EP0767036B1 - Drahtsäge mit einem Drahtmanagementsystem dass eine Verwendung von Drahtzylindern sehr grosser Länge erlaubt - Google Patents

Drahtsäge mit einem Drahtmanagementsystem dass eine Verwendung von Drahtzylindern sehr grosser Länge erlaubt Download PDF

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Publication number
EP0767036B1
EP0767036B1 EP96115198A EP96115198A EP0767036B1 EP 0767036 B1 EP0767036 B1 EP 0767036B1 EP 96115198 A EP96115198 A EP 96115198A EP 96115198 A EP96115198 A EP 96115198A EP 0767036 B1 EP0767036 B1 EP 0767036B1
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EP
European Patent Office
Prior art keywords
wire
sawing
spool
fact
axis
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96115198A
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English (en)
French (fr)
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EP0767036A1 (de
Inventor
Charles Hauser
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Applied Materials Switzerland SARL
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HCT Shaping Systems SA
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Publication date
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Publication of EP0767036A1 publication Critical patent/EP0767036A1/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H57/00—Guides for filamentary materials; Supports therefor
    • B65H57/18—Guides for filamentary materials; Supports therefor mounted to facilitate unwinding of material from packages
    • B65H57/20—Flyers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H54/00—Winding, coiling, or depositing filamentary material
    • B65H54/02—Winding and traversing material on to reels, bobbins, tubes, or like package cores or formers
    • B65H54/28—Traversing devices; Package-shaping arrangements
    • B65H54/2803—Traversing devices; Package-shaping arrangements with a traversely moving package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H54/00—Winding, coiling, or depositing filamentary material
    • B65H54/02—Winding and traversing material on to reels, bobbins, tubes, or like package cores or formers
    • B65H54/28—Traversing devices; Package-shaping arrangements
    • B65H54/2896—Flyers

