DE3381097D1 - Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. - Google Patents

Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Info

Publication number
DE3381097D1
DE3381097D1 DE8383111570T DE3381097T DE3381097D1 DE 3381097 D1 DE3381097 D1 DE 3381097D1 DE 8383111570 T DE8383111570 T DE 8383111570T DE 3381097 T DE3381097 T DE 3381097T DE 3381097 D1 DE3381097 D1 DE 3381097D1
Authority
DE
Germany
Prior art keywords
alarm
semiconductor manufacturing
control system
manufacturing system
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8383111570T
Other languages
English (en)
Inventor
Ltd Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Application granted granted Critical
Publication of DE3381097D1 publication Critical patent/DE3381097D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Fire-Detection Mechanisms (AREA)
DE8383111570T 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. Expired - Fee Related DE3381097D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57206890A JPS5998295A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (1)

Publication Number Publication Date
DE3381097D1 true DE3381097D1 (de) 1990-02-15

Family

ID=16530740

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383111570T Expired - Fee Related DE3381097D1 (de) 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Country Status (5)

Country Link
US (1) US4651141A (de)
EP (1) EP0112490B1 (de)
JP (1) JPS5998295A (de)
DE (1) DE3381097D1 (de)
ES (1) ES527816A0 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1279916C (en) * 1987-02-12 1991-02-05 Guy David Gas cylinder monitor and control system
WO1992015974A1 (en) * 1991-03-06 1992-09-17 Trozzo David L Remote transmitting fenceline monitoring apparatus
GB2255849A (en) * 1991-05-15 1992-11-18 Alan Smith Gas sensor alarm system
US20080198524A1 (en) * 2007-02-16 2008-08-21 Dometic Corporation Absorption gas arrestor system
RU2638238C1 (ru) * 2017-05-05 2017-12-12 Олег Савельевич Кочетов Автоматическое предохранительное устройство систем безопасности в чрезвычайных ситуациях
US10712005B2 (en) 2017-07-14 2020-07-14 Goodrich Corporation Ceramic matrix composite manufacturing
US10480065B2 (en) * 2017-09-19 2019-11-19 Goodrich Corporation Gas distribution for chemical vapor deposition/infiltration

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA611204A (en) * 1960-12-27 E. Goodrick Howard Gas leak detector, alarm and shut-off device
JPS54639B2 (de) * 1971-08-10 1979-01-12
FR2180423B3 (de) * 1972-04-17 1975-06-20 Securitex Sarl
JPS5514380B2 (de) * 1973-06-12 1980-04-16
US3955186A (en) * 1974-05-17 1976-05-04 Compugraphic Corporation Character image generation apparatus and CRT phototypesetting system
US4223692A (en) * 1977-10-19 1980-09-23 Perry Landis H Recreational vehicle safety system
US4219806A (en) * 1978-09-15 1980-08-26 American District Telegraph Company Dual alarm gas detector
US4369647A (en) * 1980-03-21 1983-01-25 New Cosmos Electric Company Limited Gas leakage detector
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.
US4490715A (en) * 1980-09-13 1984-12-25 Matsushita Electric Works, Ltd. Gas detector
US4369031A (en) * 1981-09-15 1983-01-18 Thermco Products Corporation Gas control system for chemical vapor deposition system
EP0075101A3 (de) * 1981-09-22 1985-12-04 Cerberus Ag Verfahren und Vorrichtung zur Reduzierung von durch Störgase hervorgerufenen Falschalarmen in Gaswarnanlagen

Also Published As

Publication number Publication date
US4651141A (en) 1987-03-17
ES8505126A1 (es) 1985-04-16
JPS5998295A (ja) 1984-06-06
EP0112490A3 (en) 1987-09-16
ES527816A0 (es) 1985-04-16
EP0112490B1 (de) 1990-01-10
EP0112490A2 (de) 1984-07-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee