EP0423710A1 - Installation à vide à chambres multiples - Google Patents

Installation à vide à chambres multiples Download PDF

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Publication number
EP0423710A1
EP0423710A1 EP90119810A EP90119810A EP0423710A1 EP 0423710 A1 EP0423710 A1 EP 0423710A1 EP 90119810 A EP90119810 A EP 90119810A EP 90119810 A EP90119810 A EP 90119810A EP 0423710 A1 EP0423710 A1 EP 0423710A1
Authority
EP
European Patent Office
Prior art keywords
chamber
batch
vacuum system
chamber vacuum
lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90119810A
Other languages
German (de)
English (en)
Inventor
Gerhard Hild
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Original Assignee
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH filed Critical Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Publication of EP0423710A1 publication Critical patent/EP0423710A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum

Definitions

  • the invention relates to a multi-chamber vacuum system according to the preamble of the first claim.
  • Such systems consist of two or more chambers in which very different atmospheric conditions (pressure, temperature and gas composition) can prevail.
  • pressure, temperature and gas composition very different atmospheric conditions
  • cycle operation the material to be treated, which is to go through several process steps, is subjected to the respective processes in the individual chambers one after the other.
  • the material to be treated In order for the specific atmospheric conditions which prevail in the chambers to be maintained over a longer period of operation, the material to be treated must pass through a lock during the transition from the atmosphere into a chamber or vice versa.
  • Locks are complex components. They must be equipped with at least two valves, to which high demands are made. Especially in the vacuum area and at high temperatures require special, constructive measures, such as suitable material selection and additional cooling systems.
  • the object of the invention is to avoid the above-mentioned outlay for locks and to present a simple system for introducing and discharging material to be treated into and out of multi-chamber vacuum systems.
  • FIGS. 1 and 2 The invention is explained in more detail in FIGS. 1 and 2 using an example.
  • Figure 1 a section of a multi-chamber vacuum system is shown in cross section.
  • Figure 2 shows a floor plan of the entire plant. In the example shown here, this consists of four process chambers 1-4, which are connected to one another via a batch exchange chamber 5. According to the invention, the process chamber denoted by 4 also serves as a lock chamber. It consists of a lower part 4a and an upper part 4b.
  • the lower part 4a is connected to the inside and the upper part 4b to the outside of the batch exchange chamber 5 in a vacuum-tight and detachable manner.
  • a lifting swivel device 8 makes it possible to lift the upper part 4b and to swivel it to the side.
  • the lock chamber 4 can be loaded with a batch 6.
  • a lifting device 7 can convey the batch 6 into the batch exchange chamber 5 after pressure equalization in the lock chamber 4. From here, the batch can by a not shown, known, conveyor mechanism in the other process chambers 1 - 3. The batch is discharged in reverse order. Instead of one, several of the process chambers can also be designed as a lock chamber.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Meat, Egg Or Seafood Products (AREA)
EP90119810A 1989-10-20 1990-10-16 Installation à vide à chambres multiples Withdrawn EP0423710A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3935014 1989-10-20
DE3935014A DE3935014A1 (de) 1989-10-20 1989-10-20 Mehrkammer-vakuumanlage

Publications (1)

Publication Number Publication Date
EP0423710A1 true EP0423710A1 (fr) 1991-04-24

Family

ID=6391870

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90119810A Withdrawn EP0423710A1 (fr) 1989-10-20 1990-10-16 Installation à vide à chambres multiples

Country Status (4)

Country Link
US (1) US5054748A (fr)
EP (1) EP0423710A1 (fr)
JP (1) JPH03207810A (fr)
DE (1) DE3935014A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1319724A1 (fr) * 2001-12-14 2003-06-18 JH Corporation Installation de traitement thermique sous vide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5476248A (en) * 1992-08-03 1995-12-19 Japan Metals & Chemicals Co., Ltd. Apparatus for producing high-purity metallic chromium

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011160A1 (fr) * 1978-11-15 1980-05-28 Klöckner Ionon GmbH Pièce de jonction pour des bassins à vide pour le traitement thermique de pièces à usiner
FR2537260A1 (fr) * 1982-12-02 1984-06-08 Traitement Sous Vide Four multicellulaire pour le traitement thermique, thermochimique ou electrothermique de metaux sous atmosphere rarefiee
EP0388333B1 (fr) * 1989-03-17 1994-07-06 Etudes Et Constructions Mecaniques Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3124634A (en) * 1964-03-10 Furnace construction
US1554368A (en) * 1923-03-01 1925-09-22 Adolph A Rackoff Process and apparatus for making steel
US3501289A (en) * 1965-06-09 1970-03-17 Finkl & Sons Co Method and apparatus for adding heat to molten metal under vacuum
DE1758460B1 (de) * 1968-06-05 1971-05-06 Degussa Ofenanlage zur waermebehandlung von werkstuecken unter schutzgasatmosphaeren
DE1913859A1 (de) * 1969-03-19 1970-10-01 Kresin Dipl Volksw Adolf Entnahmeventil fuer Fluessigkeiten
US3809379A (en) * 1970-04-21 1974-05-07 Alsacienne Atom Installation for the treatment and movement of liquid metals
JPS51131410A (en) * 1975-05-12 1976-11-15 Kubota Ltd Method for adding low-boiling metal to molten metal
HU179333B (en) * 1978-10-04 1982-09-28 Vasipari Kutato Intezet Method and apparatus for decreasing the unclusion contents and refining the structure of steels
SE452860B (sv) * 1984-08-29 1987-12-21 Inst Po Metalloznanie I Tekno Sett att behandla och gjuta metaller i ett slutet utrymme och anordning for genomforande av settet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011160A1 (fr) * 1978-11-15 1980-05-28 Klöckner Ionon GmbH Pièce de jonction pour des bassins à vide pour le traitement thermique de pièces à usiner
FR2537260A1 (fr) * 1982-12-02 1984-06-08 Traitement Sous Vide Four multicellulaire pour le traitement thermique, thermochimique ou electrothermique de metaux sous atmosphere rarefiee
EP0388333B1 (fr) * 1989-03-17 1994-07-06 Etudes Et Constructions Mecaniques Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1319724A1 (fr) * 2001-12-14 2003-06-18 JH Corporation Installation de traitement thermique sous vide
US6814573B2 (en) 2001-12-14 2004-11-09 Jh Corporation Vacuum heat-treatment apparatus

Also Published As

Publication number Publication date
JPH03207810A (ja) 1991-09-11
US5054748A (en) 1991-10-08
DE3935014A1 (de) 1991-04-25

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