DE3784009T2 - Brueckenschaltungsjustierverfahren fuer halbleiterdruckwandler. - Google Patents

Brueckenschaltungsjustierverfahren fuer halbleiterdruckwandler.

Info

Publication number
DE3784009T2
DE3784009T2 DE8787115916T DE3784009T DE3784009T2 DE 3784009 T2 DE3784009 T2 DE 3784009T2 DE 8787115916 T DE8787115916 T DE 8787115916T DE 3784009 T DE3784009 T DE 3784009T DE 3784009 T2 DE3784009 T2 DE 3784009T2
Authority
DE
Germany
Prior art keywords
bridge circuit
adjustment method
pressure transducers
semiconductor pressure
circuit adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787115916T
Other languages
English (en)
Other versions
DE3784009D1 (de
Inventor
Masanori C O Yokoha Nishiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61264747A external-priority patent/JPS63118628A/ja
Priority claimed from JP61264748A external-priority patent/JPS63118629A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3784009D1 publication Critical patent/DE3784009D1/de
Publication of DE3784009T2 publication Critical patent/DE3784009T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE8787115916T 1986-11-06 1987-10-29 Brueckenschaltungsjustierverfahren fuer halbleiterdruckwandler. Expired - Fee Related DE3784009T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61264747A JPS63118628A (ja) 1986-11-06 1986-11-06 半導体圧力センサのブリツジ回路調整方法
JP61264748A JPS63118629A (ja) 1986-11-06 1986-11-06 半導体圧力センサのブリツジ回路調整方法

Publications (2)

Publication Number Publication Date
DE3784009D1 DE3784009D1 (de) 1993-03-18
DE3784009T2 true DE3784009T2 (de) 1993-05-19

Family

ID=26546652

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787115916T Expired - Fee Related DE3784009T2 (de) 1986-11-06 1987-10-29 Brueckenschaltungsjustierverfahren fuer halbleiterdruckwandler.

Country Status (5)

Country Link
US (1) US4809536A (de)
EP (1) EP0266681B1 (de)
KR (1) KR910001842B1 (de)
AU (1) AU591817B2 (de)
DE (1) DE3784009T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10310392A1 (de) * 2003-03-07 2004-09-16 Hottinger Baldwin Messtechnik Gmbh Aufnehmer zur Ermittlung einer Dehnung
DE102006062222A1 (de) * 2006-12-22 2008-06-26 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit Kompensation des statischen Drucks

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265816B1 (de) * 1986-10-28 1991-08-28 Sumitomo Electric Industries Limited Messverfahren für einen Halbleiter-Druckmessfühler
JP3039934B2 (ja) * 1989-06-13 2000-05-08 コーリン電子株式会社 圧脈波検出装置
US5058435A (en) * 1989-06-22 1991-10-22 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5184515A (en) * 1989-06-22 1993-02-09 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5131259A (en) * 1991-02-01 1992-07-21 Fel-Pro Incorporated Calibration fixture and method of calibrating contact sensors
DE4206174C2 (de) * 1992-02-28 1995-06-22 Bosch Gmbh Robert Integrierter Sensor aus Silizium
JP3281217B2 (ja) * 1995-05-23 2002-05-13 富士電機株式会社 半導体式加速度センサと該センサのセンサ素子の特性評価方法
US7455666B2 (en) 2001-07-13 2008-11-25 Board Of Regents, The University Of Texas System Methods and apparatuses for navigating the subarachnoid space
US20040252290A1 (en) * 2003-06-10 2004-12-16 Ferguson Gary W. Optical strain gauge and methods of use including a wind measurement device
US6993954B1 (en) * 2004-07-27 2006-02-07 Tekscan, Incorporated Sensor equilibration and calibration system and method
US7216547B1 (en) * 2006-01-06 2007-05-15 Honeywell International Inc. Pressure sensor with silicon frit bonded cap
WO2011044387A2 (en) 2009-10-07 2011-04-14 The Board Of Regents Of The University Of Texas System Pressure-sensing medical devices, systems and methods, and methods of forming medical devices
JP6540397B2 (ja) 2015-09-07 2019-07-10 オムロンヘルスケア株式会社 圧脈波センサの検査方法及び圧脈波センサの製造方法
CN206330645U (zh) * 2016-09-05 2017-07-14 泰科电子(上海)有限公司 传感器组件和液位检测装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697918A (en) * 1971-08-03 1972-10-10 Gen Electric Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
US3899766A (en) * 1974-03-29 1975-08-12 Tyco Laboratories Inc Pressure transducer
JPS5453877A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Temperature compensation circuit of semiconductor strain gauge
US4174639A (en) * 1978-04-06 1979-11-20 American Chain & Cable Company, Inc. Bridge circuits
US4411158A (en) * 1981-04-14 1983-10-25 Ametek, Inc. Apparatus for sensing the condition of a fluid
US4611129A (en) * 1983-04-22 1986-09-09 Nec Corporation Signal conversion circuit
US4565097A (en) * 1984-05-09 1986-01-21 Mark Telephone Products, Inc. Method and apparatus for transducer error cancellation
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
EP0265816B1 (de) * 1986-10-28 1991-08-28 Sumitomo Electric Industries Limited Messverfahren für einen Halbleiter-Druckmessfühler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10310392A1 (de) * 2003-03-07 2004-09-16 Hottinger Baldwin Messtechnik Gmbh Aufnehmer zur Ermittlung einer Dehnung
DE102006062222A1 (de) * 2006-12-22 2008-06-26 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit Kompensation des statischen Drucks

Also Published As

Publication number Publication date
EP0266681A2 (de) 1988-05-11
AU8089187A (en) 1988-05-12
US4809536A (en) 1989-03-07
DE3784009D1 (de) 1993-03-18
EP0266681A3 (en) 1990-08-01
AU591817B2 (en) 1989-12-14
KR910001842B1 (ko) 1991-03-28
EP0266681B1 (de) 1993-02-03
KR880006533A (ko) 1988-07-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee