DK0567617T3 - Piezoelektriske og elektrostriktive aktuatorer - Google Patents
Piezoelektriske og elektrostriktive aktuatorerInfo
- Publication number
- DK0567617T3 DK0567617T3 DK92922978.9T DK92922978T DK0567617T3 DK 0567617 T3 DK0567617 T3 DK 0567617T3 DK 92922978 T DK92922978 T DK 92922978T DK 0567617 T3 DK0567617 T3 DK 0567617T3
- Authority
- DK
- Denmark
- Prior art keywords
- stack
- interstices
- piezoelectric
- gap
- members
- Prior art date
Links
- 239000000463 material Substances 0.000 abstract 6
- 239000004020 conductor Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Fuel-Injection Apparatus (AREA)
- Micromachines (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/779,345 US5175465A (en) | 1991-10-18 | 1991-10-18 | Piezoelectric and electrostrictive actuators |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0567617T3 true DK0567617T3 (da) | 1997-10-06 |
Family
ID=25116129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK92922978.9T DK0567617T3 (da) | 1991-10-18 | 1992-10-16 | Piezoelektriske og elektrostriktive aktuatorer |
Country Status (12)
Country | Link |
---|---|
US (1) | US5175465A (ko) |
EP (1) | EP0567617B1 (ko) |
JP (1) | JP2573791B2 (ko) |
KR (1) | KR970007139B1 (ko) |
AT (1) | ATE150586T1 (ko) |
AU (1) | AU648735B2 (ko) |
CA (1) | CA2096119C (ko) |
DE (1) | DE69218408T2 (ko) |
DK (1) | DK0567617T3 (ko) |
ES (1) | ES2098553T3 (ko) |
GR (1) | GR3023208T3 (ko) |
WO (1) | WO1993008609A1 (ko) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
US5625483A (en) * | 1990-05-29 | 1997-04-29 | Symbol Technologies, Inc. | Integrated light source and scanning element implemented on a semiconductor or electro-optical substrate |
US5966230A (en) * | 1990-05-29 | 1999-10-12 | Symbol Technologies, Inc. | Integrated scanner on a common substrate |
US5283497A (en) * | 1992-02-10 | 1994-02-01 | Rockwell International Corporation | Electrotiltable material (tilter) |
US5631764A (en) * | 1993-03-23 | 1997-05-20 | Daewoo Electronics Co., Ltd. | Electrodisplacive actuator for use in an actuated mirror array |
US5708521A (en) * | 1993-05-04 | 1998-01-13 | Daewoo Electronics Co., Ltd. | Actuated mirror array for use in optical projection system |
PL176406B1 (pl) * | 1993-10-29 | 1999-05-31 | Daewoo Electronics Co Ltd | Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych |
US5936757A (en) * | 1993-10-29 | 1999-08-10 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array |
KR0131570B1 (ko) * | 1993-11-30 | 1998-04-16 | 배순훈 | 투사형 화상표시 장치의 광로 조절 장치구조 |
KR0151457B1 (ko) * | 1994-04-30 | 1998-12-15 | 배순훈 | 광로조절장치 및 그 제조방법 |
US5945773A (en) * | 1994-06-23 | 1999-08-31 | Citizen Watch Co., Ltd. | Piezoelectric actuator for ink-jet printer and method of manufacturing the same |
KR100213281B1 (ko) * | 1994-10-31 | 1999-08-02 | 전주범 | 광로조절장치 |
KR960018646A (ko) * | 1994-11-14 | 1996-06-17 | 배순훈 | 광로조절장치의 제조방법 |
KR100203577B1 (ko) * | 1994-12-19 | 1999-06-15 | 배순훈 | 광로조절장치와 그 제조방법 |
US5593134A (en) * | 1995-02-21 | 1997-01-14 | Applied Power Inc. | Magnetically assisted piezo-electric valve actuator |
US5630440A (en) * | 1995-02-21 | 1997-05-20 | Applied Power Inc. | Piezo composite sheet actuated valve |
KR0159416B1 (ko) * | 1995-05-26 | 1999-01-15 | 배순훈 | 광로 조절 장치 |
KR0177648B1 (ko) * | 1995-07-05 | 1999-05-01 | 배순훈 | 프로젝터의 후면투사스크린 |
KR0164180B1 (ko) | 1995-10-27 | 1999-01-15 | 배순훈 | 투사형화상표시장치의 광학계 |
CN1198037A (zh) * | 1997-04-25 | 1998-11-04 | 株式会社村田制作所 | 压电谐振器和使用它的电子元件 |
US6175182B1 (en) * | 1998-03-18 | 2001-01-16 | Penn State Research Foundation | Pseudo-shear mode actuator |
