EA015219B1 - Способ непрерывного получения поликристаллического кремния с использованием реактора с псевдоожиженным слоем - Google Patents
Способ непрерывного получения поликристаллического кремния с использованием реактора с псевдоожиженным слоем Download PDFInfo
- Publication number
- EA015219B1 EA015219B1 EA200970014A EA200970014A EA015219B1 EA 015219 B1 EA015219 B1 EA 015219B1 EA 200970014 A EA200970014 A EA 200970014A EA 200970014 A EA200970014 A EA 200970014A EA 015219 B1 EA015219 B1 EA 015219B1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- silicon
- reactor
- gas
- silicon particles
- particles
- Prior art date
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000002360 preparation method Methods 0.000 title abstract description 5
- 239000011856 silicon-based particle Substances 0.000 claims abstract description 267
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 262
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 260
- 239000010703 silicon Substances 0.000 claims abstract description 260
- 239000007789 gas Substances 0.000 claims abstract description 187
- 239000012495 reaction gas Substances 0.000 claims abstract description 124
- 238000006243 chemical reaction Methods 0.000 claims abstract description 97
- 238000005530 etching Methods 0.000 claims abstract description 77
- 230000008021 deposition Effects 0.000 claims abstract description 63
- 238000010438 heat treatment Methods 0.000 claims description 87
- 239000011261 inert gas Substances 0.000 claims description 39
- 238000005243 fluidization Methods 0.000 claims description 32
- 239000000047 product Substances 0.000 claims description 31
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 19
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 19
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- 239000001257 hydrogen Substances 0.000 claims description 17
- 239000003566 sealing material Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 229910052786 argon Inorganic materials 0.000 claims description 14
- 239000001307 helium Substances 0.000 claims description 14
- 229910052734 helium Inorganic materials 0.000 claims description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 12
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 12
- 239000000460 chlorine Substances 0.000 claims description 12
- 229910052801 chlorine Inorganic materials 0.000 claims description 12
- 239000005049 silicon tetrachloride Substances 0.000 claims description 12
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 11
- 239000005052 trichlorosilane Substances 0.000 claims description 11
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 6
- 239000006227 byproduct Substances 0.000 claims description 6
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 238000007599 discharging Methods 0.000 abstract description 9
- 230000007774 longterm Effects 0.000 abstract description 2
- 239000002245 particle Substances 0.000 description 84
- 238000000151 deposition Methods 0.000 description 62
- 239000010410 layer Substances 0.000 description 59
- 238000004519 manufacturing process Methods 0.000 description 55
- 239000013078 crystal Substances 0.000 description 25
- 239000000203 mixture Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 150000002431 hydrogen Chemical class 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000011109 contamination Methods 0.000 description 9
- 238000009825 accumulation Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 8
- 229910010272 inorganic material Inorganic materials 0.000 description 8
- 239000011147 inorganic material Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 238000010924 continuous production Methods 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 239000002826 coolant Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 230000000737 periodic effect Effects 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000003546 flue gas Substances 0.000 description 5
- 238000000227 grinding Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000012432 intermediate storage Methods 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 150000003377 silicon compounds Chemical class 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 150000001805 chlorine compounds Chemical class 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910021397 glassy carbon Inorganic materials 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- -1 silane compound Chemical class 0.000 description 2
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000002912 waste gas Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 206010017577 Gait disturbance Diseases 0.000 description 1
- 101150025129 POP1 gene Proteins 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000010951 particle size reduction Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1809—Controlling processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1818—Feeding of the fluidising gas
- B01J8/1827—Feeding of the fluidising gas the fluidising gas being a reactant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1836—Heating and cooling the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
- B01J8/34—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with stationary packing material in the fluidised bed, e.g. bricks, wire rings, baffles
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/12—Production of homogeneous polycrystalline material with defined structure directly from the gas state
- C30B28/14—Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00398—Controlling the temperature using electric heating or cooling elements inside the reactor bed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00407—Controlling the temperature using electric heating or cooling elements outside the reactor bed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00415—Controlling the temperature using electric heating or cooling elements electric resistance heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00477—Controlling the temperature by thermal insulation means
- B01J2208/00495—Controlling the temperature by thermal insulation means using insulating materials or refractories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00539—Pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00796—Details of the reactor or of the particulate material
- B01J2208/00823—Mixing elements
- B01J2208/00831—Stationary elements
- B01J2208/0084—Stationary elements inside the bed, e.g. baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00796—Details of the reactor or of the particulate material
- B01J2208/00991—Disengagement zone in fluidised-bed reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0209—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0218—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of ceramic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0236—Metal based
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
- B01J2219/0254—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
- B01J2219/0272—Graphite
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
- B01J2219/0277—Metal based
- B01J2219/029—Non-ferrous metals
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060053826A KR100813131B1 (ko) | 2006-06-15 | 2006-06-15 | 유동층 반응기를 이용한 다결정 실리콘의 지속 가능한제조방법 |
| PCT/KR2007/002880 WO2007145474A1 (en) | 2006-06-15 | 2007-06-14 | Method for continual preparation of polycrystalline silicon using a fluidized bed reactor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EA200970014A1 EA200970014A1 (ru) | 2009-04-28 |
| EA015219B1 true EA015219B1 (ru) | 2011-06-30 |
Family
ID=38831944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EA200970014A EA015219B1 (ru) | 2006-06-15 | 2007-06-14 | Способ непрерывного получения поликристаллического кремния с использованием реактора с псевдоожиженным слоем |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US8017024B2 (enExample) |
| EP (1) | EP2032746B1 (enExample) |
| JP (1) | JP5219051B2 (enExample) |
| KR (1) | KR100813131B1 (enExample) |
| CN (1) | CN101400835B (enExample) |
| CA (1) | CA2654896C (enExample) |
| EA (1) | EA015219B1 (enExample) |
| ES (1) | ES2470540T3 (enExample) |
| WO (1) | WO2007145474A1 (enExample) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100783667B1 (ko) * | 2006-08-10 | 2007-12-07 | 한국화학연구원 | 입자형 다결정 실리콘의 제조방법 및 제조장치 |
| EP2055375B1 (en) * | 2007-10-25 | 2012-05-02 | Mitsubishi Materials Corporation | Hydrogen chloride gaz ejecting nozzle, reaction apparatus for producing thrichlorosilane and method for producing trichlorosilane |
| KR101477817B1 (ko) * | 2008-01-25 | 2014-12-30 | 미쓰비시 마테리알 가부시키가이샤 | 반응로 세정 장치 |
| SG192438A1 (en) * | 2008-06-30 | 2013-08-30 | Memc Electronic Materials | Fluidized bed reactor systems and methods for reducing the deposition of silicon on reactor walls |
| CN101676203B (zh) * | 2008-09-16 | 2015-06-10 | 储晞 | 生产高纯颗粒硅的方法 |
| US7927984B2 (en) | 2008-11-05 | 2011-04-19 | Hemlock Semiconductor Corporation | Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition |
| MY161193A (en) | 2009-11-18 | 2017-04-14 | Rec Silicon Inc | Fluid bed reactor |
| JP5180947B2 (ja) * | 2009-12-09 | 2013-04-10 | コスモ石油株式会社 | 多結晶シリコン製造用の反応炉の洗浄方法 |
| KR20120110109A (ko) * | 2009-12-29 | 2012-10-09 | 엠이엠씨 일렉트로닉 머티리얼즈, 인크. | 주변 실리콘 테트라염화물을 이용하여 반응기 벽 상의 실리콘의 퇴적을 감소시키는 방법 |
| JP5633375B2 (ja) * | 2010-01-27 | 2014-12-03 | 三菱マテリアル株式会社 | トリクロロシラン製造装置 |
| JP5637013B2 (ja) | 2010-03-04 | 2014-12-10 | 三菱マテリアル株式会社 | トリクロロシラン製造装置及び製造方法 |
| KR101329030B1 (ko) | 2010-10-01 | 2013-11-13 | 주식회사 실리콘밸류 | 유동층 반응기 |
| US8449848B2 (en) | 2010-10-22 | 2013-05-28 | Memc Electronic Materials, Inc. | Production of polycrystalline silicon in substantially closed-loop systems |
| US20120100061A1 (en) | 2010-10-22 | 2012-04-26 | Memc Electronic Materials, Inc. | Production of Polycrystalline Silicon in Substantially Closed-loop Processes |
| US20120100059A1 (en) | 2010-10-22 | 2012-04-26 | Memc Electronic Materials, Inc. | Production of Polycrystalline Silicon By The Thermal Decomposition of Trichlorosilane In A Fluidized Bed Reactor |
| US9156705B2 (en) | 2010-12-23 | 2015-10-13 | Sunedison, Inc. | Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor |
| US8452547B2 (en) * | 2010-12-29 | 2013-05-28 | Memc Electronic Materials, Inc. | Systems and methods for particle size determination and control in a fluidized bed reactor |
| US8849584B2 (en) * | 2010-12-29 | 2014-09-30 | Sunedison, Inc. | Systems and methods for particle size determination and control in a fluidized bed reactor for use with thermally decomposable silicon-containing gas |
| US20120183686A1 (en) * | 2011-01-19 | 2012-07-19 | Rec Silicon Inc. | Reactor system and method of polycrystalline silicon production therewith |
| JP5645718B2 (ja) * | 2011-03-07 | 2014-12-24 | 東京エレクトロン株式会社 | 熱処理装置 |
| KR101329035B1 (ko) | 2011-04-20 | 2013-11-13 | 주식회사 실리콘밸류 | 유동층 반응기 |
| KR101356391B1 (ko) * | 2011-04-20 | 2014-02-03 | 주식회사 실리콘밸류 | 다결정 실리콘 제조장치 |
| US20130129570A1 (en) * | 2011-04-20 | 2013-05-23 | Siliconvalue Llc. | Polycrystal silicon manufacturing apparatus |
| KR101329032B1 (ko) * | 2011-04-20 | 2013-11-14 | 주식회사 실리콘밸류 | 다결정 실리콘 제조장치 및 이를 이용한 다결정 실리콘의 제조방법 |
| KR101882330B1 (ko) * | 2011-06-21 | 2018-07-27 | 엘지이노텍 주식회사 | 증착 장치 |
| US9114997B2 (en) | 2011-09-30 | 2015-08-25 | Sunedison, Inc. | Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor |
| KR102050114B1 (ko) | 2011-09-30 | 2019-11-28 | 코너 스타 리미티드 | 유동층 반응기에서의 실란의 열 분해에 의한 다결정 실리콘의 제조 |
| US8871153B2 (en) * | 2012-05-25 | 2014-10-28 | Rokstar Technologies Llc | Mechanically fluidized silicon deposition systems and methods |
| TWI613231B (zh) * | 2012-07-17 | 2018-02-01 | 陝西有色天宏瑞科矽材料有限責任公司 | 用於製造多晶矽之反應器系統及方法 |
| CA2881640A1 (en) * | 2012-08-29 | 2014-03-06 | Hemlock Semiconductor Corporation | Tapered fluidized bed reactor and process for its use |
| DE102012218747A1 (de) * | 2012-10-15 | 2014-04-17 | Wacker Chemie Ag | Verfahren zur Abscheidung von polykristallinem Silicium |
| US9212421B2 (en) | 2013-07-10 | 2015-12-15 | Rec Silicon Inc | Method and apparatus to reduce contamination of particles in a fluidized bed reactor |
| US9587993B2 (en) | 2012-11-06 | 2017-03-07 | Rec Silicon Inc | Probe assembly for a fluid bed reactor |
| DE102013209076A1 (de) * | 2013-05-16 | 2014-11-20 | Wacker Chemie Ag | Reaktor zur Herstellung von polykristallinem Silicium und Verfahren zur Entfernung eines Silicium enthaltenden Belags auf einem Bauteil eines solchen Reaktors |
| DE102013212406A1 (de) * | 2013-06-27 | 2014-12-31 | Wacker Chemie Ag | Verfahren zum Betreiben eines Wirbelschichtreaktors |
| US9555474B2 (en) * | 2013-08-12 | 2017-01-31 | United Technologies Corporation | High temperature fluidized bed for powder treatment |
| DE102014205025A1 (de) | 2014-03-18 | 2015-09-24 | Wacker Chemie Ag | Reaktor und Verfahren zur Herstellung von granularem Polysilicium |
| CN104947187B (zh) * | 2014-03-31 | 2018-03-23 | 新特能源股份有限公司 | 一种硅片母合金的制备方法 |
| DE102014212049A1 (de) * | 2014-06-24 | 2015-12-24 | Wacker Chemie Ag | Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat |
| US9662628B2 (en) | 2014-08-15 | 2017-05-30 | Rec Silicon Inc | Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor |
| US9238211B1 (en) | 2014-08-15 | 2016-01-19 | Rec Silicon Inc | Segmented silicon carbide liner |
| US9446367B2 (en) | 2014-08-15 | 2016-09-20 | Rec Silicon Inc | Joint design for segmented silicon carbide liner in a fluidized bed reactor |
| DE102014217179A1 (de) * | 2014-08-28 | 2016-03-03 | Wacker Chemie Ag | Kunststoffsubstrate mit Siliciumbeschichtung |
| DE102014222865A1 (de) * | 2014-11-10 | 2016-05-12 | Wacker Chemie Ag | Wirbelschichtreaktor zur Herstellung von polykristallinem Siliciumgranulat und Verfahren zur Montage eines solchen Wirbelschichtreaktors |
| DE102015224120A1 (de) * | 2015-12-02 | 2017-06-08 | Wacker Chemie Ag | Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat |
| DE102015224099A1 (de) | 2015-12-02 | 2017-06-08 | Wacker Chemie Ag | Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat |
| DE102016202991A1 (de) * | 2016-02-25 | 2017-08-31 | Wacker Chemie Ag | Verfahren und Vorrichtung zur Herstellung von polykristallinem Siliciumgranulat |
| KR102096577B1 (ko) | 2016-12-29 | 2020-04-02 | 한화솔루션 주식회사 | 폴리실리콘 제조 장치 |
| KR102175817B1 (ko) * | 2017-09-12 | 2020-11-06 | 주식회사 엘지화학 | 결정화기 |
| DE102017125221A1 (de) | 2017-10-27 | 2019-05-02 | Nexwafe Gmbh | Verfahren und Vorrichtung zur Entfernung von Verunreinigungen aus Chlorsilanen |
| TWI701078B (zh) * | 2018-10-01 | 2020-08-11 | 德商瓦克化學公司 | 用於生產顆粒多晶矽的流化床反應器 |
| US10717061B1 (en) * | 2019-06-26 | 2020-07-21 | X Energy, Llc | Fluidized bed reactor system allowing particle sampling during an ongoing reaction |
| CN117548414A (zh) * | 2022-08-03 | 2024-02-13 | 江苏中能硅业科技发展有限公司 | 一种清洁流化床内壁结硅的方法 |
| CN115142127B (zh) * | 2022-08-29 | 2022-11-18 | 一道新能源科技(泰州)有限公司 | 一种基于lpcvd的多晶硅成型炉 |
| CN117105230A (zh) * | 2023-08-25 | 2023-11-24 | 乐山协鑫新能源科技有限公司 | 一种生产粒状多晶硅的方法及装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5139762A (en) * | 1987-12-14 | 1992-08-18 | Advanced Silicon Materials, Inc. | Fluidized bed for production of polycrystalline silicon |
| US20020102850A1 (en) * | 2001-01-03 | 2002-08-01 | Korea Research Institute Of Chemical Technology | Method and apparatus for preparing polysilicon granules |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57135708A (en) | 1981-02-12 | 1982-08-21 | Shin Etsu Chem Co Ltd | Manufacturing of high purity silicon granule |
| KR880000618B1 (ko) * | 1985-12-28 | 1988-04-18 | 재단법인 한국화학연구소 | 초단파 가열 유동상 반응에 의한 고순도 다결정 실리콘의 제조 방법 |
| JPH02279513A (ja) * | 1989-04-20 | 1990-11-15 | Osaka Titanium Co Ltd | 高純度多結晶シリコンの製造方法 |
| GB2271518B (en) * | 1992-10-16 | 1996-09-25 | Korea Res Inst Chem Tech | Heating of fluidized bed reactor by microwave |
| US5491967A (en) * | 1994-02-23 | 1996-02-20 | Foster Wheeler Energia Oy | Pressurized fluidized bed reactor and a method of operating the same |
| US5810934A (en) | 1995-06-07 | 1998-09-22 | Advanced Silicon Materials, Inc. | Silicon deposition reactor apparatus |
| DE19735378A1 (de) * | 1997-08-14 | 1999-02-18 | Wacker Chemie Gmbh | Verfahren zur Herstellung von hochreinem Siliciumgranulat |
| US6827786B2 (en) * | 2000-12-26 | 2004-12-07 | Stephen M Lord | Machine for production of granular silicon |
| EP1661857B1 (en) * | 2003-08-13 | 2016-12-21 | Tokuyama Corporation | Tubular reaction vessel and process for producing silicon therewith |
| WO2006019110A1 (ja) * | 2004-08-19 | 2006-02-23 | Tokuyama Corporation | クロロシラン類の反応装置 |
-
2006
- 2006-06-15 KR KR1020060053826A patent/KR100813131B1/ko not_active Expired - Fee Related
-
2007
- 2007-06-14 EP EP07746914.6A patent/EP2032746B1/en not_active Not-in-force
- 2007-06-14 US US12/281,041 patent/US8017024B2/en not_active Expired - Fee Related
- 2007-06-14 WO PCT/KR2007/002880 patent/WO2007145474A1/en not_active Ceased
- 2007-06-14 ES ES07746914.6T patent/ES2470540T3/es active Active
- 2007-06-14 CN CN2007800087821A patent/CN101400835B/zh not_active Expired - Fee Related
- 2007-06-14 EA EA200970014A patent/EA015219B1/ru not_active IP Right Cessation
- 2007-06-14 JP JP2009510899A patent/JP5219051B2/ja not_active Expired - Fee Related
- 2007-06-14 CA CA2654896A patent/CA2654896C/en not_active Expired - Fee Related
-
2009
- 2009-10-30 US US12/609,330 patent/US8431032B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5139762A (en) * | 1987-12-14 | 1992-08-18 | Advanced Silicon Materials, Inc. | Fluidized bed for production of polycrystalline silicon |
| US20020102850A1 (en) * | 2001-01-03 | 2002-08-01 | Korea Research Institute Of Chemical Technology | Method and apparatus for preparing polysilicon granules |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070119328A (ko) | 2007-12-20 |
| JP5219051B2 (ja) | 2013-06-26 |
| EP2032746B1 (en) | 2014-04-23 |
| US8431032B2 (en) | 2013-04-30 |
| US8017024B2 (en) | 2011-09-13 |
| CN101400835B (zh) | 2012-07-25 |
| ES2470540T3 (es) | 2014-06-24 |
| CA2654896A1 (en) | 2007-12-21 |
| EA200970014A1 (ru) | 2009-04-28 |
| EP2032746A4 (en) | 2010-05-19 |
| WO2007145474A1 (en) | 2007-12-21 |
| CA2654896C (en) | 2011-05-10 |
| US20090095710A1 (en) | 2009-04-16 |
| US20100044342A1 (en) | 2010-02-25 |
| JP2009536915A (ja) | 2009-10-22 |
| KR100813131B1 (ko) | 2008-03-17 |
| CN101400835A (zh) | 2009-04-01 |
| EP2032746A1 (en) | 2009-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EA015219B1 (ru) | Способ непрерывного получения поликристаллического кремния с использованием реактора с псевдоожиженным слоем | |
| RU2397952C2 (ru) | Реактор высокого давления с псевдоожиженным слоем для получения гранулированного поликристаллического кремния | |
| RU2397953C2 (ru) | Способ производства гранулированного поликристаллического кремния в реакторе с псевдоожиженным слоем | |
| JP2009536915A5 (enExample) | ||
| US7922990B2 (en) | Method and device for producing granulated polycrystalline silicon in a fluidized bed reactor | |
| JP2009525937A5 (enExample) | ||
| JP2009526734A5 (enExample) | ||
| CN103384642B (zh) | 通过在流化床反应器中使二氯硅烷热分解而生产多晶硅 | |
| WO2012054184A1 (en) | Production of polycrystalline silicon by the thermal decomposition of trichlorosilane in a fluidized bed reactor | |
| KR20040025590A (ko) | 컵 반응기에서 기체상 물질의 열분해에 의한 고체의침착방법 | |
| KR101047842B1 (ko) | 기상으로부터 초미립자를 퇴적시키는 장치 및 방법 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ BY MD TJ TM |
|
| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): KZ KG RU |