DE69938766D1 - Verfahren zur Rückgewinnung von Substratscheiben - Google Patents
Verfahren zur Rückgewinnung von SubstratscheibenInfo
- Publication number
- DE69938766D1 DE69938766D1 DE69938766T DE69938766T DE69938766D1 DE 69938766 D1 DE69938766 D1 DE 69938766D1 DE 69938766 T DE69938766 T DE 69938766T DE 69938766 T DE69938766 T DE 69938766T DE 69938766 D1 DE69938766 D1 DE 69938766D1
- Authority
- DE
- Germany
- Prior art keywords
- recovery
- substrate disks
- disks
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 1
- 238000011084 recovery Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02032—Preparing bulk and homogeneous wafers by reclaiming or re-processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Weting (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24386898 | 1998-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69938766D1 true DE69938766D1 (de) | 2008-07-03 |
Family
ID=17110182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69938766T Expired - Lifetime DE69938766D1 (de) | 1998-08-28 | 1999-08-27 | Verfahren zur Rückgewinnung von Substratscheiben |
Country Status (5)
Country | Link |
---|---|
US (1) | US6451696B1 (de) |
EP (1) | EP0986097B1 (de) |
KR (1) | KR20000017512A (de) |
DE (1) | DE69938766D1 (de) |
TW (1) | TW416104B (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6632292B1 (en) * | 1998-03-13 | 2003-10-14 | Semitool, Inc. | Selective treatment of microelectronic workpiece surfaces |
US20010039101A1 (en) * | 2000-04-13 | 2001-11-08 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for converting a reclaim wafer into a semiconductor wafer |
WO2001082354A1 (fr) * | 2000-04-24 | 2001-11-01 | Sumitomo Mitsubishi Silicon Corporation | Procédé de fabrication d'une plaquette de semi-conducteur |
US20020023715A1 (en) * | 2000-05-26 | 2002-02-28 | Norio Kimura | Substrate polishing apparatus and substrate polishing mehod |
US6406923B1 (en) | 2000-07-31 | 2002-06-18 | Kobe Precision Inc. | Process for reclaiming wafer substrates |
GB2368971B (en) * | 2000-11-11 | 2005-01-05 | Pure Wafer Ltd | Process for Reclaimimg Wafer Substrates |
DE10137113A1 (de) * | 2001-07-30 | 2003-02-27 | Infineon Technologies Ag | Verfahren zum Regenerieren von Halbleiterscheiben |
US6554909B1 (en) * | 2001-11-08 | 2003-04-29 | Saint-Gobain Ceramics & Plastics, Inc. | Process for cleaning components using cleaning media |
JP2003243403A (ja) | 2002-02-13 | 2003-08-29 | Mitsubishi Electric Corp | 半導体ウェハの再生方法 |
US6884634B2 (en) * | 2002-09-27 | 2005-04-26 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers |
US6761625B1 (en) | 2003-05-20 | 2004-07-13 | Intel Corporation | Reclaiming virgin test wafers |
DE10326273B4 (de) * | 2003-06-11 | 2008-06-12 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zur Reduzierung der Scheibenkontaminierung durch Entfernen von Metallisierungsunterlagenschichten am Scheibenrand |
US7699997B2 (en) | 2003-10-03 | 2010-04-20 | Kobe Steel, Ltd. | Method of reclaiming silicon wafers |
JP2005175106A (ja) * | 2003-12-10 | 2005-06-30 | Sumitomo Mitsubishi Silicon Corp | シリコンウェーハの加工方法 |
JP4954462B2 (ja) * | 2004-10-19 | 2012-06-13 | 株式会社フジミインコーポレーテッド | 窒化シリコン膜選択的研磨用組成物およびそれを用いる研磨方法 |
CN100483641C (zh) * | 2004-12-20 | 2009-04-29 | 斯泰拉化工公司 | 微细加工处理剂以及使用其的微细加工处理方法 |
KR100670919B1 (ko) * | 2005-01-12 | 2007-01-19 | 삼성전자주식회사 | 저유전율막 제거 방법 및 이를 이용한 웨이퍼 재생 방법 |
US7452481B2 (en) * | 2005-05-16 | 2008-11-18 | Kabushiki Kaisha Kobe Seiko Sho | Polishing slurry and method of reclaiming wafers |
DE102005060211B4 (de) * | 2005-12-14 | 2007-09-13 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Bestimmung der Oberflächenbelegung eines Quarzglasbauteils |
CN101370898B (zh) * | 2006-02-14 | 2012-09-12 | 卡伯特微电子公司 | 用于氧化铟锡表面的化学机械抛光的组合物及方法 |
US7666689B2 (en) * | 2006-12-12 | 2010-02-23 | International Business Machines Corporation | Method to remove circuit patterns from a wafer |
US20100022070A1 (en) * | 2008-07-22 | 2010-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing soi substrate |
KR101110135B1 (ko) * | 2009-07-31 | 2012-01-31 | 주식회사 케이피엠테크 | 고전도 하이드로겔층이 구비된 전기마스크 장치 |
JP5805636B2 (ja) * | 2010-06-24 | 2015-11-04 | Hoya株式会社 | 磁気記録媒体 |
US9120200B2 (en) | 2010-12-28 | 2015-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Polishing slurry including zirconia particles and a method of using the polishing slurry |
SG188775A1 (en) * | 2011-09-30 | 2013-04-30 | Hoya Corp | Manufacturing method of glass substrate for magnetic disk, magnetic disk, and magnetic data recording/reproducing device |
JP6205619B2 (ja) * | 2013-11-07 | 2017-10-04 | 株式会社岡本工作機械製作所 | 再生半導体ウエハの製造方法 |
KR20160027325A (ko) * | 2014-08-28 | 2016-03-10 | 전자부품연구원 | 태양전지 웨이퍼 재자원화를 위한 화학적-기계적 식각 방법 |
KR20160118546A (ko) | 2015-04-02 | 2016-10-12 | 주식회사 인프라웨어 | 전자문서의 보안 방법 |
CN105185741B (zh) * | 2015-07-31 | 2018-08-28 | 深圳市万中和科技有限公司 | 一种coms像素电路基板回收工艺 |
KR102215839B1 (ko) * | 2016-01-22 | 2021-02-16 | 한국전자기술연구원 | 태양전지 웨이퍼 재자원화 방법 |
US10373818B1 (en) * | 2018-01-31 | 2019-08-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of wafer recycling |
CN112967930B (zh) * | 2021-02-07 | 2023-05-12 | 西安微电子技术研究所 | 一种SiC晶圆的金属化层剥离方法 |
CN113980580B (zh) * | 2021-12-24 | 2022-04-08 | 绍兴拓邦新能源股份有限公司 | 一种单晶硅片的碱刻蚀抛光方法 |
CN116252188B (zh) * | 2023-05-15 | 2023-08-11 | 苏州焜原光电有限公司 | 一种锑化镓外延片去除外延层的方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3715842A (en) * | 1970-07-02 | 1973-02-13 | Tizon Chem Corp | Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces |
US3923567A (en) * | 1974-08-09 | 1975-12-02 | Silicon Materials Inc | Method of reclaiming a semiconductor wafer |
JPS5655052A (en) * | 1979-10-11 | 1981-05-15 | Nippon Telegr & Teleph Corp <Ntt> | Mechanical and chemical polishing |
US5084071A (en) * | 1989-03-07 | 1992-01-28 | International Business Machines Corporation | Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
JP2839801B2 (ja) * | 1992-09-18 | 1998-12-16 | 三菱マテリアル株式会社 | ウェーハの製造方法 |
US5391258A (en) * | 1993-05-26 | 1995-02-21 | Rodel, Inc. | Compositions and methods for polishing |
US5575885A (en) * | 1993-12-14 | 1996-11-19 | Kabushiki Kaisha Toshiba | Copper-based metal polishing solution and method for manufacturing semiconductor device |
US5622875A (en) | 1994-05-06 | 1997-04-22 | Kobe Precision, Inc. | Method for reclaiming substrate from semiconductor wafers |
JP3311203B2 (ja) * | 1995-06-13 | 2002-08-05 | 株式会社東芝 | 半導体装置の製造方法及び半導体製造装置、半導体ウェーハの化学的機械的ポリッシング方法 |
US5855735A (en) * | 1995-10-03 | 1999-01-05 | Kobe Precision, Inc. | Process for recovering substrates |
-
1999
- 1999-08-06 TW TW088113488A patent/TW416104B/zh not_active IP Right Cessation
- 1999-08-25 KR KR1019990035331A patent/KR20000017512A/ko not_active Application Discontinuation
- 1999-08-27 US US09/384,725 patent/US6451696B1/en not_active Expired - Lifetime
- 1999-08-27 DE DE69938766T patent/DE69938766D1/de not_active Expired - Lifetime
- 1999-08-27 EP EP99306853A patent/EP0986097B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0986097B1 (de) | 2008-05-21 |
EP0986097A3 (de) | 2000-05-10 |
EP0986097A2 (de) | 2000-03-15 |
KR20000017512A (ko) | 2000-03-25 |
US6451696B1 (en) | 2002-09-17 |
TW416104B (en) | 2000-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |