DE69923567T2 - Verfahren zur herstellung eines siliciumcarbidsinterkörpers - Google Patents
Verfahren zur herstellung eines siliciumcarbidsinterkörpers Download PDFInfo
- Publication number
- DE69923567T2 DE69923567T2 DE69923567T DE69923567T DE69923567T2 DE 69923567 T2 DE69923567 T2 DE 69923567T2 DE 69923567 T DE69923567 T DE 69923567T DE 69923567 T DE69923567 T DE 69923567T DE 69923567 T2 DE69923567 T2 DE 69923567T2
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- green body
- silicon
- carbon
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 145
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 81
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 title 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 92
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 92
- 229910052799 carbon Inorganic materials 0.000 claims description 75
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 55
- 229910052710 silicon Inorganic materials 0.000 claims description 55
- 239000010703 silicon Substances 0.000 claims description 55
- 229910052757 nitrogen Inorganic materials 0.000 claims description 46
- 239000002002 slurry Substances 0.000 claims description 41
- 239000011812 mixed powder Substances 0.000 claims description 40
- 239000011368 organic material Substances 0.000 claims description 31
- 239000012298 atmosphere Substances 0.000 claims description 26
- 239000002904 solvent Substances 0.000 claims description 26
- 239000000843 powder Substances 0.000 claims description 22
- 239000011148 porous material Substances 0.000 claims description 19
- 238000005245 sintering Methods 0.000 claims description 19
- 150000002894 organic compounds Chemical class 0.000 claims description 13
- 239000003054 catalyst Substances 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 12
- 230000009471 action Effects 0.000 claims description 10
- 238000004132 cross linking Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 8
- 230000000379 polymerizing effect Effects 0.000 claims description 7
- 238000011049 filling Methods 0.000 claims description 5
- 150000003377 silicon compounds Chemical class 0.000 claims description 5
- 238000000034 method Methods 0.000 description 50
- 238000006243 chemical reaction Methods 0.000 description 26
- 238000010438 heat treatment Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 18
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 12
- 239000012535 impurity Substances 0.000 description 12
- 238000002156 mixing Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 239000005011 phenolic resin Substances 0.000 description 10
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 9
- 239000004312 hexamethylene tetramine Substances 0.000 description 9
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 9
- 229920001568 phenolic resin Polymers 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005266 casting Methods 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 238000003754 machining Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 5
- 235000019441 ethanol Nutrition 0.000 description 5
- 239000006104 solid solution Substances 0.000 description 5
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 239000007849 furan resin Substances 0.000 description 4
- 238000013001 point bending Methods 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229920000058 polyacrylate Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 2
