EP0112491A2 - Système d'alarme et de commande pour installation de fabrication de semi-conducteurs - Google Patents

Système d'alarme et de commande pour installation de fabrication de semi-conducteurs Download PDF

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Publication number
EP0112491A2
EP0112491A2 EP83111571A EP83111571A EP0112491A2 EP 0112491 A2 EP0112491 A2 EP 0112491A2 EP 83111571 A EP83111571 A EP 83111571A EP 83111571 A EP83111571 A EP 83111571A EP 0112491 A2 EP0112491 A2 EP 0112491A2
Authority
EP
European Patent Office
Prior art keywords
alarm
semi
fire
control system
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83111571A
Other languages
German (de)
English (en)
Other versions
EP0112491B1 (fr
EP0112491A3 (en
Inventor
Shoichi C/O Nohmi Bosai Kogyo Co. Ltd. Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of EP0112491A2 publication Critical patent/EP0112491A2/fr
Publication of EP0112491A3 publication Critical patent/EP0112491A3/en
Application granted granted Critical
Publication of EP0112491B1 publication Critical patent/EP0112491B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Definitions

  • the present invention relates to an alarm and control system for semi-conductor factories or the like which can detect a fire or the leakage of treatment gases which are generated during the manufacturing process in a very large-scale integration (LSI) factory and also suitably controls the manufacturing process as well as a protection device such as fire extinguishing equipment.
  • LSI very large-scale integration
  • the present invention aims at providing an alarm and control system for semi-conductor factories or the like which can instantaneously detect the condition wherein the leaked treatment gases and react to oxygen in the air burn generating the also products of combustion and which/allows to appropriately control the outbreak of a fire before it happens or at its initial stages.
  • the reference numeral 1 is a silane gas cylinder
  • 2 is an ammonia gas cylinder
  • 3 is a housing to house these cylinders
  • 6 is a. nitride film forming device (CVD) to form an insulating film on a semi-conductor wafer by supplying silane and ammonia gases through pipes 4 and 5 respectively
  • 8 is a scaveging device which forcedly oxidizes, namely to treat by combustion the unreacted silane gas discharged from the device 6 through a pipe 7 with oxygen being supplied
  • 10 is a detection box provided between pipes 9 to monitor the state of the gas to be discharged to an exhaust duct 11 from the scaveging device 8
  • 12 is a vacuum pump to make the CVD 6 vacuous
  • 13 is a vent for room air
  • 14 is a damper provided within a pipe 15 connecting the housing 3 with the exhaust duct 11.
  • the housing 3 and the detection box 10 are provided with fire detectors D 1 and D 2 , respectively, to detect the products of combustion which are generated when treatment gases such as silane gas, etc. leak, react to oxygen in the air and :burn.
  • a photoelectric or ionization type smoke detecor may be utilized as the fire detector to detect the combustion products.
  • the sensitivity of the ionization type smoke detector b to the combution products of silane gas is higher than that of a photoelectric type smoke detector a, and the former can detect of the combustion products earlier than the latter.
  • the fire detector D 1 mounted within the housing 3 is directly connected to an OR-circuit, OR, while the fire detector D 2 installed in the detection box 10 is connected to the OR through an inverter I, the output of the OR being connected to a relay means not shown which appropriately controls the manufacturing process of the semi-conductors, or a protection device such as a fire alarm, a fire extinguishing device or the like.
  • the nitride film forming device 6 has semi-conductor wafers contained therein, and after it is made vacuous by the vacuum pump 12, the silane and ammonium gas cylinders 1 and 2 are opened to supply the silane and ammonia gases to the device 6, whereby nitride films necessary for the semi-conductor wafers, i. e. insulating films are made to be generated thereon.
  • the gases which contain the unreacted gases after the treatment are forcibly oxidized in the scaveging device 8 and discharged from the exhaust duct 11 through the pipe 9 as a safe gas.
  • the fire detector D1 is operated by the products of combustion tocperate through the OR-circuit OR, a relay means not shown which controls a protection device such as a fire alarm, a fire extinguishing device or the like, or controls the damper 14 so as to be opened fully to discharge the leaked gases to the exhaust duct 11, or to control the manufacturing process.
  • a protection device such as a fire alarm, a fire extinguishing device or the like
  • the fire detector D 2 operates the OR-circuit OR by action of the inverter I, and a protection device such as a fire alarm or a fire extinguishing device or the like not shown, or a relay means to control the manufacturing process.
  • the present invention reveals such an effect that it provides an alarm and control system for semi-conductor factories or the like in which since at locations where poisonous and inflammable treatment gases are used as in the manufacturing process of semi-conductors gas detectors are provided to detect the existence of the products of combustion generated by combustion of the treatment gases an appropriate control can be carried out before the occurrence of or at the early stages of a fire.
  • Fig. 1 is a schematical view of one embodiment of the present invention
  • Fig. 2 is its circuit diagram
  • Fig. 3 is the characteristic curves of photoelectric type and ionization type smoke detectors.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Incineration Of Waste (AREA)
EP19830111571 1982-11-27 1983-11-19 Système d'alarme et de commande pour installation de fabrication de semi-conducteurs Expired - Lifetime EP0112491B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置
JP206889/82 1982-11-27

Publications (3)

Publication Number Publication Date
EP0112491A2 true EP0112491A2 (fr) 1984-07-04
EP0112491A3 EP0112491A3 (en) 1987-09-16
EP0112491B1 EP0112491B1 (fr) 1990-01-10

Family

ID=16530723

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830111571 Expired - Lifetime EP0112491B1 (fr) 1982-11-27 1983-11-19 Système d'alarme et de commande pour installation de fabrication de semi-conducteurs

Country Status (4)

Country Link
EP (1) EP0112491B1 (fr)
JP (1) JPS5998294A (fr)
DE (1) DE3381098D1 (fr)
ES (1) ES8505124A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure

Also Published As

Publication number Publication date
JPS5998294A (ja) 1984-06-06
EP0112491B1 (fr) 1990-01-10
EP0112491A3 (en) 1987-09-16
DE3381098D1 (de) 1990-02-15
ES527815A0 (es) 1985-04-16
ES8505124A1 (es) 1985-04-16

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