Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/022—Quinonediazides

Definitions

• This invention relates to' a positive-working photoresist composition which responds to radiation and, more particularly, to a photoresist composition having a high resolving power and a high sensitivity and one capable of forming micropatterns with good profiles.
• compositions which contain an alkali-soluble resin and a light-sensitive naphthoquinonediazide compound are generally used.
• compositions containing a "novolak phenol resin/naphthoquinonediazide-substituted compound” are described in U.S. Patents 3,666,473, 4,115,128, 4,173,470, etc., and examples of a "novolak resin composed of cresol- formaldehyde/trihydroxybenzophenone-1,2-naphthoquinonediazidosulfonic acid esters" are described in L.F. Thompson, Introduction to Microlithography (published by ACS, No. 219), pp. 112-121.
• the novolak resin used as a binder is particularly useful since it is soluble in an alkali aqueous solution without swelling and shows a high resistance particularly against plasma etching when using an image formed therein as a mask for etching.
• the naphthoquinonediazide compound used as a light-sensitive material decreases alkali solubility of the novolak resin and, when decomposed by irradiation with light, produces an alkali-soluble substance and actually increases the alkali solubility of the novolak resin.
• the naphthoquinonediazide compound is particularly useful because of this great change in its properties induced by light.
• the degree of integration of integrated circuits is increasing more and more and, in manufacturing semiconductor bases such as VLSI, formation of ultramicro-patterns with a line width as narrow as 1 IJ,m is required.
• the conventional positive photoresists described above are insufficient, and photoresists having a high resolving power, an ability to accurately reproduce a pattern of an exposure mask, and a high sensitivity for attaining high productivity are required.
• a positive-working photoresist composition which comprises (1) a light-sensitive material obtained by reacting a polyhydroxy compound containing at least one group represented by the following general formula (I) per molecule with at least one of 1,2-naphthoquinonediazido-5-sulfonyl chloride and 1,2-naphthoquinonediazido-4-sulfonyl chloride, and (2) an alkali-soluble novolak resin: wherein R 1 and R 2 each represents a hydrogen atom or a C 1 -C 4 straight or branched alkyl or alkoxy group, provided that R 1 and R 2 do not represent hydrogen atoms at the same time; and X represents a divalent organic group.
• a light-sensitive material obtained by reacting a polyhydroxy compound containing at least one group represented by the following general formula (I) per molecule with at least one of 1,2-naphthoquinonediazido-5-sulfonyl chloride and 1,2-naphtho
• R 1 and R 2 when one of R 1 and R 2 represents a hydrogen atom, the other preferably represents a C 2 -C 4 straight or branched alkyl or alkoxy group. More preferably, both of R 1 and R 2 represent C 1 -C 4 straight or branched alkyl or alkoxy groups, which may be the same or different.
• Specific examples of the alkyl group include methyl, n-propyl, iso-propyl, n- butyl, sec-butyl, t-butyl groups, and specific examples of the alkoxy group include methoxy, n-propoxy, iso-propoxy, n-butoxy, sec-butoxy, t-butoxy groups.
• the linking group X in the general formula (I) represents a divalent organic group, preferably a C 1 -C 4 straight or branched alkylene group, or -0-, more preferably a C 1 -C 4 straight or branched alkylene group, O 0 - C - or - C 0-, most preferably a C,-C 4 straight or branched alkylene group.
• Preferred examples of the light-sensitive material obtained by reacting a polyhydroxy compound containing at least one group represented by the general formula (I) per molecule with 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or 1,2-naphthoquinonediazido-4-sulfonyl chloride are those which are represented by the general formulae (II) to (IX) below.
• the polyhydroxy compounds used in the present invention are those which contain one or more hydroxy groups per molecule.
• Specific examples of the polyhydroxy compounds include polyhydroxy compounds represented by the general formulae (II') to (IX') described hereinafter, bis-(polyhydroxybenzoyl)alkanes such as bis(2,3,4-trihydroxybenzoyl)methane, bis(polyhydroxybenzoyl)-benzenes such as p-bis(2,3,4-trihydroxybenzoyl)benzene, alkanediols such as ethylene glycol di(3,4,5-trihydroxybenzoate), a-pyrone natural dyes, ⁇ -pyrone natural dyes such as quercetin and rutin, diazine natural dyes such as leucopterin, quinone natural dyes such as alizarin and purpurin, poly(hydroxystyrene), and resins such as novolak resin and pyrogallol/acetone condensate resin.
• R 1 and R 2 each represents a hydrogen atom, or a C 1 -C 4 straight or branched alkyl or alkoxy group, provided that R 1 and R 2 do not represent hydrogen atoms at the same time;
• X represents a divalent organic group (preferably a C 1 -C4 straight or branched alkylene group, -S- or -O-, more preferably a C 1 -C 4 straight or branched alkylene group, and most preferably a C 1 -C 4 straight or branched alkylene group);
• R represents -H, (which may be the same or different);
• R 3 to R 20 which may be the same or different, each represents -H, -OH, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralky
• the light-sensitive materials represented by the general formulae (II) to (IX) can be obtained by reacting the polyhydroxy compounds represented by the following general formulae (II') to (IX') with 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or 1,2-naphthoquinonediazido-4-sulfonyl chloride.
• R, and R 2 each represents a hydrogen atom, or a C1-C4 straight or branched alkyl or alkoxy group, provided that R 1 and R 2 do not represent hydrogen atoms at the same time;
• X represents a divalent organic group (preferably a C 1 -C 4 straight or branched alkylene group, -S- or -O-, more preferably a C 1 -C 4 straight or branched alkylene group, , and most preferably a C 1 -C 4 straight or branched alkylene group);
• R 3 ' to R 20 ' which may be the same or different, each represents -H, -OH, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aralkyl group, a substituted or un
• the polyhydroxy compounds having at least one group represented by the general formula (I) per molecule can be obtained by introducing the group represented by general formula (I) into the starting polyhydroxy compounds according to the reactions illustrated hereinafter.
• the starting polyhydroxy compounds have a plurality of reactive sites, the products are obtained as a mixture which may also be used in the present invention.
• the term "starting polyhydroxy compound” as used herein and in the following reaction schemes means the compounds corresponding to formulae (II') to (IX') but containing no group represented by formula (1).
• each of these groups preferably represents an alkyl or alkoxy group containing 1 to 8 carbon atoms, an aryl or aralkyl group containing 6 to 15 carbon atoms, an alkyl or alkoxy group containing 1 to 8 carbon atoms which is substituted with an alkoxy group, an aryloxy group, an aryl group, a hydroxyl group, a carboxyl group, a sulfonic acid group, an amino group, a nitro group, a silyl group, a silyl ether group, a cyano group, an aldehydo group, a mercapto group
• esterification reaction between the polyhydroxy compound represented by one of the general formulae (II') to (IX') and 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or 1,2-naphthoquinonediazido-4-sulfonyl chloride is conducted in a conventional manner as described in, for example, U.S. Patent 4,639,406.
• predetermined amounts of the polyhydroxy compound represented by one of the general formulae (II') to (IX 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or 1,2-naphthoquinonediazido-4-sulfonyl chloride, and a solvent such as dioxane, acetone, methyl ethyl ketone or N-methylpyrrolidone were charged in a flask, and a basic catalyst such as sodium hydroxide, sodium carbonate, sodium hydrogencarbonate or triethylamine was dropwise added thereto to conduct the condensation reaction. The resulting product is washed with water, purified, and dried.
• Light-sensitive materials represented by, for example, the general formulae (II) to (IX) can be obtained in the above-described manner.
• esterification ratio is defined as an average value of the mixture.
• the alkali-soluble novolak resin may be obtained by addition condensation between 1 mol of a phenol and 0.6 to 1.0 mol of an aldehyde in the presence of an acidic catalyst.
• the phenol which can be used include phenol, o-cresol, m-cresol, p-cresol, xylenol, naphthol, etc., either independently or as a combination of two or more.
• the aldehyde which can be used include formaldehyde, paraformaldehyde, acetaldehyde, halogenated acetaldehyde (e.g., chloro- or bromo-), furfural, etc.
• the acidic catalyst which can be used include hydrochloric acid, sulfuric acid, formic acid, oxalic acid, acetic acid, etc.
• the thus-obtained novolak resin having a molecular weight of 1,000 to 50,000 is alkali-soluble.
• the ratio of the light-sensitive material to the alkali-soluble novolak resin to be used in the present invention 5 to 100 parts by weight, preferably 7 to 40 parts by weight, of the light-sensitive material is used per 100 parts of the novolak resin. If the amount of the light-sensitive substance is less than 5 parts by weight, there results a seriously decreased film-remaining ratio, whereas if the amount used is more than 100 parts by weight, there result a decreased sensitivity and a decreased solubility in the solvent.
• the aforesaid light-sensitive material may be the primary light-sensitive material used, but, if necessary, ordinary light-sensitive materials such as ester compounds formed between 2,3,4-trihydroxybenzophenone, 2,4,4 -trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone, etc. and 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or 1,2-naph- thoquinonedi azido-4-sulfonyl chloride may be used together with the light-sensitive material of the present invention.
• ordinary light-sensitive materials such as ester compounds formed between 2,3,4-trihydroxybenzophenone, 2,4,4 -trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone, etc. and 1,2-naphthoquinonediazido-5-sulfonyl chloride and/or
• these ordinary light-sensitive materials may be used in an amount of up to 100 parts by weight, preferably up to 30 parts by weight, per 100 parts by weight of the light-sensitive material of the present invention represented by, for example, the foregoing general formulae (II) to (IX).
• composition of the present invention may further contain a polyhydroxy compound for promoting dissolution into a developer.
• a polyhydroxy compound for promoting dissolution into a developer.
• polyhydroxy compounds include phenols, resorcin, phloroglucin, 2,3,4-trihydroxybenzophenone, 2,3,4,4 -tetrahydroxybenzophenone, 2,3,4.3',4',5'-hexahydroxybenzophenone, and acetone-pyrogallol condensate resin.
• Solvents for dissolving the light-sensitive material and the alkali-soluble novolak resin in accordance with the present invention include illustrated ketones such as methyl ethyl ketone and cyclohexanone, alcohol ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether, ethers such as dioxane and ethylene glycol dimethyl ether, cellosolve esters such as methyl cellosolve acetate and ethyl cellosolve acetate, fatty acid esters such as methyl lactate, ethyl lactate and butyl acetate, halogenated hydrocarbons such as 1,1,2-trichloroethylene, and highly polar solvents such as dimethylacetamide, N-methylpyrrolidone, dimethylformamide and dimethylsulfoxide. These solvents may be used either alone or in combination of two or more of them.
• the positive-working photoresist composition of the present invention may contain, if necessary, a dye, a plasticizer, an adhesion aid, and/or a surfactant.
• a dye include Methyl Violet, Crystal Violet, and Malachite Green
• specific examples of the plasticizers include stearic acid, acetal resin, phenoxy resin and alkyd resin
• specific examples of the adhesion aid include hexamethyldisilazane and chloromethylsilane
• specific examples of the surfactant include nonylphenoxypoly(ethyleneoxy)ethanol and octylphenoxypoly(ethyleneoxy)ethanol.
• the positive-working photoresist composition of the present invention can be coated on a base board such as a semiconductor wafer, a glass plate, a ceramic plate or a metal plate in a thickness of 0.5 to 0.3 IJ,m according to the spin-coating method or the roller-coating method. Then, the coated layer is heated and dried, exposed to UV rays or the like through an exposure mask to print a circuit pattern thereon, and then developed to obtain a positive image. Further, patternwise etching using this positive image as a mask enables patternwise processing.
• Typical fields for applying the composition include a process of manufacturing semiconductors such as IC, a process of manufacturing circuit bases for liquid crystal, thermal head or the like, and other photofabrication processes as described in U.S. Patent 4,639,406.
• a good resist can be obtained by coating the above-described positive-working photoresist composition on a substrate for use in manufacture of fine integrated circuit elements (e.g., silicon/silicon dioxide coating) according to a proper coating method using, for example, a spinner or a coater, exposing the coated composition through a predetermined mask, and then developing it.
• fine integrated circuit elements e.g., silicon/silicon dioxide coating
• aqueous solutions of alkalis such as inorganic alkalis (e.g., sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate and aqueous ammonia), primary amines (e.g., ethylamine and n-propylamine), secondary amines (e.g., diethylamine and di-n-butylamine), tertiary amines (e.g., triethylamine and methyldiethylamine), alcohol-amines (e.g., dimethylethanolamine and triethanolamine), quaternary ammonium salts (e.g., tetramethylammoium hydroxide and tetraethylammonium hydroxide), and cyclic amines(e.g., pyrrole and piperidine).
• alkalis e.g., sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate and a
• the positive-working photoresist of the present invention is excellent in resolving power, reproduction fidelity, profile pattern of resist pattern, development latitude, heat resistance and storage stability of the resist.
• the precipitate formed was collected by filtration, washed with water, and dried (at 40°C) to obtain 27.5 g of 1,2-naphthoquinonediazido-5-sulfonic acid ester of 2,3,4,4 -tetrahydroxybenzophenone (u').
• novolak resin had a weight-average molecular weight (polystyrene-reduced value) of 7,000.
• Sensitivity is defined as a reciprocal of an exposure amount capable of reproducing a 1.0- ⁇ m mask pattern, and is presented as relative values taking the sensitivity of Comparative Example 1 as 1.0.
• Film-remaining ratio is presented in terms of percentage of remaining film in an unexposed portion after development based on before development.
• Resolving power represents a limiting resolving power in an exposure amount capable of reproducing a 1.0- ⁇ m mask pattern.
• Heat resistant is presented in terms of a temperature at which a patterned resist formed on a silicon wafer is not deformed after baking for 30 minutes in a convection oven.
• Profile of the resist is presented in terms of an angle (0) formed by the resist wall in the 1.0- ⁇ m resist pattern section with the plane of silicon wafer.
• resists using the light-sensitive materials (a) to (t) in accordance with the present invention showed particularly excellent resolving power and resist profile.
• the light-sensitive materials in accordance with the present invention also possess excellent solubility in ethyl cellosolve acetate.
• the resist compositions using these light-sensitive materials of the present invention suffered formation of no precipitates even after being allowed to stand for 30 days at 40 C, whereas the resist compositions using the light-sensitive materials (u), (v) and (x) of Comparative Examples suffered formation of precipitates after being allowed to stand under the same conditions.
• 1,2-naphthoquinone diazide refers to the 2-diazonaphthoquinone-(1,2) structure.

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• Materials For Photolithography (AREA)
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• 1989
  • 1989-04-26 JP JP1107013A patent/JP2700918B2/ja not_active Expired - Fee Related
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