KR880006533A - 반도체 압력센서의 브리지회로 조정방법 - Google Patents
반도체 압력센서의 브리지회로 조정방법 Download PDFInfo
- Publication number
- KR880006533A KR880006533A KR1019870012430A KR870012430A KR880006533A KR 880006533 A KR880006533 A KR 880006533A KR 1019870012430 A KR1019870012430 A KR 1019870012430A KR 870012430 A KR870012430 A KR 870012430A KR 880006533 A KR880006533 A KR 880006533A
- Authority
- KR
- South Korea
- Prior art keywords
- adjusting
- bridge circuit
- wiring
- pressure sensor
- diaphragm
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 반도체압력센서의 브리지회로조정방법의 제1실시예를 도시한 개략평면도.
제2도는 제1도의 반도체압력센서의 횡단면도.
제3도는 반도체압력센서의 압력감도를 측정하는 실시예를 도시할 개략 단면도.
* 도면의 주요부분에 대한 부호의 설명
1 : 반도체압려센서 4 : 확산저항체
7 : 다이아프램 8,8′ : AI패드
9 : 배선, 3a, 3b, 3c, 3d : 변형게이지 저항체, 5a,5b,5c,5d,5e : Al패드
Claims (3)
- 브리지회로를 변형게이지저항체와 이 변형게이지저항체를 접속하는 확산저항체로 구성하고, 배선프로세스에서 소정간꼭마다 상기 확산저항체의 적어도 하나에 접속된 도체로 이루어진 롤선을 인출하고, 상기확산저항체의 적어도 상기 하나의 저항치를 조정하는 수단을 형성하고, 테스트프로세스에써 다이아프램의이면을 진공흡입하여 가상적으로 상기 다이아프램의 로면쪽으로부터 않력이 인가된 상태를 만들고, 상기 브리지히로를 이용해서 다이안프램의 표면쪽으로부러 상기 딴도체압력센서의 압력감도를 측정하고, 이 측정된압력갚도에 의거해서 상기 조정수단을 사용하여 상기 확산저항체의 적어도 상기 하나의 저항치를 조정하여상기 브리지회로의 출력밸런스를 조정하는 반도체입력센서의 브리지회로 조정방법
- 제1항에 있어서, 저항치를 조정하는 상기 수단은 상기 배선과 각 배선의 단부에 공통해서 접속된 도체로 이루어진 패드로 구성하고, 상기 확산저항체의 저항치는 상기 압력감도에 의거해서 상기 배선을 선택적으로 출력함에 의해 조정되는 것을 특징으로 하는 반도체압력센서의 브리지회로 조정방법.
- 제1항에 있어서, 저항치를 조정하는 상기 수단은 상기 배선과 각 배선의 단부에 접속된 도체로 이루어진 패드로 구성하고, 상기 확산저항체의 저항치는 상기 압력감도에 의거해서 상기 패드의 하나를 선택하고 결합함에 의해 조정되는 것을 특징으로하는 반도체압력센서의 브리지회로 조정방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61264747A JPS63118628A (ja) | 1986-11-06 | 1986-11-06 | 半導体圧力センサのブリツジ回路調整方法 |
JP61-264747 | 1986-11-06 | ||
JP61-264748 | 1986-11-06 | ||
JP61264748A JPS63118629A (ja) | 1986-11-06 | 1986-11-06 | 半導体圧力センサのブリツジ回路調整方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880006533A true KR880006533A (ko) | 1988-07-23 |
KR910001842B1 KR910001842B1 (ko) | 1991-03-28 |
Family
ID=26546652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019870012430A KR910001842B1 (ko) | 1986-11-06 | 1987-11-05 | 반도체압력센서의 브리지회로 조정방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4809536A (ko) |
EP (1) | EP0266681B1 (ko) |
KR (1) | KR910001842B1 (ko) |
AU (1) | AU591817B2 (ko) |
DE (1) | DE3784009T2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101355838B1 (ko) * | 2006-01-06 | 2014-01-27 | 허니웰 인터내셔널 인코포레이티드 | 실리콘 프릿으로 접착된 캡을 구비한 압력 센서 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0265816B1 (en) * | 1986-10-28 | 1991-08-28 | Sumitomo Electric Industries Limited | Method of measuring semiconductor pressure sensor |
JP3039934B2 (ja) * | 1989-06-13 | 2000-05-08 | コーリン電子株式会社 | 圧脈波検出装置 |
US5058435A (en) * | 1989-06-22 | 1991-10-22 | Ic Sensors, Inc. | Single diaphragm transducer with multiple sensing elements |
US5184515A (en) * | 1989-06-22 | 1993-02-09 | Ic Sensors, Inc. | Single diaphragm transducer with multiple sensing elements |
US5131259A (en) * | 1991-02-01 | 1992-07-21 | Fel-Pro Incorporated | Calibration fixture and method of calibrating contact sensors |
DE4206174C2 (de) * | 1992-02-28 | 1995-06-22 | Bosch Gmbh Robert | Integrierter Sensor aus Silizium |
JP3281217B2 (ja) * | 1995-05-23 | 2002-05-13 | 富士電機株式会社 | 半導体式加速度センサと該センサのセンサ素子の特性評価方法 |
