EP0264388A1 - Schaltungsanordnung zur messung einer mechanischen verformung, insbesondere unter einwirkung eines drucks. - Google Patents
Schaltungsanordnung zur messung einer mechanischen verformung, insbesondere unter einwirkung eines drucks.Info
- Publication number
- EP0264388A1 EP0264388A1 EP87902044A EP87902044A EP0264388A1 EP 0264388 A1 EP0264388 A1 EP 0264388A1 EP 87902044 A EP87902044 A EP 87902044A EP 87902044 A EP87902044 A EP 87902044A EP 0264388 A1 EP0264388 A1 EP 0264388A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- temperature
- circuit arrangement
- signal
- amplifier
- dependent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Definitions
- Circuit arrangement for measuring a mechanical deformation, in particular under the action of a pressure
- the invention relates to a circuit arrangement according to the type of the main claim.
- a sensor for detecting the pressure of a medium using at least one element which changes its resistance under the action of pressure is known.
- a commercially available resistance component preferably a carbon film resistor, a thin film resistor or a thick film resistor is used.
- the elements are preferably arranged in a bridge circuit, resistance components with different temperature and pressure coefficients being used to compensate for temperature influences and to increase the pressure-dependent signal.
- resistance elements it is proposed to arrange resistance elements on a support that is elastically deformable by the action of pressure, so that a signal increase due to the simultaneous action of the pressure and an expansion or compression of the resistance component occurs.
- the temperature response of the output signal of the circuit arrangement is first calculated or recorded.
- the temperature response can be represented mathematically as a function dependent on the temperature, which in turn can be developed into a power series.
- it is sufficient if the linear element of the temperature response is compensated, since the elements of a higher order are sufficiently small compared to an allowable tolerance.
- precautions must also be taken to compensate for quadratic and sometimes higher-quality parts of the temperature response. The actual compensation then generally takes place in such a way that a separate, temperature-dependent signal is formed within the circuit arrangement, which signal is added or subtracted in a suitable manner to the output signal.
- the present invention is accordingly based on the object of finding a circuit arrangement for measuring a mechanical deformation, in particular under the action of a pressure, which enables a highly precise temperature-compensated measurement.
- the circuit arrangement according to the invention with the characterizing features of the main claim has the particular advantage over the circuit arrangements known from the prior art that not only compensation of the static temperature response takes place, but that due to the supply of the sensor signal via a temperature-dependent resistor, the temperature response of the measuring sensitivity is simultaneously compensated becomes.
- Another particularly great advantage of the circuit arrangement according to the invention is that the quadratic portion of the temperature response is compensated for by a part of the circuit arrangement which consists solely of resistance components. These can therefore be produced particularly easily in thick-film technology by means of resistance pastes with different temperature coefficients and, if necessary, by subsequent adjustment using a laser beam.
- Terminal U- represents the ground of the circuit arrangement, while a stabilized supply voltage of 5 V is present at terminal U + .
- One between the Supply voltage terminals switched capacitor C1 is used to protect against voltage peaks that can be interspersed by the ignition system.
- a resistance bridge circuit R1, R2, R3, R4 is connected between the supply voltage terminals, the diagonal connections of which lead to the inputs of an amplifier V1.
- the connection point of the resistors R1, R2 leads to the inverting input and the connection point of the resistors R3, R4 leads to the non-inverting input of the amplifier V1.
- the output of amplifier V1 is fed back to the inverting input via a resistor R7.
- the series connection of two resistors R5, R6 is also connected between the supply voltage terminals, the connection point of which is also connected to the inverting input of the amplifier V1.
- the resistors R1, R2, R3, R4 together form a pressure sensor, as is known for example from DE-GM 81 19 025.
- the resistors are located on a thick-film membrane and are arranged in such a way that when pressure is exerted on the membrane, the resistors R1, RU are compressed, while the resistors R2, R3 are stretched in length. Due to a piezoresistive effect of the thick-film resistance paste, from which the resistors R1, R2, R3, R4 are formed, their change in resistance is about eight times as great as their geometric change in length.
- the resistance bridge circuit Since the resistance bridge circuit is operated at a constant voltage, a detuning of the bridge appears when pressure is exerted on the thick-film membrane, which occurs as a diagonal voltage of the bridge expresses, which is amplified by the amplifier V1.
- the amplification factor of the arrangement is set by the resistor R7, while a desired offset is set by the resistor divider R5, R6.
- this circuit arrangement also shows a temperature effect which is not desired for pressure measurement.
- the temperature effect consists of a temperature response of the pressure measurement sensitivity and a temperature response of the offset.
- the temperature response of the offset has a curved course, which is composed approximately of a linear and a square part.
- the output of the amplifier VI leads via a series connection of two resistors R23, R24 to the inverting input of a second amplifier V2.
- the current required for this is supplied via a resistor R8, which is connected between the supply voltage terminal U + and the output of the first amplifier V1.
- the gain factor of the second amplifier V2 is determined via a resistor R28 which is connected between the output and the inverting input of the amplifier V2.
- the output of amplifier V2 is connected to an output terminal U out of the entire circuit arrangement.
- the output current of the circuit arrangement is obtained via a resistor R30, which is connected between the supply voltage terminal U + and the output of the second amplifier V2.
- a rough setting of the offset of the amplifier V2 can be set via the division ratio of the resistors R11, R12. Fine adjustment is possible with three resistors R13, R14, R25.
- resistors R13, R1U are connected in series between terminals U and U-, while their connection point is connected via resistor R25 to the inverting input of amplifier V2.
- the series connection of a resistor R29 and a capacitor C2 is connected in parallel with the feedback resistor R28. Furthermore, the non-inverting input is connected via a resistor R9 and a capacitor C3 and the inverting input via a resistor R10 and a capacitor C4 to the ground of the circuit at the terminal U-.
- the remaining part of the circuit arrangement shown in the drawing is used to compensate the temperature response of the offset.
- the series connection of two resistors R15, R16 is connected between the terminal U + and the terminal U-, the connection point of which is connected via a resistor R26 to the inverting input of the amplifier V2.
- a resistor bridge circuit R17, R18, R19, R20 is connected between the terminals U + and U-, a series connection of two resistors R21, R22 being additionally placed in the bridge diagonal between the connection points of the resistors R17 5 Rl8 and the resistors R19, R20 .
- the connection point of the resistors R21, R22 also leads via a resistor R27 to the inverting input of the amplifier V2.
- the output signal of amplifier V1 can be approximately represented by the following equation:
- T temperature of the circuit arrangement a 0 , a 1 , a 2 , a 3 : coefficients.
- An output signal is now desired which, apart from the DC component, depends only on the pressure p and, if possible, not on the temperature T. This is achieved by a temperature response compensation, in which suitable temperature-dependent signals with the opposite sign are added to the output signal of the amplifier V1.
- the amplifier V2 is provided, which is connected as a summing amplifier.
- the temperature-dependent signals are generated in the circuit arrangement in that suitable resistors are implemented in thick-film technology with the aid of resistor pastes which have their own positive or negative temperature coefficient. That is, the resistors R15, R17, R21, R20 have a positive temperature coefficient, while the resistors R23, R16, R18, R19, R22 have a negative temperature coefficient.
- the linear temperature element of the output signal of the amplifier V1 is now compensated for using the resistors R15, R16, R26.
- the quadratic temperature element is made up of resistors R17 to R22 and R27 compensated. The component, which is dependent on both pressure and temperature, is compensated for using resistors R23, R24.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3612810 | 1986-04-16 | ||
DE19863612810 DE3612810A1 (de) | 1986-04-16 | 1986-04-16 | Schaltungsanordnung zur messung einer mechanischen verformung, insbesondere unter einwirkung eines drucks |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0264388A1 true EP0264388A1 (de) | 1988-04-27 |
EP0264388B1 EP0264388B1 (de) | 1990-01-03 |
Family
ID=6298802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87902044A Expired - Lifetime EP0264388B1 (de) | 1986-04-16 | 1987-03-19 | Schaltungsanordnung zur messung einer mechanischen verformung, insbesondere unter einwirkung eines drucks |
Country Status (6)
Country | Link |
---|---|
US (1) | US5134885A (de) |
EP (1) | EP0264388B1 (de) |
JP (1) | JPS63503085A (de) |
KR (1) | KR880701362A (de) |
DE (2) | DE3612810A1 (de) |
WO (1) | WO1987006339A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4115288A1 (de) * | 1991-05-10 | 1992-11-12 | Bosch Gmbh Robert | Einrichtung zum abgleich von sensorsignalen |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814950A1 (de) * | 1988-05-03 | 1989-11-16 | Bosch Gmbh Robert | Beschleunigungsaufnehmer |
DE3908795A1 (de) * | 1989-03-17 | 1990-09-20 | Bosch Gmbh Robert | Verfahren und vorrichtung zur messung einer mechanischen verformung |
JP3071202B2 (ja) * | 1989-07-19 | 2000-07-31 | 富士電機株式会社 | 半導体圧力センサの増巾補償回路 |
JPH03255926A (ja) * | 1990-03-06 | 1991-11-14 | Ulvac Japan Ltd | ピラニ真空計 |
DE4041621A1 (de) * | 1990-12-22 | 1992-07-02 | Bosch Gmbh Robert | Auswerteschaltung fuer einen piezoresistiven drucksensor |
DE4107433C2 (de) * | 1991-03-08 | 2000-09-21 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur Sensorsignalaufbereitung |
DE4135393A1 (de) * | 1991-10-26 | 1993-04-29 | Bosch Gmbh Robert | Einrichtung zur weg- oder winkelmessung |
JPH0550334U (ja) * | 1991-12-11 | 1993-07-02 | エヌオーケー株式会社 | 歪みゲージセンサの温度補償回路 |
DE4210818C2 (de) * | 1992-04-01 | 2002-02-14 | Bosch Gmbh Robert | Auswerteschaltung für einen Sensor, insbesondere für einen piezoresistiven Drucksensor |
JP4629892B2 (ja) * | 2001-03-27 | 2011-02-09 | 三菱電機株式会社 | 温度係数生成回路及びそれを用いた温度補償回路 |
DE102004054554A1 (de) * | 2004-11-11 | 2006-05-18 | Bosch Rexroth Aktiengesellschaft | Schaltungsanordnung zum Messen einer mechanischen Verformung |
JP4466509B2 (ja) * | 2005-08-25 | 2010-05-26 | 株式会社デンソー | コモンレール式燃料噴射システムの制御装置 |
US8013657B2 (en) * | 2009-10-07 | 2011-09-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Temperature compensated integrator |
DE102011085555A1 (de) * | 2011-11-02 | 2013-05-02 | Robert Bosch Gmbh | Variable Widerstandsanordnung, Messbrückenschaltung und Verfahren zum Kalibrieren einer Messbrückenschaltung |
JP6341119B2 (ja) * | 2015-03-03 | 2018-06-13 | 株式会社デンソー | センサ駆動装置 |
WO2020263175A1 (en) * | 2019-06-25 | 2020-12-30 | Choon How Lau | Circuit arrangement and method of forming the same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3528022A (en) * | 1965-10-14 | 1970-09-08 | Gen Electric | Temperature compensating networks |
JPS4925984A (de) * | 1972-04-12 | 1974-03-07 | ||
JPS56140229A (en) * | 1980-04-02 | 1981-11-02 | Toshiba Corp | Pressure converter |
US4478527A (en) * | 1982-12-02 | 1984-10-23 | General Signal Corporation | Temperature compensation for zero and span changes in a measurement circuit |
DE3503489A1 (de) * | 1985-01-30 | 1986-07-31 | Siemens AG, 1000 Berlin und 8000 München | Schaltungsanordnung zur kompensation der temperaturabhaengigkeit von empfindlichkeit und nullpunkt eines piezoresistiven drucksensors |
JPH0691265B2 (ja) * | 1986-08-01 | 1994-11-14 | 株式会社日立製作所 | 半導体圧力センサ |
DE3640242A1 (de) * | 1986-11-25 | 1988-05-26 | Vdo Schindling | Schaltungsanordnung fuer einen sensor |
-
1986
- 1986-04-16 DE DE19863612810 patent/DE3612810A1/de not_active Withdrawn
-
1987
- 1987-03-19 EP EP87902044A patent/EP0264388B1/de not_active Expired - Lifetime
- 1987-03-19 DE DE8787902044T patent/DE3761341D1/de not_active Expired - Lifetime
- 1987-03-19 KR KR1019870701180A patent/KR880701362A/ko not_active Application Discontinuation
- 1987-03-19 WO PCT/DE1987/000117 patent/WO1987006339A1/de active IP Right Grant
- 1987-03-19 JP JP62501951A patent/JPS63503085A/ja active Pending
-
1990
- 1990-09-07 US US07/579,939 patent/US5134885A/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO8706339A1 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4115288A1 (de) * | 1991-05-10 | 1992-11-12 | Bosch Gmbh Robert | Einrichtung zum abgleich von sensorsignalen |
DE4115288C2 (de) * | 1991-05-10 | 1995-05-04 | Bosch Gmbh Robert | Einrichtung zum Abgleich von Exemplarstreuung und Temperatureinflüssen mindestens eines Sensors |
Also Published As
Publication number | Publication date |
---|---|
KR880701362A (ko) | 1988-07-26 |
US5134885A (en) | 1992-08-04 |
DE3612810A1 (de) | 1987-10-22 |
EP0264388B1 (de) | 1990-01-03 |
WO1987006339A1 (en) | 1987-10-22 |
JPS63503085A (ja) | 1988-11-10 |
DE3761341D1 (de) | 1990-02-08 |
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