Definitions

  • the present invention relates to a sawing device per wire comprising a sawing zone in which a workpiece is pressed against the susceptible wire to be moved in an alternating or continuous motion for sawing the workpiece and a wire management device comprising a supply coil supplying new wire to the sawing area and a take-up reel taking up the wire worn from the sawing area (see eg US-A-3841297).
  • Known sawing devices most include often a layer of thread likely to move according to a continuous or reciprocating movement pressing against a workpiece to be sliced thus defining an area of sawing.
  • the sawing area consists of a set of cylinders placed in parallel. These cylinders called thread guides, are engraved with grooves defining the interval between the tablecloth wires, i.e. the thickness of the slices to be sawed.
  • the workpiece is fixed on a table support which moves perpendicular to the sheet of son. Travel speed defines the speed of chopped off.
  • the renewal of the wire as well as the control of the tension is done in a part called "management zone of the wire "and located outside the sawing area properly called.
  • the agent that will govern the cutting is either a abrasive fixed on the wire, i.e. a free abrasive brought by sparging.
  • the wire acts only as a conveyor.
  • the wire used even if it only acts as a transporter, undergoes some wear which will have to be compensated by a renewal rate which will be defined by the area sawn per unit of time.
  • the current development of wire sawing is driven by the trend of users to move towards sawing large pieces, so large areas and therefore a large consumption of wire.
  • the use of long wires becomes imperative.
  • Common wire management systems in sawing devices are made by using coils mounted horizontally or vertically on a motorized axis whose speed is managed by a device regulating the thread flow and tension via a electronic control.
  • the wire will therefore pass from a spool of new wire at the sawing area to return after use to a spool of used wire.
  • an asymmetrical longitudinal back-and-forth movement is applied, asymmetry being used to adjust the renewal rate.
  • the back and forth movement longitudinal will impose on the reels of new wire and used frequent changes of direction with strong accelerations.
  • Wire sawing devices of the above type are already known especially in the components industry electronics, ferrites, quartz and silicas, for obtaining thin slices of materials such as silicon poly- or monocrystalline or new materials such as GaAs, InP, GGG (gadolinium-gallium garnets) or also quartz, synthetic sapphire, and ceramic materials.
  • materials such as silicon poly- or monocrystalline or new materials such as GaAs, InP, GGG (gadolinium-gallium garnets) or also quartz, synthetic sapphire, and ceramic materials.
  • GGG gallium-gallium garnets
  • quartz, synthetic sapphire, and ceramic materials The high price of these materials makes sawing by more attractive thread compared to other techniques like diamond disc sawing.
  • These devices wire sawing use steel wire with a diameter generally between 0.1 and 0.2 mm, typically 0.18mm.
  • the current length is between 100 and 300 km therefore with a maximum weight of 60 kg, not including the coil support.
  • the aims of the present invention therefore consist in remedy the limitations of known sawing devices, who can only handle limited lengths of wire, remove the inertia factor of the rotating coils during large accelerations and decelerations, to be returned possible very long lengths of wire and to obtain high sawing precision.
  • the device wire management includes at least one rotary member of unwinding and / or rewinding mounted so rotating around the periphery of the supply reel and / or of the take-up reel and arranged so as to unwind and / or rewind the thread with a adjustable flow.
  • the invention allows the use coils of heavy wire having a large diameter without the use of high power motors being necessary. This will also allow you to work during long periods without human intervention, improving thus productivity and quality.
  • static coils or in any case without rapid rotation, and by winding or unwinding the wire by a rotating device around these, inertia is no longer dependent the weight of the wire or that of the spool, but only that of the winding or unwinding device which can be made as light as possible.
  • Wire lengths only become limited by the market availability, and thus 400 kg reels containing up to 2000 km of 0.18 diameter wire are made possible.
  • non-rotating wire spools allows therefore to produce a wire sawing device having a extended operating autonomy with very large lengths of wire, without the wire control system is affected by the mass of it. This will allow to have a more regular flow, to get bigger speeds while keeping the operational benefits and high cutting precision.