US7455666B2 (en) | 2001-07-13 | 2008-11-25 | Board Of Regents, The University Of Texas System | Methods and apparatuses for navigating the subarachnoid space |
DE10310392A1 (de) * | 2003-03-07 | 2004-09-16 | Hottinger Baldwin Messtechnik Gmbh | Aufnehmer zur Ermittlung einer Dehnung |
US20040252290A1 (en) * | 2003-06-10 | 2004-12-16 | Ferguson Gary W. | Optical strain gauge and methods of use including a wind measurement device |
US6993954B1 (en) * | 2004-07-27 | 2006-02-07 | Tekscan, Incorporated | Sensor equilibration and calibration system and method |
DE102006062222A1 (de) * | 2006-12-22 | 2008-06-26 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor mit Kompensation des statischen Drucks |
WO2011044387A2 (en) | 2009-10-07 | 2011-04-14 | The Board Of Regents Of The University Of Texas System | Pressure-sensing medical devices, systems and methods, and methods of forming medical devices |
JP6540397B2 (ja) * | 2015-09-07 | 2019-07-10 | オムロンヘルスケア株式会社 | 圧脈波センサの検査方法及び圧脈波センサの製造方法 |
CN206330645U (zh) * | 2016-09-05 | 2017-07-14 | 泰科电子(上海)有限公司 | 传感器组件和液位检测装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3697918A (en) * | 1971-08-03 | 1972-10-10 | Gen Electric | Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements |
US3899766A (en) * | 1974-03-29 | 1975-08-12 | Tyco Laboratories Inc | Pressure transducer |
JPS5453877A (en) * | 1977-10-07 | 1979-04-27 | Hitachi Ltd | Temperature compensation circuit of semiconductor strain gauge |
US4174639A (en) * | 1978-04-06 | 1979-11-20 | American Chain & Cable Company, Inc. | Bridge circuits |
US4411158A (en) * | 1981-04-14 | 1983-10-25 | Ametek, Inc. | Apparatus for sensing the condition of a fluid |
US4611129A (en) * | 1983-04-22 | 1986-09-09 | Nec Corporation | Signal conversion circuit |
US4565097A (en) * | 1984-05-09 | 1986-01-21 | Mark Telephone Products, Inc. | Method and apparatus for transducer error cancellation |
US4672853A (en) * | 1984-10-30 | 1987-06-16 | Burr-Brown Corporation | Apparatus and method for a pressure-sensitive device |
EP0265816B1 (en) * | 1986-10-28 | 1991-08-28 | Sumitomo Electric Industries Limited | Method of measuring semiconductor pressure sensor |
-
1987
- 1987-10-20 US US07/110,662 patent/US4809536A/en not_active Expired - Fee Related
- 1987-10-29 DE DE8787115916T patent/DE3784009T2/de not_active Expired - Fee Related
- 1987-10-29 EP EP87115916A patent/EP0266681B1/en not_active Expired - Lifetime
- 1987-11-05 KR KR1019870012430A patent/KR910001842B1/ko not_active IP Right Cessation
- 1987-11-06 AU AU80891/87A patent/AU591817B2/en not_active Ceased
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101355838B1 (ko) * | 2006-01-06 | 2014-01-27 | 허니웰 인터내셔널 인코포레이티드 | 실리콘 프릿으로 접착된 캡을 구비한 압력 센서 |
Also Published As
Publication number | Publication date |
---|---|
EP0266681A2 (en) | 1988-05-11 |
US4809536A (en) | 1989-03-07 |
EP0266681A3 (en) | 1990-08-01 |
DE3784009D1 (de) | 1993-03-18 |
AU8089187A (en) | 1988-05-12 |
DE3784009T2 (de) | 1993-05-19 |
KR910001842B1 (ko) | 1991-03-28 |
EP0266681B1 (en) | 1993-02-03 |
AU591817B2 (en) | 1989-12-14 |
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A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 19960326 Year of fee payment: 6 |
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LAPS | Lapse due to unpaid annual fee |