Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
  • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
  • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
  • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
  • B23D57/0038—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of frames; of tables
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
  • B23D59/00—Accessories specially designed for sawing machines or sawing devices
  • B23D59/04—Devices for lubricating or cooling straight or strap saw blades
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
  • B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
  • B23Q1/015—Frames, beds, pillars
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
  • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
  • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
  • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable

Definitions

• the present invention relates to an abrasion cleavage unit for cutting ingots of hard material.
• This invention relates more particularly to cutting machines used in the electronic or photovoltaic industry for cutting an ingot of silicon, germanium or glass into a multitude of fine wafers.
• Such machines usually include at least two drums, also called wire guides, having on their cylindrical surfaces a series of circular grooves with the desired cutting pitch. These wire guides are arranged in a horizontal plane, and. this from the same vertical plane. A steel wire is wound around these wire guides which creates at least one horizontal cutting ply composed of a succession of strands of steel wires parallel to each other. Thus, this wire can be set in motion by the rotation of the wire guides. Furthermore, the cutting web is wetted with an abrasive liquid such as particles of silicon carbide suspended in water or oil. The ingot to be cut is pushed against the tablecloth in an underlying manner by a plate. The abrasive particles entrained by the liquid itself carried along by the wire then cause a cleavage or cutting effect.
• abrasive liquid such as particles of silicon carbide suspended in water or oil.
• cutting quality is meant a rigorous flatness and a minimum of mechanical stresses induced in the surfaces.
• Industrial considerations are for example the rate of wear of the wire, the possibility of recovering the abrasive and / or a high productivity such as 2,000 wafers per ingot of
• the cleavage units or cutting machines currently known usually comprise a vertical front plane from which emerges orthogonally, therefore horizontally forwards, two or three wire guide cylinders. On this same vertical plane are also arranged in various places a cutting wire delivery coil, a receiving coil and a wire tensioning device, for example using a lever arm, before winding around the wire guides.
• a cutting wire delivery coil for example using a lever arm
• a receiving coil for example using a lever arm
• wire guides and support plate being thus arranged in overhang, and taking into account the inherent elasticity of the steel composing them, the forces appearing between the cutting blade and the ingot during sawing are reflected in the wire guides and support arms and necessarily cause a deviation of these elements respectively to the right or to the left depending on the direction of movement of the wires.
• the actuator moving the plate supporting the ingot acts along an axis passing through the center of gravity of this ingot.
• the means for guiding the vertical axis of the actuator are still insufficient to avoid any vibration and / or bending of this arm, and therefore of the plate during sawing.
• the known cleavage units also fish: - by the absence of a device allowing the precise and necessary orientation of the axis of a crystalline ingot to cleave it by abrasion following the crystallization planes,
• the object of this invention is to solve the aforementioned problem by proposing an abrasion cleavage unit, in other words a cutting machine which allows, in particular:
• the direction “X” means that of the axis of the wire guides, direction “Y”, the horizontal axis orthogonal to X, and the direction “Z”, the vertical axis.
• vis-à-vis an observer standing in front of the machine we mean by “posterior” a part of the machine oriented towards the observer, by “front” a part of the machine distant from the observer, therefore towards the rear, as well as “right” and “left” always in reference with respect to this same observer.
• an abrasion cleavage unit for cutting an ingot of hard material into a plurality of plates which comprises at least two identical horizontal parallel wire guide cylinders arranged opposite and rotating in synchronism. ; a wire unwound from a supply coil and then wound under tension around the wire guides to form at least one cutting ply before being taken up by a receiving coil and an actuator acting along a vertical axis passing through the center of gravity of the ingot to lift a console supporting this ingot which it applies against the cutting table.
• this cleavage unit comprises a one-piece frame symmetrical with respect to the median vertical plane orthogonal to the wire guides. This frame has two upper lateral flanges which support the thread guides on both sides. In addition, this frame comprises in its lower part means for guiding the console supporting the ingot.
• the console supporting the ingot has a square shape with its vertical plane oriented with respect to the frame.
• the guide means comprise on each lateral edge of the vertical plane of the console at least one roller cage engaged in a vertical guide rail located correspondingly on the frame.
• the actuator is. a ball screw and nut driven by a DC motor with incremental encoder, this motor being controlled by electronic and computer means which manage the rise of the ingot according to a pre-established cutting procedure for the ingot.
• the actuator is a hydraulic cylinder powered by a pump through a distributor controlled by electronic and computer means which manage the rise of the ingot according to a pre-established cutting procedure for the ingot.
• the actuator is a compressed air cylinder with a pressure variator controlled by electronic and computer means which manage the rise of the ingot according to a pre-established cutting procedure for the ingot,
• the horizontal plane of the console in angle includes a sliding plate parallel to the axis X of the wire guides inside a groove made in the horizontal plane, and this thanks to roller guides.
• the horizontal plane also includes mechanical, electro-technical or hydraulic means for fixing the position of the platform in the horizontal plane of the console.
• These means for fixing the position of the plate may comprise a screw engaged through balls in a threaded orifice of the plate, which screw is driven by a geared motor which is controlled by electronic and computer means according to a pre-established cutting procedure for the ingot. .
• the horizontal plane of the angled console includes a turntable with locking means in position for adjusting by rotation about the vertical axis Z the orientation of the axis of the ingot relative to the axis of the wire guides.
• the horizontal plane of the angled console comprises a plate oscillating around a horizontal axis located under the ingot in the plane orthogonal to the cutting plane and parallel to the wire guides, which plate is driven by a gearmotor. - even controlled by electronic and computer means to print on the plateau oscillations of amplitude and frequency dependent on the pre-established cutting procedure for the ingot.
• the cleavage unit is completed by a device for extracting the cut ingot comprising at least one clamp, the two branches of which respectively bear a shell, the antagonist of identical shape in cylinder portion, which clamp is moved by a programmable robot.
• the shells are provided on their outer faces with pins intended to be inserted into corresponding sockets located at the bottom of a washing tank in order to ensure the positioning and maintenance in this tank of the shells immobilizing during washing the cut ingot .
• This unit can also be completed by an initial device for placing the wire 144 on the wire guides.
• the cutting wire sheet can also be useful for the cutting wire sheet to be soaked in abrasive liquor from below thanks to a longitudinal distributor at constant level. Also, it may prove useful that the ingot either cooled during cleavage by a longitudinal nozzle blowing cold air.
• the invention is characterized by:
• FIG. 1 represents a perspective view of a first embodiment of the molded frame provided for two wire guides with the vertical movement console Z and the horizontal movement plate X
• FIG. 2 is a perspective diagram of the path of the cutting wire
• FIG. 3 is a detailed perspective view of the device for managing the orientation and movement of the ingot on the console
• FIGS. 4a and 4b are respectively perspective views and from the right side of the device for extracting the cut ingot
• FIG. 5 is a perspective view of the washing tub
• FIG. 6 is a perspective view of a second embodiment of the molded frame provided for four wire guides allowing the ingot to be cut to a larger size
• FIG. 7 is a perspective view of the device for extracting the cut ingot specially designed for the cleavage unit illustrated in FIG. 6.
• the one-piece frame made of molded and stabilized GS cast iron is designed so that the deformations are very slight and entirely localized in the vertical planes containing the Y axis, therefore normal to the wire guides, so that the wires rigorously maintain their position along the X axis, substantially parallel to the axis of the ingot, throughout the cleavage cycle whatever the load conditions.
• the frame illustrated in FIG. 1 comprises in a single unit a horizontal base 1 from which four columns 2, 3, 15 and 16 leave from the front part.
• Columns 3 and 15 are connected together by a bridge 14.
• Columns 2 and 3 as well as 15 and 16 are respectively connected to each other by two side walls, their extension 11 and 12 constitute two side flanges.
• the term “flanges” is understood to mean parts going in pairs in a flat fashion and arranged in parallel serving to support an axis.
• the right lateral flange 12 has two circular orifices 5 and 7 whereas on the left lateral flange portion 11 is shown only the anterior circular orifice 4 in correspondence with the orifice 5.
• In the orifices 4 and 5 is provided d 'be installed the axis of a first anterior thread guide cylinder, the right end of the axis of the posterior thread guide being provided to be installed in the circular opening 7.
• the frame is molded from a block from the base 1 to the flanges 11 and 12 provides the assembly with remarkable rigidity, in particular along the Y axis, that is to say parallel to the flanges, which happens to be the orientation of the action and the reaction between the wire guides and the ingot during cleavage.
• This rigidity is on the one hand due to the weight therefore to the inertia of the one-piece frame and on the other hand to its configuration, in particular the doubling of columns 2 and 3 as well as 16 and 15 along each lateral side.
• geared motors means the association of a motor, preferably electric, and a gearbox reducing the speed of rotation of the output shaft.
• these can for example generate a predetermined tension in the wires by controlling the flow rate and the recovery of the coils 39a and 39c as described in more detail in the description FR 2 254 948.
• the tension generator can also be formed from a cylinder not shown and pressing with a controlled pressure on the upper ply of wire.
• a distributor of cutting abrasive liquid 40 is in the form of a longitudinal tank flared upwards, filled with liquid fed from the bottom by means of a feed, not shown, and in an amount just sufficient for this liquid to emerge above the edges. anterior and posterior without overflowing.
• the distributor 40 is placed on the side of the wire guide 36 when the wire is unwound from the reel 39a towards the reel 39c.
• the wire cleaning devices 47a and 47c can use a transverse or longitudinal compressed air jet in the middle of a venturi. These devices can also include one or more rollers filled with felt and turning in opposite direction to the direction of movement of the wire.
• a longitudinal air nozzle can be placed between the two wire guides in the middle of the sheets to permanently blow cold air against the ingot and thus cool it.
• This separate cooling device makes it possible to avoid the use of abrasive liquid as a cooling fluid, and therefore to minimize consumption, thereby reducing the operating costs of the machine.
• the wire guides 36 and 37 are solid metal cylinders, the outer surface of which is coated with a non-stick layer of plastic or hard polymer such as that sold under the name VULCOLAN. In this outer surface is cut a series of side-by-side circular grooves, the pitch of which defines the thickness of the future plates. These grooves have, seen in cross section, a V shape oriented towards the inside of the cylinder. Referring to Figures 1 and 2, we see that the frame and the path of the wire 44 are rigorously symmetrical with respect to the vertical median plane orthogonal to the wire guides. This symmetry makes it possible to use the cutting wire moving indifferently in one direction or the other. In other words, the coil 39a alternately becomes the supply or reception coil and vice versa for the coil 39c.
• the movement management device of the saw ingot manages four movements which can be linked together by mathematical functions in computer means and actuated separately or in synchronism by electronic and electro-technical means to generate particular cutting faces.
• This ingot movement management device comprises:
• the device for vertical up and down movement along the Z axis comprises a console 19, the vertical face 17 of which is mounted on the frame by two roller slides with pre-stressed mounting without play.
• the cages 21a, 21b and 22a (22b not visible) of the slides are secured to the lateral edges of the vertical face 17 and these cages slide on guide rails 23 and 24 secured to the columns and 2 and 16 of the frame.
• This angled shape of the console 19 with its horizontal plane 18 and its vertical plane 17 makes it possible to keep the plate 18 strictly horizontal by effectively securing the vertical face 17 against and parallel to that of the material frame columns 2 and 16.
• This securing comprises on the left a guide rail 23 secured to column 2 and on the right a guide rail 24 secured to column 16.
• the vertical face 17 comprises a cage at its left lateral edge upper rollers 21a and a second lower 21b and at its right lateral edge in an identical manner an upper roller cage 22a and a lower cage not shown.
• the actuator 29 can also be a hydraulic cylinder powered by a pump through a distributor or a compressed air cylinder with pressure variator, these control members being in all cases controlled by electronic and computer means .
• the longitudinal movement device parallel to the axis X of the wire guides is produced by means of a plate 26 sliding inside a groove made in the horizontal plane 18.
• this sliding of the plate 26 is produced by means of roller slides inserted between this plate and the console.
• the translational movement is produced by a bolt and nut with pre-stressed mounting without backlash driven by a geared motor 27.
• this movement along the X axis has the function on the one hand of adjusting if necessary longitudinal position of the ingot and on the other hand to perform a lateral cut at the end of cleavage to separate the laminated ingot from its support.
• a second oscillation device making it possible to give the ingot a rotary movement centered on a horizontal axis situated under the ingot in the median orthogonal plane of the cutting ply.
• This device comprises a first plate 30, the upper surface of which is curved into a portion of a convex cylinder, on which a second plate 31 is disposed in the lower face is convex complementary to that of the upper of the plate 30.
• This plate 31 can be moved thanks to a gear motor 42 back and forth along the arc of the cylindrical joint.
• the device for managing the movement of the block comprises, above the elements described above, a device for orienting the longitudinal axis of the ingot relative to the axis of the wire guides, and this by a more or less significant rotation about the vertical axis Z.
• This device comprises a base 32 with in its center a pivot penetrating into a circular orifice formed in correspondence in the underside of the pivoting plate 33.
• This device is also provided with means angular measurement and locking means in its new position of the pivoting plate 33 on the base 32. This possibility of orientation of the ingot axis by compared to that of the wire guides is necessary to make the plane of crystallization of the ingot and the vertical plane of cutting by the web co-planar.
• the cleavage unit is also completed with a device for extracting the cut ingot.
• This device comprises two opposing shells 70, 73 having a shape in the form of a cylinder of diameter identical to that of the ingot to be removed.
• the front shell 70 is held by two arms 68 and 79 to a tube 61 movable in rotation about an axis 66.
• the rear shell 73 is held on the right by an arm 77 to a cylinder 63 located above the tube 61 and on the left by an arm 84 to a cylinder 65 also located above the tube 61.
• These tubes 63 and 65 are only movable in rotation relative to the tube 61.
• a pin 83 orthogonal and integral with the axis 66 crosses respectively helical grooves 64 of the tube 61 and 82 of the cylinder 65.
• a pin 81 orthogonal and integral with the axis 66 respectively crosses a helical groove 62 of the tube 61 and a helical groove 80 of the cylinder 63
• the washing solvent can be circulated by a pump starting from the top of the ingot now laminated, this solvent causing the mixture of sawdust and abrasive product to run off which is deposited at the bottom of tank 90 where the solvent is taken up by the circulation pump.
• This washing unit can also be provided with another handling automaton taking the cleaned platelets one by one from the tank and placing them on a transfer mat for successive treatments.
• FIG. 6 illustrates a machine tool produced according to the invention and intended for cutting large ingot 143, that is to say a length of the order of 800 mm for a diameter of 200 mm. In such ingots it is possible to cut approximately 2,000 wafers simultaneously. However, it will be readily understood that the action and reaction forces between the cutting web and the ingot are significantly increased. In addition, to provide sufficient space for the ingot during the sawing operation, four wire guides should be provided.
• the one-piece frame of this machine comprises a base 101, two side walls 102 supported at the top by two crosspieces 114 and 115 and having respectively two side flanges 111 and 112. In the left side f lasque 111 are formed the openings provided for the axes of the wire guides
• the cutting wire leaves a supply coil 139 to first pass through a tension damping device 146 before entering the interior of the frame where it is tensioned before being wound around the wire guides.
• a tension damping device 146 There is a similar device on the right side of the machine up to the take-up reel 148.
• the front face of the frame is completed on either side by two rails 123 and 124.
• the console 119 in the form of a square as before comprises a horizontal plane 118 and a vertical plane 117 held against the guide rails 123 and 124 by roller cages of which only those on the left side 121 are visible. This console 119 is moved vertically by the underlying actuator 129.
• This device can comprise a rail of generally square shape with rounded angles on the inner face of which a carriage turns. This substantially square rail is arranged perpendicularly around the wire guides and it is moved in translation along these wire guides by dess means not shown. Either the carriage carries a coil of wire which it unwinds, or it only holds the end of the wire and the wire guides must be rotated during installation to directly unwind the coil 139.
• Figure 7 is illustrated the device for extracting the ingot 143 cut specially provided for the machine illustrated in FIG. 6.
• This device comprises an automaton mounted on a cross member 198 coming on top of the frame, this automaton comprising means 194 for vertical movement, means 192 for translation along the X axis and an arm 190 which can rotate around the V axis.
• a clamp device 161 each branch of which respectively carries a shell in the form of a portion of cylinder 170 and 173 apprehending the ingot. Means make it possible to turn this clamp around the axis W.
• these shells 170 and 173 have means such as pins making it possible to fix them securely to the bottom of the washing tub.

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• Mechanical Treatment Of Semiconductor (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=9371516

Family Applications (1)

Country Status (5)

Cited By (1)

Families Citing this family (30)

Family Cites Families (7)

• 1989
  • 1989-10-27 EP EP89912636A patent/EP0396711A1/de not_active Withdrawn
  • 1989-10-27 WO PCT/FR1989/000561 patent/WO1990005053A1/fr not_active Application Discontinuation
  • 1989-10-27 US US07/499,503 patent/US5099820A/en not_active Expired - Fee Related
  • 1989-10-27 KR KR1019900701422A patent/KR900701490A/ko not_active Application Discontinuation
  • 1989-10-27 JP JP1511661A patent/JPH03503266A/ja active Pending

Non-Patent Citations (1)

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