  • An advantageous embodiment is characterized by the the wire is arranged in the sawing area under form of a sheet of parallel wires, by the fact that the two supply and take-up coils are mounted so not rotatable on a support and that the management device of the wire comprises two rotating members mounted so rotating around the two coils and arranged so as to act as flow and thread tension regulators.
  • a sawing device for a construction is thus obtained. simple, reliable, fast, precise operation and completely independent of the weight of the two coils of wires and comprising a regulation of the flow and the efficient, uncomplicated thread tension with a price of comes back weak.
  • said rotary member comprises a winding head rotatably mounted around the periphery of the coil and comprising at least a first return element arranged to guide the wire coming from or ending at the coil in the direction of a second element of reference.
  • the second reference element can favorably be arranged so that the wire is arranged substantially on the axis of rotation of said rotary member coincides with the axis from the spool and arranged to guide the wire in the direction of the sawing area.
  • the first deflection element includes a first pulley of which a normal to the axis of rotation is substantially perpendicular to the axis of the coil around which it turns and a second pulley whose axis of rotation is mounted rotating around a tree arranged so that the wire ends substantially tangentially to the coil whatever the degree of filling of the latter.
  • the wire can thus be wound and unwound from start to the end of the spool, very regularly and with an orientation precise.
  • the rotary member comprises a arm equipped with said winding head and having as axis the axis of the coil.
  • the rotary member may include a concentric ring to the coil and carrying said head winding driven by a motor rotating on the ring.
  • the rotary member can comprise a ring concentric with the coil formed by a bearing with two rings, the winding head being fixed on one of the rings driven in rotation by a motor.
  • the bobbin cutting function is achieved by an axial back and forth movement of these by means of a mechanical drive member, electric, hydraulic or pneumatic.
  • the wire can thus be wound very evenly on the coils.
  • the movement back and forth along the axis of the coil is applied, with an amplitude which is equal at the filling length defined by the distance between the flanges of the coil.
  • the sawing device will present itself so in the form of two modules, one containing the area sawing consisting of the wire guide cylinders supporting the tablecloth, wires and support table which moves perpendicularly to the sheet of wire, the other containing the wire management, will consist of coil support on which will be installed the supply and take-up coils.
  • These can be animated by a movement of back and forth to perform the slicing operation, at know the successive winding wire against wire.
  • To each of coils of wire is assigned a winding system or unwinding revolving around it. This function can be achieved for example by a centered rotating arm on the axis of the coil having at its ends a device pulleys with various references or by an external rail supporting a carriage with the pulleys.
  • Figure 1 shows schematically a device conventional sawing, used before the present invention.
  • Figure 2 is a schematic view of an embodiment of the sawing device according to the present invention.
  • Figure 3 is a schematic view of a detail of the figure 2.
  • Figures 4 and 5 are schematic views of two variants.
  • the new wire 1 comes out of the spool debtor 2 which is driven by a motor 3.
  • a measurement tension 4 corrects a tension arm 5 coupled to a motor 6.
  • the wire then passes through the sawing zone 40, around the wire guides 7 to form the sheet of wires 8.
  • the sawing piece 9 fixed on a support table 10 comes in press against it to be sawn with abrasive 11 from a distributor 12 and driven by the son of the ply 8.
  • the used wire 13 leaves the ply and returns to the take-up reel 14 via the arm of tension 5, tension measurement 4 and the pulley trancanning 15 actuated back and forth sideways by the motor 16.
  • the wire management device 41 therefore comprises coils 2 and 14 mounted to rotate about their axis.
  • FIG. 2 schematically illustrates an embodiment of the present invention.
  • the new wire 1 comes out of the supply coil 2a around which an arm 17 rotates supporting pulleys 18,19,20,21.
  • the arm motor 22 gives the tension to be applied to wire 1, this tension being given by a measurement gauge 4.
  • Wire 1 goes to the area sawing 40 composed of the same elements as in FIG. 1.
  • the worn wire 13 returns to the take-up reel 14a by through the gauge 4 and the rotating arm 17.
  • the supply 2a and take-up 14a coils can be driven back and forth by a drive device 23 for trancanning purposes.
  • the wire management device 41a can be perfectly reversible.
  • the coils 2a and 14a are mounted so fixed, not rotatable on any support.
  • the arms 17 with their pulleys 18 to 21 each form a rotary member 42 of unwinding and / or rewinding mounted so rotating around the periphery of the coils and arranged way to unwind and / or rewind the thread with a flow adjustable by the speed of the motors 22.
