DD137982A1 - Piezoelektrisches stellelement mit linearem verhalten - Google Patents
Piezoelektrisches stellelement mit linearem verhaltenInfo
- Publication number
- DD137982A1 DD137982A1 DD20682078A DD20682078A DD137982A1 DD 137982 A1 DD137982 A1 DD 137982A1 DD 20682078 A DD20682078 A DD 20682078A DD 20682078 A DD20682078 A DD 20682078A DD 137982 A1 DD137982 A1 DD 137982A1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- piezoelectric actuator
- linear behavior
- behavior
- linear
- piezoelectric
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD20682078A DD137982A1 (de) | 1978-07-20 | 1978-07-20 | Piezoelektrisches stellelement mit linearem verhalten |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD20682078A DD137982A1 (de) | 1978-07-20 | 1978-07-20 | Piezoelektrisches stellelement mit linearem verhalten |
Publications (1)
Publication Number | Publication Date |
---|---|
DD137982A1 true DD137982A1 (de) | 1979-10-03 |
Family
ID=5513679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD20682078A DD137982A1 (de) | 1978-07-20 | 1978-07-20 | Piezoelektrisches stellelement mit linearem verhalten |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD137982A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5081390A (en) * | 1990-08-13 | 1992-01-14 | Digital Instruments, Inc. | Method of operating a scanning probe microscope to improve drift characteristics |
EP0603835A1 (de) * | 1992-12-22 | 1994-06-29 | Nec Corporation | Piezoelektrischer Antrieb mit Dehnungsmesser |
-
1978
- 1978-07-20 DD DD20682078A patent/DD137982A1/de not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5081390A (en) * | 1990-08-13 | 1992-01-14 | Digital Instruments, Inc. | Method of operating a scanning probe microscope to improve drift characteristics |
EP0603835A1 (de) * | 1992-12-22 | 1994-06-29 | Nec Corporation | Piezoelektrischer Antrieb mit Dehnungsmesser |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENJ | Ceased due to non-payment of renewal fee |