP0588376A1 (de) 1994-03-23
US5201145A (en) 1993-04-13
EP0450579A3 (en) 1992-03-18
DE69104639T2 (de) 1995-04-06

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