US6414417B1 (en) * | 1999-08-31 | 2002-07-02 | Kyocera Corporation | Laminated piezoelectric actuator |
US7164221B1 (en) * | 1999-10-01 | 2007-01-16 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6915547B2 (en) * | 1999-10-01 | 2005-07-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6437487B1 (en) * | 2001-02-28 | 2002-08-20 | Acuson Corporation | Transducer array using multi-layered elements and a method of manufacture thereof |
US6429574B1 (en) * | 2001-02-28 | 2002-08-06 | Acuson Corporation | Transducer array using multi-layered elements having an even number of elements and a method of manufacture thereof |
US6664717B1 (en) * | 2001-02-28 | 2003-12-16 | Acuson Corporation | Multi-dimensional transducer array and method with air separation |
US6624549B2 (en) * | 2001-03-02 | 2003-09-23 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of fabricating the same |
JP4015820B2 (ja) * | 2001-04-11 | 2007-11-28 | 日本碍子株式会社 | 配線基板及びその製造方法 |
JP2004297041A (ja) * | 2003-03-12 | 2004-10-21 | Denso Corp | 積層型圧電体素子 |
JP4470504B2 (ja) * | 2004-02-03 | 2010-06-02 | 株式会社デンソー | 積層型圧電素子及びその製造方法 |
JP4483718B2 (ja) * | 2005-06-20 | 2010-06-16 | 船井電機株式会社 | 形状可変ミラー及びそれを備えた光ピックアップ装置 |
JP5087914B2 (ja) * | 2006-12-06 | 2012-12-05 | Tdk株式会社 | 積層型圧電素子 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1462404C3 (de) * | 1966-02-04 | 1974-06-27 | Agfa-Gevaert Ag, 5090 Leverkusen | Vorrichtung zur Wiedergabe eines mehrfarbigen Fernsehbildes |
US3507984A (en) * | 1966-11-17 | 1970-04-21 | Singer General Precision | Laser multicolor television display apparatus |
US3760096A (en) * | 1972-06-26 | 1973-09-18 | S Roth | Television receiver including a large screen projection system |
US3904274A (en) * | 1973-08-27 | 1975-09-09 | Itek Corp | Monolithic piezoelectric wavefront phase modulator |
US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
US4571603A (en) * | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
US4491761A (en) * | 1981-12-28 | 1985-01-01 | United Technologies Corporation | Planar piezoelectric deflector with arrays of alternate piezoelectric effect |
US4564782A (en) * | 1983-09-02 | 1986-01-14 | Murata Manufacturing Co., Ltd. | Ceramic filter using multiple thin piezoelectric layers |
US4638309A (en) * | 1983-09-08 | 1987-01-20 | Texas Instruments Incorporated | Spatial light modulator drive system |
US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
JPS60177316A (ja) * | 1984-02-24 | 1985-09-11 | Ngk Spark Plug Co Ltd | 光偏向装置 |
US4588268A (en) * | 1984-03-12 | 1986-05-13 | Itek Corporation | Tip-tilt mirror actuation system having simplified driver circuitry |
US4566935A (en) * | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US4710732A (en) * | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US4655563A (en) * | 1985-11-25 | 1987-04-07 | Itek Corporation | Variable thickness deformable mirror |
US4705361A (en) * | 1985-11-27 | 1987-11-10 | Texas Instruments Incorporated | Spatial light modulator |
US4859012A (en) * | 1987-08-14 | 1989-08-22 | Texas Instruments Incorporated | Optical interconnection networks |
US4736132A (en) * | 1987-09-14 | 1988-04-05 | Rockwell International Corporation | Piezoelectric deformable mirrors and gratings |
US4956619A (en) * | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
US4856863A (en) * | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
JPH0217860U (ko) * | 1988-07-20 | 1990-02-06 | ||
US5028939A (en) * | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US4932119A (en) * | 1989-03-28 | 1990-06-12 | Litton Systems, Inc. | Method of making standard electrodisplacive transducers for deformable mirrors |
JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5001681A (en) * | 1989-12-21 | 1991-03-19 | Honeywell Inc. | Monolaminar piezoelectric bender bar |
US5089739A (en) * | 1990-03-19 | 1992-02-18 | Brother Kogyo Kabushiki Kaisha | Laminate type piezoelectric actuator element |
-
1991
- 1991-10-18 US US07/779,345 patent/US5175465A/en not_active Expired - Lifetime
-
1992
- 1992-10-16 CA CA002096119A patent/CA2096119C/en not_active Expired - Fee Related
- 1992-10-16 AT AT92922978T patent/ATE150586T1/de not_active IP Right Cessation
- 1992-10-16 ES ES92922978T patent/ES2098553T3/es not_active Expired - Lifetime
- 1992-10-16 JP JP5507838A patent/JP2573791B2/ja not_active Expired - Lifetime
- 1992-10-16 DE DE69218408T patent/DE69218408T2/de not_active Expired - Fee Related
- 1992-10-16 KR KR1019930701839A patent/KR970007139B1/ko not_active IP Right Cessation
- 1992-10-16 DK DK92922978.9T patent/DK0567617T3/da active
- 1992-10-16 WO PCT/US1992/008872 patent/WO1993008609A1/en active IP Right Grant
- 1992-10-16 AU AU29086/92A patent/AU648735B2/en not_active Ceased
- 1992-10-16 EP EP92922978A patent/EP0567617B1/en not_active Expired - Lifetime
-
1997
- 1997-04-21 GR GR970400869T patent/GR3023208T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
KR970007139B1 (ko) | 1997-05-02 |
CA2096119C (en) | 1996-02-20 |
ATE150586T1 (de) | 1997-04-15 |
EP0567617B1 (en) | 1997-03-19 |
KR930703710A (ko) | 1993-11-30 |
CA2096119A1 (en) | 1993-04-19 |
DE69218408T2 (de) | 1997-06-26 |
WO1993008609A1 (en) | 1993-04-29 |
DE69218408D1 (de) | 1997-04-24 |
GR3023208T3 (en) | 1997-07-30 |
AU2908692A (en) | 1993-05-21 |
ES2098553T3 (es) | 1997-05-01 |
EP0567617A1 (en) | 1993-11-03 |
EP0567617A4 (en) | 1995-06-14 |
JP2573791B2 (ja) | 1997-01-22 |
AU648735B2 (en) | 1994-04-28 |
JPH06503689A (ja) | 1994-04-21 |
US5175465A (en) | 1992-12-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK0567617T3 (da) | Piezoelektriske og elektrostriktive aktuatorer | |
DE69836686D1 (de) | Diodenanordnung | |
AU7020994A (en) | Broadband phased array transducer design with frequency controlled two dimension capability and methods for manufacture thereof | |
ATE27208T1 (de) | Stellglied mit piezokeramischem koerper. | |
DE69422916D1 (de) | Piezoelektrischer niederspannungs-biegeantrieb | |
ES517649A0 (es) | Perfeccionamientos en una estructura de electrodo. | |
DE59010081D1 (de) | Piezoelektrischer Biegewandler und seine Verwendung | |
SE8504350D0 (sv) | Ytvaganordning | |
DE69410861D1 (de) | Piezoelektrisches/elektrostriktives Element mit Elektrodenfilmen mit einer bestimmten Oberflächenrauhigkeit | |
IT1252281B (it) | Dispositivo a resistori per il controllo della velocita' di rotazione del motore di una soffiante | |
KR970062729A (ko) | 미세 위치 설정기용 위치 설정 액추에이터 | |
ATE171019T1 (de) | Positionierungsapparat | |
TW331043B (en) | Piezoelectric actuator device | |
DE50113157D1 (de) | Piezoaktor | |
DE3870298D1 (de) | Druckhammer mit piezoelektrischem betaetiger. | |
JPS6059981A (ja) | 駆動装置 | |
JP2611784B2 (ja) | 電歪駆動装置の制御方法 | |
US2814739A (en) | Pulse width modulator | |
DD137982A1 (de) | Piezoelektrisches stellelement mit linearem verhalten | |
FR2726406B1 (fr) | Actionneur lineaire piezoelectrique | |
KR980000625A (ko) | 압전/전왜 액츄에이터 | |
SU1014034A1 (ru) | Сегнетоэлектрический накопитель информации | |
KR950000657U (ko) | 직사각형의 압전을 박을수 있는 압전기기 | |
JPH03112373A (ja) | 変位発生装置 | |
JPH046885A (ja) | 積層ユニモルフ型圧電素子 |