ES8505124A1 - Sistema de alarma y control para plantas de fabricacion de semiconductores - Google Patents

Sistema de alarma y control para plantas de fabricacion de semiconductores

Info

Publication number
ES8505124A1
ES8505124A1 ES527815A ES527815A ES8505124A1 ES 8505124 A1 ES8505124 A1 ES 8505124A1 ES 527815 A ES527815 A ES 527815A ES 527815 A ES527815 A ES 527815A ES 8505124 A1 ES8505124 A1 ES 8505124A1
Authority
ES
Spain
Prior art keywords
alarm
control system
semiconductor manufacturing
manufacturing plants
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES527815A
Other languages
English (en)
Other versions
ES527815A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of ES527815A0 publication Critical patent/ES527815A0/es
Publication of ES8505124A1 publication Critical patent/ES8505124A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Incineration Of Waste (AREA)
  • Fire-Detection Mechanisms (AREA)

Abstract

SISTEMA DE ALARMA Y CONTROL PARA PLANTAS DE FABRICACION DE SEMICONDUCTORES.COMPRENDE UN DETECTOR DE FUEGO (D1) INSTALADO EN UN RECIPIENTE (3) DONDE ESTAN ALOJADOS CILINDROS (1, 2) QUE CONTIENEN LOS GASES DE SILANO Y AMONIACO, Y UN DETECTOR DE FUEGO (D2) INSTALADO EN UNA CAJA (10) DISPUESTA ENTRE EL DISPOSITIVO DE BARRIDO (8) Y EL CONDUCTO DE ESCAPE (9); CONECTADOS DIRECTAMENTE Y A TRAVES DE UN CIRCUITO INVERSOR (I), RESPECTIVAMENTE, CON UN CIRCUITO (OR) CUYA SALIDA SE CONECTA CON UN DISPOSITIVO DE ALARMA, CON UN DISPOSITIVO EXTINTOR DE FUEGO, Y CON UN RELE DE INTERRUPCION DEL PROCESO DE FABRICACION DE LOS SEMICONDUCTORES Y CONSISTEN EN DETECTORES DE HUMOS DEL TIPO DE IONIZACION.
ES527815A 1982-11-27 1983-11-25 Sistema de alarma y control para plantas de fabricacion de semiconductores Expired ES8505124A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (2)

Publication Number Publication Date
ES527815A0 ES527815A0 (es) 1985-04-16
ES8505124A1 true ES8505124A1 (es) 1985-04-16

Family

ID=16530723

Family Applications (1)

Application Number Title Priority Date Filing Date
ES527815A Expired ES8505124A1 (es) 1982-11-27 1983-11-25 Sistema de alarma y control para plantas de fabricacion de semiconductores

Country Status (4)

Country Link
EP (1) EP0112491B1 (es)
JP (1) JPS5998294A (es)
DE (1) DE3381098D1 (es)
ES (1) ES8505124A1 (es)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.

Also Published As

Publication number Publication date
EP0112491A3 (en) 1987-09-16
ES527815A0 (es) 1985-04-16
EP0112491A2 (en) 1984-07-04
JPS5998294A (ja) 1984-06-06
DE3381098D1 (de) 1990-02-15
EP0112491B1 (en) 1990-01-10

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20010402