- 229930006000 Sucrose Natural products 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- CWAFVXWRGIEBPL-UHFFFAOYSA-N ethoxysilane Chemical compound CCO[SiH3] CWAFVXWRGIEBPL-UHFFFAOYSA-N 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 239000011505 plaster Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- 239000005720 sucrose Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 101100371219 Pseudomonas putida (strain DOT-T1E) ttgE gene Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003738 black carbon Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011294 coal tar pitch Substances 0.000 description 1
- 238000004939 coking Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 150000004676 glycans Chemical class 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- ARYZCSRUUPFYMY-UHFFFAOYSA-N methoxysilane Chemical compound CO[SiH3] ARYZCSRUUPFYMY-UHFFFAOYSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 150000002772 monosaccharides Chemical class 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- ZWLPBLYKEWSWPD-UHFFFAOYSA-N o-toluenecarboxylic acid Natural products CC1=CC=CC=C1C(O)=O ZWLPBLYKEWSWPD-UHFFFAOYSA-N 0.000 description 1
- 229920001542 oligosaccharide Polymers 0.000 description 1
- 150000002482 oligosaccharides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- LPNBBFKOUUSUDB-UHFFFAOYSA-N p-toluic acid Chemical compound CC1=CC=C(C(O)=O)C=C1 LPNBBFKOUUSUDB-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001282 polysaccharide Polymers 0.000 description 1
- 239000005017 polysaccharide Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- ZMYXZXUHYAGGKG-UHFFFAOYSA-N propoxysilane Chemical compound CCCO[SiH3] ZMYXZXUHYAGGKG-UHFFFAOYSA-N 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011134 resol-type phenolic resin Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 239000011269 tar Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22441698 | 1998-08-07 | ||
| JP22441698 | 1998-08-07 | ||
| JP22445198 | 1998-08-07 | ||
| JP22445198 | 1998-08-07 | ||
| JP29581498 | 1998-10-16 | ||
| JP29581498 | 1998-10-16 | ||
| PCT/JP1999/004274 WO2000007959A1 (fr) | 1998-08-07 | 1999-08-06 | Fritte de carbure de silicium et son procede de production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69923567D1 DE69923567D1 (de) | 2005-03-10 |
| DE69923567T2 true DE69923567T2 (de) | 2006-02-16 |
Family
ID=27330903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69923567T Expired - Lifetime DE69923567T2 (de) | 1998-08-07 | 1999-08-06 | Verfahren zur herstellung eines siliciumcarbidsinterkörpers |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6695984B1 (fr) |
| EP (1) | EP1103532B1 (fr) |
| KR (1) | KR100620493B1 (fr) |
| CA (1) | CA2339649C (fr) |
| DE (1) | DE69923567T2 (fr) |
| WO (1) | WO2000007959A1 (fr) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002047066A (ja) * | 2000-08-02 | 2002-02-12 | Tokai Carbon Co Ltd | ＳｉＣ成形体およびその製造方法 |
| JP4700835B2 (ja) * | 2001-05-01 | 2011-06-15 | 株式会社ブリヂストン | 炭化ケイ素粉末及びその製造方法並びに炭化ケイ素焼結体 |
| US7335330B2 (en) | 2001-10-16 | 2008-02-26 | Bridgestone Corporation | Method of producing sintered carbide |
| JP4136380B2 (ja) * | 2001-12-21 | 2008-08-20 | 日本碍子株式会社 | 高熱伝導性含Ｓｉ材料及びその製造方法 |
| US6887421B2 (en) * | 2002-01-14 | 2005-05-03 | Redunndant Materials, Inc. | Method for making a silicon carbide resistor with silicon/silicon carbide contacts by induction heating |
| AU2003211822A1 (en) * | 2002-03-11 | 2003-09-22 | Bridgestone Corporation | Method for manufacturing silicon carbide sintered compact jig and silicon carbide sintered compact jig manufactured by the method |
| JP4261130B2 (ja) * | 2002-06-18 | 2009-04-30 | 株式会社東芝 | シリコン／炭化ケイ素複合材料 |
| TW200416208A (en) * | 2002-11-12 | 2004-09-01 | Bridgestone Corp | Silicon carbide sintered product and method for production the same |
| US6978469B2 (en) * | 2002-11-25 | 2005-12-20 | Brown Johnny L | Disc protector |
| KR20040051961A (ko) * | 2002-12-13 | 2004-06-19 | 삼화전자공업 주식회사 | 태양전지용 기판 및 그 제조방법 |
| WO2004097801A2 (fr) * | 2003-04-25 | 2004-11-11 | Brown Johnny L | Dispositif de protection de disque |
| US7267741B2 (en) * | 2003-11-14 | 2007-09-11 | Lam Research Corporation | Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| CA2567747A1 (fr) * | 2004-06-08 | 2005-12-22 | Marik Dombsky | Procede de formation de cibles ceramiques composites |
| KR101040761B1 (ko) * | 2009-05-28 | 2011-06-10 | 한국과학기술연구원 | 저저항 탄화규소 소결체, 이의 조성물 및 이의 제조방법 |
| FR2976917B1 (fr) | 2011-06-23 | 2013-06-28 | Thales Sa | Ensemble hybride d'au moins un panneau solaire. |
| KR101288342B1 (ko) * | 2011-09-05 | 2013-07-22 | 임광현 | 다공성 탄화규소 발열체의 제조방법 |
| RU2494043C1 (ru) * | 2012-02-09 | 2013-09-27 | Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" | Способ изготовления изделий из углерод-карбидокремниевого материала |
| RU2494962C1 (ru) * | 2012-02-09 | 2013-10-10 | Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" | Способ изготовления изделий из углерод-карбидокремниевого материала |
| JP6291446B2 (ja) * | 2015-03-26 | 2018-03-14 | 東京窯業株式会社 | 導電性炭化珪素質焼結体の製造方法 |
| DE102017217321A1 (de) * | 2017-09-28 | 2019-03-28 | Sgl Carbon Se | Keramisches Bauteil |
| JP7213607B2 (ja) * | 2018-03-28 | 2023-01-27 | 東京窯業株式会社 | 導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5969473A (ja) * | 1982-10-06 | 1984-04-19 | 株式会社日立製作所 | 電気絶縁性焼結材用炭化けい素粉末組成物 |
| US5589116A (en) * | 1991-07-18 | 1996-12-31 | Sumitomo Metal Industries, Ltd. | Process for preparing a silicon carbide sintered body for use in semiconductor equipment |
| JP2995692B2 (ja) * | 1991-07-30 | 1999-12-27 | バブコック日立株式会社 | 流動層ボイラの層高制御装置 |
| JP3131914B2 (ja) * | 1992-05-12 | 2001-02-05 | 東海高熱工業株式会社 | 炭化けい素発熱体およびその製造方法 |
| US5322824A (en) * | 1993-05-27 | 1994-06-21 | Chia Kai Y | Electrically conductive high strength dense ceramic |
| JPH0789764A (ja) | 1993-09-21 | 1995-04-04 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素発熱体 |
| JPH07165408A (ja) * | 1993-12-14 | 1995-06-27 | Tokai Konetsu Kogyo Co Ltd | 導電性炭化珪素微粉末および焼結体の製造方法 |
| JP3611345B2 (ja) * | 1994-06-22 | 2005-01-19 | 東京窯業株式会社 | セラミック及びその用途 |
| US5801073A (en) * | 1995-05-25 | 1998-09-01 | Charles Stark Draper Laboratory | Net-shape ceramic processing for electronic devices and packages |
| JP3934695B2 (ja) | 1995-05-31 | 2007-06-20 | 株式会社ブリヂストン | 炭化ケイ素単結晶製造用高純度炭化ケイ素粉体の製造方法 |
| JPH0923140A (ja) | 1995-07-05 | 1997-01-21 | Hitachi Ltd | Ｍｏｓデバイス |
| JP3631837B2 (ja) | 1996-02-21 | 2005-03-23 | 東芝テック株式会社 | 商品発注管理装置 |
| US5955391A (en) * | 1996-03-29 | 1999-09-21 | Kabushiki Kaisha Toshiba | Ceramic matrix composite and method of manufacturing the same |
| JP2001019552A (ja) * | 1999-07-09 | 2001-01-23 | Bridgestone Corp | 炭化ケイ素焼結体及びその製造方法 |
-
1999
- 1999-08-06 CA CA002339649A patent/CA2339649C/fr not_active Expired - Lifetime
- 1999-08-06 DE DE69923567T patent/DE69923567T2/de not_active Expired - Lifetime
- 1999-08-06 KR KR1020007013850A patent/KR100620493B1/ko not_active IP Right Cessation
- 1999-08-06 EP EP99935095A patent/EP1103532B1/fr not_active Expired - Lifetime
- 1999-08-06 US US09/744,918 patent/US6695984B1/en not_active Expired - Lifetime
- 1999-08-06 WO PCT/JP1999/004274 patent/WO2000007959A1/fr active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| EP1103532A1 (fr) | 2001-05-30 |
| WO2000007959A1 (fr) | 2000-02-17 |
| KR20010052627A (ko) | 2001-06-25 |
| DE69923567D1 (de) | 2005-03-10 |
| US6695984B1 (en) | 2004-02-24 |
| CA2339649A1 (fr) | 2000-02-17 |
| EP1103532A4 (fr) | 2003-01-15 |
| EP1103532B1 (fr) | 2005-02-02 |
| CA2339649C (fr) | 2008-08-05 |
| KR100620493B1 (ko) | 2006-09-05 |
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