DE69915651T2 - Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen - Google Patents

Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen Download PDF

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Publication number
DE69915651T2
DE69915651T2 DE69915651T DE69915651T DE69915651T2 DE 69915651 T2 DE69915651 T2 DE 69915651T2 DE 69915651 T DE69915651 T DE 69915651T DE 69915651 T DE69915651 T DE 69915651T DE 69915651 T2 DE69915651 T2 DE 69915651T2
Authority
DE
Germany
Prior art keywords
sensor
membrane
sensor elements
substrate
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69915651T
Other languages
German (de)
English (en)
Other versions
DE69915651D1 (de
Inventor
Carl Ross
John Schuster
Xiaoyi Ding
Walter Czarnocki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DE69915651D1 publication Critical patent/DE69915651D1/de
Application granted granted Critical
Publication of DE69915651T2 publication Critical patent/DE69915651T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE69915651T 1998-08-21 1999-08-12 Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen Expired - Lifetime DE69915651T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/137,765 US6142021A (en) 1998-08-21 1998-08-21 Selectable pressure sensor
US137765 1998-08-21
PCT/US1999/018474 WO2000011441A2 (en) 1998-08-21 1999-08-12 Pressure sensor and method of forming the same

Publications (2)

Publication Number Publication Date
DE69915651D1 DE69915651D1 (de) 2004-04-22
DE69915651T2 true DE69915651T2 (de) 2004-08-19

Family

ID=22478952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69915651T Expired - Lifetime DE69915651T2 (de) 1998-08-21 1999-08-12 Sensor mit Membran und einer Vielzahl von anschaltbaren Wandlern, um den Rand zu treffen

Country Status (6)

Country Link
US (1) US6142021A (enExample)
EP (1) EP1110067B1 (enExample)
JP (1) JP2002523736A (enExample)
DE (1) DE69915651T2 (enExample)
ES (1) ES2217809T3 (enExample)
WO (1) WO2000011441A2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6790699B2 (en) 2002-07-10 2004-09-14 Robert Bosch Gmbh Method for manufacturing a semiconductor device
DE102007062711A1 (de) * 2007-12-27 2009-07-02 Robert Bosch Gmbh Halbleiterwafer mit einer Vielzahl von Sensorelementen und Verfahren zum Vermessen von Sensorelementen auf einem Halbleiterwafer
US7926353B2 (en) * 2009-01-16 2011-04-19 Infineon Technologies Ag Pressure sensor including switchable sensor elements
GB2515715A (en) 2012-11-21 2015-01-07 Continental Automotive Systems Piezoresistive transducer with low thermal noise

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456226A (en) * 1967-10-27 1969-07-15 Conrac Corp Strain gage configuration
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
US4322980A (en) * 1979-11-08 1982-04-06 Hitachi, Ltd. Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
US4400681A (en) * 1981-02-23 1983-08-23 General Motors Corporation Semiconductor pressure sensor with slanted resistors
CA1186163A (en) * 1982-01-04 1985-04-30 James B. Starr Semiconductor pressure transducer
US4539554A (en) * 1982-10-18 1985-09-03 At&T Bell Laboratories Analog integrated circuit pressure sensor
JPS6077470A (ja) * 1983-10-04 1985-05-02 Nec Corp ダイアフラム型半導体圧力センサ
US4996082A (en) * 1985-04-26 1991-02-26 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4885621A (en) * 1988-05-02 1989-12-05 Delco Electronics Corporation Monolithic pressure sensitive integrated circuit
US5058435A (en) * 1989-06-22 1991-10-22 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5220838A (en) * 1991-03-28 1993-06-22 The Foxboro Company Overpressure-protected, differential pressure sensor and method of making the same
US5264075A (en) * 1992-11-06 1993-11-23 Ford Motor Company Fabrication methods for silicon/glass capacitive absolute pressure sensors
US5427975A (en) * 1993-05-10 1995-06-27 Delco Electronics Corporation Method of micromachining an integrated sensor on the surface of a silicon wafer
WO1995002164A1 (en) * 1993-07-07 1995-01-19 Ic Sensors, Inc. Pulsed thermal flow sensor system
DE19527687A1 (de) * 1995-07-28 1997-01-30 Bosch Gmbh Robert Sensor
US5672808A (en) * 1996-06-11 1997-09-30 Moore Products Co. Transducer having redundant pressure sensors

Also Published As

Publication number Publication date
WO2000011441A2 (en) 2000-03-02
ES2217809T3 (es) 2004-11-01
JP2002523736A (ja) 2002-07-30
DE69915651D1 (de) 2004-04-22
WO2000011441A3 (en) 2000-06-02
EP1110067B1 (en) 2004-03-17
US6142021A (en) 2000-11-07
EP1110067A4 (en) 2001-10-24
EP1110067A2 (en) 2001-06-27

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