EP0112492A2 - Système d'alarme et de commande pour installation de fabrication de semi-conducteurs - Google Patents

Système d'alarme et de commande pour installation de fabrication de semi-conducteurs Download PDF

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Publication number
EP0112492A2
EP0112492A2 EP83111572A EP83111572A EP0112492A2 EP 0112492 A2 EP0112492 A2 EP 0112492A2 EP 83111572 A EP83111572 A EP 83111572A EP 83111572 A EP83111572 A EP 83111572A EP 0112492 A2 EP0112492 A2 EP 0112492A2
Authority
EP
European Patent Office
Prior art keywords
semi
gas
alarm
conductor
control system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83111572A
Other languages
German (de)
English (en)
Other versions
EP0112492A3 (en
EP0112492B1 (fr
Inventor
Shoichi C/O Nohmi Bosai Kogyo Co. Ltd. Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of EP0112492A2 publication Critical patent/EP0112492A2/fr
Publication of EP0112492A3 publication Critical patent/EP0112492A3/en
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Publication of EP0112492B1 publication Critical patent/EP0112492B1/fr
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Definitions

  • the present invention relates to an alarm and control system for semi-conductor factories or the like which can detect a fire or the leakage of treatment gases which are generated during the manufacturing process in a very large-scale integration (LSI) factory and also suitably controls the manufacturing process as well as a protection device such as fire extinguishing equipment.
  • LSI very large-scale integration
  • the present invention aims at providing an alarm and control system for semi-conductor factories or the like which can detect leaked treatment gas whether in the state of the gas itself or in the state of products of combustion as a result of combustion due to its reaction to oxygen in the air so that an appropriate control can be carried out either before the occurance of or at the initial stages of a fire.
  • the reference numeral 1 is a silane gas cylinder
  • 2 is an ammonia gas cylinder
  • 3 is a housing to house these cylinders
  • 6 is a nitride film forming device (CVD) to form an insulating film on a semi-conductor wafer by supplying silane and ammonia gases through pipes 4 and 5 respectively
  • 8 is a scaveging device which forcedly oxidizes,namely to treat by combustion the unreacted silane gas discharged from the device 6 through a pipe 7 with oxygen being supplied
  • 10 is a detection box provided between pipes 9 to monitor the state of the gas to be discharged to an exhaust duct 11 from the scaveging device 8
  • 12 is a vacuum pump to make the CVD 6 vacuous
  • 13 is an exhaust
  • the housing 3 and the detection box 10 are provided with gas detectors G 1 , G 2 , respectively, to detect the leakage of the treatment gases such as silane gas, etc. and fire detector D 1 and D 2 , respetively, to detect the products of combustion from the burning of the gases.
  • gas detectors G1, G 2 although a photoelectric type gas detector in which the light scattered by the gas particles is detected can be used, a gas detector as disclosed in Japanese Laid Open Patent Publication No.
  • 14380/1980 is preferably utilized in the embodiment shown here which operates on the basis of such phemonena that when a metal oxide semi-conductor which contains platinum black in the composition of stannic oxide known by the above patent as a detecting element for carbon monoxide, is aged in anatmosphare of silane gas it responds to low concentrations of silane gas of 0.2 to 0.5% and above.
  • a metal oxide semi-conductor which contains platinum black in the composition of stannic oxide known by the above patent as a detecting element for carbon monoxide
  • the fire detector to detect the products of combustion even though a photoelectric or ionization type smoke detector can be utilized, judging from the characterizing curves shown in Fig.
  • the ionization smoke detector (b) has a more effective than the photoelectric type smoke detector (a) in detecting the products of combustion of the silane gas, the former detecting the generation of the products of combustion earlier than the latter. As shown in Fig.
  • the gas detector G 1 and the fire detector D 1 provided in the housing 3 are connected to a first OR-circuit OR 1
  • the gas detector G 2 and the fire detector D 2 provided in the detection box 10 are connected directly and through an inverter I respectively to a second OR circuit OR 2
  • the outputs of the OR, and OR2 being connected to a third OR-circuit, OR 3
  • ihe output of OR 3 is connected to a relay means which appropriately controls the manufacturing process of the semi-conductor or a device for prevention of disasters such as a fire alarm or a fire extinguishing device.
  • the nitride film forming device 6 has semi-conductor wafers contained therein, and after it is made vacuous by the vacuum pump 12, the silane and ammonium gas cylinders 1 and 2 are opened to supply the silane and ammonia gases to the device 6, whereby nitride films necessary for the semi- conductor wafers, i. e. insulating films are made to be generated thereon.
  • the gases which contain the unreacted gases after the treatment are forcibly oxidized in the scavaeging device 8 and discharged from the exhaust duct 11 through the pipe 9 as a safe gas.
  • silane gas leak from the silance gas cylinder 1 in an amount that is of a degree insufficient to react to oxygen in the air.
  • the gas detector G 1 is operated to detect the gas itself. If a large amount of silane gas leaked from the silane gas cylinder 1 and the gas promptly reacts to the oxygen and burns, the fire detector D 1 is operated by the products of combustion through the OR-circuits, i. e. OR 1 and OR 3 so that a control means not shown is operated which controls a device for prevention of disasters such as a or fire alarm, a fire extinguishing device /the manufacturing process.
  • the detection box 10 during normal operation of the : sca veging device 8, the burnt out products of combustion are discharged to the exhaust duct 11 through the pipe 9. Therefore, neither the gas detector G 2 nor the fire detector D 2 operate the OR ⁇ circuit.
  • OR 2 because of operation of the inverter. Should the silane gas be discharged without being treated due to trouble in the scaveging device 8, either the gas detector G 2 directly or the fire detector D 2 through the operation of the inverter I operate the OR-circuit, OR 2 , so that a relay means not shown is operated which controls the manufacturing process or a device for prevention of disasters such as a fire alarm, a fire extinguishing device, or the like.
  • the gas detector and the smoke detector are separately provided the two detectors may be integrally constituted and the circuit shown in Fig. 2 may be incorporated with them.
  • the present invention reveals such an effect as providing an alarm and control system for semi-conductor factories or the like in which since at locations where poisonous and inflammable treatment gases are used such as in a semi-conductor manufacturing process etc. gas detectors to detect leakage of the treatment gases themselves and fire detectors to detect the products of combustion resulting from combustion of the gases are provided so that either type of leakage of the gases can be dealt-with, allowing an appropriate control before or at the early stags of fire breaking out.
  • F ig. 1 is a schematical view of one embodiment of the present invention
  • Fig. 2 is its circuit diagram
  • Fig. 3 is the characteristic curves of a photoelectric type smoke detector and an ionization type smoke detector.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
EP19830111572 1982-11-27 1983-11-19 Système d'alarme et de commande pour installation de fabrication de semi-conducteurs Expired EP0112492B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP206888/82 1982-11-27
JP20688882A JPS5998293A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (3)

Publication Number Publication Date
EP0112492A2 true EP0112492A2 (fr) 1984-07-04
EP0112492A3 EP0112492A3 (en) 1987-08-26
EP0112492B1 EP0112492B1 (fr) 1990-01-10

Family

ID=16530706

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830111572 Expired EP0112492B1 (fr) 1982-11-27 1983-11-19 Système d'alarme et de commande pour installation de fabrication de semi-conducteurs

Country Status (4)

Country Link
EP (1) EP0112492B1 (fr)
JP (1) JPS5998293A (fr)
DE (1) DE3381099D1 (fr)
ES (1) ES8505125A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640628A (en) * 1984-07-11 1987-02-03 Hiroshi Seki Composite fire sensor
WO2005091238A2 (fr) * 2004-03-23 2005-09-29 Du Plessis Jacobus Petrus Fran Systeme de prevention ou d'extinction d'incendie pour appareil
US20140358300A1 (en) * 2013-03-15 2014-12-04 Macronix International Co., Ltd. Portable Control System for Cylinder Cabinet

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539067B2 (ja) * 1990-02-20 1996-10-02 富士通株式会社 減圧気相成長装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2180423A1 (fr) * 1972-04-17 1973-11-30 Securitex Sarl
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) * 1974-05-17 1976-05-04 Compugraphic Corporation Character image generation apparatus and CRT phototypesetting system
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4219806A (en) * 1978-09-15 1980-08-26 American District Telegraph Company Dual alarm gas detector
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) * 1980-03-21 1983-01-25 New Cosmos Electric Company Limited Gas leakage detector

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54639B2 (fr) * 1971-08-10 1979-01-12
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2180423A1 (fr) * 1972-04-17 1973-11-30 Securitex Sarl
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) * 1974-05-17 1976-05-04 Compugraphic Corporation Character image generation apparatus and CRT phototypesetting system
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4219806A (en) * 1978-09-15 1980-08-26 American District Telegraph Company Dual alarm gas detector
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) * 1980-03-21 1983-01-25 New Cosmos Electric Company Limited Gas leakage detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640628A (en) * 1984-07-11 1987-02-03 Hiroshi Seki Composite fire sensor
WO2005091238A2 (fr) * 2004-03-23 2005-09-29 Du Plessis Jacobus Petrus Fran Systeme de prevention ou d'extinction d'incendie pour appareil
WO2005091238A3 (fr) * 2004-03-23 2005-11-03 Plessis Jacobus Petrus Fran Du Systeme de prevention ou d'extinction d'incendie pour appareil
US20140358300A1 (en) * 2013-03-15 2014-12-04 Macronix International Co., Ltd. Portable Control System for Cylinder Cabinet

Also Published As

Publication number Publication date
EP0112492A3 (en) 1987-08-26
DE3381099D1 (de) 1990-02-15
ES527814A0 (es) 1985-04-16
ES8505125A1 (es) 1985-04-16
JPS5998293A (ja) 1984-06-06
EP0112492B1 (fr) 1990-01-10

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