EA201101662A1 - Устройство для нанесения покрытий и способ нанесения покрытий - Google Patents

Устройство для нанесения покрытий и способ нанесения покрытий

Info

Publication number
EA201101662A1
EA201101662A1 EA201101662A EA201101662A EA201101662A1 EA 201101662 A1 EA201101662 A1 EA 201101662A1 EA 201101662 A EA201101662 A EA 201101662A EA 201101662 A EA201101662 A EA 201101662A EA 201101662 A1 EA201101662 A1 EA 201101662A1
Authority
EA
Eurasian Patent Office
Prior art keywords
coating application
increasing
magnetron
rate
coating
Prior art date
Application number
EA201101662A
Other languages
English (en)
Inventor
Деннис Тиэр
Алекс Горуппа
Original Assignee
Тиэр Коутингз Лимитед
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0613877.0A external-priority patent/GB0613877D0/en
Priority claimed from GB0707801A external-priority patent/GB0707801D0/en
Application filed by Тиэр Коутингз Лимитед filed Critical Тиэр Коутингз Лимитед
Publication of EA201101662A1 publication Critical patent/EA201101662A1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0223—Composites
    • H01M8/0228—Composites in the form of layered or coated products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0206—Metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0213—Gas-impermeable carbon-containing materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Fuel Cell (AREA)

Abstract

Настоящее изобретение относится к устройству и способу, которые можно применять для осаждения материала путем распыления по меньшей мере на одно изделие для формирования на нем покрытия. Новая конструкция магнетрона, описанная в данной заявке, позволяет увеличить скорость осаждения путем увеличения подаваемой энергии без повреждения создаваемого покрытия. Это может быть достигнуто путем улучшенного охлаждения и использования в магнетроне относительно сильного магнитного поля при одновременном увеличении энергии, подводимой к магнетрону, путем увеличения тока со скоростью, большей скорости увеличения напряжения.
EA201101662A 2006-07-13 2007-07-12 Устройство для нанесения покрытий и способ нанесения покрытий EA201101662A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0613877.0A GB0613877D0 (en) 2006-07-13 2006-07-13 Coating apparatus and coating for an article
GB0707801A GB0707801D0 (en) 2007-04-23 2007-04-23 Improvments to the application of coatings, and the coating applied

Publications (1)

Publication Number Publication Date
EA201101662A1 true EA201101662A1 (ru) 2012-05-30

Family

ID=38617911

Family Applications (2)

Application Number Title Priority Date Filing Date
EA200900182A EA200900182A1 (ru) 2006-07-13 2007-07-12 Устройство для нанесения покрытий и способ нанесения покрытий
EA201101662A EA201101662A1 (ru) 2006-07-13 2007-07-12 Устройство для нанесения покрытий и способ нанесения покрытий

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EA200900182A EA200900182A1 (ru) 2006-07-13 2007-07-12 Устройство для нанесения покрытий и способ нанесения покрытий

Country Status (7)

Country Link
US (1) US8440301B2 (ru)
EP (1) EP2044237B1 (ru)
JP (2) JP2009542918A (ru)
CA (1) CA2660085C (ru)
EA (2) EA200900182A1 (ru)
MX (1) MX2009000449A (ru)
WO (1) WO2008007095A1 (ru)

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US9303312B2 (en) * 2013-03-06 2016-04-05 Areesys Technologies, Inc. Film deposition apparatus with low plasma damage and low processing temperature
WO2015037315A1 (ja) * 2013-09-10 2015-03-19 株式会社島津製作所 成膜装置および成膜方法
US10858727B2 (en) 2016-08-19 2020-12-08 Applied Materials, Inc. High density, low stress amorphous carbon film, and process and equipment for its deposition
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Also Published As

Publication number Publication date
CA2660085A1 (en) 2008-01-17
CA2660085C (en) 2016-02-09
EP2044237B1 (en) 2020-12-16
MX2009000449A (es) 2009-04-28
WO2008007095A1 (en) 2008-01-17
EP2044237A1 (en) 2009-04-08
US20110305912A1 (en) 2011-12-15
JP2014062325A (ja) 2014-04-10
EA200900182A1 (ru) 2009-06-30
US8440301B2 (en) 2013-05-14
JP2009542918A (ja) 2009-12-03

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