EP0423710A1 - Multiple chamber vacuum installation - Google Patents
Multiple chamber vacuum installation Download PDFInfo
- Publication number
- EP0423710A1 EP0423710A1 EP90119810A EP90119810A EP0423710A1 EP 0423710 A1 EP0423710 A1 EP 0423710A1 EP 90119810 A EP90119810 A EP 90119810A EP 90119810 A EP90119810 A EP 90119810A EP 0423710 A1 EP0423710 A1 EP 0423710A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- chamber
- batch
- vacuum system
- chamber vacuum
- lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
Definitions
- the invention relates to a multi-chamber vacuum system according to the preamble of the first claim.
- Such systems consist of two or more chambers in which very different atmospheric conditions (pressure, temperature and gas composition) can prevail.
- pressure, temperature and gas composition very different atmospheric conditions
- cycle operation the material to be treated, which is to go through several process steps, is subjected to the respective processes in the individual chambers one after the other.
- the material to be treated In order for the specific atmospheric conditions which prevail in the chambers to be maintained over a longer period of operation, the material to be treated must pass through a lock during the transition from the atmosphere into a chamber or vice versa.
- Locks are complex components. They must be equipped with at least two valves, to which high demands are made. Especially in the vacuum area and at high temperatures require special, constructive measures, such as suitable material selection and additional cooling systems.
- the object of the invention is to avoid the above-mentioned outlay for locks and to present a simple system for introducing and discharging material to be treated into and out of multi-chamber vacuum systems.
- FIGS. 1 and 2 The invention is explained in more detail in FIGS. 1 and 2 using an example.
- Figure 1 a section of a multi-chamber vacuum system is shown in cross section.
- Figure 2 shows a floor plan of the entire plant. In the example shown here, this consists of four process chambers 1-4, which are connected to one another via a batch exchange chamber 5. According to the invention, the process chamber denoted by 4 also serves as a lock chamber. It consists of a lower part 4a and an upper part 4b.
- the lower part 4a is connected to the inside and the upper part 4b to the outside of the batch exchange chamber 5 in a vacuum-tight and detachable manner.
- a lifting swivel device 8 makes it possible to lift the upper part 4b and to swivel it to the side.
- the lock chamber 4 can be loaded with a batch 6.
- a lifting device 7 can convey the batch 6 into the batch exchange chamber 5 after pressure equalization in the lock chamber 4. From here, the batch can by a not shown, known, conveyor mechanism in the other process chambers 1 - 3. The batch is discharged in reverse order. Instead of one, several of the process chambers can also be designed as a lock chamber.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Meat, Egg Or Seafood Products (AREA)
- Powder Metallurgy (AREA)
Abstract
Die Erfindung beschreibt eine Mehrkammer-Vakuumanlage bestehend aus einer Chargen-Wechselkammer 5 und mehreren Prozeßkammern 1 - 4. Eine der Prozeßkammern dient gleichzeitig als Schleusenkammer 4. Sie besteht aus zwei Teilen, welche an der Innen- bzw. Außenseite der Chargen-Wechselkammer befestigt sind.The invention describes a multi-chamber vacuum system consisting of a batch exchange chamber 5 and a plurality of process chambers 1 - 4. One of the process chambers serves simultaneously as a lock chamber 4. It consists of two parts which are attached to the inside or outside of the batch exchange chamber .
Description
Die Erfindung betrifft eine Mehrkammer-Vakuumanlage nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a multi-chamber vacuum system according to the preamble of the first claim.
Insbesondere ist eine Anwendung bei Wärmebehandlungsanlagen, wie z.B. Schmelz- und Gießanlagen oder Sinteranlagen, in welchen das Behandlungsgut unter Vakuum einem Taktbetrieb unterworfen ist, vorgesehen.In particular, an application in heat treatment plants, such as Melting and casting plants or sintering plants, in which the material to be treated is subjected to a cyclical operation under vacuum, are provided.
Solche Anlagen bestehen aus zwei oder mehr Kammern, in welchen sehr unterschiedliche atmosphärische Bedingungen (Druck, Temperatur und Gaszusammensetzung) herrschen können. Im Taktbetrieb wird das zu behandelnde Gut, welches mehrere Verfahrensschritte durchlaufen soll, nacheinander in den einzelnen Kammern den jeweiligen Prozessen unterzogen. Damit die spezifischen atmosphärischen Bedingungen, welche in den Kammern herrschen, über eine längere Betriebsdauer aufrechterhalten werden können, muß das Behandlungsgut beim Übergang von der Atmosphäre in eine Kammer oder umgekehrt eine Schleuse durchlaufen.Such systems consist of two or more chambers in which very different atmospheric conditions (pressure, temperature and gas composition) can prevail. In cycle operation, the material to be treated, which is to go through several process steps, is subjected to the respective processes in the individual chambers one after the other. In order for the specific atmospheric conditions which prevail in the chambers to be maintained over a longer period of operation, the material to be treated must pass through a lock during the transition from the atmosphere into a chamber or vice versa.
Schleusen sind aufwendige Bauteile. Sie müssen mit mindestens zwei Ventilen ausgestattet sein, an welche hohe Ansprüche gestellt werden. Besonders der Einsatz im Vakuumbereich und bei hohen Temperaturen erfordert spezielle, konstruktive Maßnahmen, wie z.B. passende Materialwahl und zusätzliche Kühlsysteme.Locks are complex components. They must be equipped with at least two valves, to which high demands are made. Especially in the vacuum area and at high temperatures require special, constructive measures, such as suitable material selection and additional cooling systems.
Aufgabe der Erfindung ist es, den oben genannten Aufwand für Schleusen zu umgehen und ein einfaches System zum Ein- und Ausschleusen von Behandlungsgut in und aus Mehrkammer-Vakuumanlagen vorzustellen.The object of the invention is to avoid the above-mentioned outlay for locks and to present a simple system for introducing and discharging material to be treated into and out of multi-chamber vacuum systems.
Die Aufgabe wird durch den kennzeichnenden Teil des ersten Patentanspruches gelöst. Die Ansprüche zwei bis vier stellen weitere Ausgestaltungsformen der Erfindung dar.The object is achieved by the characterizing part of the first claim. Claims two to four represent further embodiments of the invention.
Durch die Verwendung einer der vorhandenen Prozeßkammern als Schleusenkammer zum Ein- und Ausschleusen von Behandlungsgut in und aus der Chargen-Wechselkammer, wird die Verwendung einer zusätzlichen Schleuse überflüssig. Die oben geschilderten Nachteile, welche den Einsatz einer zusätzlichen Schleuse mit sich bringen würde, werden vermieden. Die gesamte Anlage wird somit in ihrem Aufbau einfacher und im Betrieb sicherer und bedienungsfreundlicher.By using one of the existing process chambers as a lock chamber for introducing and discharging treatment material into and out of the batch change chamber, the use of an additional lock is unnecessary. The disadvantages described above, which would entail the use of an additional lock, are avoided. The structure of the entire system is thus simpler and safer and more user-friendly in operation.
Die Erfindung wird in den Figuren 1 und 2 anhand eines Beispiels näher erläutert.The invention is explained in more detail in FIGS. 1 and 2 using an example.
Es zeigen:
- Fig. 1:
Querschnitt des Teils der Mehrkammer-Vakuumanlage, welcher mit der Schleusenkammer verbunden ist. - Fig. 2:
Grundriß der Mehrkammer-Vakuumanlage.
- Fig. 1:
Cross-section of the part of the multi-chamber vacuum system which is connected to the lock chamber. - Fig. 2:
Floor plan of the multi-chamber vacuum system.
In Figur 1 ist ein Ausschnitt aus einer Mehrkammer-Vakuumanlage anlage im Querschnitt dargestellt. Figur 2 zeigt einen Grundriß der gesamten Anlage. Diese besteht in dem hier dargestellten Beispiel aus vier Prozeßkammern 1-4, welche über eine Chargen-Wechselkammer 5 miteinander verbunden sind. Die mit 4 bezeichnete Prozeßkammer dient erfindungsgemäß gleichzeitig als Schleusenkammer. Sie besteht aus einem unterem Teil 4a und einem oberen Teil 4b.In Figure 1, a section of a multi-chamber vacuum system is shown in cross section. Figure 2 shows a floor plan of the entire plant. In the example shown here, this consists of four process chambers 1-4, which are connected to one another via a
Das untere Teil 4a ist mit der Innenseite und das obere Teil 4b mit der Außenseite der Chargen-Wechselkammer 5 vakuumdicht und lösbar verbunden. Eine Hub-Schwenkvorrichtung 8 ermöglicht es, das obere Teil 4b anzuheben und zur Seite zu schwenken. In diesem Zustand kann die Schleusenkammer 4 mit einer Charge 6 beladen werden. Eine Hubvorrichtung 7 kann die Charge 6 nach Druckausgleich in der Schleusenkammer 4 in die Chargen-Wechselkammer 5 befördern. Von hier aus kann die Charge durch einen nicht dargestellten, ansich bekannten, Fördermechanismus in die übrigen Prozeßkammern 1 - 3 gelangen. Das Ausschleusen der Charge geschieht entsprechend in umgekehrter Reihenfolge. Statt einer können auch mehrere der Prozeßkammern als Schleusenkammer ausgebildet sein.The lower part 4a is connected to the inside and the
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3935014 | 1989-10-20 | ||
DE3935014A DE3935014A1 (en) | 1989-10-20 | 1989-10-20 | MULTI-CHAMBER VACUUM SYSTEM |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0423710A1 true EP0423710A1 (en) | 1991-04-24 |
Family
ID=6391870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90119810A Withdrawn EP0423710A1 (en) | 1989-10-20 | 1990-10-16 | Multiple chamber vacuum installation |
Country Status (4)
Country | Link |
---|---|
US (1) | US5054748A (en) |
EP (1) | EP0423710A1 (en) |
JP (1) | JPH03207810A (en) |
DE (1) | DE3935014A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1319724A1 (en) * | 2001-12-14 | 2003-06-18 | JH Corporation | Vacuum heat-treatment apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5476248A (en) * | 1992-08-03 | 1995-12-19 | Japan Metals & Chemicals Co., Ltd. | Apparatus for producing high-purity metallic chromium |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0011160A1 (en) * | 1978-11-15 | 1980-05-28 | Klöckner Ionon GmbH | Connecting piece for vacuum containers for heat treating work pieces |
FR2537260A1 (en) * | 1982-12-02 | 1984-06-08 | Traitement Sous Vide | Multicellular oven for heat treatment, thermochemical treatment or electrothermal treatment of metals in a rarified atmosphere |
EP0388333B1 (en) * | 1989-03-17 | 1994-07-06 | Etudes Et Constructions Mecaniques | Apparatus for performing sequences of continous heat treatments in vacuum |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3124634A (en) * | 1964-03-10 | Furnace construction | ||
US1554368A (en) * | 1923-03-01 | 1925-09-22 | Adolph A Rackoff | Process and apparatus for making steel |
US3501289A (en) * | 1965-06-09 | 1970-03-17 | Finkl & Sons Co | Method and apparatus for adding heat to molten metal under vacuum |
DE1758460B1 (en) * | 1968-06-05 | 1971-05-06 | Degussa | OVEN SYSTEM FOR HEAT TREATMENT OF WORKPIECES UNDER PROTECTIVE GAS ATMOSPHERES |
DE1913859A1 (en) * | 1969-03-19 | 1970-10-01 | Kresin Dipl Volksw Adolf | Extraction valve for liquids |
US3809379A (en) * | 1970-04-21 | 1974-05-07 | Alsacienne Atom | Installation for the treatment and movement of liquid metals |
JPS51131410A (en) * | 1975-05-12 | 1976-11-15 | Kubota Ltd | Method for adding low-boiling metal to molten metal |
HU179333B (en) * | 1978-10-04 | 1982-09-28 | Vasipari Kutato Intezet | Method and apparatus for decreasing the unclusion contents and refining the structure of steels |
SE452860B (en) * | 1984-08-29 | 1987-12-21 | Inst Po Metalloznanie I Tekno | SET TO PROCESS AND CAST METALS IN A CLOSED SPACE AND DEVICE FOR IMPLEMENTATION OF THE SET |
-
1989
- 1989-10-20 DE DE3935014A patent/DE3935014A1/en not_active Withdrawn
-
1990
- 1990-10-16 EP EP90119810A patent/EP0423710A1/en not_active Withdrawn
- 1990-10-18 US US07/599,668 patent/US5054748A/en not_active Expired - Fee Related
- 1990-10-19 JP JP2281684A patent/JPH03207810A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0011160A1 (en) * | 1978-11-15 | 1980-05-28 | Klöckner Ionon GmbH | Connecting piece for vacuum containers for heat treating work pieces |
FR2537260A1 (en) * | 1982-12-02 | 1984-06-08 | Traitement Sous Vide | Multicellular oven for heat treatment, thermochemical treatment or electrothermal treatment of metals in a rarified atmosphere |
EP0388333B1 (en) * | 1989-03-17 | 1994-07-06 | Etudes Et Constructions Mecaniques | Apparatus for performing sequences of continous heat treatments in vacuum |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1319724A1 (en) * | 2001-12-14 | 2003-06-18 | JH Corporation | Vacuum heat-treatment apparatus |
US6814573B2 (en) | 2001-12-14 | 2004-11-09 | Jh Corporation | Vacuum heat-treatment apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH03207810A (en) | 1991-09-11 |
US5054748A (en) | 1991-10-08 |
DE3935014A1 (en) | 1991-04-25 |
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Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 19930910 |