EP0387130A1 - Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes - Google Patents

Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes Download PDF

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Publication number
EP0387130A1
EP0387130A1 EP90400556A EP90400556A EP0387130A1 EP 0387130 A1 EP0387130 A1 EP 0387130A1 EP 90400556 A EP90400556 A EP 90400556A EP 90400556 A EP90400556 A EP 90400556A EP 0387130 A1 EP0387130 A1 EP 0387130A1
Authority
EP
European Patent Office
Prior art keywords
bar
housing
guide piece
piece
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP90400556A
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English (en)
French (fr)
Inventor
Roger Accomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP0387130A1 publication Critical patent/EP0387130A1/de
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

Definitions

  • the present invention relates to a device for locating the crystal orientation and rectifying a bar. It applies in particular to the production of locating flats on cylindrical bars of semiconductor and monocrystalline material intended for the production of wafers (wafers in English terminology).
  • a rod is made of monocrystalline semiconductor material (gallium arsenide for example) by known methods of crystal growth.
  • a raw monocrystalline draft bar has two end faces which, once erected, are oriented along defined and known crystal planes (the plans [100] for AsGa, for example).
  • the bar is then lapped so as to make it cylindrical, the generatrices of the cylinder being perpendicular to the end faces.
  • the cylinder diameter is normalized: it can be 2 inches (5.08 cm) or 3 inches (7.62 cm).
  • Figure 1 schematically shows an exploded view of a device for preparing the running-in operation.
  • This device comprises a support 10 for aligning along an axis AA, two end pieces 12.
  • One of the end pieces 12 rests on the support 10 and is centered relative to the axis AA.
  • the translation along AA of the other end piece 12 is free.
  • This translation is guided by a part 14 fixed on one end of the support 10.
  • This part 14 has an orifice crossed by a cylinder 16 on which the end piece 12 is fixed.
  • the axis of revolution of the cylinder 16 coincides with the axis AA.
  • the translation of the cylinder 16 causes the translation of the end piece 12 along the axis AA.
  • FIG. 2 schematically represents a lapping bar introduced into the device represented in FIG. 1.
  • the end pieces 12 are hot glued, at 50 ° C. for example, using a resin, on the end faces 20, 21 of the bar 18.
  • a pressure is applied (symbolized by an arrow in FIG. 2) to the end pieces 12 by means of the cylinder 16 for a period depending on the nature of the resin. This duration is fixed by the manufacturer.
  • FIGS. 3A to 3C represent the actual running-in operation.
  • FIG. 3B schematically represents the running-in operation.
  • the assembly comprising the bar 18 and the end pieces 12 is placed between the centering points 22 of a lapping machine (not shown in FIG. 3B). Centering is ensured by conical holes 13 made in the end pieces 12 and capable of receiving the centering points 22 of the lapping machine.
  • the bar 18 is rotated.
  • a grinding wheel 24 is brought into contact with the bar 18. The longitudinal displacement of the grinding wheel 24 allows the desired diameter of the bar 18 to be set.
  • FIG. 3C schematically represents the bar 18 once the running-in operation has ended.
  • the axis of revolution of the cylindrical bar 18 coincides with the axis of alignment of the end pieces 12.
  • a rough location of the two generators to be machined is carried out in order to obtain the two flats.
  • This location is made from surface details observable with the naked eye on the raw drawing bar. Markers are inscribed on the end faces 20, 21 of the bar 18, in indelible ink for example.
  • a blank is made of one of the flats according to one of the marks. Then, successive machining operations are carried out, followed by checks on the orientation of the plane of the flat surface by means of X-ray diffraction, so as to obtain the correct width of the flat as well as the correct orientation.
  • the second flat is produced using the same technique in a plane perpendicular to that of the first flat.
  • the present invention overcomes these drawbacks; it makes it possible to obtain greater precision over the width of the flats and the crystal orientation during manual machining of the bar while only making a single X-ray diffraction measurement. Thanks to the device recommended by he invention of locating the second flat is easy once the first flat is located.
  • the present invention relates to a device for adjusting the crystal orientation and the rectification of a crystalline bar of cylindrical shape, said bar having a standardized diameter.
  • This device comprises: a guide piece having a first housing adapted to receive said bar.
  • This first housing has a longitudinal central axis.
  • the guide piece has a flat face intersecting the first housing so as to provide an opening of determined width along the first housing.
  • the device according to the invention further comprises a fixing means capable of fixing the bar inside the housing of the guide piece.
  • the first housing is cylindrical of revolution around the central axis.
  • the diameter of the first housing is then substantially equal to but greater than the standard diameter.
  • the fixing means consists of: - a bar arranged in a second housing made in the guide piece and opening onto the first housing, - At least one clamping screw exerting pressure on said bar, passing through a threaded orifice made for this purpose in the guide piece.
  • This bar possibly has a concave face.
  • the concave face is able to match the cylindrical shape of the bar.
  • the device further comprises means for rotating said bar around the central axis of the first housing of the guide piece.
  • these means for rotating said bar comprise: a hollow plate rotating around an axis of revolution, this plate being supported by a hollow body able to be fixed to one end of the guide piece, - a connecting piece secured to the turntable, a centering end piece capable of being fixed to an end face of the bar, a raised end of the connecting piece being able to fit into a recess in the end piece so as to center the bar inside from the first housing, this end piece being secured to the connecting piece by a fixing means so that a rotation of the turntable causes a rotation of the bar, this end piece having a size such that once introduced into the guide piece, the end piece has no part projecting from the opening of the first housing.
  • the bar is inserted into the first housing of the guide piece.
  • the generator of the bar is marked according to which one wishes to machine a flat.
  • This location is obtained by X-ray diffraction on the bar.
  • the generator chosen is brought into position in the guide part by rotation of the bar which is integral with the turntable.
  • Machining is carried out manually after dismantling the turntable from the guide piece.
  • the flat face of the guide piece serves as a reference plane.
  • the part of the bar extending beyond the opening of the first housing is adjusted until the flat face comes flush with the surface of the grinding wheel.
  • the device according to the invention also comprises: two flanges suitable for being fixed by fixing means at each end of the guide piece and each having a flat face of determined width, and projecting from the guide piece, positioning means capable of positioning the flat face of each flange parallel to the flat face of the guide piece.
  • the positioning means consist of two pins per flange to be positioned, each pin being able to fit into housings made for this purpose in each flange and in the guide piece.
  • the positioning means consist of a pin per flange to be positioned, this pin being able to fit into housings made for this purpose in each flange and in the guide part, and in relief of the relief flange capable of fitting into the first housing of the guide piece.
  • the flanges are put in place and a rectification of the bar is carried out to obtain the flat.
  • the machining is carried out manually, the part of the bar extending beyond the opening of the first housing and projecting beyond the flat faces of the flanges is kept in contact with a grinding wheel until the flat faces of the flanges are flush with the surface of the grinding wheel.
  • the two flats of desired width and crystalline orientation are thus obtained using a single exposure to X-rays and avoiding the imprecision of successive machining operations.
  • FIG. 4A schematically represents an exploded view of a device according to the invention.
  • This device is particularly suitable for the machining of a cylindrical monocrystalline bar 18 of standardized diameter for the production of the two locating flats.
  • the device comprises a guide piece 30 having a first cylindrical housing 32 of revolution around a central axis CC.
  • This housing 32 is intended to receive the bar 18 to be rectified, its diameter is therefore substantially equal but nevertheless greater than the standard diameter of the bar 18. For example, for a standard diameter of 2 inches (5.08 cm) the diameter of the housing 32 is 5.1 cm.
  • the guide piece 30 has a flat face 34 intersecting the diameter of the housing 32 so as to provide an opening 36.
  • This opening 36 has a determined width which corresponds to the width of the large flat to be machined on the bar 18 (that is i.e. a width of 18 mm).
  • the bar 18 inserted inside the first housing 32 of the guide piece 30 must be oriented for the machining of the flats.
  • the bar 18 is secured to a hollow turntable 42, by means of a connecting piece 44 secured to the turntable 42
  • One end in relief 46 of the connecting piece 44 fits into a recess 38 in the end piece 12.
  • the size of the end piece 12 is such that once introduced into the guide piece 30, the end piece 12 has no part extending beyond the opening 36 of the first housing 32.
  • the turntable 42 is supported by a hollow body 40.
  • the turntable 42 and the hollow body 40 can be of the TR80 type manufactured by the company Micro-Contrcom, for example.
  • the connecting piece 44 is fixed to the turntable 42 by two screws 48; it crosses the turntable 42 and the hollow body 40 to be secured to the end piece 12 by two screws 54.
  • the centering end piece 12 is one of those already fixed to the bar 18 when the diameter is set, thus ensuring perfect concordance between the central axes of the bar 18 and the end piece 12 .
  • the bar 18 is introduced into the first housing 32 of the guide piece 30.
  • the hollow body 40 is then fixed to one end of the guide piece 30 by means of two screws 50. These screws 50 are brought to the end of the guide piece 30 by a passage 52 machined over the entire height of the guide piece 30, for example.
  • the centering of the assembly constituted by the turntable 42 and its body 40 can be improved by the use of a centering ring (not shown) interposed between the guide part 30 and the body 40.
  • the bar 18 is then suitably oriented inside the first housing 32 by X-ray diffraction on the part of the bar 18 projecting through the opening 36.
  • the orientation is obtained by rotating the bar around the axis CC 18 inside the housing 32, by actuating a system 43 of adjusting screws coupled to a wheel setting in motion the turntable 42.
  • the bar 18 is held in position inside the housing 32 by means of fixing.
  • FIG. 4B schematically represents a transverse section along a plane perpendicular to the axis CC. This figure shows an embodiment of the means for fixing the bar 18 inside the housing 32.
  • This fixing means consists of a bar 60 arranged in a second housing 62 formed in the guide piece 30 and opening onto the first housing 32.
  • This bar 60 has a concave face 64 able to match the cylindrical contour of the bar 18.
  • clamping screws 66 are actuated which exert pressure on said bar 60 by passing through threaded orifices made for this purpose in the guide piece 30.
  • the bar 18 is perfectly oriented in the first housing 32 of the guide piece 30, that is to say that the crystalline planes chosen ([110] for AsGa, for example) are parallel to the planar face 34 of the guide piece, then the small flat is machined.
  • the bar 18 is separated from the turntable 42 by unscrewing the screws 54 then the screws 50.
  • FIG. 5A schematically represents an exploded view of a device according to the invention used to make the small flat.
  • a flange 70 is fixed having a flat face 72 of determined width, and projecting from the guide piece 30.
  • Each flange 70 is by example fixed by screws 74.
  • the planar face 72 of each flange 70 is positioned parallel to the face 34 of the guide piece 30 by means of a set of two pins 76 fitting into housings 78, 79 designed for this purpose in the flanges and in the guide piece 30.
  • FIG. 5B schematically represents an alternative embodiment of a flange allowing to machine a small flat.
  • FIG. 5B it can be seen that the flat face 72 of the flange 70 is positioned parallel to the face 34 of the guide piece 30 by means of a single pin 76 which fits into housings 78, 79 designed for this purpose. effect in the flange 70 and in the guide piece 30.
  • the flange 70 also has a relief 75 capable of fitting into the first housing 32 of the guide piece 30.
  • the flat faces 72 of the flanges 70 are included in a plane cutting the diameter of the bar 18 projecting from the opening 36.
  • the section generated has a width equal to the width of the small flat.
  • FIGS. 6A to 6D schematically represent the different stages of the production of the flats on a bar.
  • the references used are the same as those used in the description of Figures 1 to 5.
  • the small flat is machined first.
  • FIG. 6A schematically represents the orientation of the bar by the X-ray diffraction referenced RX.
  • the bar 18 is inserted into the first housing of the guide piece 30 and secured to the turntable 42.
  • the bar 18 is subjected to the RX beam through the opening 36 made in the first housing 32 of the guide piece 30.
  • the crystalline planes are oriented ([110] for AsGa for example) parallel to the flat face 34 of the guide piece 30.
  • the bar 18 is fixed in this orientation by acting on the screws 66.
  • the turntable 42 is then separated from the bar 18 and removed, as well as the body 40 and the connecting piece 44, from the guide piece 30.
  • FIG. 6B schematically represents the device according to the invention allowing the realization of the small flat.
  • the flanges 70 are fixed to the guide piece 30, their planar face 72 parallel to the planar face 34.
  • Maintaining the bar 18 against a grinding wheel allows the machining of the flat part 17.
  • the machining is stopped when the grinding wheel comes into contact with the flat faces 72.
  • the parallelism between the faces 72 of the flanges 70 and the flat face 34 of the guide piece 30 guarantees the orientation of the flat 17.
  • FIG. 6C schematically represents the device according to the invention allowing, after the realization of the small flat 17, to orient the bar 18 for the realization of the large flat.
  • the flanges 70 are disassembled is the bar 18 and again secured to the turntable 42. After having loosened the clamping screws 66, the bar 18 is subjected to a rotation of 90 °, then the clamping screws 66 are tightened.
  • the turntable 42 is then detached from the bar 18 and removed, as well as the body 40 and the connecting piece 44, from the guide piece 30.
  • Figure 6D shows the device according to the invention for making the large flat.
  • the machining is stopped when the grinding wheel comes into contact with the flat face 34 of the guide piece 30. In this way, the orientation and the width of the large flat 19 are guaranteed.
  • FIG. 7 schematically represents the bar 18 once the two flats 17, 19 have been made.
  • the device according to the invention makes it possible to guarantee an angular precision of at least ⁇ 5 ′ and a precision over the widths of the flats 17, 19 of ⁇ 0.5 mm.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP90400556A 1989-03-02 1990-02-28 Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes Ceased EP0387130A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8902700 1989-03-02
FR8902700A FR2643843B1 (fr) 1989-03-02 1989-03-02 Dispositif pour le reperage de l'orientation cristalline et la rectification d'un barreau

Publications (1)

Publication Number Publication Date
EP0387130A1 true EP0387130A1 (de) 1990-09-12

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ID=9379274

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Application Number Title Priority Date Filing Date
EP90400556A Ceased EP0387130A1 (de) 1989-03-02 1990-02-28 Vorrichtung zum Markieren der kristallinischen Orientierung und Schleifen eines Stabes

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EP (1) EP0387130A1 (de)
FR (1) FR2643843B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0450579A2 (de) * 1990-03-31 1991-10-09 Shin-Etsu Handotai Company Limited Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren
CN109571258A (zh) * 2018-12-25 2019-04-05 内蒙古晶环电子材料有限公司 一种用于蓝宝石晶棒定向与端面研磨的固定装置
US20210299822A1 (en) * 2020-03-30 2021-09-30 Hunan Sanan Semiconductor Co., Ltd. Crystal centering and clamping device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2326319A (en) * 1942-03-12 1943-08-10 Bendix Aviat Corp Crystal working apparatus
US2381993A (en) * 1943-06-17 1945-08-14 Western Electric Co Method of cutting quartz crystals and apparatus for preparing quartz crystals for cutting
US2394622A (en) * 1943-10-19 1946-02-12 Western Electric Co Orienting device
US2425750A (en) * 1945-06-14 1947-08-19 John O Mccarty Optical aligner
US2947214A (en) * 1958-06-02 1960-08-02 Sylvania Electric Prod Crystal orientation device
US3887202A (en) * 1972-11-13 1975-06-03 Bruno J Zapart Speed grind fixture
DE3428714A1 (de) * 1984-08-03 1986-02-13 Alcan Aluminiumwerke GmbH, 3400 Göttingen Walzenschleifmaschine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1436035A1 (ru) * 1987-01-22 1988-11-07 Предприятие П/Я М-5073 Держатель монокристаллов дл рентгеновского дифрактометра

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2326319A (en) * 1942-03-12 1943-08-10 Bendix Aviat Corp Crystal working apparatus
US2381993A (en) * 1943-06-17 1945-08-14 Western Electric Co Method of cutting quartz crystals and apparatus for preparing quartz crystals for cutting
US2394622A (en) * 1943-10-19 1946-02-12 Western Electric Co Orienting device
US2425750A (en) * 1945-06-14 1947-08-19 John O Mccarty Optical aligner
US2947214A (en) * 1958-06-02 1960-08-02 Sylvania Electric Prod Crystal orientation device
US3887202A (en) * 1972-11-13 1975-06-03 Bruno J Zapart Speed grind fixture
DE3428714A1 (de) * 1984-08-03 1986-02-13 Alcan Aluminiumwerke GmbH, 3400 Göttingen Walzenschleifmaschine

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOVIET PATENT ABSTRACTS ILLUSTRATED, semaine 8918, 7 novembre 198, page 25, résumé no. 89-137137/18, Derwent Publications Ltd, Londres, GB; & SU-A-1 436 035 (V.A. OKHRIMENKO) 07-11-1988 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0450579A2 (de) * 1990-03-31 1991-10-09 Shin-Etsu Handotai Company Limited Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren
EP0450579A3 (en) * 1990-03-31 1992-03-18 Shin-Etsu Handotai Company, Limited Monocrystal ingot attitude-adjusting/surface-grinding/conveying apparatus
US5201145A (en) * 1990-03-31 1993-04-13 Shin-Etsu Handotai Company, Limited Monocrystal ingot attitude-adjusting/surface-grinding/conveying apparatus
CN109571258A (zh) * 2018-12-25 2019-04-05 内蒙古晶环电子材料有限公司 一种用于蓝宝石晶棒定向与端面研磨的固定装置
CN109571258B (zh) * 2018-12-25 2023-11-14 内蒙古晶环电子材料有限公司 一种用于蓝宝石晶棒定向与端面研磨的固定装置
US20210299822A1 (en) * 2020-03-30 2021-09-30 Hunan Sanan Semiconductor Co., Ltd. Crystal centering and clamping device

Also Published As

Publication number Publication date
FR2643843A1 (fr) 1990-09-07
FR2643843B1 (fr) 1991-05-17

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