DE8520877U1 - Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial - Google Patents

Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial

Info

Publication number
DE8520877U1
DE8520877U1 DE8520877U DE8520877U DE8520877U1 DE 8520877 U1 DE8520877 U1 DE 8520877U1 DE 8520877 U DE8520877 U DE 8520877U DE 8520877 U DE8520877 U DE 8520877U DE 8520877 U1 DE8520877 U1 DE 8520877U1
Authority
DE
Germany
Prior art keywords
winding
photoresist
roll
disks
hoechst
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8520877U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoechst AG
Original Assignee
Hoechst AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst AG filed Critical Hoechst AG
Priority to DE8520877U priority Critical patent/DE8520877U1/de
Publication of DE8520877U1 publication Critical patent/DE8520877U1/de
Priority to EP86109355A priority patent/EP0212203A3/de
Priority to JP1986108803U priority patent/JPS6238277U/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/161Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/50Storage means for webs, tapes, or filamentary material
    • B65H2701/51Cores or reels characterised by the material
    • B65H2701/513Cores or reels characterised by the material assembled mainly from rigid elements of the same kind
    • B65H2701/5136Moulded plastic elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/50Storage means for webs, tapes, or filamentary material
    • B65H2701/51Cores or reels characterised by the material
    • B65H2701/515Cores or reels characterised by the material assembled from parts made of different materials
    • B65H2701/5152End flanges and barrel of different material
    • B65H2701/51528Plastic barrel

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Storage Of Web-Like Or Filamentary Materials (AREA)
DE8520877U 1985-07-19 1985-07-19 Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial Expired DE8520877U1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE8520877U DE8520877U1 (de) 1985-07-19 1985-07-19 Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial
EP86109355A EP0212203A3 (de) 1985-07-19 1986-07-09 Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial
JP1986108803U JPS6238277U (forum.php) 1985-07-19 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8520877U DE8520877U1 (de) 1985-07-19 1985-07-19 Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial

Publications (1)

Publication Number Publication Date
DE8520877U1 true DE8520877U1 (de) 1985-09-05

Family

ID=6783311

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8520877U Expired DE8520877U1 (de) 1985-07-19 1985-07-19 Wickelrolle zum Auf- und Abwickeln von Fotoresistmaterial

Country Status (3)

Country Link
EP (1) EP0212203A3 (forum.php)
JP (1) JPS6238277U (forum.php)
DE (1) DE8520877U1 (forum.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8905036U1 (de) * 1989-04-21 1989-06-01 Du Pont de Nemours (Deutschland) GmbH, 6380 Bad Homburg Wickelrolle zum Auf- und Abwickeln von Fotopolymermaterial
AU623301B2 (en) * 1990-04-13 1992-05-07 Bando Kagaku Kabushiki Kaisha Conveyor belt packing and shipping device
JP6528775B2 (ja) * 2014-09-04 2019-06-12 株式会社ニコン 処理システムおよびデバイス製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544145A (en) * 1920-04-13 1925-06-30 Elliott Fisher Co Storage spool
US2017636A (en) * 1934-05-26 1935-10-15 Bell Telephone Labor Inc Stationery guiding instrumentality
GB888830A (en) * 1959-08-21 1962-02-07 Juan Comerma Aymerich Flange for multiple bobbins
JPS59167459A (ja) * 1983-03-14 1984-09-20 Fuji Xerox Co Ltd ロ−ル紙のホルダ−
JPS59167457A (ja) * 1983-03-14 1984-09-20 Fuji Xerox Co Ltd ロ−ル紙のホルダ−
DE3437453A1 (de) * 1984-10-12 1986-04-17 Hoechst Ag, 6230 Frankfurt Photopolymerisierbares aufzeichnungsmaterial und verfahren zu seiner herstellung

Also Published As

Publication number Publication date
EP0212203A2 (de) 1987-03-04
JPS6238277U (forum.php) 1987-03-06
EP0212203A3 (de) 1987-10-21

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