  • the gauges of measure 4 are connected to the control of motors 22, way that the rotary members 42 act as regulators thread flow and tension.
  • FIG. 3 represents a possibility of carrying out the wire management device 41a according to the invention.
  • Thread enters by a pulley 18, fixedly oriented and coupled to the tension gauge 4, coming from the sawing zone 40.
  • This passes through a bearing 24 at which is fixed the tension arm 17 driven by the tension motor and of rotation 22 fixed on a support 26. It passes around the pulleys 19 and 20 fixed relative to the arm and having parallel axes of rotation.
  • the output pulley 21 can be rotatable relative to the shaft 25 to keep a fixed orientation to the next wire filling the take-up reel 14.
  • the bearing 24 supports the rotary arm 17 with its pulley system.
  • the coil is driven by a back and forth movement generated by a mechanism 23 which can be electric, hydraulic, pneumatic or other.
  • the pulleys 20, 21 therefore form a winding head 29 rotatably mounted around the periphery of a coils 2a, 14a.
  • the pulley 21 constitutes a return arranged to guide the wire coming from or ending to the spool in the direction of the pulley 20.
  • the latter guides the wire to the pulleys 19 and 18 which are arranged so that the wire is arranged substantially on the axis of rotation of the bearing 24, coincident with the axis of the coil. From pulley 18, the wire then passes to the sawing zone 40.
  • the pulley 20 has an axis of rotation such as a normal to this axis is substantially perpendicular to the axis of the coil. As the pulley 21 turns around the shaft 25 the wire terminates substantially tangentially at the coil whatever the degree of filling of the latter.
  • FIG. 4 represents a variant making it possible to carry out the function using a linear motor 27 in rotation on a concentric ring or circular rail 28 to coil 2a.
  • Linear motor carriage 29b 27 forming the winding head supports the necessary pulleys 20b and 21b.
  • the pulley 18b coupled to the gauge tension 4b, as well as the bearing 24b are fixedly mounted on the support 26b and the pulley 19b rotating relative to the pulley 18b is fixed on the bearing 24b.
  • Pulley 21b is rotating rise on the shaft 25b, while the pulley 20b has a fixed axis of rotation relative to the carriage 29b.
  • the second variant shown in Figure 5 includes a support 26c and mobile support arm 26d carrying the coil 2a fixed, non-rotating. Thanks to the 23d motor, which can be mechanical, electrical, hydraulic, pneumatic or other, the support arm 26d can be moved vertically to perform the slicing function, corresponding to a transverse back-and-forth movement, axial of the coil so as to wind the wire gradually.
  • a ring concentric with the coil is formed by a ball bearing 30 comprising two rings.
  • the winding head 29c is mounted on the inner ring 32 driven in rotation by the motor 31, for example in function of signals received from the voltage gauge or a other control element.
  • the pulleys 18c and 20c have axes of rotation with fixed orientation relative to to the support 26c, respectively to the winding head 29c, while the pulleys 19c and 21c are mounted so rotating relative to the support 26c thanks to the bearing 24c, respectively with respect to the winding head 29c thanks to tree 25c.
  • the coils 2a, 14a could be rotatably mounted on their arm 26d support (fig. 5) and rotated for pass the wire at a continuous rate from the spool debtor to the take-up reel.
  • the alternative sawing movement can then have a speed greater, for example 20m / sec, than that of the movement continuous, for example 1 to 2m / sec.
  • the saw wire forming the web 8 wires consist of spring steel with a diameter between 0.1 and 0.2 mm in order to saw blocks of material hard or more specific compositions, such than silicon, ceramic, composed of elements of groups III-V, GGG, sapphire, etc., in slices 0.1 to 5mm thick about.
  • the abrasive agent is a commercial product and can be diamond, silicon carbide, alumina etc, in form attached to the wire or in free form in sparging.
  • the sawing device allows by the use of coils 2a, 14a heavy, containing great lengths of wire, streamline the sawing and cutting operation large-sized sawn pieces 9 while obtaining the necessary precision.
  • the general concept of the machine is simplified, making it possible to obtain for the user a lower investment and a more economical operation.
  • the sawing device may only have one in the sawing area wire, instead of a sheet of wire. He could also have a single, non-rotating coil either receiver and another wire management device at the other end, for example a monoflasque conical coil.
  • the coil cutting function could also be performed by a back and forth movement transverse of the winding head parallel to the axis coils. Pulleys 18 to 21 could be replaced by any other suitable return and guide device.
  • the orientation of the axis of the coils 2a, 14a could be different, vertical or oblique.

Claims (12)

  1. Drahtsägevorrichtung, die einen Sägebereich (40) aufweist, in welchem ein zu sägendes Stück (9) auf den Draht (1) aufdrückt, der geeignet ist, zum Sägen des Stücks gemäß einer alternierenden oder kontinuierlichen Bewegung verschoben zu werden, und eine Drahthandhabungsvorrichtung (41a), welche eine Ausgabespule (2a), die den Sägebereich (40) mit neuem Draht versorgt, und eine Aufnahmespule (14a), die den vom Sägebereich herkommenden, abgenutzten Draht aufnimmt, aufweist, dadurch gekennzeichnet, daß die Drahthandhabungsvorrichtung (41 a) zumindest eine Rotationsvorrichtung zum Abspulen und/oder Wiederaufspulen (42) aufweist, die drehbar um den Randbereich der Ausgabespule (2a) und/oder der Aufnahmespule (14a) angebracht ist und derart gestaltet ist, daß sie den Draht mit einer einstellbaren Leistung abwickelt und/oder wiederaufwickelt.
  2. Sägevorrichtung gemäß dem Anspruch 1, dadurch gekennzeichnet, daß der Draht im Sägebereich (40) in Form einer Schicht von parallelen Drähten (8) angeordnet ist, dadurch, daß die zwei Ausgabe- und Aufnahmespulen (2a, 14a) nicht drehbar auf Halterungen angebracht sind, und daß die Drahthandhabungs-vorrichtung (41a) zwei Rotationsvorrichtungen (42) aufweist, die drehbar um die zwei Spulen angebracht sind und derart gestaltet sind, daß sie als Leistungs- und Drahtspannungsregler wirken.
  3. Sägevorrichtung gemäß dem Anspruch 1 oder 2, dadurch gekennzeichnet, daß die besagte Rotationsvorrichtung (42) einen Spulenkopf (29) aufweist, der drehbar um den Randbereich der Spule angebracht ist und zumindest ein erstes Umlenkelement (20, 21) aufweist, das derart gestaltet ist, daß der von der Spule herkommende oder an der Spule ankommende Draht in Richtung eines zweiten Umlenkelements (18, 19) gelenkt wird.
  4. Sägevorrichtung gemäß dem Anspruch 3, dadurch gekennzeichnet, daß das zweite Umlenkelement (18, 19) derart gestaltet ist, daß der Draht merklich auf der Rotationsachse der besagten Rotationsvorrichtung (42), die identisch zu der Achse der Spule (2a, 14a) ist, angeordnet ist, und derart gestaltet ist, daß es den Draht in Richtung des Sägebereiches (40) lenkt.
  5. Sägevorrichtung gemäß dem Anspruch 3, dadurch gekennzeichnet, daß das erste Umlenkelement eine erste Rolle (20) aufweist, deren Senkrechte auf die Rotationsachse merklich senkrecht zur Achse der Spule (2a, 14a), um welche sie dreht, steht, und eine zweite Rolle (21), deren Rotationsachse drehbar um eine Welle (25) angeordnet ist, die derart gestaltet ist, daß der Draht merklich tangential an der Spule (2a, 14a) ankommt, wie auch immer der Auffüllzustand dieser letzteren sei.
  6. Sägevorrichtung gemäß den Ansprüchen 4 und 5, dadurch gekennzeichnet, daß das zweite Umlenkelement eine dritte Rolle (19) aufweist, die auf einer Halterung drehbar angebracht ist, derart, daß ihre Rotationsachse merklich parallel zur Rotationsachse der ersten Rolle (20) ist, und eine vierte Rolle (18), die derart gestaltet ist, daß sie den Draht in Richtung des Sägebereiches (40) lenkt.
  7. Sägevorrichtung gemäß einem der Ansprüche 3 bis 6, dadurch gekennzeichnet, daß die Rotationsvorrichtung (42) einen Arm (17) aufweist, der mit besagtem Spulenkopf (29) ausgerüstet ist und als Rotationsachse die Achse der Spule besitzt.
  8. Sägevorrichtung gemäß einem der Ansprüche 3 bis 6, dadurch gekennzeichnet, daß die Rotationsvorrichtung (42) einen Ring (28) aufweist, der konzentrisch zur Spule ist und besagten Spulenkopf (29b) trägt, dessen Rotation auf dem Ring von einem Motor angetrieben wird.
  9. Sägevorrichtung gemäß einem der Ansprüche 3 bis 6, dadurch gekennzeichnet, daß die Rotationsvorrichtung (42) einen von einem Lager (30) mit zwei Ringen gebildeten Ring aufweist, der konzentrisch zur Spule ist, wobei der besagte Spulenkopf (29c) auf einem (32) der Ringe befestigt ist, dessen Rotation von einem Motor (31) angetrieben wird.
  10. Sägevorrichtung gemäß einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, daß die Durchdringfunktion der Spulen (2a, 14a) durch eine axiale Vorwärts- und Rückwärtsbewegung derselben mittels eines mechanischen, elektrischen, hydraulischen oder pneumatischen Antriebsorgans (23) realisiert wird.
  11. Sägevorrichtung gemäß einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, daß die Durchdringfunktion der Spulen durch eine axiale Vorwärts- und Rückwärtsbewegung des Spulenkopfes (29) parallel zur Achse der Spulen (2a, 14a) realisiert wird.
  12. Sägevorrichtung gemäß dem Anspruch 1, dadurch gekennzeichnet, daß die Drahthandhabungsvorrichtung (41 a) derart gestaltet ist, daß sie dank der Wirkung der besagten Rotationsvorrichtung (42) eine erste alternierende Sägebewegung des Drahts ausführt, und dadurch, daß die Spulen drehbar auf Halterungen angebracht sind, um eine zweite Bewegung zum Wiederaufwickeln des abgenutzten Drahts auf der Aufnahmespule auszuführen.
EP96115198A 1995-10-03 1996-09-21 Drahtsäge mit einem Drahtmanagementsystem dass eine Verwendung von Drahtzylindern sehr grosser Länge erlaubt Expired - Lifetime EP0767036B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH2777/95 1995-10-03
CH02777/95A CH691292A5 (fr) 1995-10-03 1995-10-03 Dispositif de sciage par fil équipé d'un système de gestion de fil permettant l'utilisation de bobines de fil de très grande longueur.
CH277795 1995-10-03

Publications (2)

Publication Number Publication Date
EP0767036A1 EP0767036A1 (de) 1997-04-09
EP0767036B1 true EP0767036B1 (de) 2002-11-13

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EP96115198A Expired - Lifetime EP0767036B1 (de) 1995-10-03 1996-09-21 Drahtsäge mit einem Drahtmanagementsystem dass eine Verwendung von Drahtzylindern sehr grosser Länge erlaubt

Country Status (5)

Country Link
US (1) US5829424A (de)
EP (1) EP0767036B1 (de)
JP (1) JPH09109013A (de)
CH (1) CH691292A5 (de)
DE (1) DE69624769T2 (de)

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CN103224166B (zh) * 2013-05-15 2017-02-08 长沙岱勒新材料科技股份有限公司 一种高速绕线机
CN103448153B (zh) * 2013-08-23 2016-02-03 蓝思科技股份有限公司 一种蓝宝石晶棒的切割工艺及其加工治具
JP5994766B2 (ja) * 2013-11-21 2016-09-21 信越半導体株式会社 ワークの切断方法
DE102015200198B4 (de) * 2014-04-04 2020-01-16 Siltronic Ag Verfahren zum Abtrennen von Halbleiterscheiben von einem Werkstück mit einem Sägedraht
EP3023184A1 (de) 2014-11-20 2016-05-25 Meyer Burger AG Verfahren und Vorrichtung zum Schneiden eines Werkstücks
CN104608264B (zh) * 2015-02-11 2016-08-24 苏州硅峰太阳能科技有限公司 摇摆式大理石多线切割机
CN104647622B (zh) * 2015-02-11 2017-07-07 苏州硅峰太阳能科技有限公司 一种摇摆式硅锭的高效多线开方机
CN105057823A (zh) * 2015-08-01 2015-11-18 烟台力凯电子科技有限公司 一种多线切割机的张力摆臂限位柱装置
JP6923828B2 (ja) * 2015-09-15 2021-08-25 キヤノンマーケティングジャパン株式会社 ワイヤ放電加工装置
CN106239747B (zh) * 2016-08-26 2019-03-05 浙江顺联智能设备有限公司 金刚线截断机
TWI713832B (zh) * 2017-04-28 2020-12-21 友達晶材股份有限公司 晶圓切片機及其收放線裝置與晶圓切片的方法
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EP0767036A1 (de) 1997-04-09
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DE69624769D1 (de) 2002-12-19
CH691292A5 (fr) 2001-06-29
JPH09109013A (ja) 1997-04-28

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