DE3381099D1 - Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. - Google Patents

Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Info

Publication number
DE3381099D1
DE3381099D1 DE8383111572T DE3381099T DE3381099D1 DE 3381099 D1 DE3381099 D1 DE 3381099D1 DE 8383111572 T DE8383111572 T DE 8383111572T DE 3381099 T DE3381099 T DE 3381099T DE 3381099 D1 DE3381099 D1 DE 3381099D1
Authority
DE
Germany
Prior art keywords
alarm
semiconductor manufacturing
control system
manufacturing system
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8383111572T
Other languages
English (en)
Inventor
Ltd Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Application granted granted Critical
Publication of DE3381099D1 publication Critical patent/DE3381099D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
DE8383111572T 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter. Expired - Fee Related DE3381099D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688882A JPS5998293A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (1)

Publication Number Publication Date
DE3381099D1 true DE3381099D1 (de) 1990-02-15

Family

ID=16530706

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383111572T Expired - Fee Related DE3381099D1 (de) 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.

Country Status (4)

Country Link
EP (1) EP0112492B1 (de)
JP (1) JPS5998293A (de)
DE (1) DE3381099D1 (de)
ES (1) ES8505125A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910000246Y1 (ko) * 1984-07-11 1991-01-18 히로시 세끼 복합화재 검출기
JP2539067B2 (ja) * 1990-02-20 1996-10-02 富士通株式会社 減圧気相成長装置
WO2005091238A2 (en) * 2004-03-23 2005-09-29 Du Plessis Jacobus Petrus Fran Fire preventing or extinguishing system for an appliance
US20140358300A1 (en) * 2013-03-15 2014-12-04 Macronix International Co., Ltd. Portable Control System for Cylinder Cabinet

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54639B2 (de) * 1971-08-10 1979-01-12
FR2180423B3 (de) * 1972-04-17 1975-06-20 Securitex Sarl
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) * 1974-05-17 1976-05-04 Compugraphic Corporation Character image generation apparatus and CRT phototypesetting system
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4219806A (en) * 1978-09-15 1980-08-26 American District Telegraph Company Dual alarm gas detector
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) * 1980-03-21 1983-01-25 New Cosmos Electric Company Limited Gas leakage detector
NL8003068A (nl) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem Parfumcomposities en geparfumeerde materialen en voorwerpen die esters van bicyclische monoterpeenzuren als grondstof bevatten.

Also Published As

Publication number Publication date
EP0112492A2 (de) 1984-07-04
EP0112492B1 (de) 1990-01-10
JPS5998293A (ja) 1984-06-06
EP0112492A3 (en) 1987-08-26
ES527814A0 (es) 1985-04-16
ES8505125A1 (es) 1985-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee