DE69130575T2 - Gerät zum Positionieren und Richten von Einkristall-Barren - Google Patents

Gerät zum Positionieren und Richten von Einkristall-Barren

Info

Publication number
DE69130575T2
DE69130575T2 DE69130575T DE69130575T DE69130575T2 DE 69130575 T2 DE69130575 T2 DE 69130575T2 DE 69130575 T DE69130575 T DE 69130575T DE 69130575 T DE69130575 T DE 69130575T DE 69130575 T2 DE69130575 T2 DE 69130575T2
Authority
DE
Germany
Prior art keywords
straightening
positioning
single crystal
crystal bars
bars
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69130575T
Other languages
English (en)
Other versions
DE69130575D1 (de
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2085938A external-priority patent/JPH0794111B2/ja
Priority claimed from JP8593990A external-priority patent/JPH07115273B2/ja
Priority claimed from JP2085937A external-priority patent/JPH0794110B2/ja
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69130575D1 publication Critical patent/DE69130575D1/de
Application granted granted Critical
Publication of DE69130575T2 publication Critical patent/DE69130575T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B23Q3/186—Aligning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1405—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with a series disposition of similar working devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1421—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with a parallel disposition of working devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B24B41/062—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically between centres; Dogs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G05B19/4015—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes going to a reference at the beginning of machine cycle, e.g. for calibration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45156—Grind on lathe
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50152—Align axis cylinder, tube with rotation axis machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
DE69130575T 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren Expired - Fee Related DE69130575T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2085938A JPH0794111B2 (ja) 1990-03-31 1990-03-31 周面研削装置用単結晶インゴット回転装置
JP8593990A JPH07115273B2 (ja) 1990-03-31 1990-03-31 単結晶インゴット姿勢調整装置
JP2085937A JPH0794110B2 (ja) 1990-03-31 1990-03-31 単結晶インゴット搬送・周面研削装置

Publications (2)

Publication Number Publication Date
DE69130575D1 DE69130575D1 (de) 1999-01-14
DE69130575T2 true DE69130575T2 (de) 1999-07-29

Family

ID=27304997

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69130575T Expired - Fee Related DE69130575T2 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten von Einkristall-Barren
DE69104639T Expired - Fee Related DE69104639T2 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69104639T Expired - Fee Related DE69104639T2 (de) 1990-03-31 1991-04-02 Gerät zum Positionieren und Richten/Schleifen/Handhaben von Einkristall-Barren.

Country Status (3)

Country Link
US (1) US5201145A (de)
EP (2) EP0588376B1 (de)
DE (2) DE69130575T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2789983B2 (ja) * 1993-01-28 1998-08-27 信越半導体株式会社 加工誤差補正装置
DK12893A (da) * 1993-02-04 1994-08-05 Smidth & Co As F L Fremgangsmåde til fremstilling af normal såvel som ultrafin cement
KR100303074B1 (ko) * 1996-06-15 2001-11-02 로이 아써턴 그라인딩및폴리싱장치와이를이용한그라인딩방법
DE19837858A1 (de) * 1998-08-20 2000-03-02 Wacker Siltronic Halbleitermat Schleifmaschine
JP3951079B2 (ja) * 1998-09-14 2007-08-01 株式会社安川電機 オフラインティーチング方法、オフラインティーチング装置および記録媒体
AU2003218022A1 (en) * 2002-03-05 2003-09-22 Corning Incorporated Method for making an oriented optical fluoride crystal blank
TWI498179B (zh) * 2012-12-19 2015-09-01 Genesis Photonics Inc 工作機台及晶圓的處理方法
US9272442B2 (en) 2012-12-31 2016-03-01 Sunedison, Inc. Methods for aligning an ingot with mounting block
US9950402B2 (en) 2012-12-31 2018-04-24 Corner Star Limited System and method for aligning an ingot with mounting block
JP7078560B2 (ja) * 2019-01-25 2022-05-31 ファナック株式会社 精密工作機械
US20220001454A1 (en) * 2020-07-01 2022-01-06 Snap-On Incorporated On-vehicle disk brake lathe system with capture device and use thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1124877A (en) * 1967-03-07 1968-08-21 Tripoli Joseph V Fluid centering and sensing devices
DE2127106A1 (de) * 1971-06-01 1972-12-14 Licentia Gmbh Transportvorrichtung
CH623261A5 (en) * 1978-07-14 1981-05-29 Tschudin Werkzeugmasch Process for the cylindrical grinding of cylindrical parts, and cylindrical grinding machine for carrying out this process
US4651472A (en) * 1984-09-03 1987-03-24 Schaudt Maschinenbau Gmbh Method of and machine for grinding rotary workpieces
DD238938A1 (de) * 1985-07-01 1986-09-10 Zeiss Jena Veb Carl Optisch positionierbare einrichtung
CH658216A5 (fr) * 1985-09-06 1986-10-31 Bula & Fils Mach Procede de finissage de pieces moulees ou usinees et centre de finissage pour la mise en oeuvre de ce procede.
FR2604383B1 (fr) * 1986-09-25 1993-05-07 Usinor Chatillon Dispositif d'appui radial pour une piece tournante a usiner du type a lunette, et rectifieuse equipee de ce dispositif et au besoin d'un automate de chargement/dechargement et son application notamment a l'usinage de cylindres de laminoirs
US4879846A (en) * 1988-07-29 1989-11-14 United Technologies Corporation Ingot knock out and grind machine
US5007204A (en) * 1988-09-16 1991-04-16 Shin-Etsu Handotai Company Limited Apparatus for shaping ingots into right circular cylindrical form
JPH0683957B2 (ja) * 1988-11-10 1994-10-26 信越半導体株式会社 円筒研磨装置
FR2643843B1 (fr) * 1989-03-02 1991-05-17 Commissariat Energie Atomique Dispositif pour le reperage de l'orientation cristalline et la rectification d'un barreau

Also Published As

Publication number Publication date
US5201145A (en) 1993-04-13
DE69130575D1 (de) 1999-01-14
EP0450579A2 (de) 1991-10-09
DE69104639D1 (de) 1994-11-24
EP0588376B1 (de) 1998-12-02
EP0450579B1 (de) 1994-10-19
EP0588376A1 (de) 1994-03-23
EP0450579A3 (en) 1992-03-18
DE69104639T2 (de) 1995-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee