DE3381098D1 - Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. - Google Patents

Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Info

Publication number
DE3381098D1
DE3381098D1 DE8383111571T DE3381098T DE3381098D1 DE 3381098 D1 DE3381098 D1 DE 3381098D1 DE 8383111571 T DE8383111571 T DE 8383111571T DE 3381098 T DE3381098 T DE 3381098T DE 3381098 D1 DE3381098 D1 DE 3381098D1
Authority
DE
Germany
Prior art keywords
alarm
semiconductor manufacturing
control system
manufacturing system
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8383111571T
Other languages
German (de)
English (en)
Inventor
Ltd Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Application granted granted Critical
Publication of DE3381098D1 publication Critical patent/DE3381098D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Incineration Of Waste (AREA)
  • Fire-Detection Mechanisms (AREA)
DE8383111571T 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. Expired - Fee Related DE3381098D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (1)

Publication Number Publication Date
DE3381098D1 true DE3381098D1 (de) 1990-02-15

Family

ID=16530723

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383111571T Expired - Fee Related DE3381098D1 (de) 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Country Status (4)

Country Link
EP (1) EP0112491B1 (fr)
JP (1) JPS5998294A (fr)
DE (1) DE3381098D1 (fr)
ES (1) ES8505124A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.

Also Published As

Publication number Publication date
EP0112491A3 (en) 1987-09-16
ES527815A0 (es) 1985-04-16
ES8505124A1 (es) 1985-04-16
EP0112491A2 (fr) 1984-07-04
JPS5998294A (ja) 1984-06-06
EP0112491B1 (fr) 1990-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee