DE69934036D1 - Verfahren zum Verarbeiten eines Substrats aus einem ferroelektrischen einkristallinen Material - Google Patents

Verfahren zum Verarbeiten eines Substrats aus einem ferroelektrischen einkristallinen Material

Info

Publication number
DE69934036D1
DE69934036D1 DE69934036T DE69934036T DE69934036D1 DE 69934036 D1 DE69934036 D1 DE 69934036D1 DE 69934036 T DE69934036 T DE 69934036T DE 69934036 T DE69934036 T DE 69934036T DE 69934036 D1 DE69934036 D1 DE 69934036D1
Authority
DE
Germany
Prior art keywords
substrate
processing
crystalline material
single crystalline
ferroelectric single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69934036T
Other languages
English (en)
Other versions
DE69934036T2 (de
Inventor
Makoto Iwai
Tatsuo Kawaguchi
Minoru Imaeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69934036D1 publication Critical patent/DE69934036D1/de
Publication of DE69934036T2 publication Critical patent/DE69934036T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
    • G02F1/3775—Non-linear optics for second-harmonic generation in an optical waveguide structure with a periodic structure, e.g. domain inversion, for quasi-phase-matching [QPM]

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
DE69934036T 1998-02-17 1999-02-17 Verfahren zum Verarbeiten eines Substrats aus einem ferroelektrischen einkristallinen Material Expired - Lifetime DE69934036T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3482398 1998-02-17
JP03482398A JP3863277B2 (ja) 1998-02-17 1998-02-17 強誘電体結晶基板の加工方法

Publications (2)

Publication Number Publication Date
DE69934036D1 true DE69934036D1 (de) 2007-01-04
DE69934036T2 DE69934036T2 (de) 2007-06-21

Family

ID=12424929

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69934036T Expired - Lifetime DE69934036T2 (de) 1998-02-17 1999-02-17 Verfahren zum Verarbeiten eines Substrats aus einem ferroelektrischen einkristallinen Material

Country Status (4)

Country Link
US (1) US6687448B2 (de)
EP (2) EP1744190A3 (de)
JP (1) JP3863277B2 (de)
DE (1) DE69934036T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6792189B2 (en) * 2001-05-13 2004-09-14 Nippon Telegraph And Telephone Corporation Optical waveguide and method of manufacture
JP4781648B2 (ja) * 2004-04-14 2011-09-28 株式会社 光コム 光共振器
JP4557264B2 (ja) * 2007-03-08 2010-10-06 日本碍子株式会社 波長変換素子

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4887878A (en) 1984-06-14 1989-12-19 Polaroid Corporation Optical modulation device
JPS6317718A (ja) * 1986-07-08 1988-01-25 Ngk Insulators Ltd 棒状体の自動整列装置
JPH0797170B2 (ja) * 1986-12-23 1995-10-18 松下電器産業株式会社 光素子の製造方法
JP2703926B2 (ja) * 1988-06-14 1998-01-26 日本電気株式会社 光回路の製造
JP2750231B2 (ja) * 1990-11-05 1998-05-13 富士通株式会社 導波路型第２高調波発生素子の製造方法
JP3052501B2 (ja) * 1990-11-30 2000-06-12 松下電器産業株式会社 波長変換素子の製造方法
SE502139C2 (sv) * 1992-12-09 1995-08-28 Ellemtel Utvecklings Ab Elektriskt styrbar filteranordning
JPH06235833A (ja) * 1993-02-09 1994-08-23 Nikon Corp 光導波路
JPH07159637A (ja) * 1993-12-10 1995-06-23 Nikon Corp リッジ型光導波路の製造方法
JPH0952679A (ja) 1995-08-16 1997-02-25 Toshiba Corp リニアモータエレベータ用ブレーキ
EP0782017B1 (de) * 1995-12-28 2009-08-05 Panasonic Corporation Optischer Wellenleiter, Vorrichtung zur Umwandlung optischer Wellenlängen und Verfahren zu ihrer Herstellung
JPH103100A (ja) 1996-04-15 1998-01-06 Matsushita Electric Ind Co Ltd 光導波路部品、光学部品、光導波路部品の製造方法および周期分極反転構造の製造方法
JPH1010348A (ja) 1996-06-26 1998-01-16 Ngk Insulators Ltd 光導波路デバイスの製造方法
JPH11162255A (ja) 1997-11-25 1999-06-18 Ngk Insulators Ltd 強誘電体結晶基板の加工方法

Also Published As

Publication number Publication date
DE69934036T2 (de) 2007-06-21
EP0936481B1 (de) 2006-11-22
JPH11228294A (ja) 1999-08-24
EP1744190A3 (de) 2007-03-28
US6687448B2 (en) 2004-02-03
JP3863277B2 (ja) 2006-12-27
EP1744190A2 (de) 2007-01-17
EP0936481A3 (de) 2000-10-25
EP0936481A2 (de) 1999-08-18
US20010031123A1 (en) 2001-10-18

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