EP0254111A1 - Dispositif de rayonnement ultraviolet - Google Patents

Dispositif de rayonnement ultraviolet Download PDF

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Publication number
EP0254111A1
EP0254111A1 EP87109674A EP87109674A EP0254111A1 EP 0254111 A1 EP0254111 A1 EP 0254111A1 EP 87109674 A EP87109674 A EP 87109674A EP 87109674 A EP87109674 A EP 87109674A EP 0254111 A1 EP0254111 A1 EP 0254111A1
Authority
EP
European Patent Office
Prior art keywords
electrode
radiator according
dielectric
power radiator
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87109674A
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German (de)
English (en)
Other versions
EP0254111B1 (fr
Inventor
Baldur Dr. Eliasson
Peter Dr. Erni
Michael. Dr Hirth
Ulrich Dr. Kogelschatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
BBC Brown Boveri AG Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BBC Brown Boveri AG Switzerland filed Critical BBC Brown Boveri AG Switzerland
Publication of EP0254111A1 publication Critical patent/EP0254111A1/fr
Application granted granted Critical
Publication of EP0254111B1 publication Critical patent/EP0254111B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas, the walls of which are formed on the one hand by a dielectric which is provided with first electrodes on its surface facing away from the discharge space, and on the other hand by second electrodes or likewise are formed by a dielectric, which is provided on its surface facing away from the discharge space with second electrodes, with an alternating current source connected to the first and second electrodes for supplying the discharge and means for directing the radiation generated by the silent electrical discharge into an external space.
  • the invention relates to a state of the art, such as that found in the publication "Vacuum-ultraviolet lamps with a barrier discharge in inert gases" by GA Volkova, NN Kirillova, EN Pavlovskaya and AV Yakovleva in the SU magazine Zhurnal Prikladnoi Spektoskopii 41 (1984) No. 4, 691-695, published in an English translation by Plenum Publishing Corporation 1985, Doc. No. 0021-9037 / 84 / 4104-1194 $ 08.50, pp. 1194 ff.
  • high-performance lamps especially high-performance UV lamps, e.g. Disinfection, curing of paints and synthetic resins, flue gas cleaning, destruction and synthesis of special chemical compounds.
  • the wavelength of the emitter will have to be matched very precisely to the intended process.
  • the best-known UV lamp is probably the mercury lamp, which emits UV radiation with wavelengths of 254 nm and 185 nm with high efficiency.
  • a low-pressure glow discharge burns in a noble gas-mercury vapor mixture in these lamps.
  • This radiator consists of a tube made of dielectric material with a rectangular cross section. Two opposite tube walls are provided with flat electrodes in the form of metal foils, which are connected to a pulse generator. The tube is closed at both ends and filled with an inert gas (argon, krypton or xenon). Such filling gases form so-called excimers when an electrical discharge is ignited under certain conditions.
  • An excimer is a molecule that is formed from an excited atom and an atom in the ground state. e.g. Ar + Ar * ⁇ Ar
  • the UV light generated in a first embodiment reaches the outside through an end window in the dielectric tube.
  • the broad sides of the tube are provided with metal foils which form the electrodes.
  • the tube is provided with recesses, over which special windows are glued, through which the radiation can escape.
  • the efficiency that can be achieved with the known radiator is of the order of 1%, which is far below the theoretical value of around 50% because the filling gas heats up inadmissibly.
  • Another inadequacy of the known radiator can be seen in the fact that its light exit window has only a comparatively small area for reasons of stability.
  • the object of the invention is to create a high-performance radiator, in particular of ultraviolet light, which has a significantly higher degree of efficiency, can be operated with higher electrical power densities and whose light exit surface is not subject to the restrictions mentioned.
  • this object is achieved in that, in the case of a high-power radiator of the generic type, both the dielectric and the first electrodes for the said Radiation are permeable and at least the second electrodes are cooled.
  • the geometry of the high-performance lamp can be adapted to the process in which it is used within wide limits. In addition to large, flat spotlights, cylindrical ones that radiate inwards or outwards are also possible.
  • the discharges can be operated at high pressure (0.1 - 10 bar). With this design, electrical power densities of 1 - 50 KW / m2 can be realized. Since the electron energy in the discharge can be largely optimized, the efficiency of such radiators is very high, even if one excites resonance lines of suitable atoms.
  • the wavelength of the radiation can be set by the type of fill gas, e.g.
  • the advantage of these emitters is the areal radiation of large radiation outputs with high efficiency. Almost all of the radiation is concentrated in one or a few wavelength ranges. It is important in all cases that the radiation can escape through one of the electrodes.
  • This problem can be solved with transparent, electrically conductive layers or else by using a fine-mesh wire network or applied conductor tracks as electrodes, which on the one hand ensure the current supply to the dielectric, but on the other hand are largely transparent to the radiation.
  • a transparent electrolyte for example H20, can be used as a further electrode, which is particularly advantageous for the irradiation of water / waste water, since in this way the radiation generated is directly in irradiating liquid arrives and this liquid also serves as a coolant.
  • a metal electrode 1 which is in contact on one side with a cooling medium 2, for example water.
  • a plate 4 made of dielectric material is arranged, spaced apart by electrically insulating spacers 3, which are distributed over a certain area.
  • a UV high-performance lamp it consists, for example, of quartz or sapphire, which is transparent to the UV radiation. Materials such as magnesium fluoride and calcium fluoride are also suitable for very short-wave radiation.
  • Dielectric 4 and metal electrode 1 delimit a discharge space 5 with a typical gap width between 1 and 10 mm.
  • a wire mesh there can also be a transparent, electrically conductive layer, the layer of indium or tin oxide being used for visible light, a gold layer 50-100 angstroms thick for visible and UV light, and especially a thin layer of alkali metals in UV can.
  • An AC power source 7 is connected between the metal electrode 1 and the counter electrode (wire mesh 6).
  • alternating current source 7 those can generally be used which have long been used in connection with ozone generators.
  • the discharge space 5 is laterally closed in the usual way, was evacuated before closing and was filled with an inert gas or a substance that forms excimers under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, filled, optionally using an additional further noble gas (Ar, He, Ne) as a buffer gas.
  • an inert gas or a substance that forms excimers under discharge conditions e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, filled, optionally using an additional further noble gas (Ar, He, Ne) as a buffer gas.
  • the electron energy distribution can be optimally adjusted by varying the gap width of the discharge space, pressure and / or temperature (via the intensity of the cooling).
  • a metal tube 8, a tube 9 made of dielectric material and an outer metal tube 10 are arranged coaxially one inside the other. Coolant or a gaseous coolant is passed through the interior 11 of the metal tube.
  • the annular gap 12 between the tubes 8 and 9 forms the discharge space.
  • the dielectric tube 9 a quartz tube in the example
  • the outer metal tube spaced from it by a further annular gap 13 is the liquid to be irradiated, in the example water, which forms the other electrode due to its electrolytic property.
  • the AC power source 7 is therefore connected to the two metal tubes 8 and 10.
  • This arrangement has the advantage that the radiation can act directly on the water, the water also serves as a coolant, and a separate electrode on the outer surface of the dielectric tube 9 is therefore unnecessary.
  • one of the electrodes mentioned in connection with FIG. 1 can be used (transparent electrically conductive layer, wire mesh) can be applied to the outer surface of the dielectric tube 9.
  • a quartz tube 9 provided with a transparent, electrically conductive inner electrode 14 is arranged coaxially in a metal tube 8.
  • An annular discharge gap 12 extends between the two tubes 8, 9.
  • the metal tube 8 is formed to form an annular cooling gap 15 through which a coolant, e.g. Water that can be passed through is surrounded by an outer tube 10.
  • the AC power source 7 is connected between the inner electrode 14 and the metal tube 8.
  • the substance to be irradiated is guided through the interior 16 of the dielectric tube 9 and, if suitable, simultaneously serves as a coolant.
  • an electrolyte e.g. Use water as an electrode.
  • the individual tubes are spaced or fixed relative to one another by means of spacing elements, such as are used in ozone technology.
  • FIG. 4 The basic structure of such a high-power radiator is shown in FIG. 4. There are the same with Fig. 1 parts with the same reference numerals.
  • the basic difference between FIGS. 1 and 4 consists in the interposition of a second dielectric 17 between the discharge space 5 and the metallic electrode 1.
  • the metallic electrode 1 is cooled by a cooling medium 2; the radiation leaves the discharge space 5 through the dielectric 4 which is permeable to the radiation and the wire mesh 6 serving as the second electrode.
  • FIG. 5 A practical implementation of such a high-power radiator is illustrated schematically in FIG. 5.
  • a double-walled quartz tube 18, consisting of an inner tube 19 and an outer tube 20, is surrounded on the outside by a wire mesh 6, which serves as the first electrode.
  • the second electrode is designed as a metal layer 21 on the inner wall of the inner tube 19.
  • the AC power source 7 is connected to these two electrodes.
  • the annular space between the inner and outer tube serves as a discharge space 5. This is sealed off from the outer space by melting the filler neck.
  • the radiator is cooled by passing a coolant through the interior of the inner tube 19, a tube 23 being inserted into the inner tube 19 to guide the coolant, leaving an annular space 24 between the inner tube 19 and the tube 23.
  • the direction of flow of the coolant is shown by arrows.
  • the hermetically sealed radiator according to FIG. 5 can also be operated as an internal radiator analogous to FIG. 3 if the cooling is fitted on the outside and the UV-permeable electrode on the inside.
  • the high-power radiators according to FIGS. 4 and 5 can also be modified in a variety of ways without departing from the scope of the invention:
  • the metallic electrode 1 can be dispensed with if the cooling medium is an elec trolyte, which also serves as an electrode.
  • the wire mesh 6 can also be replaced by an electrically conductive, radiation-permeable layer.
  • the wire mesh 6 can be replaced by such a layer.
  • the metal layer 21 is formed as a layer which is transparent to the radiation, e.g. from indium or tin oxide, the radiation can be applied directly to the cooling medium, e.g. Water. If the coolant itself is an electrolyte, this can take over the function of the electrode 21.
  • each volume element in the discharge gap will emit its radiation in the entire solid angle 4 ⁇ . If one only wants to use the radiation that emerges from the UV-permeable electrode 6, the usable radiation can be practically doubled if the counter electrode 21 is made of a material that reflects UV radiation well (e.g. aluminum). 5, the inner electrode could be aluminum vapor deposition.
  • Thin (0.1-1 ⁇ m) layers of alkali metals are also suitable for the UV-permeable, electrically conductive electrode 6.
  • the alkali metals lithium, potassium, rubidium, cesium in the ultraviolet spectral range have a high transparency with little reflection. Alloys (eg 25% sodium / 75% potassium) are also suitable. Since the alkali metals react with air (sometimes very violently), they must be provided with a UV-permeable protective layer (eg Mg F2) after application in a vacuum.
  • a UV-permeable protective layer eg Mg F2

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
EP87109674A 1986-07-22 1987-07-06 Dispositif de rayonnement ultraviolet Expired - Lifetime EP0254111B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH2924/86 1986-07-22
CH2924/86A CH670171A5 (fr) 1986-07-22 1986-07-22

Publications (2)

Publication Number Publication Date
EP0254111A1 true EP0254111A1 (fr) 1988-01-27
EP0254111B1 EP0254111B1 (fr) 1992-01-02

Family

ID=4244683

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87109674A Expired - Lifetime EP0254111B1 (fr) 1986-07-22 1987-07-06 Dispositif de rayonnement ultraviolet

Country Status (5)

Country Link
US (1) US4837484A (fr)
EP (1) EP0254111B1 (fr)
CA (1) CA1288800C (fr)
CH (1) CH670171A5 (fr)
DE (1) DE3775647D1 (fr)

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DE4113524A1 (de) * 1991-04-25 1992-10-29 Abb Patent Gmbh Verfahren zur behandlung von oberflaechen
DE4140497A1 (de) * 1991-12-09 1993-06-17 Asea Brown Boveri Hochleistungsstrahler
DE4208376A1 (de) * 1992-03-16 1993-09-23 Asea Brown Boveri Hochleistungsstrahler
DE4302465C1 (de) * 1993-01-29 1994-03-10 Fraunhofer Ges Forschung Vorrichtung zum Erzeugen einer dielektrisch behinderten Entladung
DE4235743A1 (de) * 1992-10-23 1994-04-28 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE4238324A1 (de) * 1992-11-13 1994-05-19 Abb Research Ltd Verfahren und Einrichtung zur Entgiftung von schadstoffhaltigen Gasen
DE4242172A1 (de) * 1992-12-15 1994-06-16 Heraeus Noblelight Gmbh Verfahren zur Entkeimung
DE4243208A1 (de) * 1992-12-19 1994-06-23 Heraeus Noblelight Gmbh Verfahren zur Abwasserreinigung
WO1994013330A1 (fr) * 1992-12-15 1994-06-23 Heraeus Noblelight Gmbh Sterilisation de liquides
DE4243210A1 (de) * 1992-12-19 1994-06-30 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE4314510A1 (de) * 1993-05-03 1994-11-10 Abb Research Ltd Verfahren zur Erzeugung von Ozon
EP0642153A1 (fr) * 1993-09-08 1995-03-08 Ushiodenki Kabushiki Kaisha Lampe à décharge à barrière diélectrique
DE4342643A1 (de) * 1993-09-13 1995-03-16 Fraunhofer Ges Forschung Fotochemische Fixierung mit UV-Strahler
WO1995009256A1 (fr) * 1993-09-27 1995-04-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Traitement de surfaces par effet corona
EP0661110A1 (fr) * 1993-11-26 1995-07-05 Ushiodenki Kabushiki Kaisha Procédé d'oxydation de surface d'un article
DE4415242A1 (de) * 1994-04-30 1995-11-02 Wissenschaftlich Tech Optikzen Quasi-kontinuierlich emittierender UV-Laser, insbesondere Excimer-Laser
DE4430300C1 (de) * 1994-08-26 1995-12-21 Abb Research Ltd Excimerstrahler und dessen Verwendung
EP0767484A1 (fr) * 1995-10-02 1997-04-09 Ushiodenki Kabushiki Kaisha Lampe à décharge à barrière diélectrique
EP0703602B1 (fr) * 1994-09-20 1997-12-10 Ushiodenki Kabushiki Kaisha Dispositif source de lumière utilisant une lampe à décharge à barrière diélectrique
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EP0767484A1 (fr) * 1995-10-02 1997-04-09 Ushiodenki Kabushiki Kaisha Lampe à décharge à barrière diélectrique
EP0782871A3 (fr) * 1995-11-22 1999-03-10 Heraeus Noblelight GmbH Procédé et dispositif d'irradiation ultra-violet destiné au rayonnement corporelque son emploi
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DE19627119A1 (de) * 1996-07-05 1998-01-15 Hassia Verpackung Ag Vorrichtung zum Entkeimen und/oder Sterilisieren von Packstoffbahnen
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US4837484A (en) 1989-06-06
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DE3775647D1 (de) 1992-02-13
EP0254111B1 (fr) 1992-01-02

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